JP2908995B2 - Mechanical chuck type loading device and vacuum device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a vacuum apparatus provided with a loading device 及 beauty the loading device of the workpiece for use in film-forming apparatus such as sputtering apparatus.

[0002]

2. Description of the Related Art A compact disk (hereinafter referred to as a CD), which is widely used for recording a large amount of recently digitized audio signals and image information, is provided on a surface of a transparent synthetic resin substrate such as polycarbonate. Then, an aluminum thin film having high light reflectance is formed by, for example, a sputtering method or the like to complete the process. A small hole called a bit is formed on this substrate in accordance with digital information consisting of "1" and "0", and the presence or absence of this small hole is detected by the presence or absence of a reflected wave of a laser hole for irradiating the bit. Then, the record information is read.

[0003] The transparent CD substrate are holes in the central portion is formed, and an aluminum thin film is formed on a substrate to a position at a distance therefrom a fixed distance.

[0004] In the sputtering apparatus for forming a continuous sputtering for example, aluminum thin film on the surface of the CD substrate, it is necessary to load 及 beauty unloading CD substrate in the apparatus, during its operation, the CD substrate A method is employed in which the exposed surface is suctioned and transferred by a vacuum chuck.

For example, this continuous sputtering apparatus is shown in FIG.
Referring to cross-sectional view schematically showing the 及 beauty Figure 10 will be described.

In the drawing, reference numeral 8 denotes a sputtering apparatus. A driving shaft 82 which repeats reversal in the X1 direction and moves up and down in the Y1 direction, and a CD substrate D supported by the shaft 82 are placed in a vacuum chamber 81 for performing sputtering. An internal transport head 83 for mounting is provided. Reference numeral 84 denotes a film forming chamber, and reference numerals 85 and 86 denote openings.

Reference numeral 9 denotes a loading device provided with a vacuum chuck. The loading device 9 includes a drive shaft 91 that repeats reversal in the X2 direction and moves up and down in the Y2 direction, and head portions 92, 92 supported by the shaft 91. . The heads 92, 9
Reference numeral 2 denotes a rubber pad 93 which is connected to a pressure reducing device and a pressure line, and has a lower surface side for sucking a CD substrate D;
93 are provided.

Reference numeral 7 denotes a lower-side loading device also provided with a vacuum chuck, and a drive shaft 71 which is repeatedly inverted in the Z1 direction, and a head 72 supported by the shaft 71.
The head portion 72 is connected to a pressure reducing device and a pressure line, and is provided with rubber pads 73, 73 for sucking the CD substrate D.

Reference numeral 99 denotes an external transfer device such as a belt conveyor for transferring the CD substrate D before sputtering.

In such a configuration, the loading device 9 descends in the downward direction Y2, and the CD substrate D sequentially sent by the external transport device 99 is transferred to the rubber pad 93 of the head portion 92 connected to the decompression device. , 93 for suction. Then, the loading device 9 moves upward in the upward direction Y2, and moves 180 degrees around the drive shaft 91 in the X2 direction.
And then descend. This lowered head portion 92
Rubber pads 73, 73 of the head unit 72 of the loading device 7 are located below. The CD substrate D is released by releasing the decompression on the head unit 92 side and connecting the head unit 72 side to the decompression device. Rubber pad 73 of part 72,
It is sent transportable by suction support 73.

When the drive shaft 71 is rotated half a turn in the Z1 direction and lowered downward, the rotation also causes the head 72 to rotate half a turn, and the CD substrate D is supported below the head 72. Become. When the head portion 72 further descends and the lower surface of the head portion 72 covers the periphery of the opening 85 formed in the vacuum chamber 81, the inside of the vacuum chamber 81 is airtightly closed. After closing the opening 85, the passage 74 is closed.
The in the head portion 72 including 及 beauty rubber pads 73, 73 is released the vacuum is air from a pressurized line, the rubber pad 7
The substrate D for CD supported by 3, 73 is placed and loaded on the internal transport head 83.

After that, the driving shaft 8 of the sputtering device 8
2 is rotated in the X1 direction and raised in the Y1 direction, and the internal transport head 83 is moved so that the upper surface side of the CD substrate D faces the opening 86 side of the film forming chamber 84 side. And
The inside of the film forming chamber 84 and the inside of the vacuum chamber 81 are depressurized, and when a predetermined degree of vacuum is reached, sputtering is performed in the film forming chamber 84 to form an aluminum film on the substrate D side facing the film forming chamber 84 side. .

When the sputtering is completed, the shaft 82 is moved to Y
It is lowered in one direction and reversed in the X1 direction.
2 is raised in the Y1 direction. When the internal transport head 83 moves in conjunction with the operation of the shaft 82 and the CD substrate D faces the opening 85, the head 72 of the loading device 7 is depressurized, and the CD substrate D is
Is supported by suction.

Next, the head portion 72 is lifted to unload the CD substrate D from the internal transfer head 83 in the vacuum chamber 81, and the drive shaft 71 is rotated half a turn in the Z1 direction so that the CD pads D are placed on the rubber pads 73, 73. The CD substrate D is located at the right position. Then, to release the vacuum in the rubber pad 73, to support the substrate D for CD with by another conveyance device (not shown), transports the CD substrate D in the next step.

The heads 72 and 92 constituting the vacuum chucks of the loading devices 9 and 7 are shown in FIG.
In the configuration shown in FIG. 5, the CD substrate D is adsorbed and desorbed. The head portion 72 (92) has a passage 74 (94) formed therein. The passage 74 (94) is connected to the rubber pads 73, 73 (93, 93), and the valves 75 (95), 76. It is connected to a decompression device (shown as a vacuum pump in the figure) and a pressurization line via (96).

The above steps are continuously and repeatedly performed.

[0017]

When a workpiece such as a substrate for a CD is transported by loading or unloading using a loading device having such a vacuum chuck, the following disadvantages arise. Occurs.

When a workpiece such as a CD substrate is detached from a head constituting a vacuum chuck, a pressurized gas from a pressurizing line in a passage 74 or a rubber pad 73 performs an essential vacuum chamber for performing continuous sputtering. it is temporarily deteriorated degree of vacuum enters the deposition chamber, to together the frequency with which impurities are mixed is high, adversely affect the film formation. In order to prevent such a defect, a method of setting a waiting time until a certain degree of vacuum is reached after the workpiece is detached has been adopted. For this reason, there are disadvantages such as a decrease in productivity such as an increase in work time, contamination in a film forming chamber due to introduction of air, uncertain operation, and adhesion of a rubber pad to a substrate made of a synthetic resin. In addition to this, there is a problem that dirt from the rubber pad impairs the appearance of the sputtered film and the protective film.

The present invention has been made in view of such circumstances, and has particularly improved efficiency as compared with the case where a conventional vacuum chuck type loading device is used.

[0020]

Means for Solving the Problems According to the first aspect of the present invention.
Mechanical chuck type loading device, vertical movement and a loading mechanism having a head and a gate valve which is rotatably supported by the drive shaft for rotation; elastic body expands or contracts by and out of the fluid provided in the hollow portion of the head And a mechanical chuck provided in the gate valve so as to be air-tightly separated from the elastic body and having a plurality of locking claw members at a central portion operated by expansion or contraction of the elastic body. And

Further, the mechanical mechanism according to claim 2 of the present invention.
The chuck type loading device is characterized in that the locking claw member constituting the mechanical chuck is bent and rotates around a portion supported at an intermediate portion as a fulcrum.

A vacuum device according to a third aspect of the present invention is connected to a decompression device and has a vacuum chamber having an opening for entering and exiting a workpiece; and is provided to face the opening of the vacuum chamber. , a mechanical chuck type loading instrumentation <br/> location according to the claim 1 or claim 2 workpiece can feed support transportable to and from the opening to cover the opening of the vacuum chamber airtight; that provided with the It is characterized by.

Further, the vacuum apparatus according to claim 4 of the present invention, the low of the mechanical chuck type loading device
An elastic body that expands or contracts by the inflow and outflow of a fluid provided in the cavity of the loading mechanism , and a seal ring provided with a through-hole in which a part of the elastic body faces inside the gate valve.
An annular case provided on the seal ring with a pressing member interposed therebetween, a pressing member provided between the seal ring and the pressing member, and an upper end face facing the pressing member and abuttingly supported by the annular case. the lower end side together when it has a plurality of latching pawl member extending from the case, pressing the boss portion of the tip provided on the pressing member is in contact with the inner surface of the pawl member for the latch And a body.

Further, the vacuum apparatus according to claim 5 of the present invention is characterized in that the vacuum chamber is a sputtering apparatus, and the workpiece is a synthetic resin substrate having a hole in the center.

[0025]

As described above, the mechanical chuck according to the present invention
The biggest feature of the formula loading device 及 beauty vacuum apparatus is that made it possible to handle while preventing a decrease in vacuum degree in the vacuum region by placing a mechanical chuck having airtightness between the atmosphere and the vacuum region. In addition, by providing the loading mechanism, the workpiece gripped by the locking claw member can be transported to another manufacturing apparatus.

The work is, for example, a CD substrate made of a transparent synthetic resin having a hole formed in the center, and the diameter of the work tends to become smaller and smaller. However, if the hole is gripped, the work can be easily carried out.

In the mechanical chuck according to the present invention, a pressing member which can move correspondingly to a member which can be expanded and contracted by a pressurized fluid is provided, and a locking claw member interlocked with the pressing member is provided, so that a central portion is provided. Workpieces with holes can be gripped. In a film forming apparatus using this workpiece, there is no pressure fluctuation, and the processing time of the process can be reduced.

[0028]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention is an improvement of a loading device provided with a vacuum chuck shown in FIGS. 9 and 10, and is applied to a sputtering device for continuously forming an aluminum thin film on a CD substrate shown in FIG. An embodiment will be described with reference to FIGS.

FIG. 1 is a sectional view showing a main part of a mechanical chuck type loading device according to the present invention, FIG. 2 is an enlarged sectional view mainly showing a mechanical chuck part, and FIG. 3 is a part (annular case). FIG. 4 is a perspective view seen from below, FIG. 4 is a bottom view of components (annular case and locking claw member), and FIGS. 5A and 5B are explanatory views showing the operation of the locking claw member; FIG. 7 is a sectional view showing the operation of the mechanical chuck, and FIG. 8 is an explanatory view showing another configuration of the locking claw member and its opening / closing means.

[0030] 1 0 in Figure 1, moves vertically and rotates
Consists of a head 1A supported on a drive shaft 1B and a gate valve 2.
In the loading mechanism includes a gate valve 2 及 <br/> beauty mechanical chuck 5 to the head 1A below, these constitute a mechanical chuck type loading device 1 of the present invention are integrated. Also, this mechanical chuck type loading
In the locking device 1, the gate valve 2 covers the opening 85 opened above the vacuum chamber 81 via, for example, an O-ring 25 made of rubber to ensure airtightness. Further, inside the vacuum chamber 81, an internal transfer head 83 and a film forming chamber (not shown) are provided. In addition, a pusher (Pusher) 89 that supports a synthetic resin CD substrate D having a hole D1 at the center thereof and that can move up and down is arranged below the internal transport head 83.

The CD substrate D held by the mechanical chuck 5 with detail locking pawl member 4, ... the later, main
After being moved upward by the cannical chuck loading device 1, it is conveyed to another device (not shown) by the rotation of the drive shaft 1B.

Further, the CD substrate D is placed on the holder of the internal transfer head 83 provided in the vacuum chamber 81, and the CD substrate D is brought into contact with the pushing claw members 4,. , As described above.

Further details will be described with reference to FIG. 2 which is an enlargement of FIG.

The mechanical chuck 5 is a mechanical chuck.
An elastic body 3F, a seal ring 3A, a pressing member 3E, a pressing member 3B, a pressing member 3B, an annular case 3C, which is provided mainly in the center hole 21 of the gate valve 2 of the head 1A of the chuck-type loading device 1 and will be described later. locking pawl member 4 for gripping the pressing body 3D 及 beauty workpiece directly, and a ....

And, mechanical chuck type loading
In the mechanical chuck 5 of grayed device 1, the solenoid valve (not shown.) Pressurized fluid supplied closing control to is introduced through a passage 11 connected with the pressure line by. This is a mechanical chuck type loading device 1
An elastic body 3F made of a member such as rubber, which is directly connected to the tip of the passage 11, is housed in the hollow portion 12 inside the elastic body 3F. The elastic body 3F is expanded or contracted by the pressurized fluid passing through the passage 11. Has become.

In addition , a hole 3 is provided in the middle below the hollow portion 12.
1 is provided with a seal ring 3A,
A part of the elastic body faces inside 1. And elastic body 3F
When it expands, it largely jumps out into the hole 31 of the seal ring 3A. In addition, a pressing member 3B and an annular case 3C, which will be described later, are provided below the seal ring 3A.

A rubber O is provided between the seal ring 3A and the gate valve 2 and between the seal ring 3A and the cavity 12.
Rings 26 and 27 are interposed, and the space between them is airtight. Although the inside of the elastic body 3F and the passage 11 communicate with each other, they are airtightly isolated from the inside of the gate valve 2 and the inside of the vacuum chamber 81.

A pressure member 3E is disposed in the hole 31 of the seal ring 3A at a certain distance from the elastic body 3F that expands and contracts, and a protruding portion 34 is provided at the center thereof. Thus, when the elastic body 3F expands, the protruding portion 34 is pressed.

As shown in FIGS. 3 and 4, the annular case 3C has a two-stage diameter cylindrical shape having an edge 35 which comes into contact with the pressing member 3B, and the small-diameter side peripheral wall 38 is formed at equal intervals. Are formed at each of the notches 36,... And projecting pieces 37,.
, And the protruding pieces 37, are interposed here with three locking claw members 4, spaced at 120 degrees.

The locking claw members 4,...
As shown in (a) and (b), two horizontal portions 41 and 42
The two upright portions 43 and 44 which are continuous with each other have a bent stepped shape, and the upper upright portion 43 is formed by the notch 3 of the pressing member 3B.
0, the upper end surface contacts the lower surface of the pressing member 3E. Further, the vicinity of the inner angle between the upper horizontal portion 41 and the lower upright portion 44 is defined by the projecting piece 37 of the annular case 3C.
Is in contact with the top of Further, the locking claw member 4 is supported with a contact portion with the top of the protruding piece 37 as a fulcrum 47.

[0041] Further, FIGS. 5 (a) 及 Beauty (b) are explanatory view showing a cross section contact between the annular casing 3C and the engagement pawl member 4, FIG. (A) For locking FIG. 4B shows a state in which the claw member 4 is closed, and FIG. 4B shows a state in which the locking claw member 4 is open.

The operation of the locking claw member 4 is such that the operation of expanding or contracting the elastic body 3F is performed by the lower pressing member 3E.
Through the three locking claw members 4. That is,
When the protrusion 34 of the pressing member 3E is pressed when the elastic body 3F is expanded and the pressing member 3E is lowered, the upper end surface 45 of each of the locking claw members 4,.

FIG. 5A shows a state in which the pressing member 3E is not pressed on the upper end surface 45 of the locking claw member 4, and the locking claw member 4 is in contact with the top of the protruding piece 37. Fulcrum 47
The lower horizontal portion 42 rotates in the direction of arrow a and opens outward. That is, three locking claw members 4,...
Are expanded, and the outer corner protruding ends 46,... Of the lower horizontal portion 42 and the lower upright portion 44 of the three locking claw members 4,.
Is the largest.

FIG. 5B shows a state in which the pressing member 3E is pressed on the upper end surface 45 of the locking claw member 4. At this time, the locking claw member 4 has an upper part outside the upright portion 43. The horizontal portion 42 is tilted in the direction (to the right in the drawing), and the lower horizontal portion 42 is pivoted in the direction of the arrow b by the principle of leverage toward the inward direction by using the contact portion with the top of the protruding piece 37 as a fulcrum 47. That is, when the three locking claw members 4,... Are closed, the lower horizontal portion 42 and the lower upright portion 44 of the three locking claw members 4,.
Are the smallest.

A downwardly biasing spring 32 is mounted in a recess near the center of the lower surface of the pressing member 3B near the lower side of the pressing member 3E, and a pressing body 3D is provided at the tip side of the spring 32. And the cylindrical boss 33 at the tip of the pressing body 3D is in contact with the lower inner surfaces of the three locking claw members 4,.

Next, the locking claw members 4,...
Mechanical Cha equipped with a mechanical chuck 5 with
The loading type loading device 1 will be described with reference to FIGS.

FIG. 6 shows a state in which the locking claws 4,... Grip the hole D1 at the center of the CD substrate D. I)
No pressure is applied by the pressure line, and b) the elastic body 3F is not expanded. C) The pressing member 3E is not in a state of pressing the locking claw members 4,..., And the downward force acts outward in the direction of arrow a due to the principle of leverage by the fulcrum 47 of the annular case 3C. I have. D) The pressing body 3D constantly exerts a downward force, and e) a downwardly acting force of the cylindrical boss 33 at the tip abutting against the inner surfaces of the three locking claw members 4,. ing.

FIG. 6 is the same as the state shown in FIG. 5 (a). The lower part of the three locking claw members 4,... The virtual circle diameter connecting the outer corner protruding ends 46 of the locking claw members 4 is larger than the diameter of the hole D1 of the CD substrate D at the maximum. Therefore, the outer surface side of each of the locking claw members 4,... Contacts the wall surface of the hole D1 of the CD substrate D, and when loading or unloading the CD substrate D in this state, the locking claw members 4,. ... does not fall down and fall off.

FIG. 7 shows a state in which the locking claw members 4,... Are separated from the center hole D1 of the CD substrate D. I)
The pressurized fluid is sent from the pressurized line via the passage 11 and
The elastic body 3F expands, and a part of the elastic body 3F swells into the through hole 31 of the seal ring 3A. C) The swelling presses the pressing member 3E, and exerts a downward force on the locking claw members 4,... Via the pressing member 3E. D) When the locking claw members 4 are pressed from above, the upper sides of the locking claw members 4 are inclined outward, and the lower side is indicated by an arrow b due to the principle of leverage by the fulcrum 47 of the annular case 3C. Turn in the direction and turn inward. E) The force is always exerted downward to abut against the locking claw members 4,... F) The pressing body 3D loses the pressing force of the pressing member 3E and the spring 32 contracts to reduce the stress. Absorb.

7 is the same as the state shown in FIG. 5B, the lower part of the three locking claw members 4,... Is most contracted in the direction of arrow b, and the three locking claw members 4,. 4, the outer corner tip 4
The virtual circle diameter connecting 6, 6,... Is at a minimum and smaller than the diameter of the hole D1 of the CD substrate D. Therefore, the outer surface side of each locking claw member 4,... Can enter and exit the hole D1 without contacting the wall surface of the hole D1 of the CD substrate D. Therefore, when gripping and releasing the CD substrate D, the locking claw members 4
... can easily pass through the hole D1.

During the loading and unloading of the CD substrate D, the operations shown in the above figure are continuously and repeatedly performed for the transfer and the holding and opening by the chuck.

The locking claw member and its opening / closing means are shown in FIG.
The configuration shown in FIG. In the embodiment shown in FIG. 8, a pair of locking claw members 6, 6 are arranged in left-right contrast. The locking claw member 6 includes a straight portion 61, an inclined portion 62 and a short straight portion 63, and a fixing portion 64 that forms a fulcrum is provided between the straight portions 61. The locking claw members 6 and 6 have a configuration in which the straight portions 63 and 63 having short ends are close to each other.
A spring 65 wound in a coil shape for bringing the two close to each other is stretched between the lower sides of the two. Also, the pressure member 3E in which the elastic body 3F pressed, the pressing member 3G which is formed an inclined surface 39, 39 downwardly tip sides is provided.

The locking claw members 6, 6 usually have a narrow interval between the straight end portions 63, 63. When supporting the CD substrate D, the elastic members 3F are expanded to press the pressing members 3E. the is pressed downward the pressing member 3G tip of the inclined surfaces 39 and 39 to penetrate between both the inclined portions 62, 62 of the two locking pawl members 6, short both locking pawl members 6 The linear portions 63, 63 can be opened outward in the direction of arrow c to abut on the inner wall of the hole D1 of the CD substrate D to perform loading and transport with the chuck. Moreover, since releasing the chuck back to the pressure member 3E when caused to contract the elastic member 3F original, with even tip of the pressing member 3G exits the straight portion 63, 63 of the two locking pawl members 6 The original width is reduced by the force of the spring 65.

Then, the mechanical chuck type b of the present invention
In the case of using over loading device 1 and the vacuum chamber 81, mechanical
The part exposed to the outside air when the loading device 1 is detached is substantially pushed from below the gate valve 2 by a pusher 89.
Since a small volume between the upper surface of the air entering the vacuum chamber 81 during the replacement of the CD substrate D is small, the time required for the exhaust working compared to evacuate a portion including a communication passage when Bayumuchakku use The work efficiency was greatly reduced and the work efficiency was improved.

As described above, in the mechanical chuck type loading device provided with the mechanical chuck according to the present invention, reduction and expansion operations are alternately performed by a combination of an expanding or contracting member such as an elastic body or a spring. the mechanical locking pawl, since the attachment and detachment of the workpiece, less pressure variation than conventional vacuum chuck type loading device in the vacuum chamber of the film formation apparatus such as a sputtering apparatus, the time can be shortened evacuation step became.

[0056]

The mechanical chuck type rode described above
Ingu device is characterized to allow handling in the vacuum region by placing a mechanical chuck between the atmosphere and the vacuum region. As a result, pressure fluctuations in a film forming apparatus such as a sputtering apparatus are smaller than those in a conventional vacuum chuck type loading apparatus, so that the following advantages are obtained.

1. When applied to sputtering equipment,
1. Stabilization of sputtered film (film formation) (arcing etc.), downsizing of pump (one turbo pump is acceptable), etc. 2. Shortening of cycle time (elimination of air introduction process during sputtering), etc. Compared with the conventional method, there is an advantage that the operation of the machine is not interrupted, the operation rate is improved, and the operation speed is improved.

[Brief description of the drawings]

FIG. 1 is a sectional view showing an embodiment of the present invention.

FIG. 2 is an enlarged sectional view of a main part of FIG.

FIG. 3 is a perspective view of the annular case shown in FIG. 1;

FIG. 4 is a bottom view showing a state in which a locking claw member is attached to an annular case.

FIGS. 5A and 5B are explanatory views showing a cross-sectional state of contact between an annular case and a locking claw member.

FIG. 6 is a cross-sectional view for explaining the operation of the embodiment shown in FIG.

FIG. 7 is a sectional view for explaining another operation of the embodiment shown in FIG. 1;

FIG. 8 is an explanatory view showing another embodiment of a pressing member and a locking claw member.

FIG. 9 is an explanatory diagram showing a main part of the sputtering apparatus.

FIG. 10 is an explanatory view showing a cross section of a conventional vacuum chuck type loading device.

[Explanation of symbols]

1: Mechanical chuck type loading device 1A: Head 1B: Drive shaft 10: Loading mechanism 12: Cavity 2: Gate valve 3A: Seal ring 31: Through hole 3B: Holding member 3C: Annular case 3D: Pressing body 3E: Pressurization member 3F: elastic 3G: the pressing members 4 and 6: the locking pawl 47: contact portion (fulcrum) 5: mechanical chuck 8: sputtering device 81: vacuum chamber 85: the opening D: workpiece (for CD Substrate) D1: Hole

──────────────────────────────────────────────────続 き Continuation of the front page (51) Int.Cl. ⁶ Identification symbol FI H01L 21/68 H01L 21/68 A (56) References JP-A-5-33135 (JP, A) JP-A-62-222624 ( JP, A) (58) Fields investigated (Int. Cl. ⁶ , DB name) C23C 14/00-14/58 B25J 15/08 H01L 21/68

Claims (5)

(57) [Claims] A loading mechanism having a head and a gate valve supported by a vertically moving and rotating drive shaft; and an elastic body provided in a cavity of the head , which expands or contracts due to a fluid flowing in and out; mechanical characterized by comprising a; the elastic body provided in the hermetically isolated to the gate valve, a mechanical chuck having a plurality of locking pawl member to a central portion which operates by expansion or contraction of the elastic member Chuck type loading device. 2. The mechanical chuck type loading according to claim 1, wherein the locking claw member constituting the mechanical chuck is bent and rotates around a portion supported at an intermediate portion as a fulcrum. apparatus. A vacuum chamber connected to the decompression device and having an opening for entering and exiting the workpiece; and a vacuum chamber provided opposite to the opening of the vacuum chamber to hermetically cover the opening of the vacuum chamber and in the opening. mechanism described in claim 1 or claim 2 workpiece can feed support transportable to and from
A vacuum apparatus, comprising: a nial chuck type loading apparatus. 4. An elastic body provided in a cavity of a loading mechanism of the mechanical chuck-type loading device, which expands or contracts by entering and exiting a fluid, and a part of the elastic body inside the gate valve. A seal ring provided with a through-hole facing the same, an annular case provided on the seal ring via a pressing member, a pressing member provided between the seal ring and the pressing member, and an upper end surface provided on the pressing member. There faces, and a plurality of latching pawl member extending the lower side together when held in contact supported on said annular casing from the casing, a boss portion the engaging tip disposed on the pressing member 4. The vacuum device according to claim 3, further comprising a pressing body in contact with an inner surface of the claw member. 5. The vacuum apparatus according to claim 3, wherein the vacuum chamber is a sputtering apparatus, and the workpiece is a synthetic resin substrate having a hole in the center.