JP2828673B2 - Thin film magnetic head - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin-film magnetic head in a magnetic recording / reproducing apparatus and a method of manufacturing the same, and more particularly, to a thin-film magnetic head whose track width is determined by the thickness of a magnetic film and its thin-film magnetic head. It relates to a manufacturing method.

[Prior Art] In general, a thin film magnetic head has a type in which a magnetic path length along a track longitudinal direction of a contact surface of a magnetic recording medium is determined by a film thickness of a magnetic film (hereinafter referred to as “conventional example 1”). The track width is determined by the film thickness (hereinafter referred to as “conventional example 2”).
It is known. The format of Conventional Example 1 is disclosed in, for example, JP-A-62-9514 and JP-A-62-71016, and the format of Conventional Example 2 is described in, for example, No. 86521, "IEE
E, Transaction on Magnetics, M.G. 23, 5, 1987, pp. 2503-2505 ("IEEE
Trans.Magnetics MAG23,5,1987 "pp2503-2505). In a recent magnetic recording / reproducing device that performs high-density recording / reproduction by narrowing the track width, it is necessary to make the track width with high accuracy. The type in which the track width is determined by the film thickness in the second conventional example is advantageous in that the accuracy of the track width can be easily increased by adjusting the film thickness.

[Problem to be Solved by the Invention] In the technology of the above-mentioned conventional example 2, that is, the thin film magnetic head of the type in which the track width is determined by the thickness of the magnetic film,
Since the magnetic pole surface (the surface facing the magnetic recording medium) has a predetermined length along the longitudinal direction of the track on the magnetic pattern to be recorded, the recording is performed by the magnetic field leaking from the magnetic pole. Second, a phenomenon (recording demagnetization effect) occurs that the weakened signal is weakened. Secondly, if the recording density is increased because the magnetic gap and the other end of the magnetic pole are parallel,
There is a problem that undulation (shape effect) occurs according to the shape and size of the magnetic pole.

Hereinafter, this problem will be described with reference to FIGS. 2 (a) and 2 (b), and
(E), (f) will be described in more detail.

2 (a) and 2 (b) are schematic views of the thin-film magnetic head according to Conventional Example 2 as viewed from the surface facing the magnetic recording medium, and 11 is the first.
12 is a magnetic gap, 13 is a second magnetic thin film,
TW is the magnetic recording track width. In FIG. 2 (a), the thickness direction of the magnetic thin films 11 and 13 coincides with the direction of the track width TW, and the film thickness directly gives the track width TW. Track longitudinal end 11
a and 13a are parallel to the magnetic gap 12 so that the second
As shown by the curve in the recording density vs. normalized output characteristic diagram of FIG. 7E, a wavy phenomenon (undulation phenomenon, shape effect) occurs in the reproduction characteristic.

As a countermeasure for this, as shown in FIG. 2 (b), both ends 11a and 13a of the magnetic pole surface (media facing surface) in the medium moving direction (track longitudinal direction) are not parallel to the magnetic gap portion 12. According to this, although the waving phenomenon disappears as shown by the curve in FIG. 2 (e), the recording current as shown by the curve in the graph of FIG. 2 (f). The phenomenon that the normalized output decreases as the current increases (this also appears in the head of FIG. 2A).
Can not be avoided. The reason for this is shown in FIG.
Or, in the head of (b), the length of the magnetic pole surface (media contact surface) (from the magnetic gap 12 to the end 11a or 13a, especially the end 13a).
(a distance to a) is considerably long, and when a large current is applied to perform sufficient recording on a high coercive force recording medium for high density recording, recording is performed by a magnetic field leaking from the facing surface. Of weakened signal (recording demagnetization)
This is because

Accordingly, an object of the present invention is to solve the above-mentioned problems of the prior art, to maintain the function of determining the narrow track width with high precision by the thickness of the magnetic thin film without a recording demagnetization effect, no shape effect, and the like. It is an object of the present invention to provide a thin-film magnetic head and a method of manufacturing the same.

Another object of the present invention is to provide a thin-film magnetic head capable of generating a strong recording magnetic field corresponding to a magnetic recording medium having a high coercive force, capable of performing azimuth recording / reproducing, and capable of forming a composite magnetic head of a recording / reproducing separation type. An object of the present invention is to provide a head and a manufacturing method thereof.

[Means for Solving the Problems] In order to achieve the above and the objects, the thin-film magnetic head of the present invention has a magnetic gap forming surface (a surface where the first and second magnetic thin films oppose each other in the magnetic gap). At least one of the first and second magnetic thin films (the magnetic thin film on one side) is inclined at a predetermined angle (θ °) with respect to the thin film formation surface (the film surface, that is, the surface perpendicular to the film thickness);
The thin film forming surface is made non-parallel to the track longitudinal direction of the magnetic recording medium (the direction perpendicular to the track width TW, the relative direction of movement of the magnetic recording medium), and the at least one magnetic thin film (the one-side magnetic thin film) The track width is determined based on the thickness of the film.

In order to achieve the above object, the thickness of the magnetic pole on one side (the medium facing surface formed by the magnetic thin film on the inflow side with respect to the recording medium moving direction) (the length in the medium moving direction) is increased (the area is reduced). The thickness of the magnetic pole on the other side (the length of the medium facing surface formed by the magnetic thin film on the outflow side with respect to the medium moving direction in the medium moving direction) is reduced (the area is reduced).

Further, in order to achieve the above object, a plurality of magnetic circuits each including a first and a second magnetic thin film, a magnetic gap, and an electric coil are provided, and the magnetic gap of each magnetic circuit is different from the track width. In order to achieve the above object, two head elements having the same azimuth angle are provided at predetermined intervals, one of which is used for recording and the other is used for reproduction. Configure.

When one head element is used for recording and reproduction,
Recording can be of the inductive type, and reproduction can be of the MR type.

A plurality of head elements can be provided at the outflow end of the slider on both wing rails.

In the method of manufacturing a thin-film magnetic head according to the present invention, a step of forming a first magnetic thin film on a substrate and the step of forming the first magnetic thin film (by machining, ion milling, etching, or the like).
Removing a part with a predetermined inclination angle, and forming a magnetic gap film and a second
Forming a magnetic thin film of at least one of the first and second magnetic thin films by making the track longitudinal direction non-parallel to the thin film forming surface of at least one of the first and second magnetic thin films. The track width direction component is set as the track width.

In the method for manufacturing a thin-film magnetic head, prior to the step of forming a first magnetic thin film on the substrate,
A groove may be formed on the substrate at a predetermined angle (by machining, ion milling, etching, or the like), and the first magnetic thin film may be formed in the groove.

In these manufacturing methods, a groove formed by removing a part of the first magnetic film may be filled with a non-magnetic material.

[Operation] An operation based on the above configuration will be described.

According to the present invention, the thin film forming surface of the magnetic thin film and the track length direction (media moving direction) are non-parallel (typically perpendicular), so that at least one of the thin film forming surfaces is a medium. It forms the front edge or the rear edge of the magnetic pole (the medium facing surface) in the moving direction. As a result, the distance (magnetic pole length) from the magnetic gap to the front edge or the rear edge is as short as possible and the recording demagnetization effect described above can be suppressed. Further, since the magnetic gap forming surface is inclined at a predetermined angle (θ) with respect to the thin film forming surface substantially functioning as the front edge or the rear edge of the magnetic pole, the generation of the shape effect is prevented. Is done. Further, since the magnetic gap forming surface is inclined at a predetermined angle with respect to the magnetic thin film having a predetermined thickness, the magnetic gap length (the length of the magnetic gap line appearing on the medium facing surface) is determined. Based on this, the track width of the magnetic track extending non-parallel to the thin film formation surface is determined.
This will be described later with reference to the drawings).

Further, by increasing the thickness of the magnetic pole on one side (for example, the inflow side), a strong recording magnetic field corresponding to a high coercive force medium can be generated, and by changing the inclination angle of the magnetic gap of the plural head elements with respect to the track width, azimuth recording or Reproduction is possible, and two head elements having the same azimuth angle are provided at predetermined intervals, and one of them is used for recording and the other is used for reproduction, so that a composite magnetic head of a recording / reproducing separation type can be obtained.

Example An example of the present invention will be described below with reference to the drawings.

First, the basic concept of the present invention will be described with reference to FIGS. 2 (c) to 2 (f).

As shown in FIG. 2A, the first and second magnetic thin films 1
The film surface of 1,13, that is, the thin film forming surface (the upper surface and the lower surface in the figure) is in the medium movement direction (the track length direction, ie, the track width TW
And the front edge 11a and the rear edge 13a of the magnetic pole 12 (the front edge and the rear edge of the medium facing surfaces of the magnetic thin films 11 and 13) are both parallel to the medium movement direction. In the head perpendicular to, a shape effect (FIG. 2 (e)) and a recording demagnetization effect (FIG. 2 (f)) appear. If the front edge 11a and the rear edge 13a are not parallel to the magnetic gap 12 as shown in FIG. 2 (b), the shape effect is suppressed, but the recording demagnetization effect cannot be suppressed (FIG. 2 ( e), (f)).

On the other hand, in the present invention, as shown in FIG. 2 (c), the magnetic gap 12 has a predetermined angle (θ) with respect to the film surfaces of the magnetic thin films 11 and 12 (thin film forming surfaces, left and right surfaces in the drawing). It is formed so as to be inclined, and so that the track longitudinal direction (media moving direction) and the film surface are non-parallel (in this embodiment, perpendicular to each other). As a result, the film surfaces 11a and 13a of the magnetic thin films 11 and 13 themselves constitute the front edge and the rear edge of the magnetic pole. As a result, as is apparent from the figure, the average distance (magnetic pole length) between the magnetic gap 12 and the front end edge 11a or 13a is shortened, and the recording demagnetization effect can be reduced (FIG. 1F). In addition, since the magnetic gap 12 and the front edge 11a or 13a are not parallel, no swell (shape effect) is generated (FIG. 9E).

In FIG. 2 (c), the track length direction and the film surface are perpendicular to each other, and in this case, the front edge 11a and the rear edge 1
The distance between 3a (magnetic pole length) is the shortest dimension equal to the thin thickness, but the track longitudinal direction and the film surface cross at any angle other than perpendicular (the track longitudinal direction and the film surface are non-parallel) ), The magnetic pole length can be made sufficiently short. Assuming that the angle formed by the magnetic gap 12 with the film surface is θ, the angle formed by the track longitudinal direction with the film surface is α, and the film thickness is d, the track width TW is: TW = | d × sin (α−θ) / sinθ | Is determined as The so-called azimuth angle is ｛90
°-(α-θ)｝. In the case of FIG. 2 (c),
Since α = 90 °, it is determined as TW = dcotθ. At this time, the azimuth angle is θ. In the figure, the portion of the magnetic thin films 11 and 12 facing the medium that deviates from the track width TW can be shaped so as to be obliquely cut away from the medium so as not to contact the recording medium surface. .

As another solution to eliminate the above-mentioned shape effect (undulation phenomenon), the position where the undulation occurs on the characteristic curve is moved to a higher frequency side (high density side) by shortening the magnetic pole length, and the usage record is made. There is a method of moving out of the density (frequency) band. However, when using a high coercivity medium,
Since the magnetic pole is thin, magnetic saturation occurs, and sufficient writing cannot be performed. FIG. 2 (d) shows an embodiment considered as a countermeasure, in which the magnetic pole (the end on the inflow side with respect to the moving direction of the medium) of the magnetic thin film 11 on one side is thickened and the magnetic thin film 13 on the other side is thickened.
, The magnetic pole (outflow end side with respect to the medium moving direction) can be made thinner to generate a stronger magnetic field than when both magnetic poles are thin. In FIG. 2 (d), 11a, 11
a ′ is the film forming surface of the magnetic thin film 11 and the other magnetic thin film 13
The film forming surface is parallel to the magnetic gap 12. In the figure, there is no place where the front edge (formation surface 11a) of the magnetic pole on the inflow end side is parallel to the magnetic gap 12 within the track width TW, and the thickness of the magnetic pole (magnetic thin film 13) on the outflow side (magnetic pole length) ) Is so short that no shape effect occurs. In the same figure, the magnetic poles (particularly,
There is no recording demagnetization because the magnetic pole on the outflow end side, which has a large effect on the recording demagnetizing action, is short.

Next, an embodiment of the present invention will be described with reference to FIG.
In FIG. 1A, a slider 2 is attached to a tip of a support spring 1. The slider 2 has a narrow clearance (for example, 0.1 mm) over a magnetic disk recording medium (not shown) which rotates in the medium moving direction indicated by the arrow 3 by an air flow.
2 μm). Rails 2a and 2b are provided on both sides of the slider 2, and the inflow end sides of the rails 2a and 2b are slightly warped (about 0.6 to 0.7 °). A thin film head (element) 4 is formed on the outflow end side of the slider 2.

The shape of the element 4 is composed of two magnetic circuits 5, 5 ', as shown in FIG. 1 (b). The magnetic circuit 5 includes magnetic thin films 11 and 13
Thus, the magnetic circuit 5 'is composed of the magnetic thin films 11' and 13. Each magnetic circuit is formed with write coils 6, 6 'and reproducing MR elements (magnetoresistive elements) 7, 7'. Also, to eliminate interference between the two magnetic circuits,
An interference prevention groove 8 is formed.

FIG. 1 (c) shows the magnetic pole shape of the two elements viewed from the air bearing surface (the medium facing surface). Each of the gaps 12, 12 'is formed at a different angle [theta], [theta]'. Also, the track width is TW, TW ', and two head elements shown in FIG. 2 (c) are combined to form two magnetic circuits having different magnetic gap angles θ and θ'. , Azimuth recording is possible.

A method for manufacturing such a magnetic pole-shaped magnetic head will be described with reference to FIG.

First, a base film 10 (for example, alumina or the like) is formed on a substrate 9 (for example, alumina, titanium, carbide or the like) on which elements are to be formed by sputtering or the like (FIGS. 3A and 3B). A first magnetic film 11 of permalloy or the like is formed thereon by a sputtering method, a plating method, or the like (FIG. 3C), and the magnetic film 11 is subjected to ion milling, etching, machining, or the like. A groove 11s having a predetermined angle is provided to partially remove the groove 11 (d), and a gap film 12 (for example, alumina, SiO ₂ or the like having a thickness of about 0.3 μm) and a second film of a permalloy or the like are formed. The magnetic film 13 is formed as shown in FIG. Thereafter, a part of the second magnetic film 13 is flattened by ion milling or the like, and a protective film 14 of alumina or the like is formed (FIG. 1F). An inclination component from the thickness direction of the first or second magnetic film (dcotθ or dcotθ as described above)
θ ′) gives the track width TW ′. In this embodiment, θ ′
= 180 ° -θ, that is, TW = TW ', and azimuth recording and reproduction are performed.

FIG. 4 shows another method of manufacturing the magnetic head having the pole shape shown in FIG. On the substrate 9 (the base film 10 may be provided)
In addition, by ion milling, etching, machining, etc.
A predetermined groove 10s is provided ((a), (b), (c) in the figure),
A magnetic film 11 is formed in the groove 10s (FIG. 4D), and the magnetic film 11 is subjected to ion milling, etching, machining, or the like to form a part of the magnetic film 11 at a predetermined angle. Is removed to form a groove 11s (FIG. (E),
(F)), a gap film 12 and a second magnetic film 13 are sequentially formed in the groove 11s.
(FIG. 2G), and then a part of the second magnetic film 13 is flattened by ion milling or the like, and a protective film 14 made of alumina or the like is formed.
To form Also in this embodiment, similarly to FIG. 3, the gradient component of the thickness of the first or second magnetic film gives the track width.

FIG. 5 is a schematic external view of an embodiment of a magnetic head element having another shape and structure. In the figure, the same parts as those in FIG. 1 are denoted by the same reference numerals, and description thereof will be omitted. FIG. 5A shows a case where a single element is used (in place of the composite element shown in FIG. 1). In this embodiment, a non-magnetic gap can be provided in the magnetic path 5 behind the element 7 (on the side of the coil 6) in order to guide the reproduced magnetic flux to the MR element 7 as much as possible. FIG. 7B shows a case where the MR element 7 is inserted in the magnetic circuit 5 (in place of the MR element shown in FIG. 9A provided outside the magnetic circuits 5 and 5 '). FIG. 3C shows two MR elements in the magnetic circuit 5.
An example is shown in which 7, 7 'are provided and the outputs of these MR elements are arranged to be differentially extracted. FIG. 3D shows an inductive type using the coil 6 for both recording and reproduction without using the MR element.

By using the MR element for reproduction, the coil becomes write-only and requires only a small number of turns, so that a smaller size and higher efficiency can be achieved. Further, the recording element and the reproducing element may be dedicated respectively. Furthermore, one slider 2
Two rails 2a, 2b formed on both sides of the rail (FIG. 1 (a)
Azimuth recording / reproducing may be performed by attaching head elements having different azimuth angles to the respective heads.

FIG. 6 shows another embodiment relating to a method of forming and mounting a head element as viewed from a slider surface (a medium facing surface).

FIG. 6 (a) shows a magnetic gap of two magnetic head elements mounted on rails 2a and 2b on both sides of the slider, respectively.
12a and 12b tilt angle theta ₁ and theta ₂ are equal is (θ _{1 =} θ ₂₎ If, recording and re-separation is (recording one of Giyatsupu, the other Giyatsupu for reproduction). FIGS. 7B and 7C show the case where θ ₁ ≠ θ ₂ and are for azimuth recording (signals are recorded or reproduced on adjacent tracks of the medium in each gap). (D), (e),
(F) shows two gear gaps 12a, 12a on rails 2a and 2d, respectively.
In the case where a composite head element having 12a '(or 12b, 12b') is mounted and, advantageously, four gaps are formed, the gaps 12a and 12a 'have different azimuths but the gaps are different.
12a and 12b have the same azimuth, and the gaps 12a 'and 12b' have the same azimuth. If necessary, they can be used for recording / re-separation or for azimuth recording / reproduction.

Next, the structure of a magnetic head according to another embodiment of the present invention and a method of manufacturing the same will be described with reference to FIGS.

FIG. 7 is an external view of a slider to which a magnetic head element according to another embodiment is mounted. The magnetic head element 4 is formed near the rail 2a at the outflow end of the slider 2. 11 is a first magnetic film, 6 is a coil, and 13 is a second magnetic film.

With reference to FIG. 8, a method for manufacturing the head of FIG. 7 will be described. A predetermined groove 16 is formed in the substrate 9 (which may include the base film 10) constituting the slider 2 by ion milling, etching, machining, or the like (FIG. 8 (a),
(B)). The first magnetic film 11 is formed in the groove 16 by a sputtering method, a plating method, or the like (FIG. 3C). Thereafter, the groove is filled with a non-magnetic material 17 (for example, glass or the like) (FIG. 4D), and is flattened by wrapping or the like so that the gradient component of the magnetic film thickness is exposed (FIG. 4E). ). Thereafter, a gap film 12 is formed, and after the coil 6 is formed using the gap film and a resist as an insulating material and a mask material, a second magnetic film 13 is formed (FIG. 9G). The shape of the medium facing surface of the magnetic pole of the obtained magnetic head element has a structure substantially as shown in FIG. 2D, and the magnetic track length direction is perpendicular to the gap surface 12 (FIG. 8G). (Up and down direction). According to the present embodiment, the magnetic pole (second magnetic film 13) on the outflow end side, which has a large effect on the recording characteristics, can be made thin, so that good characteristics can be obtained without recording demagnetization.

FIG. 9 shows an embodiment of a method of forming magnetic films having various shapes and structures on the slider 2 by an external view of a medium facing surface of the slider. FIG.
Head elements as shown in FIG. 8 are respectively attached to the left and right rails 2a and 2b (the head elements by the magnetic films 11a and 13a and the magnetic films 11b and 1b).
3b). FIG. 9B shows a case where the first magnetic film 11 is common to both head elements and the second magnetic films 13a and 13b are separate. FIG. 9 (c) shows a first example in order to prevent interference between the two head elements.
This is a case where the magnetic film 11 is separated. FIG. 9D shows a case where the first magnetic film 11 is formed at the corner of the slider outflow end. Also, the first magnetic film 11 may be non-parallel to the gap surface, and may be, for example, a curved surface as shown in FIG. 9 (e).

FIG. 10 is an external view of a magnetic head according to another embodiment,
This embodiment is the embodiment of FIG. 9 (d), in which an MR element 7 is further formed on the side surface of the slider 2, and the recording is of the inductive type and the reproduction is of the MR type. Here, 11 is a first magnetic film, and 13 is a second magnetic film. This MR element 7 may be formed so as to be embedded in the nonmagnetic material 18 in the figure.

In the embodiment shown in FIG. 9, each element can be dedicated to recording and reproduction.

Further, the metal magnetic film in each embodiment is made of Cr, alumina,
High performance can be achieved by forming a multilayer structure using SiO ₂ or the like as an intermediate film. In particular, when an insulating interlayer is used,
The metal magnetic films are insulated from each other, thereby reducing eddy current loss and improving characteristics.

Alternatively, the head element may be formed in a chip shape and attached to the outflow end or side surface of the slider by bonding or the like. Alternatively, the head element can be embedded in a part of the slider.

In the embodiment of FIG. 1 (c), θ and θ ′ are set so that TW = TW ′, and the track width TW (= TW) is set.
W ') and the inter-track space (the distance between TW and TW'). That is, the track pitch is changed to the track width.
Set to twice TW (= TW '). Each time the magnetic disk recording medium makes one revolution, both head elements (gap 12 and
12 ') is moved one track at a time, and both heads are alternately switched (recording or reproducing) for each rotation. In this case, for magnetic disk media with closely adjacent tracks (no guard band), # 1,3,5,
The track of …… is, for example, by a head (gap) 12,
The tracks # 2, 4, 6,... Are alternately recorded and reproduced by the head (gap) 12 ', so that azimuth recording or reproduction can be performed. Generally, the same recording / reproduction can be performed by setting the interval between the head elements (12, 12 ') to be an even multiple of the track width (TW = TW').

In the above embodiment, permalloy, sendust, cobalt amorphous, or the like can be used as the magnetic thin film material. In this case, in the above embodiment, the first magnetic thin film 11 and the second
The magnetic thin film 13 was made of the same magnetic material.
In the embodiments and the like, the magnetic thin film 13 having a thinner magnetic pole is made of a material that is less saturated than the magnetic thin film 11 having a thicker magnetic pole, so that the two magnetic thin films are balanced to reduce a head that generates a strong magnetic field. Obtainable.

Further, the magnetic head having two or more head elements can be operated simultaneously to perform recording / reproduction in parallel.

[Effects of the Invention] As described in detail above, according to the present invention, the magnetic gap forming surface is inclined with respect to the film forming surface of the magnetic thin film, and the track length direction is made to cross the film forming surface. Since the track width is determined based on the film thickness, the narrow track width can be determined with high accuracy by the film thickness of the magnetic thin film, and the shape effect (undulation) and the recording demagnetizing effect can be prevented.

Further, by making the magnetic pole length of the inflow side magnetic thin film longer than that of the outflow side, a high saturation magnetic flux density suitable for a high coercive force recording medium can be obtained, and the inclination angle of each magnetic gap of the plurality of magnetic head elements can be set to the track width. Azimuth recording / reproduction becomes possible, and recording / re-separation becomes possible by arranging at least two magnetic head elements having the same azimuth angle at predetermined intervals.

Further, by providing a double azimuth head on one of the rails of the slider and forming a groove for preventing interference between the two magnetic circuits in the central core, the magnetic resistance between the two magnetic heads increases, and the distance between adjacent heads increases. Interference does not occur.

Similarly, by separately installing heads having different angles on the two rails of the slider, interference between adjacent heads is prevented.

Therefore, the recording density per unit track length and
It has excellent effects such as increasing the track density per unit width and enabling high-density recording / reproduction.

[Brief description of the drawings]

FIG. 1 is an external view of a thin-film magnetic head according to one embodiment of the present invention,
FIG. 2 is an explanatory view of the principle of the thin film magnetic head of the present invention, and FIG.
FIG. 4 is an explanatory view of a method of manufacturing a thin-film magnetic head according to one embodiment of the present invention. FIG. 4 is an explanatory view of a method of manufacturing a thin-film magnetic head according to another embodiment of the present invention. 7 is an external view of a thin-film magnetic head according to another embodiment of the present invention. FIG. 8 is an explanatory view of a method of manufacturing a thin-film magnetic head according to still another embodiment of the present invention. FIG. 10 is an external view of a thin-film magnetic head according to still another embodiment of the present invention. 2 ... Slider, 3 ... Moving direction of magnetic recording medium, 4 ...
... Magnetic head element, 5,5 '... Magnetic circuit, 6,6' ... Coil, 7,7 '... Reproduction MR element, 9 ... Substrate, 10 ... Base film, 11,11' ... First magnetic (thin) film, 12, 12 '... magnetic gap, 13 ... second magnetic (thin) film, 14 ... protective film.

────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Tsubasa Saito 2880 Kozu, Odawara-shi, Kanagawa Prefecture Odawara Plant, Hitachi, Ltd. (56) References JP-A-63-234406 (JP, A) JP-A-62- 141619 (JP, A) JP-A-3-22208 (JP, A) (58) Fields investigated (Int. Cl. ⁶ , DB name) G11B 5/31

Claims (3)

(57) [Claims] A first magnetic thin film connected to a front end of the first magnetic thin film via a magnetic gap at a front end and connected to a rear end of the first magnetic thin film at a rear end; A thin-film magnetic head comprising: a second magnetic thin film; and an electric coil interlinked with a magnetic circuit formed by the first and second magnetic thin films and the magnetic gap. Is formed at a predetermined angle with respect to the thin film forming surface of at least one of the first and second magnetic thin films, and the thin film forming surface is non-parallel to a track longitudinal direction which is a recording medium moving direction. Wherein a track width is determined based on a thickness of the at least one magnetic thin film, and a front edge of the first magnetic thin film forms a front edge of a magnetic pole at the front end of the first magnetic thin film. You At the same time, the trailing edge of the second magnetic thin film forms the trailing edge of the magnetic pole at the leading end of the second magnetic thin film, and is formed by the first magnetic thin film on the inflow side in the recording medium movement direction. The thickness of the magnetic pole along the recording medium moving direction is greater than the thickness of the magnetic pole formed by the second magnetic thin film on the outflow side of the recording medium moving direction along the recording medium moving direction. head. 2. A first magnetic thin film, which is connected to a front end of the first magnetic thin film via a magnetic gap at a front end and connected to a rear end of the first magnetic thin film at a rear end. A thin-film magnetic head comprising: a second magnetic thin film; and an electric coil interlinked with a magnetic circuit formed by the first and second magnetic thin films and the magnetic gap. Is formed at a predetermined angle with respect to the thin film forming surface of at least one of the first and second magnetic thin films, and the thin film forming surface is non-parallel to a track longitudinal direction which is a recording medium moving direction. Wherein a track width is determined based on a thickness of the at least one magnetic thin film, and a front edge of the first magnetic thin film forms a front edge of a magnetic pole at the front end of the first magnetic thin film. You And a trailing edge of the second magnetic thin film forms a trailing edge of a magnetic pole at the leading end of the second magnetic thin film, and a slider rail on which the thin-film magnetic head is mounted,
Magnetic gaps having different angles are formed to perform double azimuth recording, and a magnetic circuit of each magnetic head is provided at a central core of each magnetic head having the magnetic gaps having different angles. A thin-film magnetic head having an interference preventing groove for eliminating interference between the thin-film magnetic heads. 3. The first magnetic thin film is connected to a front end of the first magnetic thin film via a magnetic gap at a front end, and is connected to a rear end of the first magnetic thin film at a rear end. A thin-film magnetic head comprising: a second magnetic thin film; and an electric coil interlinked with a magnetic circuit formed by the first and second magnetic thin films and the magnetic gap. Is formed at a predetermined angle with respect to the thin film forming surface of at least one of the first and second magnetic thin films, and the thin film forming surface is non-parallel to a track longitudinal direction which is a recording medium moving direction. Wherein a track width is determined based on a thickness of the at least one magnetic thin film, and a front edge of the first magnetic thin film forms a front edge of a magnetic pole at the front end of the first magnetic thin film. You And a trailing edge of the second magnetic thin film forms a trailing edge of a magnetic pole at the leading end of the second magnetic thin film, and is different from each other on rails on both sides of a slider on which the thin-film magnetic head is mounted. A magnetic gap having a different angle, separating magnetic gaps having different angles into rails on both sides, and performing double azimuth recording or reproduction with the magnetic gap.