JP2775437B2 - 3D composite clean valve - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a valve attached to a closed container filled with a liquid CVD material and a valve which is easy to clean in piping.

(Prior Art) Conventionally, a gaseous raw material has been mainly used in a CVD process for manufacturing an LSI, but a liquid raw material has been increasingly used as the integration degree increases.

Many of the liquid raw materials used here are hydrolyzed by moisture in the atmosphere, and decomposition products of fine particles are generated.

On the other hand, in the liquid CVD raw material used for LSI production, the mixing of fine particles is expressed by particle density, and efforts are being made to reduce this density as much as possible.

In addition, the decomposition vapor of the liquid raw material is harmful, and cleaning of such liquid is extremely important.

In practice, this liquid raw material is filled in an airtight container such as stainless steel, and usually includes a piping system provided with a valve as shown in FIG.

 The usage will be described with reference to FIG.

After the closed container 8 is filled with the liquid raw material 9, the valves 1 and 3 are closed to clean the piping system.
4 and 5 are opened, one port of A and B is evacuated, and an inert gas is flowed from the other port to remove the liquid or vaporized gas remaining in the joint portion or the piping and to clean.

After the cleaning operation, remove joints 6 and 7 and LS
I sent to the manufacturer.

When using this liquid raw material, connect joints 6 and 7, close valve 2, open valves 1, 3, 4, and 5,
When an inert gas is poured from B into an airtight container, pressure is applied to the surface of the liquid raw material by the gas, and the liquid raw material
Used out of the.

After use, close valve 1 and valve 3 and valve 2,
4 and 5 are opened and the same cleaning operation as above is performed to remove and clean the liquid or vaporized gas remaining in the joint portion or the piping. Then, the joints 6 and 7 are removed and sent to the raw material supplier. Is done.

However, since this method uses three valves independent of 1, 2, and 3 for piping, there is a disadvantage that the piping is long and requires a large space.

Further, for example, there is a disadvantage that a liquid pool portion is formed between the pipe above the valve 1 or the valve 3 and the pipe of the valve 2, and it is difficult to remove the liquid in this portion.

When the joints 6 and 7 are detached, the remaining liquid comes into contact with air to form hydrolyzed fine particles, which causes a marked increase in particle density.

Also, when the residual liquid decomposition vapor is toxic (for example,
Vapor containing As), which has the disadvantage of being extremely dangerous.

(Problems to be Solved) The present invention aims to provide a valve in which the above-mentioned drawbacks are eliminated by making the liquid pool portion extremely small, and in which the cleaning of the residual liquid or gas is made extremely easy.

(Means for Solving the Problem) In the present invention, three valves are integrated into one block, the length of the piping is extremely reduced, and the liquid reservoir is made extremely small. It is assumed that.

FIG. 2 is a block diagram of the valve according to the present invention. The present invention will be described in detail with reference to FIG.

As an example, three valves used bellows valves.

In the figure, valves 1, 2, 3 and A ', B',
C and D correspond to the reference numerals in FIG.

The valve 1 is formed very close to the pipe A 'and the valve 3 is formed very close to the pipe B'.

In the cleaning operation, valves 1 and 3 are closed and valve 2 is opened A ',
This is performed by drawing a vacuum at one port of B 'and flowing an inert gas through the other port.

Compared to FIG. 1, the space between the valve 1 or the valve 3 and the cleaning pipe is extremely small, so that liquid pool is less likely to occur at that portion. Further, even if a liquid pool is generated, the amount thereof is small, so that the residual liquid can be easily blown off by evacuation and blowing of an inert gas.

FIG. 3 shows a valve and piping diagram of the present invention formed in one block. The block is preferably made of stainless steel when the liquid material is corrosive.

(Effect of the Invention) According to the present invention, since the liquid reservoir is extremely small in the valve and the pipe attached to the closed container filled with the liquid raw material, cleaning is easy, and particles due to hydrolysis of the residual liquid are generated. The characteristic is that the particle density is extremely reduced.

In addition, three valves are integrated into one block,
Since the length of the pipe is extremely shortened, it has a feature that it is compact and does not require a large space.

Further, when the decomposition vapor of the remaining liquid is toxic, the residual liquid is completely removed, which is very safe.

[Brief description of the drawings]

FIG. 1 is a block diagram of a valve and a piping system attached to a conventional closed container for a liquid material. In the figure, 1, 2, 3, 4, 5 are independent valves, 6, 7 are joints, 8 is a closed container, 9 is a liquid material, A, B, C,
D is a gas or liquid inlet / outlet of the pipe. FIG. 2 is a configuration diagram of a clean valve and piping according to the present invention. In the figure, 1, 2 and 3 are valves, A ',
B ', C and D are ports for gas or liquid in the piping. FIG. 3 is a sectional view of three valves formed in one block and the piping thereof. In the figure, 1, 2 and 3 are valves, and A ', B', C and D are ports for gas or liquid in the piping. In addition, the entrances C and D are perpendicular to the plane of the paper, and pass down from below the valves 1 and 3 to the lower side of the paper.

Claims (1)

(57) [Claims] 1. One fluid pipe penetrating through one end of the block with the end face as an inlet / outlet, three sequentially installed valves capable of opening and closing the pipe from outside the block, and a pipe between the valves. A three-dimensional composite clean valve comprising two pipes communicating with each other and projecting to an end face of the block, wherein a total pipe length is reduced as much as possible.