JP2779676B2 - Chromatography apparatus and method of forming component separation means - Google Patents
Chromatography apparatus and method of forming component separation meansInfo
- Publication number
- JP2779676B2 JP2779676B2 JP2012369A JP1236990A JP2779676B2 JP 2779676 B2 JP2779676 B2 JP 2779676B2 JP 2012369 A JP2012369 A JP 2012369A JP 1236990 A JP1236990 A JP 1236990A JP 2779676 B2 JP2779676 B2 JP 2779676B2
- Authority
- JP
- Japan
- Prior art keywords
- mesh
- column
- groove
- substrate
- introducing
- Prior art date
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- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/26—Conditioning of the fluid carrier; Flow patterns
- G01N30/38—Flow patterns
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N2030/022—Column chromatography characterised by the kind of separation mechanism
- G01N2030/025—Gas chromatography
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/26—Conditioning of the fluid carrier; Flow patterns
- G01N30/38—Flow patterns
- G01N2030/388—Elution in two different directions on one stationary phase
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/26—Conditioning of the fluid carrier; Flow patterns
- G01N30/38—Flow patterns
- G01N30/46—Flow patterns using more than one column
- G01N30/461—Flow patterns using more than one column with serial coupling of separation columns
- G01N30/463—Flow patterns using more than one column with serial coupling of separation columns for multidimensional chromatography
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/60—Construction of the column
- G01N30/6095—Micromachined or nanomachined, e.g. micro- or nanosize
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Treatment Of Liquids With Adsorbents In General (AREA)
Description
【発明の詳細な説明】 〈産業上の利用分野〉 本発明は、クロマトグラフィ装置に関し、連続分離測
定を可能とし、切替バルブを不要とすることにより長寿
命化を図ったクロマトグラフィ装置に関する。DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a chromatography apparatus, and more particularly, to a chromatography apparatus which enables continuous separation measurement and has a long life by eliminating the need for a switching valve.
〈従来の技術〉 従来用いられている例えばガスクロマトグラフィ装置
（以下、単にガスグロという）は、第９図に示すような
構成となっている。即ち、キャリアガスとサンプルガス
の流れを切替バルブ１で切替え、この切替バルブ１を介
してキャリアガスにより搬送されるサンプルガスをカラ
ム２を通すことにより成分毎に分離し、分離したガスの
成分を検出器３により測定している。<Conventional Technology> For example, a conventionally used gas chromatography apparatus (hereinafter simply referred to as gas glow) has a configuration as shown in FIG. That is, the flow of the carrier gas and the flow of the sample gas are switched by the switching valve 1, and the sample gas conveyed by the carrier gas is passed through the switching valve 1 to be separated into components by passing through the column 2, and the components of the separated gas are separated. It is measured by the detector 3.
〈発明が解決しようとしている課題〉 上記従来技術においては、測定は基本的にバッチ方式
であり、プロセス用ガスクロではシーケンスコントロー
ラにより定期的に切替バルブを切替えている。又、従来
のラボ用ガスクロでは、手動によるマイクロシリンジで
サンプル流体を注入している。しかしながら将来ガスク
ロシステムが小形化、マイクロ化された時、従来のよう
な切替バルブを用いるものにおいては、切替バルブの性
能（特にリーク）や寿命及び小形化の点で問題があり、
又、マイクロシリンジを用いるものにおいては、サンプ
リング量が例えばｎ、ｐというような微量になると
シリンジの構造にも限界があるという問題があった。<Problem to be Solved by the Invention> In the above-mentioned conventional technology, measurement is basically performed in a batch system, and a switching valve is periodically switched by a sequence controller in a process gas chromatograph. In a conventional laboratory gas chromatograph, a sample fluid is manually injected with a microsyringe. However, when the gas chromatography system is miniaturized and miniaturized in the future, there is a problem in the performance (especially leak), life, and miniaturization of the switching valve when using the conventional switching valve.
Further, in the case of using a micro syringe, there is a problem that the structure of the syringe is limited when the sampling amount is as small as n and p, for example.
本発明は上記従来技術の課題を踏まえて成されたもの
であり、カラムに連続分離機能を持たせることにより、
切替バルブの不要なクロマトグラフィ装置を提供するこ
とを目的とするものである。The present invention has been made in view of the above-mentioned problems of the prior art, and by providing a column with a continuous separation function,
It is an object of the present invention to provide a chromatography device that does not require a switching valve.
〈課題を解決するための手段〉 上記課題を解決するための本発明の第１構成は、網目
の溝が形成された第１の基板と、前記溝を気密に覆って
網目のカラムとなるように固着された第２の基板と、前
記網目のカラムの任意の特定方向のカラム中に形成され
た少なくとも二種類の成分分離手段と、前記網目のカラ
ムのそれぞれの一端にキャリア流体を導入するキャリア
流体導入手段と、前記キャリア流体導入側の一点から前
記カラムにサンプル流体を導入するサンプル流体導入手
段とを具備したことを特徴とするものであり、第２の構
成は、網目の溝が形成された第１の基板と、前記溝を気
密に覆って網目のカラムとなるように固着された第２の
基板と、前記網目のカラムの任意の特定方向のカラム中
に形成された少なくとも二種類の成分分離手段と、前記
網目のカラムのそれぞれの一端にキャリア流体を導入す
るキャリア流体導入手段と、前記キャリア流体導入側の
一点から前記カラムにサンプル流体を導入するサンプル
流体導入手段とを具備するクロマトグラフィ装置におい
て、前記成分分離手段は、網目の溝が形成された第１の
基板の任意の一方向について、網目の溝の側面に斜め蒸
着の方法により成分分離手段を塗布する工程と、次いで
網目の溝以外の面及び網目の溝の底面に付着した成分分
離手段を異方性にエッチングにより除去する工程により
形成したことを特徴とするものである。<Means for Solving the Problems> According to a first configuration of the present invention for solving the above problems, a first substrate in which mesh grooves are formed, and a mesh column that covers the grooves in an airtight manner. A second substrate fixed to the mesh column, at least two kinds of component separation means formed in a column in any specific direction of the mesh column, and a carrier for introducing a carrier fluid to one end of each of the mesh columns. A fluid introduction unit, and a sample fluid introduction unit that introduces a sample fluid into the column from one point on the carrier fluid introduction side. A first substrate, a second substrate fixed in such a manner as to form a mesh column by airtightly covering the grooves, and at least two types of at least two types formed in columns in any specific direction of the mesh column. Ingredient separation A chromatography apparatus comprising: a step; a carrier fluid introducing means for introducing a carrier fluid to one end of each of the mesh columns; and a sample fluid introducing means for introducing a sample fluid to the column from one point on the carrier fluid introducing side. A step of applying the component separating means to a side surface of the mesh groove by a method of oblique vapor deposition in any one direction of the first substrate in which the mesh groove is formed; And the component separating means attached to the bottom surface of the mesh groove and the surface of the mesh are formed anisotropically by etching.
〈作用〉 本発明によると、網目のカラムの一点に流入した複数
の成分を有するサンプル流体は、カラムの端部に流入す
るキャリア流体に搬送されて進むが、成分分離手段はカ
ラムの任意の特定方向に形成されているので、サンプル
流体はその成分に応じて遅延する。その結果、カラムの
それぞれの出口には特定の成分を有する流体のみが排出
される。そして、それらのカラムの出口にセンサを配置
しておけば、異なった種類の流体の成分を連続して測定
することができる。<Operation> According to the present invention, the sample fluid having a plurality of components flowing into one point of the mesh column is transported by the carrier fluid flowing into the end of the column and proceeds, but the component separating means is arbitrarily specified for the column. Being formed in the direction, the sample fluid is delayed depending on its components. As a result, only the fluid having a specific component is discharged at each outlet of the column. If sensors are arranged at the outlets of these columns, components of different types of fluid can be measured continuously.
〈実施例〉 以下、本発明を図面に基づいて説明する。<Example> Hereinafter, the present invention will be described with reference to the drawings.
第１図は本発明をガスクロマトグラフィ装置に応用し
た一実施例を示す構成斜視図である。第１図において、
10は例えばSiウエハからなる第１の基板、11はこの基板
10の表面にフォトリソグラフィとエッチングの技術によ
り格子状に形成された微細な溝（例えば縦方向に500
本、横方向に500本）であり、溝11が形成された部分は
全体として正方形に網目状となっている。これらの溝11
の内の任意の特定方向（図に示す矢印Ｘ方向）の溝に
は、少なくとも二種類の成分分離部材が形成されてい
る。12は正方形の形成された網目状の溝11の隣り合う２
辺の近傍に形成されたキャリアガス分配溝であり、各溝
11の一端はこのキャリアガス分配溝12に連通している。
13はキャリアガス分配溝12の対辺に形成された混合ガス
捕捉溝であり各溝11の他端が連通している。14は各溝11
中に形成されたガスセンサであり、溝11の端部が混合ガ
ス捕捉溝13に達する直前に配置されている。15はピーク
検出、波形処理、演算等を行う電子回路部で、ガスセン
サ14とはリード線16で接続されている。17は電子回路部
15からの信号を取り出す出力端子である。18は第１の基
板と同様のSiウエハからなる第２の基板であり、この第
２の基板18は公知の陽極接合法等により接合され、第１
の基板10に形成された溝11を気密に覆って格子状のカラ
ムを形成する。19は第１の基板のキャリアガス分配溝12
に連通するキャリアガス導入孔、20は格子状のカラムの
角部に連通するサンプルガス導入孔である。FIG. 1 is a configuration perspective view showing an embodiment in which the present invention is applied to a gas chromatography device. In FIG.
10 is a first substrate made of, for example, a Si wafer, 11 is this substrate
Fine grooves (for example, 500 in the vertical direction) formed in a grid by photolithography and etching on the surface of 10
And 500 grooves in the horizontal direction), and the portion where the groove 11 is formed has a square mesh shape as a whole. These grooves 11
At least two types of component separation members are formed in grooves in any specific direction (the direction of arrow X shown in the figure). 12 is an adjacent 2 of a square formed mesh groove 11
The carrier gas distribution grooves formed near the sides
One end of 11 communicates with the carrier gas distribution groove 12.
Reference numeral 13 denotes a mixed gas trapping groove formed on the opposite side of the carrier gas distribution groove 12, and the other end of each groove 11 communicates. 14 is each groove 11
The gas sensor is formed therein, and is disposed immediately before the end of the groove 11 reaches the mixed gas capturing groove 13. Reference numeral 15 denotes an electronic circuit unit that performs peak detection, waveform processing, calculation, and the like, and is connected to the gas sensor 14 by a lead wire 16. 17 is the electronic circuit section
Output terminal for extracting the signal from 15. Reference numeral 18 denotes a second substrate made of the same Si wafer as the first substrate, and the second substrate 18 is bonded by a known anodic bonding method or the like,
The grooves 11 formed in the substrate 10 are air-tightly covered to form a grid-like column. Reference numeral 19 denotes a carrier gas distribution groove 12 of the first substrate.
Reference numeral 20 denotes a sample gas introduction hole communicating with a corner of the lattice-shaped column.
第２図は第１図装置の網目部分を拡大して示す図
（ａ）及び溝のＡ部を拡大して示す図（ｂ）である。第
２図において、矢印Ｘ方向の溝には（ｂ）図のＢ−Ｂ断
面に示すような成分分離部材21が形成され、矢印Ｙ方向
の溝はＣ−Ｃ断面に示すように未処理状態とされる。な
お、成分分離部材21は充填剤を詰めたり、塗布したり、
溝の表面を処理したりすることにより形成される。FIG. 2 is a diagram (a) showing the mesh portion of the apparatus of FIG. 1 in an enlarged manner and a diagram (b) showing an enlarged portion A of the groove. In FIG. 2, the component separating member 21 is formed in the groove in the direction of the arrow X as shown in the section BB in FIG. 2B, and the groove in the direction of the arrow Y is in the unprocessed state as shown in the section CC. It is said. The component separating member 21 is filled with a filler, or applied,
It is formed by treating the surface of the groove.
上記構成において、キャリアガスはキャリアガス分配
溝12を介して矢印C1,C2方向からそれぞれのカラムに導
入され、矢印D1,D2で示す方向に流出する。In the above configuration, the carrier gas is introduced into the respective columns from the directions of arrows C 1 and C 2 via the carrier gas distribution groove 12 and flows out in the directions indicated by arrows D 1 and D 2 .
第３図はこのようにキャリアガスが流れている網目状
カラムの一点（Ｏ）に成分A,Bを有するサンプルガスを
導入した場合のガスの動きを示すものである（ここでは
成分Ｂの方が成分Ａに比較して成分分離部材中で遅延す
るものとする）。即ち、網目状のカラムに流入したサン
プルガスはOY方向（未処理方向）には同一速度で進行す
るが、少なくとも二種類の成分分離部材が形成されたOX
方向には従来の分離カラムと同様に成分に応じて流出す
る速度の違いが生じ、その結果、異なった出口（点P,
Q）から流出する。したがって、それらの出口の先端付
近にセンサを設けて置けば、成分A,Bを連続的に検知す
ることができ、波形処理を行うことで各成分の濃度を知
ることができる。FIG. 3 shows the movement of the gas when the sample gas having the components A and B is introduced at one point (O) of the mesh column through which the carrier gas flows (here, the component B Is delayed in the component separating member compared to component A). That is, the sample gas flowing into the mesh column travels at the same speed in the OY direction (unprocessed direction), but the OX in which at least two types of component separation members are formed.
In the direction, as in the conventional separation column, there is a difference in outflow velocity depending on the components, and as a result, different outlets (points P,
Q). Therefore, if sensors are provided near the ends of the outlets, the components A and B can be detected continuously, and the concentration of each component can be known by performing waveform processing.
第４図は例えば溝の数を500×500とし、Ｏ点から流入
したガスの成分の進行方向と垂直な方向への拡がり具合
の計算結果を示すものである。各流線ピーク値の５％,5
0％,95％の位置を流出方向に結んだものを示している。FIG. 4 shows a calculation result of the degree of expansion of the gas component flowing from the point O in the direction perpendicular to the traveling direction, for example, when the number of grooves is 500 × 500. 5% of each streamline peak value, 5
0% and 95% are connected in the outflow direction.
第５図は溝の数に対するサンプルガスの拡がりを最高
値を１と規格化して示すものである。FIG. 5 shows the spread of the sample gas with respect to the number of grooves, with the maximum value being normalized to 1.
上記構成によれば、サンプルガスに含まれる成分が異
なった出口から流出するので、切替バルブが不要となる
と共に連続的な測定が可能となる。又、切替バルブを用
いることによる故障も皆無となる。According to the above configuration, the components contained in the sample gas flow out from different outlets, so that a switching valve is not required and continuous measurement is possible. Also, there is no failure due to the use of the switching valve.
第６図及び第７図は本発明の第２の実施例を示す成分
分離手段を網目の溝の両側の側面の任意の特定方向だけ
に形成させる工程を示す工程図及び作業フローである。
第６図（ａ）において、第１の基板10に形成された網目
の溝11の縦又は横の一方向について、一つ向こう側の溝
の側面の底辺（例えば側面11aから見て側面11bの底辺）
が見えるような角度で斜め上方から成分分離部材を蒸着
する（第７図（ａ））。成分分離部材は溝11の両側面に
は厚く、溝11以外の面と溝11の底面には薄く蒸着され
る。次に、溝11以外の面と溝11の底面に付着した成分分
離部材を除去するが、溝11以外の面と溝11の底面に付着
した成分分離部材は、溝11の両面に付着した成分分離部
材に対して付着方向が異なる。したがって、方向性のあ
る異方性エッチングを行う（第７図（ｂ））ことによ
り、第６図（ｂ）に示すように縦又は横の溝の両側面に
のみ成分分離部材21が形成される。（図では横方向の溝
の両側面に成分分離部材21が形成されている。） なお、上記実施例においては網目の形状を格子状とし
たが、例えば第８図に示すように網目を六角状にして、
イ，ロで示す方向やハ，ニで示す方向のみに成分分離部
材を形成することにより、格子状のものと同様の効果を
得ることも可能であり、カラムの形状は任意に変形可能
である。又、カラムの全体形状は正方形に限ること無く
成分分離状態に応じて任意に変更可能である。FIG. 6 and FIG. 7 are a process chart and a work flow showing a process of forming the component separating means according to the second embodiment of the present invention only in any specific direction on both sides of the mesh groove.
In FIG. 6 (a), in one of the vertical and horizontal directions of the mesh groove 11 formed in the first substrate 10, the bottom of the side surface of the groove (for example, the side surface 11b viewed from the side surface 11a). Bottom)
The component separation member is vapor-deposited from obliquely above at such an angle that the can be seen (FIG. 7 (a)). The component separating member is deposited thick on both side surfaces of the groove 11 and thinly deposited on the surface other than the groove 11 and on the bottom surface of the groove 11. Next, the component separating member attached to the surface other than the groove 11 and the bottom surface of the groove 11 is removed. The attachment direction is different from the separation member. Therefore, by performing directional anisotropic etching (FIG. 7 (b)), the component separating members 21 are formed only on both side surfaces of the vertical or horizontal groove as shown in FIG. 6 (b). You. (In the figure, the component separating members 21 are formed on both side surfaces of the groove in the horizontal direction.) In the above embodiment, the mesh is formed in a lattice shape. For example, as shown in FIG. Like
By forming the component separation members only in the directions indicated by (a) and (b) or in the directions indicated by (c) and (d), it is possible to obtain the same effect as that of the lattice-shaped member, and the column shape can be arbitrarily deformed . Further, the overall shape of the column is not limited to a square, but can be arbitrarily changed according to the component separation state.
又、上記格子状の実施例においては、一方向の溝に成
分分離部材を形成し、他方向は無処理としたが、無処理
とせず、種類の異なる成分分離部材を形成することも可
能である。このように種類の異なる成分分離部材を用い
れば、多種の成分分離が可能となるばかりでなく、この
カラムの分離能をより向上させることも可能となる。こ
のことは、例えば第８図に示す六角状のものにおいて
は、イ，ロの方向とハ，ニの方向に別の種類の成分分離
部材を形成すれば良い。Further, in the lattice-shaped embodiment, the component separating member is formed in the groove in one direction, and the other direction is not processed. However, without performing the non-processing, it is also possible to form a different type of component separating member. is there. The use of such different types of component separation members not only enables separation of various types of components, but also allows the separation ability of this column to be further improved. This means that, for example, in the case of the hexagonal shape shown in FIG. 8, another type of component separating member may be formed in the directions of a and b and c and d.
又、本実施例においては、ガスクロに応用した場合に
ついて説明したが、液状クロマトグラフィ装置に応用す
ることも可能である。Further, in this embodiment, the case where the present invention is applied to gas chromatography is described, but it is also possible to apply to a liquid chromatography apparatus.
更に、本実施例においては、微細構造に応用した例に
ついて示したが、基板として他の部材（例えば金属やプ
ラスチック）を用いて、カラムを機械加工等により形成
し、網目の全体面積を数十cm〜数ｍ平方の大きさとし
て、複数の成分を含む液体の成分を分離するための分離
装置として利用することも可能である。Further, in this embodiment, an example in which the present invention is applied to a fine structure is described. However, a column is formed by machining or the like using another member (for example, metal or plastic) as a substrate, and the entire area of the mesh is reduced by several tens. The size of cm to several m square can be used as a separation device for separating components of a liquid containing a plurality of components.
〈発明の効果〉 以上、実施例と共に具体例に説明したように、本発明
によれば、切替バルブが不要となると共に連続的な測定
が可能となる。又、切替バルブを用いないので故障の少
ないクロマトグラフィ装置を実現することができる。<Effects of the Invention> As described above, as described in the specific examples together with the embodiments, according to the present invention, a switching valve is not required, and continuous measurement can be performed. Further, since a switching valve is not used, a chromatography apparatus with less failure can be realized.
第１図は本発明のクロマトグラフィ装置の一実施例を示
す構成斜視図、第２図（ａ）及び（ｂ）は第１図装置の
網目部分を拡大して示す図及び溝部を拡大して示す図、
第３図は第１図装置の成分分離の原理を示す図、第４図
はカラム中での成分のピークの分布状態を示す図、第５
図は溝の数に対するサンプルガスの拡がりを規格化して
示す図、第６図及び第７図は本発明の第２の実施例を示
す成分分離手段を網目の溝の両側の側面の任意の特定方
向だけに形成させる工程を示す工程図及び作業フロー、
第８図はカラムの他の実施例を示す図、第９図は従来の
ガスクロマトグラフィ装置の原理図である。 10……第１の基板、11……溝、12……キャリアガス分配
溝、13……混合ガス捕捉溝、14……センサ、15……電子
回路部、16……リード線、17……出力端子、18……第２
の基板、19……キャリアガス導入孔、20……サンプルガ
ス導入孔、21……成分分離部材。FIG. 1 is a perspective view showing the configuration of an embodiment of the chromatography apparatus according to the present invention, and FIGS. 2 (a) and (b) are views showing the mesh portion of the apparatus shown in FIG. Figure,
FIG. 3 is a diagram showing the principle of component separation of the apparatus shown in FIG. 1, FIG. 4 is a diagram showing a distribution state of component peaks in a column, and FIG.
FIGS. 6A and 6B show the second embodiment of the present invention. FIG. 6 shows the second embodiment of the present invention. Process diagram and work flow showing the process of forming only in the direction,
FIG. 8 is a diagram showing another embodiment of the column, and FIG. 9 is a principle diagram of a conventional gas chromatography device. 10 ... first substrate, 11 ... groove, 12 ... carrier gas distribution groove, 13 ... mixed gas trapping groove, 14 ... sensor, 15 ... electronic circuit part, 16 ... lead wire, 17 ... Output terminal, 18 ... second
Substrate, 19: Carrier gas introduction hole, 20: Sample gas introduction hole, 21: Component separation member.
Claims (3)
溝を気密に覆って網目のカラムとなるように固着された
第２の基板と、前記網目のカラムの任意の特定方向のカ
ラム中に形成された少なくとも二種類の成分分離手段
と、前記網目のカラムのそれぞれの一端にキャリア流体
を導入するキャリア流体導入手段と、前記キャリア流体
導入側の一点から前記カラムにサンプル流体を導入する
サンプル流体導入手段とを具備したことを特徴とするク
ロマトグラフィ装置。1. A first substrate having a mesh groove formed therein, a second substrate hermetically covering the groove so as to form a mesh column, and an arbitrary specific direction of the mesh column. At least two types of component separation means formed in the column, a carrier fluid introduction means for introducing a carrier fluid to one end of each of the mesh columns, and a sample fluid to the column from one point on the carrier fluid introduction side. And a sample fluid introducing means for introducing the sample fluid.
ム中に形成された少なくとも二種類の成分分離手段は、
前記網目の溝の両側の側面に形成したことを特徴とする
請求項１記載のクロマトグラフィ装置。2. The means for separating at least two types of components formed in a column in any specific direction of the mesh column,
2. The chromatography apparatus according to claim 1, wherein said chromatography apparatus is formed on both side surfaces of said mesh groove.
溝を気密に覆って網目のカラムとなるように固着された
第２の基板と、前記網目のカラムの任意の特定方向のカ
ラム中に形成された少なくとも二種類の成分分離手段
と、前記網目のカラムのそれぞれの一端にキャリア流体
を導入するキャリア流体導入手段と、前記キャリア流体
導入側の一点から前記カラムにサンプル流体を導入する
サンプル流体導入手段とを具備するクロマトグラフィ装
置において、前記成分分離手段は、下記工程により形成
したことを特徴とする成分分離手段の形成方法。 網目の溝が形成された第１の基板の任意の一方向につ
いて、網目の溝の両側の側面に斜め蒸着の方法により成
分分離手段を塗布する工程。 網目の溝以外の面及び網目の溝の底面に付着した成分
分離手段を異方性エッチングにより除去する工程。3. A first substrate in which a mesh groove is formed, a second substrate airtightly covering the groove so as to form a mesh column, and an arbitrary specific direction of the mesh column. At least two types of component separation means formed in the column, a carrier fluid introduction means for introducing a carrier fluid to one end of each of the mesh columns, and a sample fluid to the column from one point on the carrier fluid introduction side. In a chromatography apparatus having a sample fluid introducing means for introducing, the component separating means is formed by the following steps. A step of applying a component separating means to each side surface of the mesh groove in an arbitrary direction of the first substrate in which the mesh groove is formed by oblique deposition. A step of removing, by anisotropic etching, the component separating means attached to the surface other than the mesh groove and the bottom surface of the mesh groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012369A JP2779676B2 (en) | 1989-06-14 | 1990-01-22 | Chromatography apparatus and method of forming component separation means |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15119189 | 1989-06-14 | ||
| JP1-151191 | 1989-06-14 | ||
| JP2012369A JP2779676B2 (en) | 1989-06-14 | 1990-01-22 | Chromatography apparatus and method of forming component separation means |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0394158A JPH0394158A (en) | 1991-04-18 |
| JP2779676B2 true JP2779676B2 (en) | 1998-07-23 |
Family
ID=26347975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012369A Expired - Fee Related JP2779676B2 (en) | 1989-06-14 | 1990-01-22 | Chromatography apparatus and method of forming component separation means |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2779676B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6399023B1 (en) | 1996-04-16 | 2002-06-04 | Caliper Technologies Corp. | Analytical system and method |
| US6811668B1 (en) | 1999-06-22 | 2004-11-02 | Caliper Life Sciences, Inc. | Apparatus for the operation of a microfluidic device |
| JP5050592B2 (en) * | 2007-03-20 | 2012-10-17 | 株式会社島津製作所 | Pyrolysis gas chromatograph |
| JP4761073B2 (en) * | 2007-03-20 | 2011-08-31 | 株式会社ダイフク | Heat treatment equipment on the painting line |
-
1990
- 1990-01-22 JP JP2012369A patent/JP2779676B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0394158A (en) | 1991-04-18 |
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