JP2839059B2 - 3D shape measuring device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a CAD data input device for inputting external shape data and surface color data from a molding die or a model of various designed products to finish a final design drawing, and an educational system. More specifically, a tertiary shape measuring device used as an input device for three-dimensional video data, a medical diagnostic device, or a visual sensor of a robot used for sales or sales, outputs monochromatic light of red, green, and blue (RGB). A light source, a measurement optical system that irradiates the measurement light beam from the light source toward the measurement object on the reference surface, and a light receiving device that detects a scattered light beam reflected from the measurement object surface in the measurement light beam. Unit, a light receiving optical system for guiding the scattered light beam to the light receiving unit, and calculating and deriving a distance and a color of the surface of the measured object from the reference surface based on a detection output of the scattered light beam by the light receiving unit. It relates to a three-dimensional shape measuring apparatus that is configured from a No. processor.

[0002]

2. Description of the Related Art As a three-dimensional shape measuring apparatus of this kind,
The light source is composed of a laser oscillator that outputs monochromatic light of red, green and blue (RGB). The scattered light beam from the reference surface is separated by a prism, and the separated light beam is condensed by condensing means. It was configured to be incident on a light receiving section using an original CCD image sensor. The signal processing unit derives a distance from the reference plane to the surface of the object to be measured based on the detection position data of any one of the red, green, blue (RGB) light beams by the light receiving unit, and obtains red, green, blue (RGB). The surface color of the measured object is specified based on each detection intensity data ratio.

[0003]

According to the above-mentioned prior art, the red-green-blue (RG) is obtained by a one-dimensional CCD image sensor.
When each component data of B) is detected, the distance and the color can be accurately detected from the relative relationship between the detection positions of each component, but even one component of each component data of red, green and blue (RGB) can be detected. If it is missing, the relative relationship between the detection positions of each component cannot be determined, and therefore it is not possible to identify which component was missing with that data alone, so it was necessary to estimate the missing component using the data around it. . However, when the surface shape or the surface color of the measured object changes rapidly, there is a disadvantage that it is extremely difficult to accurately detect the distance and the color. An object of the present invention is to solve the above-mentioned drawbacks and provide a three-dimensional shape measuring apparatus capable of accurately detecting a distance and a color even when the surface shape or surface color of an object to be measured changes rapidly. The point is to provide.

[0004]

In order to achieve this object, a feature of the three-dimensional shape measuring apparatus according to the present invention is that a modulating means for modulating output light from the light source with a modulation signal different for each color is provided. On the other hand, there is provided a detecting means for identifying each monochromatic light from the scattered light beam detected by the light receiving section.

The monochromatic light of red, green and blue (RGB) output from the light source is modulated by the modulating means with different modulation signals and irradiated to the object to be measured, and the scattered light beam detected by the light receiving section is detected by the detecting means for each monochromatic light. By identifying each light, the color of the scattered light beam detected by the light receiving unit can be specified individually, not based on the three-component relative relationship.

[0005]

Therefore, according to the present invention, even if the surface shape or surface color of the object to be measured changes rapidly,
It has become possible to provide a three-dimensional shape measuring device capable of accurately detecting a distance and a color.

[0006]

Embodiments will be described below. As shown in FIG. 2, a three-dimensional shape measuring device, which is an example of a measuring device, includes a white laser oscillator 3 that oscillates light of three primary colors of red, green, and blue (RGB).
A, and a light source 3 for outputting a spot light, and the light source 3
A measurement optical system 4 that scans the measurement light beam from the target device 2 on the XY reference surface 1 in the X direction, and scattered light beams of the measurement light beam reflected from the surface of the measurement object 2 Light receiving unit 6 provided with one-dimensional CCD image sensor for detecting bundle
An optical system unit U comprising a light receiving optical system 5 for guiding the scattered light beam to the light receiving unit 6, and the object to be measured from the reference surface 1 based on a detection output of the scattered light beam by the light receiving unit 6. A signal processing unit 7 for calculating and deriving the distance between the two surfaces;
A measurement control unit 8 for controlling the optical system unit U; and a model generation unit 9 for generating a shape model of the DUT 2 from the X, Y, and Z three-dimensional data obtained from the signal processing unit 7 and the measurement control unit 8. It consists of

The measurement optical system 4 scans the measurement light beam from the light source 3 with the first movable mirror 4A, and reflects the measurement light beam scanned by the first movable mirror 4A toward the DUT 2. The light receiving optical system 5 includes a first fixed mirror 4B and a second fixed mirror 5B that reflects a scattered light beam from the surface of the device under test 2 and a scattered light reflected by the second fixed mirror 5B. A second movable mirror 5A for guiding the bundle to the light receiving unit 6, and a spectral unit 5C for dispersing the scattered light beam reflected by the second movable mirror 5A into three primary colors of RGB.
And a light condensing means 5D, which is an image forming lens that converges the scattered light beams separated into the three primary colors of RGB by the dispersing means 5C on the light receiving unit 6.

[0008] First movable mirror 4A and second movable mirror 5
A is a double-sided reflecting mirror that is rotated by a motor MOT about an axis parallel to the Y axis.

The measurement control unit 8 rotates the motor MOT to scan the measurement light beam in the X direction, and moves the optical system unit U in the Y direction to scan on the ZY plane.

As shown in FIG. 1, modulation means for separately inputting modulation signals of different frequencies to control terminals T1, T2, T3 for adjusting the respective oscillation intensities of red, green and blue (RGB) of the white laser oscillator 3A. The output terminal of the AM modulator 10 is connected, and a detecting means 11 for detecting the signal detected by the light receiving section 6 for each of the different modulation signals is provided. The signal detected by the light receiving section 6 is red. Patina (RG
B), which signal is selectively output.

As shown in FIG. 1, the signal processing section 7 focuses on the fact that each color component of the scattered light beam reflected by the reference plane 1 is converged on a certain point X ₀ (for example, RX ₀ ). ,
For any of the detection outputs separated into the three primary colors of RGB, the distances X ₀ , X ₁ (for example, R
X ₀ , RX ₁ ) is proportional to ΔX ₀ , and the surface position Z ₀ of the measuring object 2 from the reference plane 1 is Z ₀ · θ = ΔX
_Since there is a relationship of ₀ , Z ₀ is obtained and RG
The intensity of each of the three primary colors B is detected to determine the color at that point. The model generation unit 9 grasps measurement points on the XY plane from the rotation angles (rotation angles of the motor MOT) of the first movable mirror 4A and the second movable mirror 5A by the measurement control unit 8, and the signal processing unit 7 A shape model of the device under test 2 is generated from the derived Z coordinate at the point and data indicating the surface color of the point.

Hereinafter, another embodiment of the present invention will be described. In the above embodiment, the scanning mechanism of the optical system unit U in the Y-axis direction is not described in detail, but this may be configured by using an existing technology, for example, a driving mechanism such as a motor and a pulley.
The configuration of the optical system unit U is not limited to this configuration, but can be arbitrarily configured as long as it derives three-dimensional coordinates based on the principle described in the previous embodiment. For example, the movable mirrors 4A and 5A may be fixed, and the first fixed mirror 4B may be rotated to scan the projected light beam. The plane formed by the projected light beam and the detected light beam may be Y-shaped. In order to scan in the axial direction, a reflective mirror that can rotate around a rotation axis parallel to the X axis may be provided. In the above embodiment, an example is described in which the white laser oscillator 3A that oscillates light of three primary colors of red, green and blue (RGB) is used as a light source.
However, the present invention is not limited to this, and a laser that emits light of each wavelength of red, green, and blue (RGB) may be provided separately. In the previous embodiment, the modulation means for inputting the AM modulation signal to the adjustment signal of the laser output intensity was described. However, the modulation signal is not limited to this, and the modulation signal may be other than digital or analog. The modulation signal may be a modulation signal according to the above modulation method. In the above-described embodiment, a description has been given of a case in which the spectral unit that disperses the scattered light beam into the three primary colors of red, green, and blue (RGB) is provided. It can be omitted.

In the claims, reference numerals are provided for convenience of comparison with the drawings, but the present invention is not limited to the configuration shown in the attached drawings.

[Brief description of the drawings]

FIG. 1 is a block diagram of a main part.

FIG. 2 is an overall configuration diagram of a three-dimensional shape measuring apparatus.

FIG. 3 is a sectional view showing a main part of the optical system.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Reference surface 2 Object 3 Light source 4 Projection optical system 5 Light-receiving optical system 5C Light-splitting means 5D Light-collecting means 6 Light-receiving part 7 Signal processing 10 Modulation means 12 Detection means

────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-4-232580 (JP, A) JP-A-2-291907 (JP, A) JP-A-5-126570 (JP, A) JP-A-6-206 137826 (JP, A) JP-A-63-238511 (JP, A) JP-A-4-83133 (JP, A) JP-A-4-69547 (JP, A) JP-A-5-107032 (JP, A) Japanese Utility Model Application Hei 2-140488 (JP, U) (58) Fields investigated (Int. Cl. ⁶ , DB name) G01B 11/00-11/30 102 G06T 1/00-7/00

Claims (2)

(57) [Claims] 1. A light source (3) for outputting monochromatic lights of red, green and blue (RGB), and a measuring light beam from the light source (3) is directed to an object to be measured (2) on a reference surface (1). An optical system for measurement (4) to be irradiated, a light receiving unit (6) for detecting a scattered light beam reflected from the surface of the object (2) of the measurement light beam, and the light receiving unit (6) receiving the scattered light. A light receiving optical system (5) for guiding a light beam, and a distance and a color of the surface of the object (2) from the reference surface (1) based on a detection output of the scattered light beam by the light receiving unit (6). A three-dimensional shape measuring device comprising a signal processing unit (7) for calculating and deriving, a modulating means (10) for modulating output light from the light source (3) with a different modulation signal for each color. While detecting means (1) for identifying each monochromatic light from the scattered light beam detected by the light receiving section (6). ) Three-dimensional shape measuring apparatus is provided with. 2. A light source (3) for outputting monochromatic light of red, green and blue (RGB), and a measuring light beam from the light source (3) is directed to an object to be measured (2) on a reference surface (1). A measuring optical system (4) for irradiation, a light receiving unit (6) for detecting a scattered light beam reflected from the surface of the object (2) of the measured light beam, and a red-green-blue (RGB) ), And a light condensing means (5D) for condensing the spectral output to the light receiving section (6), and receiving the light to guide the scattered light beam to the light receiving section (6). Optical system (5)
And a signal processing unit (7) that calculates and derives the distance and color of the surface of the device under test (2) from the reference surface (1) based on the detection output of the scattered light beam by the light receiving unit (6). The three-dimensional shape measuring apparatus thus configured, wherein a modulating means (10) for modulating output light from the light source (3) with a modulation signal different for each color is provided, while the light receiving unit (6) A three-dimensional shape measuring apparatus provided with a detecting means (11) for distinguishing each monochromatic light from a detected scattered light beam.