JP2834741B2 - microscope - Google Patents

microscope

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Publication number
JP2834741B2
JP2834741B2 JP63186622A JP18662288A JP2834741B2 JP 2834741 B2 JP2834741 B2 JP 2834741B2 JP 63186622 A JP63186622 A JP 63186622A JP 18662288 A JP18662288 A JP 18662288A JP 2834741 B2 JP2834741 B2 JP 2834741B2
Authority
JP
Japan
Prior art keywords
aperture
optical axis
modulator
microscope
conjugate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP63186622A
Other languages
Japanese (ja)
Other versions
JPH0235408A (en
Inventor
芳弘 河野
忠史 藤原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
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Filing date
Publication date
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Priority to JP63186622A priority Critical patent/JP2834741B2/en
Publication of JPH0235408A publication Critical patent/JPH0235408A/en
Application granted granted Critical
Publication of JP2834741B2 publication Critical patent/JP2834741B2/en
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Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、透明物体を可視化する顕微鏡例えば変調コ
ントラスト顕微鏡及び位相差顕微鏡に関するものであ
る。
The present invention relates to a microscope for visualizing a transparent object, for example, a modulation contrast microscope and a phase contrast microscope.

〔従来の技術〕 この種従来の変調コントラスト顕微鏡としては、例え
ば特開昭51−128548号公報,特開昭57−178212号公報及
び米国特許第4407569号明細書に記載のものがある。
2. Description of the Related Art Conventional modulation contrast microscopes of this kind are described, for example, in JP-A-51-128548, JP-A-57-178212 and U.S. Pat. No. 4,407,569.

これらの光学系は何れも第6図に示した基本構成を有
している。
Each of these optical systems has the basic configuration shown in FIG.

即ち、第6図において、1は光源、2はリレーレン
ズ、3は開口を有する開口スリット、4はコンデンサー
レンズ、5は透明物体(標本)、6は対物レンズ、7は
複数の異なった濃度領域を有していて透明物体5の光学
的位相傾斜(屈折力)に変調コントラスト効果をつける
変調器、8は結像面であって、光源1のリレーレンズ2
による像がコンデンサーレンズ4の前側焦点位置又はそ
の近傍に結像し、この光源像の位置に開口スリット3を
設け、変調器7は対物レンズ6の射出瞳面上即ちフーリ
エ変換面上に位置するように構成されている。そして、
光源1を発し開口スリット3の開口で絞られた光束はコ
ンデンサーレンズ4により物体5に照射され、物体5を
透過した光束は対物レンズ6によりその射出瞳位置即ち
変調器7上に開口像を形成し、そこで変調コントラスト
効果がつけられて透明物体5の像が可視像として眼8に
結像せしめられるようになっている。
That is, in FIG. 6, 1 is a light source, 2 is a relay lens, 3 is an opening slit having an opening, 4 is a condenser lens, 5 is a transparent object (specimen), 6 is an objective lens, and 7 is a plurality of different density regions. And a modulator 8 for giving a modulation contrast effect to the optical phase tilt (refractive power) of the transparent object 5. Reference numeral 8 denotes an image plane, and the relay lens 2 of the light source 1.
Is formed at or near the front focal position of the condenser lens 4, the aperture slit 3 is provided at the position of this light source image, and the modulator 7 is located on the exit pupil plane of the objective lens 6, that is, on the Fourier transform plane. It is configured as follows. And
The light beam emitted from the light source 1 and converged by the opening of the aperture slit 3 is irradiated on the object 5 by the condenser lens 4, and the light beam transmitted through the object 5 is formed by the objective lens 6 at the exit pupil position, that is, on the modulator 7. Then, a modulation contrast effect is applied thereto, and the image of the transparent object 5 is formed on the eye 8 as a visible image.

具体的には、特開昭51−128548号公報に記載のもの
は、第7図(A)に示した如く長方形の開口3aを中央部
に有する開口スリット3と、第7図(B)に示した如く
透過率が夫々大,中,小(例えば100%,15%,5%)の領
域7a,7b,7cを有する変調器7とを有している。又、特開
昭57−178212号公報に記載のものは、第8図(A)に示
した如く長方形の開口3aを左方に形成した開口スリット
3と、第8図(B)に示した如く第7図(B)と同じ領
域7a,7b,7cが右方に寄っている変調器7とを有してい
る。又、米国特許第4407569号明細書に記載のものは、
第9図(A)に示した如く弧状の開口3aを左方に形成し
た開口スリット3と、第9図(B)に示した如く領域7
a,7b,7cを多重環状に形成した変調器7とを有してい
る。
Specifically, the one disclosed in Japanese Patent Application Laid-Open No. 51-128548 has an opening slit 3 having a rectangular opening 3a at the center as shown in FIG. As shown, the modulator 7 has regions 7a, 7b, and 7c having large, medium, and small transmittances (for example, 100%, 15%, and 5%). The one described in Japanese Patent Application Laid-Open No. 57-178212 has an opening slit 3 in which a rectangular opening 3a is formed on the left side as shown in FIG. 8A, and FIG. 8B. As shown in FIG. 7B, the same regions 7a, 7b and 7c have the modulator 7 shifted to the right. Also, those described in U.S. Pat.
An opening slit 3 in which an arc-shaped opening 3a is formed on the left side as shown in FIG. 9 (A), and a region 7 as shown in FIG. 9 (B).
and a modulator 7 in which a, 7b and 7c are formed in a multiple ring.

そして、例えば第7図(A),(B)に示した如き開
口スリット3と変調器7を備えた第6図に示した顕微鏡
により第10図に示した如き台形状の透明物体5を観察し
た場合について説明すれば、物体5の屈折率がn1(>
1),媒質の屈折率がn2(=1)であり、矢印a方向の
光線が物体5の下面に垂直に入射した後傾斜した側面に
入射角(π/2−θ)で入射し、入射光軸Oとなす角が
θで即ち矢印b方向の光線として射出して行くとすれ
ば、 となる。
Then, for example, the trapezoidal transparent object 5 as shown in FIG. 10 is observed with the microscope shown in FIG. 6 having the aperture slit 3 and the modulator 7 as shown in FIGS. 7 (A) and 7 (B). If the refractive index of the object 5 is n 1 (>
1), the medium has a refractive index of n 2 (= 1), and a light beam in the direction of arrow a is perpendicularly incident on the lower surface of the object 5 and then incident on the inclined side surface at an incident angle (π / 2−θ a ). If the angle formed with the incident optical axis O is θ b, that is, the light is emitted as a ray in the direction of the arrow b, Becomes

従って、第11図(A)に示した如く台形物体5の左側
面(斜面)を観察した場合、光線が変調器7の領域7c
(透過率5%)を通るので暗い像となり、第11図(B)
に示した如く台形物体5の中央部を観察した場合、光線
が変調器7の領域7b(透過率15%)を通るので灰色の像
となり、第11図(C)に示した如く台形物体5の右側面
(斜面)を観察した場合、光線が変調器7の領域7a(透
過率100%)を通るので明るい像となる。
Therefore, when observing the left side (slope) of the trapezoidal object 5 as shown in FIG.
(Transmittance 5%), resulting in a dark image, and FIG. 11 (B)
When the central portion of the trapezoidal object 5 is observed as shown in FIG. 11, since the light beam passes through the area 7b (transmittance 15%) of the modulator 7, it becomes a gray image, and as shown in FIG. When the right side (slope) is observed, the light beam passes through the area 7a (transmittance 100%) of the modulator 7 and becomes a bright image.

尚、特開昭57−178212号公報に記載のもののように第
8図(A)及び(B)に示した開口スリット3及び変調
器7を有する場合、物体5を射出する光線と光軸のなす
角(θ)と光線の強度との関係は第12図に示した如く
になる。
In the case of having the aperture slit 3 and the modulator 7 shown in FIGS. 8A and 8B as disclosed in JP-A-57-178212, the light emitted from the object 5 and the optical axis The relationship between the angle (θ b ) and the light intensity is as shown in FIG.

即ち、開口3aを通って物体に射出された光が大きく屈
折されて全て変調器の領域7cを通る場合は、結像面の明
るさは最小(min)となるが、屈折率が小さくなって来
ると、物体からの光は領域7bと7cの境界を越えて両領域
にまたがるようになる。領域7bの透過率は7cよりも大き
いので、θが減少するにつれて像面の明るさは漸増す
る。物体5を通過した光が領域7a,7b両方にまたがる
と、領域7aと7の透過率の差と領域7bと7cの透過率の差
とが異なることによりθの変化と像内の明るさの変化
の割合が変わるため、明るさの像増加曲線には段がつ
く。物体5からの光が全て領域7aを通る状態で像面の明
るさが最大(max)となる。
That is, when the light emitted to the object through the opening 3a is largely refracted and all pass through the region 7c of the modulator, the brightness of the imaging surface becomes minimum (min), but the refractive index becomes small. When it comes, the light from the object spreads over the boundaries between the regions 7b and 7c. Since the transmittance of the region 7b is greater than 7c, the brightness of the image surface as theta b decreases gradually increases. Light region 7a that has passed through the object 5 and spans 7b both, a change in theta b by the difference in transmittance differ difference and region 7b and 7c of the transmittance of the regions 7a and 7 and brightness in the image Is changed, the brightness increase curve has a step. The brightness of the image plane becomes maximum (max) in a state where all the light from the object 5 passes through the region 7a.

かくして、フーリエ変換面上にある変調器7によっ
て、物体5の透過光をフーリエ変換したものの強度が変
調されて、像面8に可視像が形成される。
Thus, the intensity of the Fourier-transformed version of the transmitted light of the object 5 is modulated by the modulator 7 on the Fourier transform plane, and a visible image is formed on the image plane 8.

これは特開昭51−29149号公報に記載の変調コントラ
スト顕微鏡の基本原理である。
This is the basic principle of the modulation contrast microscope described in JP-A-51-29149.

〔発明が解決しようとする課題〕[Problems to be solved by the invention]

ところが、上記従来の変調コントラスト顕微鏡は、コ
ンデンサーレンズ4の前側焦点位置に小さな開口3aが設
けてあるので、コンデンサーレンズ4の物体側NAが小さ
くなり、焦点深度は深まるが像が暗くなってしまうとい
う欠点があった。又、上記変調コントラスト顕微鏡は変
調コントラスト効果の感度を変化させることができなか
ったため、物体5によっては適正なコントラストの像が
得られないという欠点があった。又、上記変調コントラ
スト顕微鏡において開口3aの位置を光軸Oから離した場
合変調コントラスト効果に方向性が生じ、而も開口3aの
位置が固定されていたため、物体5の屈折作用の方向に
応じて物体5を回転させて観察しなければならず、操作
が非常に煩わしかった。
However, in the conventional modulation contrast microscope described above, since the small aperture 3a is provided at the front focal position of the condenser lens 4, the object side NA of the condenser lens 4 becomes smaller, and the depth of focus becomes deeper, but the image becomes darker. There were drawbacks. In addition, the modulation contrast microscope cannot change the sensitivity of the modulation contrast effect, and thus has a defect that an image having an appropriate contrast cannot be obtained depending on the object 5. Further, in the modulation contrast microscope, when the position of the opening 3a is separated from the optical axis O, the modulation contrast effect has directionality, and since the position of the opening 3a is fixed, the direction of the refraction action of the object 5 is changed. The operator had to rotate and observe the object 5, and the operation was very troublesome.

本発明は、上記問題点に鑑み、明るい像が得られ、種
々の物体に対して常に適正なコントラストの像が得ら
れ、操作も容易である顕微鏡を提供することを目的とし
ている。
In view of the above problems, an object of the present invention is to provide a microscope that can obtain a bright image, always obtain images of appropriate contrast for various objects, and is easy to operate.

〔課題を解決するための手段及び作用〕[Means and actions for solving the problem]

本発明による顕微鏡の一つは、光軸上に光源とコンデ
ンサーレンズを含む照明系と、該照明系と共軸に配置さ
れた対物レンズを含む結像系とを備えた顕微鏡におい
て、前記コンデンサーレンズの入射瞳位置又はその近傍
若しくはそれらと共役な前記照明系内の位置に、光軸か
ら離れた位置に夫々向きを異ならせて形成された複数個
の開口を有する開口スリットを配置すると共に、前記対
物レンズの射出瞳位置又はその近傍若しくはそれらと共
役な前記結像系内の位置に、前記開口と略共役に形成さ
れた光制御領域を有する変調器を配置し、前記複数の開
口の少なくとも一部の開口と他の一部の開口とを切替え
て遮蔽する手段を備えている。従って、開口が光軸から
離れて位置するので、光軸上に開口が位置する場合に比
べて同じNAであるならば開口面積が大となり、その結
果、焦点深度が同じでも明るい像が得られるようにな
り、又、前記複数の開口の少なくとも一部の開口と他の
一部の開口とを切替えて遮蔽する手段を備えているの
で、変調コントラスト効果の方向を切替えることが可能
であり、物体の屈折作用の方向に応じていちいち物体を
回転させる必要はなく、操作が容易である。更に各開口
の幅が異なるようにすれば、開口の切替えにより物体の
位相傾斜(屈折力)に対する変調感度を変化させること
ができ、物体の位相傾斜の小さな部分から大きな部分ま
で又細かい物体から大きな物体まで観察することができ
る。
One of the microscopes according to the present invention is a microscope including an illumination system including a light source and a condenser lens on an optical axis, and an imaging system including an objective lens coaxially arranged with the illumination system. At the entrance pupil position or in the vicinity thereof or at a position in the illumination system conjugate therewith, an aperture slit having a plurality of apertures formed in different directions at positions distant from the optical axis, and A modulator having a light control region formed substantially conjugate with the aperture is disposed at or near the exit pupil position of the objective lens or at a position in the imaging system conjugate therewith, and at least one of the plurality of apertures is provided. There is provided a means for switching between the opening of the part and the other part of the opening for shielding. Therefore, since the aperture is located away from the optical axis, the aperture area becomes larger if the NA is the same as compared with the case where the aperture is located on the optical axis, and as a result, a bright image can be obtained even if the depth of focus is the same. And a means for switching and blocking at least a part of the plurality of openings and another part of the plurality of openings, so that the direction of the modulation contrast effect can be switched, It is not necessary to rotate the object depending on the direction of the refraction action of the object, and the operation is easy. Further, if the widths of the apertures are made different, the modulation sensitivity to the phase tilt (refractive power) of the object can be changed by switching the apertures. The object can be observed.

又、本発明による顕微鏡の更に他の一つは、光軸上に
光源とコンデンサーレンズを含む照明系と、該照明系と
共軸に配置された対物レンズを含む結像系とを備えた顕
微鏡において、前記コンデンサーレンズの入射瞳位置又
はその近傍若しくはそれらと共役な前記照明系内の位置
に、光軸の近傍から周辺に向かって形成された開口であ
って、且つ光軸に近い部分の幅よりも光軸から遠い部分
の幅が広くなっている開口を有する開口スリットを配置
すると共に、前記対物レンズの射出瞳位置又はその近傍
若しくはそれらと共役な前記結像系内の位置に、前記開
口と略共役に形成された光制御領域を有する変調器を配
置している。従って、物体の位相傾斜に対する変調感度
特性がなだらかな特性になるので、高い屈折力を持つ物
体も観察することができる。
Still another one of the microscopes according to the present invention is a microscope having an illumination system including a light source and a condenser lens on an optical axis, and an imaging system including an objective lens coaxially arranged with the illumination system. At the entrance pupil position of the condenser lens or in the vicinity thereof or at a position in the illumination system conjugate therewith, which is an opening formed from the vicinity of the optical axis to the periphery, and the width of a portion close to the optical axis An aperture slit having an aperture whose width is farther from the optical axis than that of the objective lens is arranged, and the aperture is located at the exit pupil position of the objective lens or in the vicinity thereof or in a position in the imaging system conjugate with them. And a modulator having a light control region formed substantially conjugate with the light modulator. Therefore, since the modulation sensitivity characteristic with respect to the phase tilt of the object becomes gentle, an object having a high refractive power can also be observed.

〔実施例〕〔Example〕

以下、図示した実施例に基づき本発明を詳細に説明す
る。
Hereinafter, the present invention will be described in detail based on illustrated embodiments.

第1実施例 本実施例の光学系の基本構成は第6図と同じなので、
その説明は省略する。
First Embodiment The basic configuration of the optical system of this embodiment is the same as that shown in FIG.
The description is omitted.

第1図(A)及び(B)は夫々本実施例の開口スリッ
ト13及び変調器17を示しており、開口スリット13は光軸
Oから離れた図面左方位置及び図面上方位置に径方向幅
が同一の開口13a及び13bを夫々有し、変調器17は該開口
13a及び13bに夫々対応し且つ何れも透過率の異なる3つ
の領域から成る光制御領域17a及び17bを有している。
1A and 1B show an aperture slit 13 and a modulator 17, respectively, of the present embodiment. The aperture slit 13 has a radial width at a position on the left side and an upper position on the drawing away from the optical axis O. Have the same apertures 13a and 13b, respectively, and the modulator 17
Light control regions 17a and 17b corresponding to 13a and 13b, respectively, and each including three regions having different transmittances are provided.

従って、本実施例によれば、開口13a及び13bが光軸O
から離れて位置するので、光軸O上に開口が位置する場
合に比べて同じNAであるならば開口面積が大となり、そ
の結果焦点深度が同じでも明るい像が得られる。又、開
口13a及び13bの両方を用いれば、物体5を射出する光線
と光軸Oのなす角と光線の強度との関係は第1図(C)
の如くになり、焦点深度は浅くなるが像が2倍の明るさ
で観察できる。この場合、開口13a及び第13bが光軸Oと
直交する異なる線分上に夫々存在するので、変調コント
ラスト効果の方向性が緩和され、その結果多くの種類の
物体に対して適正なコントラストの像が得られる。
Therefore, according to the present embodiment, the openings 13a and 13b are
, The aperture area becomes larger if the NA is the same as when the aperture is located on the optical axis O. As a result, a bright image can be obtained even when the depth of focus is the same. Further, if both the openings 13a and 13b are used, the relationship between the angle formed by the light beam emitted from the object 5 and the optical axis O and the intensity of the light beam is shown in FIG.
And the depth of focus becomes shallower, but the image can be observed with twice the brightness. In this case, since the apertures 13a and 13b are present on different line segments orthogonal to the optical axis O, the directionality of the modulation contrast effect is reduced, and as a result, an image having an appropriate contrast can be obtained for many types of objects. Is obtained.

又、本実施例において、開口13aと13bとを切替えて遮
蔽すれば、変調コントラスト効果の方向が切替えられ
る。従って、物体5の屈折作用の方向に応じていちいち
物体5を回転させる必要はなく、操作が容易である。
In this embodiment, if the openings 13a and 13b are switched and shielded, the direction of the modulation contrast effect can be switched. Therefore, it is not necessary to rotate the object 5 depending on the direction of the refraction of the object 5, and the operation is easy.

第2実施例 本実施例の光学系の基本構成は第6図と同じなので、
その説明は省略する。
Second Embodiment The basic configuration of the optical system of this embodiment is the same as that of FIG.
The description is omitted.

第2図(A)及び(B)は夫々本実施例の開口スリッ
ト23及び変調器27を示しており、開口スリット23は光軸
Oから離れた図面左方位置及び図面上方位置に径方向幅
が異なる開口23a及び23bを夫々有し、変調器27は該開口
23a及び23bに夫々対応し且つ何れも透過率の異なる3つ
の領域から成る光制御領域27a及び27bを有している。そ
して、開口23aと23bとを切替えて遮蔽し得るようになっ
ている。
FIGS. 2A and 2B show an aperture slit 23 and a modulator 27 of the present embodiment, respectively. The aperture slit 23 has a radial width at a position on the left side of the drawing away from the optical axis O and at a position above the drawing. Have different apertures 23a and 23b, respectively, and the modulator 27
Light control areas 27a and 27b corresponding to 23a and 23b, respectively, and composed of three areas having different transmittances are provided. The openings 23a and 23b can be switched and shielded.

従って、本実施例によれば、開口23aを用いて照明し
た場合は、これに対応する光制御領域27aの幅が広いの
で、物体5の位相傾斜に対する変調感度は第2図(C)
の曲線aで示した如くあまり高くならない。一方開口23
bを用いて照明した場合は、これに対応する光制御領域2
7bの幅が狹いので、物体5の位相傾斜に対する変調感度
は第2図(C)の曲線bで示した如く高くなる。従っ
て、物体5の位相傾斜の大きな部分から小さな部分まで
又細かい物体から大きな物体まで観察することができ
る。
Therefore, according to the present embodiment, when illumination is performed using the aperture 23a, the width of the light control area 27a corresponding to the illumination is large, so that the modulation sensitivity to the phase tilt of the object 5 is as shown in FIG.
Does not become so high as shown by the curve a. Opening 23
When illuminated using b, the corresponding light control area 2
Since the width of 7b is narrow, the modulation sensitivity to the phase tilt of the object 5 increases as shown by the curve b in FIG. 2 (C). Therefore, the object 5 can be observed from a portion having a large phase gradient to a portion having a small phase gradient, and from a fine object to a large object.

尚、両方の開口23a,23bで同時に照明した場合は、第
1実施例と同様に明るい像が観察できることは言うまで
もない。
It is needless to say that a bright image can be observed as in the case of the first embodiment when the light is illuminated at both openings 23a and 23b at the same time.

第3実施例 本実施例の光学系の基本構成は第6図と同じなので、
その説明は省略する。
Third Embodiment The basic configuration of the optical system of this embodiment is the same as that shown in FIG.
The description is omitted.

第3図(A)及び(B)は夫々本実施例の開口スリッ
ト33及び変調器37を示しており、開口スリット33は光軸
Oに近い部分の幅よりも光軸Oから遠い部分の幅が広く
なっている階段状の開口33aを有し、変調器37は該開口3
3aに対応する光制御領域37aを有している。その結果、
本実施例における物体5の位相傾斜に対する変調感度特
性が第3図(C)の曲線の如くなだらかになる。従っ
て、高い屈折力を持つ物体を観察することができる。
FIGS. 3A and 3B show an aperture slit 33 and a modulator 37 of the present embodiment, respectively. The aperture slit 33 has a width at a portion farther from the optical axis O than at a portion closer to the optical axis O. The modulator 37 has a stepped opening 33a in which
It has a light control area 37a corresponding to 3a. as a result,
In this embodiment, the modulation sensitivity characteristic with respect to the phase tilt of the object 5 becomes gentle as shown by the curve in FIG. Therefore, an object having a high refractive power can be observed.

尚、開口形状は、光軸Oに近い部分の幅よりも光軸O
から遠い部分の幅が広くなっており、物体5の屈折力に
合うものであれば、三角形,クローバー形等種々の形状
に設計できる。
Note that the opening shape is larger than the width of the portion near the optical axis O than the optical axis O.
As long as the width of the portion far from the object 5 is wide and matches the refractive power of the object 5, it can be designed in various shapes such as a triangle and a clover shape.

第4実施例 第4図及び第5図は夫々第4実施例の光学系及びその
要部を示しており、43は第1図(A)の開口スリット13
と同じ構造の開口スリットの二つの開口部に偏光方向が
互いに直交する偏光板43a及び43bを夫々取付けて成る開
口スリット、44は光源1と開口スリット43との間に光軸
Oの周りに回転可能に配置された偏光板である。
Fourth Embodiment FIGS. 4 and 5 show the optical system of the fourth embodiment and the main parts thereof, respectively. Reference numeral 43 denotes an opening slit 13 shown in FIG.
An aperture slit 44 is formed by attaching polarizing plates 43a and 43b whose polarization directions are orthogonal to each other to two apertures of the aperture slit having the same structure as that of the aperture slit, and rotates around the optical axis O between the light source 1 and the aperture slit 43. It is a polarizing plate that is arranged as possible.

従って、本実施例によれば、偏光板44を回転せしめる
ことにより光(偏光)が通過する開口即ち照明する開口
を切替えることができ、その結果変調コントラストの方
向を切替えることができる。
Therefore, according to the present embodiment, the opening through which light (polarized light) passes, that is, the opening through which light is illuminated can be switched by rotating the polarizing plate 44, and as a result, the direction of the modulation contrast can be switched.

尚、物体5を偏光した光で照明したくない場合は、各
開口部において偏光板43a,43bの物体5側面に偏光解消
板を設ければ良い。
If it is not desired to illuminate the object 5 with polarized light, a depolarizing plate may be provided on the side of the polarizing plate 43a, 43b on the side of the object 5 at each opening.

尚、上記各実施例において、上記濃度変調器を位相差
変調器に変えれば、位相差顕微鏡となることは言うまで
もない。又、開口スリット及び変調器の各近傍に微分干
渉用プリズムを夫々配置すれば、微分干渉顕微鏡になる
ことは言うまでもない。
In each of the above embodiments, if the density modulator is replaced with a phase difference modulator, it goes without saying that a phase contrast microscope is obtained. It is needless to say that a differential interference microscope can be obtained by disposing a differential interference prism near each of the aperture slit and the modulator.

〔発明の効果〕〔The invention's effect〕

上述の如く、本発明による顕微鏡は、焦点深度が同じ
でも明るい像が得られ、種々の位相傾斜の物体に対して
常に適正なコントラストの像が得られ、操作も容易であ
るという実用上重要な利点を有している。
As described above, the microscope according to the present invention can obtain a bright image even with the same depth of focus, can always obtain images with appropriate contrast for objects with various phase inclinations, and is easy to operate. Has advantages.

【図面の簡単な説明】[Brief description of the drawings]

第1図(A),(B)及び(C)は夫々本発明による顕
微鏡の第1実施例の開口スリット,変調器及び変調感度
特性を示す図、第2図(A),(B)及び(C)は夫々
第2実施例の開口スリット,変調器及び変調感度特性を
示す図、第3図(A),(B)及び(C)は夫々第3実
施例の開口スリット,変調器及び変調感度特性を示す
図、第4図及び第5図は夫々第4実施例の光学系及びそ
の要部を示す図、第6図は従来例の光学系の基本構成を
示す図、第7図,第8図,第9図は夫々各従来例の開口
スリット及び変調器を示す図、第10図はある透明物体で
の光の屈折の様子を示す図、第11図は変調コントラスト
効果を生み出す原理の説明図、第12図は第8図に示した
従来例の変調感度特性を示す図である。 1……光源、2……リレーレンズ、13,23,33,43……開
口スリット、4……コンデンサーレンズ、5……物体、
6……対物レンズ、17,27,37……変調器、8……観察者
の眼、44……偏光板。
1 (A), 1 (B) and 1 (C) show the aperture slit, modulator and modulation sensitivity characteristics of a first embodiment of the microscope according to the present invention, respectively, and FIGS. 2 (A), 2 (B) and 2 (C). (C) is a diagram showing an aperture slit, a modulator and a modulation sensitivity characteristic of the second embodiment, respectively. FIGS. 3 (A), (B) and (C) are aperture slits, a modulator and a modulator of the third embodiment, respectively. FIGS. 4 and 5 show modulation sensitivity characteristics, FIGS. 4 and 5 respectively show the optical system of the fourth embodiment and its essential parts, FIG. 6 shows the basic configuration of a conventional optical system, and FIG. , 8 and 9 show a conventional aperture slit and a modulator, respectively. FIG. 10 shows how light is refracted by a certain transparent object. FIG. 11 shows a modulation contrast effect. FIG. 12 is a diagram illustrating the principle, and FIG. 12 is a diagram illustrating the modulation sensitivity characteristics of the conventional example shown in FIG. 1 ... light source, 2 ... relay lens, 13,23,33,43 ... opening slit, 4 ... condenser lens, 5 ... object,
6 Objective lens, 17, 27, 37 Modulator, 8 Eye of observer, 44 Polarizing plate.

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭51−128548(JP,A) 特開 昭57−178211(JP,A) 特開 昭57−178212(JP,A) 特開 昭59−90813(JP,A) 実公 平2−41604(JP,Y2) (58)調査した分野(Int.Cl.6,DB名) G02B 21/00 - 21/36──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-51-128548 (JP, A) JP-A-57-178211 (JP, A) JP-A-57-178212 (JP, A) JP-A-59-178212 90813 (JP, A) Jikken Hei 2-41604 (JP, Y2) (58) Fields investigated (Int. Cl. 6 , DB name) G02B 21/00-21/36

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】光軸上に光源とコンデンサーレンズを含む
照明系と、該照明系と共軸に配置された対物レンズを含
む結像系とを備えた顕微鏡において、該コンデンサーレ
ンズの入射瞳位置又はその近傍若しくそれらと共役な前
記照明系内の位置に、光軸から離れた位置に夫々向きを
異ならせて形成された複数個の開口を有する開口スリッ
トを配置すると共に、前記対物レンズの射出瞳位置又は
その近傍若しくはそれらと共役な前記結像系内の位置
に、前記開口と略共役に形成された光制御領域を有する
変調器を配置し、前記複数の開口の少なくとも一部の開
口と他の一部の開口とを切替えて遮蔽する手段を備えて
いることを特徴とする顕微鏡。
1. A microscope having an illumination system including a light source and a condenser lens on an optical axis, and an imaging system including an objective lens arranged coaxially with the illumination system, the entrance pupil position of the condenser lens. Or, an aperture slit having a plurality of apertures formed in directions different from each other at a position away from the optical axis at a position in the illumination system near or conjugate with them, and A modulator having a light control region formed substantially conjugate with the aperture is disposed at an exit pupil position or a position in the vicinity thereof or a position in the imaging system conjugate with them, and at least a part of the plurality of apertures has an aperture. A microscope, comprising: means for switching between a part of the aperture and another part to shield the aperture.
【請求項2】光軸上に光源とコンデンサーレンズを含む
照明系と、該照明系と共軸に配置された対物レンズを含
む結像系とを備えた顕微鏡において、前記コンデンサー
レンズの入射瞳位置又はその近傍若しくそれらと共役な
前記照明系内の位置に、光軸の近傍から周辺に向かって
形成された開口であって、且つ光軸に近い部分の幅より
も光軸から遠い部分の幅が広くなっている開口を有する
開口スリットを配置すると共に、前記対物レンズの射出
瞳位置又はその近傍若しくはそれらと共役な前記結像系
内の位置に、前記開口と略共役に形成された光制御領域
を有する変調器を配置したことを特徴とする顕微鏡。
2. A microscope having an illumination system including a light source and a condenser lens on an optical axis, and an imaging system including an objective lens arranged coaxially with the illumination system, wherein an entrance pupil position of the condenser lens is provided. Or an opening formed from the vicinity of the optical axis to the periphery at a position in the illumination system near or conjugate with them, and a portion farther from the optical axis than the width of a portion closer to the optical axis. An aperture slit having an opening having a wider width is arranged, and light formed substantially conjugate with the aperture at the exit pupil position of the objective lens or in the vicinity thereof or at a position in the imaging system conjugate with them. A microscope comprising a modulator having a control area.
JP63186622A 1988-07-26 1988-07-26 microscope Expired - Fee Related JP2834741B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63186622A JP2834741B2 (en) 1988-07-26 1988-07-26 microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63186622A JP2834741B2 (en) 1988-07-26 1988-07-26 microscope

Publications (2)

Publication Number Publication Date
JPH0235408A JPH0235408A (en) 1990-02-06
JP2834741B2 true JP2834741B2 (en) 1998-12-14

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ID=16191803

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Country Status (1)

Country Link
JP (1) JP2834741B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10245974A1 (en) * 2002-10-02 2004-04-15 Leica Mikroskopie Und Systeme Gmbh Contrast modulation microscope has a modulator in each viewing path, with a layer changing with the phase/amplitude, for a continuous phase shift without numerous modulators
WO2007137598A1 (en) * 2006-05-26 2007-12-06 Leica Microsystems Cms Gmbh Inverse microscope
WO2008004679A1 (en) * 2006-07-04 2008-01-10 Nikon Corporation Microscope device
JP4940841B2 (en) * 2006-09-05 2012-05-30 株式会社ニコン Modulation contrast microscope
US8599479B2 (en) 2007-11-19 2013-12-03 Nikon Corporation Modulation contrast microscope
JP6112872B2 (en) 2013-01-18 2017-04-12 キヤノン株式会社 Imaging system, image processing method, and imaging apparatus

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* Cited by examiner, † Cited by third party
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JPS57178211A (en) * 1981-04-27 1982-11-02 Nippon Kogaku Kk <Nikon> Microscope optical system
JPS5990813A (en) * 1982-11-15 1984-05-25 Nippon Kogaku Kk <Nikon> Projection type microscope

Also Published As

Publication number Publication date
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