JP2814601B2 - Magneto-optical recording medium - Google Patents

Magneto-optical recording medium

Info

Publication number
JP2814601B2
JP2814601B2 JP1224065A JP22406589A JP2814601B2 JP 2814601 B2 JP2814601 B2 JP 2814601B2 JP 1224065 A JP1224065 A JP 1224065A JP 22406589 A JP22406589 A JP 22406589A JP 2814601 B2 JP2814601 B2 JP 2814601B2
Authority
JP
Japan
Prior art keywords
film
magneto
optical recording
recording medium
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1224065A
Other languages
Japanese (ja)
Other versions
JPH0386947A (en
Inventor
勝久 荒谷
真澄 太田
隆司 下馬
有克 中沖
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP1224065A priority Critical patent/JP2814601B2/en
Publication of JPH0386947A publication Critical patent/JPH0386947A/en
Application granted granted Critical
Publication of JP2814601B2 publication Critical patent/JP2814601B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は光磁気記録媒体、すなわち例えば半導体レー
ザ光の照射による光(熱)磁気記録を行い、その記録の
読み出しをカー回転角の検出によって行うようになされ
た光磁気記録媒体に係わる。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention performs magneto-optical recording media, that is, magneto-optical (thermal) magnetic recording by, for example, irradiation of a semiconductor laser beam, and reads the recording by detecting the Kerr rotation angle. The present invention relates to a magneto-optical recording medium adapted to perform the above-described operations.

〔発明の概要〕 本発明は、光磁気記録媒体に係わり、光透過性基板上
に設けられた誘電体膜と反射性光磁気記録膜と保護膜と
樹脂保護膜とこれの上に形成された厚さが25Å〜200Å
未満のアルミニウム薄膜を介して樹脂保護膜を形成する
構成をとって、アルミニウム膜を設けることによって信
頼性の向上をはかると共に記録感度の低下の招来を回避
する。
SUMMARY OF THE INVENTION The present invention relates to a magneto-optical recording medium, and is formed on a dielectric film, a reflective magneto-optical recording film, a protective film, a resin protective film, and a dielectric film provided on a light-transmitting substrate. 25 to 200 mm thick
By adopting a configuration in which the resin protective film is formed via an aluminum thin film less than the aluminum thin film, by providing the aluminum film, the reliability is improved and the reduction in the recording sensitivity is avoided.

〔従来の技術〕[Conventional technology]

レーザ光照射による局部的加熱によって情報ビットす
なわち磁区を形成し、これを光磁気相互作用すなわちカ
ー効果によって読み出す光磁気記録媒体は、例えば第3
図に示すようにポリカーボネイト(PC)基板等の光透過
性基板(11)上にSi3N4等の誘電体膜(12)と、Tb Fe C
o等よりなる光磁気記録膜(13)、すなわち垂直磁化膜
と、例えばSi3N4からなる誘電体膜(14)と、例えば紫
外線硬化樹脂よりなる樹脂保護膜(15)が積層されてな
る。
A magneto-optical recording medium that forms an information bit, ie, a magnetic domain by local heating by laser beam irradiation and reads it out by magneto-optical interaction, ie, the Kerr effect, is, for example, a third magnetic recording medium.
As shown in the figure, a dielectric film (12) such as Si 3 N 4 and a TbFeC are placed on a light transmitting substrate (11) such as a polycarbonate (PC) substrate.
a magneto-optical recording film (13) made of o, etc., that is, a perpendicular magnetization film, a dielectric film (14) made of, for example, Si 3 N 4, and a resin protective film (15) made of, for example, an ultraviolet curing resin. .

このような光磁気記録媒体において、その光磁気記録
膜(13)が例えば光学的に透明な状態での膜厚例えばそ
の厚さが400Å程度以下である場合等の作用態様におい
て、その実効的なカー効果をエンハンスメント効果を得
るためにアルミニウムAl膜を磁気記録膜(13)の背部す
なわち光透過性基板(11)とは反対側の例えば誘電体膜
(14)と樹脂保護膜(15)との間に積層配置するという
構成がとられる場合がある。また、或る場合はヒートシ
ンク効果を得るためにAl膜を配置する場合もある。これ
らの目的によるAl膜の厚さは、400Å以上の厚さに選定
される必要がある。
In such a magneto-optical recording medium, in an operation mode such as when the magneto-optical recording film (13) has a thickness in an optically transparent state, for example, a thickness of about 400 ° or less, the effective mode is effective. In order to obtain the Kerr effect, an aluminum Al film is formed on the back of the magnetic recording film (13), that is, on the opposite side of the light transmitting substrate (11), for example, between the dielectric film (14) and the resin protective film (15). In some cases, a configuration in which the components are stacked and arranged therebetween is adopted. In some cases, an Al film may be disposed to obtain a heat sink effect. The thickness of the Al film for these purposes needs to be selected to be 400 mm or more.

しかしながら昨今光磁気記録垂直磁化膜(13)として
この膜自体での反射によってこの膜でのカー効果でその
読み出しを行うようにした反射性の光磁気記録媒体膜、
すなわちその厚さが400Åを越える大なる厚さ、あるい
は光強度変調オーバーライト用記録媒体におけるような
光磁気記録膜の厚さが大である場合、あるいはこの光磁
気記録膜において、交換結合による2層膜以上とされた
構成による光磁気記録媒体におけるようにAl膜によるエ
ンハンスメント効果を必要としない光磁気記録媒体で
は、上述したような厚いAl膜を配置することはこれによ
る熱放散効果によって記録感度の低下を招来することか
らこのAl膜の配置が排除される傾向にある。ところが、
このようなAl膜の排除された光磁気記録媒体において
は、その紫外線硬化樹脂による樹脂保護膜(15)側から
の侵蝕によって光磁気記録膜の腐蝕(孔食)の問題すな
わちS/N低下、信頼性の低下の問題が生じてくる。
However, recently, as a magneto-optical recording perpendicular magnetization film (13), a reflective magneto-optical recording medium film which performs reading by the Kerr effect in this film by reflection on the film itself,
That is, when the thickness exceeds 400 mm, or when the thickness of the magneto-optical recording film is large as in a recording medium for light intensity modulation overwriting, or when the magneto-optical recording film has In a magneto-optical recording medium that does not require the enhancement effect of the Al film as in a magneto-optical recording medium having a configuration of more than a layer film, the above-described arrangement of the thick Al film can reduce the recording sensitivity due to the heat dissipation effect due to this. Therefore, the arrangement of the Al film tends to be excluded because of lowering of the Al film. However,
In such a magneto-optical recording medium from which the Al film has been eliminated, the problem of corrosion (pitting) of the magneto-optical recording film due to erosion from the resin protective film (15) side by the ultraviolet curable resin, that is, a decrease in S / N, There is a problem of reduced reliability.

〔発明が解決しようとする課題〕[Problems to be solved by the invention]

本発明は上述した光磁気記録媒体、特にその光磁気記
録膜の厚さが400Åを越える、例えば780nmの半導体レー
ザ光に対して反射性を示す600Å以上の反射性光磁気記
録膜を有する光磁気記録媒体において、記録感度の低下
を招来することなく、かつ信頼性の向上をはかるもので
ある。
The present invention relates to a magneto-optical recording medium as described above, particularly a magneto-optical recording medium having a reflective magneto-optical recording film having a thickness of more than 400 mm, for example, having a thickness of 600 mm or more, which exhibits reflectivity to a semiconductor laser beam of 780 nm. In a recording medium, reliability is improved without lowering recording sensitivity.

〔課題を解決するための手段〕[Means for solving the problem]

本発明は第1図にその略線的拡大断面図を示すよう
に、光透過性基板(1)上に、順次誘電体膜(2)と、
厚さ400Å以上の反射性光磁気記録膜(3)すなわちこ
の光磁気記録膜(3)において反射された光の光磁気相
互作用を検出して記録の読み出しを行うようにその膜厚
が大とされた垂直磁化膜と、保護膜(4)と、樹脂保護
膜(5)とが積層形成されてなる光磁気記録媒体におい
て、その保護膜(4)上に厚さ25Å〜200Å未満のアル
ミニウムAl薄膜(6)を介して樹脂保護膜(5)を形成
する構成をとる。
According to the present invention, a dielectric film (2) is sequentially formed on a light-transmitting substrate (1) as shown in FIG.
The reflective magneto-optical recording film (3) having a thickness of 400 mm or more, that is, the thickness of the reflective magneto-optical recording film (3) is so large that the magneto-optical interaction of the light reflected on the magneto-optical recording film (3) is detected and the recording is read out. A perpendicular magnetic film, a protective film (4), and a resin protective film (5) are laminated on a magneto-optical recording medium, and aluminum (Al) having a thickness of 25 to less than 200 mm is formed on the protective film (4). The configuration is such that the resin protective film (5) is formed via the thin film (6).

〔作用〕[Action]

上述の本発明構成によれば、Al薄膜(6)を保護膜
(4)と樹脂保護膜(5)との間に介在せしめたもので
あるが、この場合に特にAl薄膜(6)の膜厚を25Å〜20
0Å未満に選定したことによってこのAl薄膜(6)の存
在による光磁気記録膜(3)への記録レーザ光の照射時
に、このAl薄膜(6)による熱放散によって記録に要す
る記録レーザパワーの増大化すなわち感度の低下を招来
することなく、しかもこの程度の厚さのAl薄膜(6)に
よって記録膜(3)の孔食は効果的に回避できることが
確められた。
According to the configuration of the present invention described above, the Al thin film (6) is interposed between the protective film (4) and the resin protective film (5). In this case, the film of the Al thin film (6) is particularly used. 25 ~ 20 thick
When the recording laser beam is applied to the magneto-optical recording film (3) due to the existence of the Al thin film (6) due to the selection of less than 0 °, the heat dissipation by the Al thin film (6) increases the recording laser power required for recording. It was confirmed that the pitting corrosion of the recording film (3) could be effectively avoided by the Al thin film (6) having such a thickness without causing the reduction in the sensitivity, that is, lowering the sensitivity.

〔実施例〕〔Example〕

第1図に示すように、PC等の樹脂基板、ガラス基板等
よりなる光透過性基板(1)上に例えば800Åの厚さのS
i3N4よりなる誘電体膜(2)と、例えばその厚さが400
Åを越える600Å以上例えば800ÅのTb Fe Coの垂直磁化
膜によりなる反射性光磁気記録膜(3)と、例えば厚さ
800ÅのSi3N4よりなる保護膜(4)と、厚さが25Å〜20
0Å未満のAl薄膜(6)と、例えば紫外線硬化樹脂によ
る保護膜(5)とを順次積層形成した光磁気記録媒体を
構成する。
As shown in FIG. 1, for example, an 800 mm thick S is formed on a light transmitting substrate (1) made of a resin substrate such as a PC or a glass substrate.
a dielectric film (2) made of i 3 N 4 having a thickness of, for example, 400
A reflective magneto-optical recording film (3) consisting of a perpendicular magnetization film of Tb Fe Co of 600 ° or more, for example, 800 °
Protective film (4) made of 800Å Si 3 N 4 and thickness 25Å-20
A magneto-optical recording medium is formed by sequentially laminating an Al thin film (6) of less than 0 ° and a protective film (5) made of, for example, an ultraviolet curable resin.

この光磁気記録媒体において、そのAl薄膜(6)の膜
厚を変えた各光磁気記録媒体を作製しその記録レーザパ
ワーの膜厚との関係を測定した。その結果を第2図に示
す。この場合の測定条件は、780nmの波長の半導体レー
ザを記録レーザ光として、光磁気記録媒体との相対速度
すなわち線速度が10m/s、記録磁界を300〔Oe〕、記録周
波数を5MHzとした場合である。この場合の記録レーザパ
ワーすなわち2次高調波レベルが最小となる記録パワー
を測定したもので、この場合第2図によって明らかなよ
うに200Å程度以下、更に第2図からあきらかなよう
に、確実には200Å未満でAl薄膜を設けない場合すなわ
ちAl薄膜の厚さ0の場合の記録レーザパワーより殆どそ
の増大が見られていない。すなわち感度の低下が抑制さ
れている。
In this magneto-optical recording medium, each magneto-optical recording medium in which the film thickness of the Al thin film (6) was changed was manufactured, and the relationship between the recording laser power and the film thickness was measured. The result is shown in FIG. The measurement conditions in this case are as follows: a semiconductor laser having a wavelength of 780 nm is used as a recording laser beam, the relative speed with respect to the magneto-optical recording medium, that is, the linear velocity is 10 m / s, the recording magnetic field is 300 (Oe), and the recording frequency is 5 MHz. It is. In this case, the recording laser power, that is, the recording power at which the second harmonic level was minimized, was measured. In this case, as clearly shown in FIG. 2, the recording power was not more than about 200 °, and as clearly apparent from FIG. Is less than 200 [deg.] And the recording laser power is hardly increased when the Al thin film is not provided, that is, when the thickness of the Al thin film is 0. That is, a decrease in sensitivity is suppressed.

一方、この場合のAl薄膜に対する孔食数すなわち腐蝕
による磁気記録媒体の腐蝕数の測定を行った。その結果
を表1に示す。
On the other hand, the number of pits on the Al thin film in this case, that is, the number of corrosions of the magnetic recording medium due to corrosion was measured. Table 1 shows the results.

この場合、各膜厚t(Å)をt=0Å,50Å,100Å,20
0Åとした場合のそれぞれの光磁気ディスクを4枚づつ
総計16枚について温度80℃,湿度85%R.H.の恒温恒湿槽
に1000時間放置した結果の平均値を示す。これにより明
らかなようにAl薄膜(6)を設けない場合に比し、Al膜
厚(6)を設けるときはその厚tがt<200Åに拘わら
ず格段に孔食発生が回避されていることがわかる。因み
にこの程度のAl薄膜の厚さでは光反射効果は殆どない。
In this case, each film thickness t (Å) is defined as t = 0Å, 50Å, 100Å, 20
The average value of the results obtained by leaving each of the 16 magneto-optical disks in total at 16 ° C. for 1000 hours in a thermo-hygrostat at a temperature of 80 ° C. and a humidity of 85% RH for a total of 16 magneto-optical disks is shown. As is apparent from this, when the Al film (6) is provided, the occurrence of pitting corrosion is remarkably avoided when the Al film (6) is provided, irrespective of the thickness t <200 °. I understand. By the way, with this thickness of the Al thin film, there is almost no light reflection effect.

尚、上述した例においては、光磁気記録膜(3)の垂
直磁化膜がTb Fe Coによる場合について説明したが、そ
の他各種の垂直磁化膜例えば希土類−遷移金属合金薄膜
等をはじめとする各種磁性薄膜あるいはまた単層のみな
らず多層薄膜構成とする場合にも本発明を適用できる。
In the above-described example, the case where the perpendicular magnetic film of the magneto-optical recording film (3) is made of TbFeCo has been described. However, various kinds of other perpendicular magnetic films such as a rare earth-transition metal alloy thin film and the like may be used. The present invention can be applied not only to a thin film or a single layer but also to a multilayer thin film.

〔発明の効果〕〔The invention's effect〕

上述したところから明らかなように、本発明によれば
25Å〜200Å未満という薄いAl薄膜(6)を配置したこ
とによって孔食の発生による信頼性の低下を効果的に回
避でき、しかもAl薄膜(6)が200Å未満という薄い膜
としたことによって、記録レーザパワーの増大化すなわ
ち感度の低下の招来を回避でき、記録特性に優れた光磁
気記録媒体を得ることができ、実用に供してその利益は
甚大である。
As is apparent from the above, according to the present invention,
By arranging the thin Al thin film (6) having a thickness of less than 25 ° to less than 200 °, it is possible to effectively avoid a decrease in reliability due to the occurrence of pitting corrosion. An increase in laser power, that is, a decrease in sensitivity can be avoided, and a magneto-optical recording medium having excellent recording characteristics can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明による光磁気記録媒体の一例の略線的拡
大断面図、第2図はその記録レーザパワーのAl薄膜の膜
厚に対する依存性の測定結果を示す図、第3図は従来の
光磁気記録媒体の一例の略線的拡大断面図である。 (1)は光透過性基板、(2)は誘電体膜、(3)は光
磁気記録膜、(4)は保護膜、(5)は樹脂保護膜、
(6)はアルミニウム(Al)薄膜である。
FIG. 1 is a schematic enlarged cross-sectional view of an example of a magneto-optical recording medium according to the present invention, FIG. 2 is a diagram showing the measurement results of the dependence of the recording laser power on the thickness of an Al thin film, and FIG. FIG. 2 is a schematic enlarged cross-sectional view of an example of the magneto-optical recording medium of FIG. (1) is a light transmitting substrate, (2) is a dielectric film, (3) is a magneto-optical recording film, (4) is a protective film, (5) is a resin protective film,
(6) is an aluminum (Al) thin film.

フロントページの続き (72)発明者 中沖 有克 東京都品川区北品川6丁目7番35号 ソ ニー株式会社内 (56)参考文献 特開 平2−105352(JP,A) 特開 平2−239446(JP,A) (58)調査した分野(Int.Cl.6,DB名) G11B 11/10 521 F G11B 11/10 506 ZContinuation of the front page (72) Inventor Yukatsu Nakaoki 6-7-35 Kita-Shinagawa, Shinagawa-ku, Tokyo Inside Sony Corporation (56) References JP-A-2-105352 (JP, A) JP-A-2 -239446 (JP, A) (58) Fields investigated (Int. Cl. 6 , DB name) G11B 11/10 521 F G11B 11/10 506 Z

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】光透過性基板上に、順次誘電体膜と、厚さ
400Å以上の光磁気記録膜と、保護膜と、樹脂保護膜と
が積層形成され、上記光磁気記録膜における反射によっ
て再生がなされる光磁気記録媒体において、 上記保護膜上に厚さ25Å以上200Å未満の薄いアルミニ
ウム薄膜を介して上記樹脂保護膜を形成して成ることを
特徴とする光磁気記録媒体。
A dielectric film and a thickness are sequentially formed on a light-transmitting substrate.
In a magneto-optical recording medium in which a magneto-optical recording film of 400 mm or more, a protective film, and a resin protective film are laminated and reproduced by reflection on the magneto-optical recording film, a thickness of 25 to 200 mm is formed on the protective film. A magneto-optical recording medium comprising the above-mentioned resin protective film formed via a thin aluminum thin film having a thickness of less than.
JP1224065A 1989-08-30 1989-08-30 Magneto-optical recording medium Expired - Fee Related JP2814601B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1224065A JP2814601B2 (en) 1989-08-30 1989-08-30 Magneto-optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1224065A JP2814601B2 (en) 1989-08-30 1989-08-30 Magneto-optical recording medium

Publications (2)

Publication Number Publication Date
JPH0386947A JPH0386947A (en) 1991-04-11
JP2814601B2 true JP2814601B2 (en) 1998-10-27

Family

ID=16808020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1224065A Expired - Fee Related JP2814601B2 (en) 1989-08-30 1989-08-30 Magneto-optical recording medium

Country Status (1)

Country Link
JP (1) JP2814601B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2067945C (en) * 1991-05-16 2001-09-04 Shintaro Tanaka Magneto-optical recording medium

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02239446A (en) * 1989-03-10 1990-09-21 Seiko Epson Corp Magneto-optical recording medium

Also Published As

Publication number Publication date
JPH0386947A (en) 1991-04-11

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