JP2785925B2 - Seal mechanism - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sealing mechanism using an elastic body such as a rubber O-ring for forming a reduced pressure region such as a vacuum , and is particularly suitable for preventing adhesion of the elastic body.

[0002]

2. Description of the Related Art For example, a compact disk (hereinafter referred to as a CD) widely used for recording a large amount of recently digitized audio signals and image information is a transparent synthetic resin substrate such as polycarbonate. on the surface of, form a high aluminum thin film light reflectance by sputtering or the like
It is made by forming. Then, a small hole called a bit is made in this substrate in accordance with the digital information consisting of "1" and "0", and the presence or absence of this small hole is detected by the presence or absence of a reflected wave of the laser light irradiating the bit. Then, the record information is read.

[0003] A hole is formed in the center of this transparent CD substrate, and an aluminum thin film is formed on the CD substrate up to a position separated by a predetermined distance therefrom.

The outline of the operation of forming an aluminum thin film on this CD substrate by, for example, a continuous sputtering apparatus is shown in FIG.
4 and with reference to FIG. 5 will be described. This sputtering
When the CD substrate is transported in the process, a method is employed in which the CD substrate is held by a vacuum chuck.

FIG . 4 is a partial cross section of a continuous sputtering apparatus.
FIG. 5 is a sectional view of a main part. Figure smell
81 is an external conveying device such as a belt conveyor , and 82 is
Vacuum Chuck 83 is set to passage connecting to the vacuum apparatus without the over arm-like (not shown) is made of a rubber pad downwardly formed
It is a work transfer device that has been shaken. This vacuum chuck 83
Represents the rotational motion X1 about the axis 84 and the vertical direction Y1.
Can be moved.

Reference numeral 9 denotes an intermediate transfer device, which has a cover 91
Vacuum chuck 92 made of a rubber pad similar to the above.
The lid 91 and the vacuum chuck 92 are
It is supported horizontally and can rotate. S is a spa
The vacuum chamber 1 of the vacuum chamber 1 for forming a vacuum by a
1 and the internal transfer device 4 supported by the rotating shaft 23 in the
A membrane chamber 14 is provided.

[0007] The continuous sputtering apparatus S
The vacuum chuck 83 of the workpiece transfer device 82
The work that descends and is sequentially sent by the belt conveyor 81
The substrate 5 for CD, which is a crop, is suction-held and moved upward in the upward direction Y1.
Raise it. Next, the shaft 84 is rotated in the X1 direction,
To transport the CD substrate 5 to the intermediate transport device
9 corresponding to the vacuum chuck 92 of the transfer device 82 side.
Pressing the empty chuck 83 to release the holding
The side of the vacuum chuck 92 facing down is decompressed to hold the CD substrate 5.
Hold. Next, the vacuum chuck 92 is lowered in the Y2 direction.
And invert in the X2 direction, with the CD substrate 5 side down.
And put the lid 91 on the window 13 of the vacuum chamber 1
Make airtight contact.

Next, the lid 91 is fitted on the window 13.
In this state, the vacuum chuck 92 is pressed to maintain the CD substrate 5.
Release the holding. With this pressurization, the vacuum chuck 92
The separated CD substrate 5 is placed on the holder 41 of the internal transport device 4.
Loading or resting on top.

Thereafter , the internal transport device 4 is lowered in the Y3 direction.
And rotated in the X3 direction to face the film forming chamber 14.
At the position, aluminum is sputtered on the CD substrate 5.
And an aluminum thin film is formed on the CD substrate 5.
You.

[0010] Such a CD substrate 5 is transferred to the intermediate transfer device.
More detail by Figure 5 how to suction by the vacuum chuck 92 of the location 91. The intermediate conveyance device 9 includes a valve 93,
94 decompression apparatus (not shown) via a (described as vacuum pumps in FIG. 5) and the passage 95 which communicates is formed in the pressure line, a vacuum switch comprising a rubber pad on its distal end
Ru Tei Yak 92 is installed. C This is the hollow as illustrated, by the operation of the decompressor及Pi pressure line
Aspirate of D for the substrate 5 and the withdrawal Ru is carried out.

[0011] Then, in general, an airtight state under reduced pressure is obtained.
To the vacuum vessel 1 is essential, upper Symbol sputtering apparatus S
Window 13 and the lid 9 shown in FIG.
1 is a contact surface with the intermediate transfer device 9 which also serves as an airtight valve.
Or an internal transfer device for holding the window 13 and the CD substrate 5
The contact surface or the like of a 4, members are (hereinafter referred to elastic body) such as O-ring of rubber <br/> to toward or away from the portion made of the seal portion
Materials are provided .

[0012]

[SUMMARY OF THE INVENTION] However, the elastic member is deteriorated due to aging, withdrawal and adhesive with the installed part material
As measures to prevent the difficulty, it is necessary to change the material of the elastic body , remove grease or the like applied to the elastic body , etc.
However, it is difficult to eliminate stickiness. In particular, it vulcanized contained in the elastic body of rubber O-ring or the like, out soak by aging, long time if such were seal becomes large tackiness, unless away easily
There was a problem .

The present invention has been made in view of such circumstances, and in particular, provides a novel structure for reducing the degree of adhesion of an elastic body constituting a sealing mechanism.

[0014]

According to a first aspect of the present invention, there is provided a sealing mechanism in which a vacuum chamber is formed between contact surfaces of a hollow body and a lid-like member via a sealing member made of an elastic body. in what was characterized by digits set repulsion mechanism separating the both members by pressing between the contact surfaces in proximity to the seal member.

The sealing mechanism of the second aspect of the present invention, repulsive
One part consisting of a hollow or lid-like body at one end of the mechanism
Buried in the contact surface of the material, the other end is hollow or lid-like
The contact surface of the other member consisting of
Is characterized by having a large repulsive force and contacting
You.

The sealing mechanism of the third aspect of the present invention, repulsive
The mechanism is a spherical body in a hollow container having a window on one end.
The container is made of a hollow body
Or embedded in the contact surface of one of the lid
And is pushed by the spring and protrudes from the window
The spherical body is connected to the other member consisting of a hollow body or a lid.
It is characterized by being in contact with the contact surface.

[0017]

[Action] For example, a vacuum chamber that separates the atmosphere from the reduced pressure atmosphere
In order to maintain the degree of vacuum in the tank between the contact surfaces of the members formed of a hollow body or a lid, the airtight structure is provided via an elastic body (seal member) such as a rubber O-ring. Then, at a position close to the elastic body between the contact surfaces of the vacuum chamber components, by placing the repulsive mechanism you a pressing action of a large force from the tackiness of the elastic body, and the adhesive by residual adhesive of the elastic body So that the holder and the like can be easily removed and the holder and the like can be transported reliably.

[0018]

EXAMPLES continuous sputtering apparatus of an embodiment according to the present invention the workpiece such as a substrate for CD performing continuous sputtering
This will be described with reference to FIG . Overall structure of continuous sputtering equipment
The configuration is substantially the same as that of FIG.
FIG. 2 is a cross-sectional view of a part, and FIG.
FIG. 3 is a perspective view of the repulsion mechanism shown in FIG.
4 and FIG. 5 are denoted by the same reference numerals.
The description is omitted.

The continuous sputtering apparatus S for CD is a vacuum
Pusher (Pusher) 21 you vertically moving the vacuum chamber 11 forming a hollow body of the tank 1 is disposed, further, the vacuum chamber 1
1 of the window portion 13 which is more formed on the upper side of the annular wall 12,
It is covered with a gate valve 3 that forms a lid-like body that comes and goes .

[0020] Further, the vacuum chamber 1 in 1, C as workpiece
Holder 41 on which D substrate 5 is placed
Ru Tei inner transfer unit 4 is disposed with the. The Pusshi <br/> catcher - 21 is movable up and down by fixed to the shaft 23 which can be moved up and down, the pusher - the peripheral edge of the 21 holder - circular so as to be in contact with the 41 step 22 Provided
Is not that.

The center of the gate valve 3 is provided with a perforated portion 3.
1 is provided, and a claw mechanism or a vacuum chuck (not shown) is arranged so that the held CD substrate 5 can be transferred to another device.
That it has been in.

The upper and lower surfaces of the annular wall 12 and the pusher
Examples of rubber seal members for the annular step portions 21
For example, elastic bodies 6a, 6b, 6c made of O-rings are provided.
Gate valve 3 and internal transfer device 4 corresponding to these.
Airtightness at the contact surface between the upper and lower surfaces of the holder 41
Keep. At this time, the elastic bodies 6a, 6b, 6c are interposed.
Upper and lower surfaces of the annular wall 12, upper and lower surfaces of the holder 41, and
The surface of the step portion 22 is preferably a rubbing surface.

Further, between the lower surface of the annular wall 12 forming the vacuum chamber 11 and the upper surface of the holder 41 of the internal transfer device 4, there is a repulsion mechanism 7, between the contact surface near the elastic body 6b.
7 is installed. As shown in FIGS. 2 and 3, the repulsion mechanism 7 includes a spherical body 73 and a spring 74 wound in a coil shape in a hollow container 71 provided on the annular wall 12 side and having a window 72 on one end side. Consisting of Then, the spherical body 73 is constantly pressed by the spring 74, and when no load is applied, nearly half of the spherical body 73 protrudes from the window 72,
When the annular wall 12 and the holder 41 come close to each other, the spherical body 7
3 ing a state in which elastic pressing the upper surface of the holder -41.
Note that the pressing of the spherical body 73 can be used as long as it has an elastic force such as a spring outside the spring 74.

Such a continuous sputtering apparatus for CDs
S is a hollow member connected to the decompression device and forming the vacuum chamber 1.
Elastic bodies 6a and 6b interposed between the contact surfaces of the body and the lid,
The necessary degree of vacuum is secured by 6c. And
Loading and unloading of the CD substrate 5 into the taring device S
When the vacuum chamber 11 is opened, such as during loading,
In step 1, the CD substrate 5 is held by a nail mechanism or a vacuum chuck.
After holding, if pusher-21 goes down,
Is pressed further inside the container 71 against the spring 74
When the spring 74 extends, the spherical body 73
The pressing force is applied to the window 72, and the pressing force is applied to the holder 41.
Wrong. Then, for example, the elastic body 6b having increased adhesive strength is used.
However, the holder 41 has the spherical bodies 73, 7 of the repulsion mechanisms 7, 7.
3 so that it is easily separated from the elastic body 6b.
Become.

The location of the repulsion mechanisms 7, 7 is
It is desirable to be as close as possible to the sex bodies 6a, 6b, 6c.
The effect of repulsion diminishes as it is received.

In the continuous CD sputtering apparatus S provided with the repulsion mechanisms 7, 7 , after the holder 41 is transported by the internal transport device 4 to a position corresponding to the perforated portion 31 ,
By moving the 21 upward, the holder - - pusher by a shaft 23 41 and annular wall 12 to form one surface of the vacuum chamber 1 1, the pusher - 21 between the upper surface of the annular step portion 22 formed on The isolation between the atmosphere and the vacuum is completed by pinching.

[0027] At this time, the pusher as shown - the lower surface of the annular wall 12 to form a 21 annular step 22 the upper surface and one side of the vacuum chamber 1 1, i.e. close to the repulsive mechanism 7, 7 <br /> since the elastic body 6b made of O-ring to have positions are arranged as above Symbol both become close form, it is possible to maintain the degree of vacuum in the vacuum chamber 1 1 to a predetermined value.

Then, a claw mechanism or a vacuum is placed on the holder 41.
The CD substrate 5 as a workpiece is loaded by the chuck.
Window 13 formed by the annular wall 12 is partitioned
Covered by valve 3. Next, the shaft 23 of the pusher 21
Is moved downward, the repulsion mechanism 7,
Holder -41 the use substrate 5 resting returns to the inner transfer unit 4 is lowered pushed downward. Thereafter, the internal transfer device 4 rotates.
Sputtering is conveyed aluminum Te in the film deposition chamber 14
Is Ru is carried out.

With the operation of the repulsion mechanisms 7, 7 as described above , C
A downward force acts on the holder 41 on which the substrate for D 5 is placed, so that the instability of the drop can be suppressed.
Work of the two-stage pushing down the 41 to ensure that Ru Oh.

Such a continuous sputtering apparatus for a CD substrate is connected to a decompression device, and elastic members 6a, 6
By providing the repulsion mechanisms 7 and 7 according to the present invention in addition to providing the required degree of vacuum by installing b and 6c, members such as a hollow body and a lid-like body constituting the vacuum chamber 11 can be provided. It is possible to forcibly remove and separate the members that are in contact with and separated from each other, such as opening and closing, by pressing the adhesive.

The place where the elastic body 6b and the repulsion mechanism 7 are installed
The place is illustrated on the lower surface of the annular wall 12 in FIG.
These are provided on the holder 41 side
Elastic body 6b on one side and repulsion mechanism 7 on the other
However, the effect is the same as described above.

Further , the repulsion mechanism 7 is provided with the CD described in the embodiment.
It can be applied not only to a continuous sputtering apparatus for a substrate, but also to a so-called bell jar, for example, when a specific region having a certain pressure atmosphere by the atmosphere is constituted by a pair of hollow objects, and in any case, a pair of hollow objects. a location near the elastic body consisting of O-ring to be installed at the interface have good if Kere set repulsion mechanism. In this case, it is suitable for the mutual sliding mating surfaces of both of the boundary surfaces as above SL forms a pressure atmosphere of Jo Tokoro.

[0033]

The seal mechanism according to the present invention forcibly prevents the sticking of the rubber seal member such as an O-ring due to a change with time by installing a simple repulsion mechanism .
Workpiece, such as a substrate is Ru can improve the reliability of the conveying prevent accidents falling.

[Brief description of the drawings]

1 is a cross-sectional view of a main part of the continuous scan grasshopper ring device and the sealing mechanism is installed in accordance with the present invention.

FIG. 2 is a cross-sectional view of a repulsion mechanism constituting a main part of the seal mechanism according to the present invention.

FIG. 3 is a perspective view of a repulsion mechanism shown in FIG. 2;

FIG. 4 shows a cross section of a part of a continuous sputtering apparatus.
It is an explanatory diagram.

FIG. 5 is a sectional view showing a main part of FIG . 4 ;

[Description of Signs] 1: Vacuum chamber 1 1 : Vacuum chamber 12: Annular wall 21 : Pusher 22 : Stepped part 3 : Gate valve 4 : Internal transfer device 41 : Holder 5 : Workpiece (substrate for CD) 6a, 6b, 6c : elastic body (seal member) 7 : repulsion mechanism 73 : spherical body

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-63-47591 (JP, A) JP-A-61-188072 (JP, U) (58) Fields investigated (Int. Cl. ⁶ , DB name) C23C 14/00-14/58

Claims (3)

(57) [Claims] Between 1. A contact surface of a hollow-shaped body and the lid-like member, in which the formation of the vacuum chamber via a sealing member made of an elastic body, the pressing between the contact surfaces in proximity to the seal member sealing mechanism, characterized in that the repulsion mechanism separating the two members digits set. 2. The repulsion mechanism has one end embedded in a contact surface of one member formed of a hollow body or a lid, and the other end formed in a contact surface of another member formed of a hollow body or a lid. 2. The sealing mechanism according to claim 1, wherein the sealing member has a repulsive force greater than the adhesive force of the sealing member and is in contact with the sealing member. 3. The repulsion mechanism comprises a hollow container having a window on one end side and a spherical body and a spring housed in a hollow container, and the container comes into contact with one of a hollow member and a lid member. The spherical body buried in the surface and pressed by a spring and projecting from the window portion is in contact with the contact surface of the other member made of a hollow body or a lid-like body. Item 3. The sealing mechanism according to Item 2.