JP2774901B2 - Connection between glass tube and synthetic resin tube - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a connection portion between a glass tube and a synthetic resin tube, and more particularly to a connection portion for liquid distribution used in a semiconductor wafer cleaning apparatus or the like.

[0002]

2. Description of the Related Art For example, semiconductor wafers are required to have not only physical properties but also surface quality, that is, surface cleanliness, in order not to lower the yield in the device process and not to lower the device performance. For this purpose, the semiconductor wafer is cleaned through several chemical tanks or pure water tanks before shipment.

[0003] These washing tanks are often made of glass, and many synthetic resin tubes are used to supply a chemical solution or pure water to the washing tank or discharge the same from the washing tank. Accordingly, there are many connection points between the glass tube and the synthetic resin tube provided in the cleaning tank.
Conventionally, these connections have been made by the method shown in FIG. 2, that is, by connecting the glass tube with an O-ring (6) and connecting it with a union joint.

[0004]

However, when the cleaning device is operated, as time passes, the glass tube and the joint are changed due to various factors such as the temperature of the cleaning solution, the pressure in the piping, vibration, and the type of chemical solution. Often slipped and the joints came off.

[0005]

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-mentioned problems, and heats the tip of a glass tube communicating with a cleaning tank, that is, a connecting portion, to increase the volume thereof. A heated synthetic resin tube is fitted around the periphery, and then cooled. On the other hand, the end of the synthetic resin tube, that is, the connecting portion, is enormous because a ring is inserted by a known technique, so that these two connecting portions are connected by a union joint. At the connection between the glass tube for use and the synthetic resin tube, the synthetic resin tube was fitted to the outer periphery of the connection portion of the glass tube, which was almost spherical, to form an assembly, and the synthetic resin tube was fitted to one end. At the connection between the glass tube and the synthetic resin tube, wherein the assembly is mounted and fixed to the other end of the union joint. This prevents the nut of the union joint from being loosened due to factors such as internal pressure, vibration, cleaning liquid temperature, and chemical liquid, and can eliminate liquid leakage accidents due to poor connection.

[0006]

[Function] If the glass tube and the synthetic resin tube are connected in the above-described configuration, the connecting portion of the glass tube becomes enormous, and the synthetic resin tube is fitted around the outer periphery thereof, so that the frictional resistance with the nut of the union joint is reduced. Since the outer diameter of the synthetic resin tube covered on the glass tube is larger than the inner diameter of the nut of the union joint, the nut of the union joint does not move and the joint does not come off.

An embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a diagram showing a state in which a glass tube and a synthetic resin tube of the present invention are connected, and FIG. 2 is a diagram showing a state in which they are connected by a conventional method.

In FIG. 1, a tip (1a) of a glass tube (1) communicating with a cleaning tank is heated and enlarged by a jig into a spherical shape, and the outer periphery of the glass tube (1) has substantially the same inner and outer diameters as the glass tube (1). The synthetic resin tube (2) is fitted and cooled before being heated and cooled. Then, the synthetic resin tube (2) closely adheres to the glass tube (1).

On the other hand, the tip (3a) of the synthetic resin pipe (3)
Is enormous because the ring (4) is inserted by a known technique, that is, by a jig. The end portion (1a) of the glass tube (1) and the end portion (3a) of the synthetic resin tube (3) are connected by a union joint (5) made of synthetic resin.

[0010]

By using the connecting portion of the present invention, the problems of the prior art can be solved. That is, the nut of the union joint does not loosen due to factors such as the pressure and vibration in the pipe due to the operation of the cleaning device, the temperature of the cleaning liquid, the chemical liquid, and the like, and the joint does not come off.

Therefore, there is no risk of liquid leakage due to poor connection.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a connection portion between a glass tube and a synthetic resin tube of the present invention.

FIG. 2 is a vertical cross-sectional view of a conventional connection portion.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 glass tube 1a glass tube tip 2 synthetic resin tube 3 synthetic resin tube 3a synthetic resin tube tip 4 ring 5 union joint 5a union joint nut 6 O-ring

Claims (1)

(57) [Claims] At a connecting portion between a glass tube for liquid flow and a synthetic resin tube, a synthetic resin tube is fitted around the outer periphery of the connecting portion of the glass tube, which is substantially spherical, to form an assembly. A connection portion between a glass tube and a synthetic resin tube, wherein the assembly is mounted and fixed to the other end of a union joint fitted with the synthetic resin tube.