JP2766678B2 - Rotating anti-cathode - Google Patents
Rotating anti-cathodeInfo
- Publication number
- JP2766678B2 JP2766678B2 JP1195355A JP19535589A JP2766678B2 JP 2766678 B2 JP2766678 B2 JP 2766678B2 JP 1195355 A JP1195355 A JP 1195355A JP 19535589 A JP19535589 A JP 19535589A JP 2766678 B2 JP2766678 B2 JP 2766678B2
- Authority
- JP
- Japan
- Prior art keywords
- rotating
- cooling water
- cathode
- water passage
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は電子線照射によりＸ線を発生させる水冷形回
転対陰極に関するものである。Description: TECHNICAL FIELD The present invention relates to a water-cooled rotary anti-cathode that generates X-rays by irradiating an electron beam.
従来、第２図に示すように、Ｘ線発生装置１の真空チ
ャンバ内に配置された銅、クロム、タングステン、モリ
ブデン等からなる回転対陰極２をモータ５、ベルト６、
プーリ４を介して高速で回転させ、陰極３から回転対陰
極の周側面に対して電子線を照射し、Ｘ線を発生させて
取り出すようにしたものが工業用に使用されている。回
転対陰極の真空封じとしては、従来、磁気シールが使用
されているが、回転による発熱が大きく寿命保持のため
に水冷が不可欠であるためホース8a、8bを通して冷却し
ている。一方、回転対陰極は電子線照射による発熱が大
きく、磁気シールに比して多量の冷却水により冷却する
必要があり、構造上磁気シール用冷却水の水路の断面積
が制限されていること、また磁気シールの場合は対陰極
用冷却水より少ない流量で済むことから磁気シール用と
対陰極用の供給水路を分け、対陰極はホース7a、7bを設
けて別個に冷却していた。Conventionally, as shown in FIG. 2, a rotating anti-cathode 2 made of copper, chromium, tungsten, molybdenum, or the like disposed in a vacuum chamber of an X-ray generator 1 is connected to a motor 5, a belt 6,
Rotating at a high speed via a pulley 4, irradiating the peripheral surface of the rotating counter-cathode with an electron beam from the cathode 3, and generating and extracting X-rays are used for industrial use. Conventionally, a magnetic seal has been used to vacuum seal the rotating anode, but since the heat generated by rotation is large and water cooling is indispensable for maintaining the life, cooling is performed through the hoses 8a and 8b. On the other hand, the rotating anode has a large amount of heat generated by electron beam irradiation, and needs to be cooled by a larger amount of cooling water than the magnetic seal.Therefore, the cross-sectional area of the magnetic seal cooling water channel is structurally limited, Further, in the case of the magnetic seal, the flow rate is smaller than that of the cooling water for the negative electrode, so that the supply channels for the magnetic seal and the negative electrode are separated, and the negative electrode is separately cooled by providing hoses 7a and 7b.
従来のＸ線発生装置においては回転対陰極と磁気シー
ルの冷却系が、別々で２系統となっているために、水冷
ホースが４本となって対陰極周りのスペースを奪ってし
まい、例えば分析装置に利用する場合には対陰極と組み
合わせて使用されるゴニオメータやカメラ類の操作を阻
害する要因となっていた。In the conventional X-ray generator, since the cooling system for the rotating anode and the magnetic seal are two separate systems, four water-cooling hoses are used to take up space around the cathode, and for example, analysis When used in an apparatus, it has been a factor that hinders the operation of a goniometer and cameras used in combination with a counter electrode.
本発明は上記課題を解決するためのもので、冷却系を
一系統とすることにより、回転対陰極周りのスペースを
確保し、操作性を向上するようにした回転対陰極を提供
することを目的とする。SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems, and has an object to provide a rotating anti-cathode having a single cooling system to secure a space around the rotating anti-cathode and improve operability. And
この目的を達成する本発明の回転対陰極は、真空室内
に配置され、電子線照射によりＸ線を発生させるように
した水冷形回転対陰極において、内側筒部と外側筒部を
有する固定部と、該固定部の内側筒部と外側筒部間に配
置された筒状の回転部と、該回転部に取り付けられた中
空状の回転対陰極と、前記外側筒部と回転部間に設けら
れた軸受と、前記外側筒部と回転部間を真空シールする
真空シール部と、前記外側筒部内に設けられた、前記真
空シール部を冷却するための第１の冷却水路と、該第１
の冷却水路に通じ、前記外側筒部と前記回転部間を結ぶ
第２の冷却水路と、該第２の冷却水路に通じ、前記回転
部と前記内側筒部間に設けられた第３の冷却水路と、該
第３の冷却水路に通じ、前記回転対陰極の中空部に設け
られた第４の冷却水路と、該第４の冷却水路に通じ、前
記内側筒部内に設けられた第５の冷却水路と、前記内側
筒部と前記固定部間を水シールする水シール部を備え
た、第１の冷却水路と第５の冷却水路の間に一系統の冷
却路を形成したことを特徴とする。To achieve this object, the rotating anti-cathode of the present invention is disposed in a vacuum chamber, and in a water-cooled rotating anti-cathode configured to generate X-rays by electron beam irradiation, a fixed portion having an inner cylindrical portion and an outer cylindrical portion. A cylindrical rotating part disposed between the inner cylindrical part and the outer cylindrical part of the fixed part, a hollow rotating negative electrode attached to the rotating part, and provided between the outer cylindrical part and the rotating part. A bearing, a vacuum seal portion for vacuum-sealing between the outer cylindrical portion and the rotating portion, a first cooling water passage provided in the outer cylindrical portion for cooling the vacuum seal portion,
A second cooling water passage communicating with the cooling water passage and connecting the outer cylindrical portion and the rotating portion; and a third cooling water flowing through the second cooling water passage and provided between the rotating portion and the inner cylindrical portion. A fourth cooling water passage communicating with the third cooling water passage and provided in the hollow portion of the rotating anode; and a fifth cooling water passage communicating with the fourth cooling water passage and provided in the inner cylindrical portion. A cooling channel is formed between the first cooling channel and the fifth cooling channel, the cooling channel including a water seal portion for water sealing between the inner cylindrical portion and the fixed portion. I do.
以下、実施例を説明する。 Hereinafter, examples will be described.
第１図は本発明の水冷形回転対陰極の一実施例を示す
図である。図中、10は回転対陰極、11は磁気シール、1
3、14はベアリング、15はプーリ、16は回転部、17は固
定部、18は給水口、19は排水口、20は排水導管、21水シ
ール、22はフランジである。FIG. 1 is a view showing one embodiment of a water-cooled rotary counter-cathode of the present invention. In the figure, 10 is a rotating anti-cathode, 11 is a magnetic seal, 1
3, 14 are bearings, 15 is a pulley, 16 is a rotating part, 17 is a fixed part, 18 is a water supply port, 19 is a drain port, 20 is a drain pipe, 21 is a water seal, and 22 is a flange.
図において、回転対陰極10は、プーリ15が設けられ、
ベアリング13、14により回転可能に固定部17に支持され
ている回転部16と一体に構成されている。固定部と回転
部との間は磁気シール11により真空封じされて回転対陰
極側が真空に維持されている。また、水シール20により
プーリ、ベアリング側は水密に保たれるようになってい
る。冷却系は固定部17と回転部16とにわたる一系統の水
路により形成されている。固定部17は中空円筒状をして
おり、固定部17の外側筒部内に水路Ａ（第１の冷却水
路）、Ｂ（第１の冷却水路）、Ｃ（第２の冷却水路）が
形成され、中空部にさらに中空円筒状の回転部16が設け
られている。回転部16の中空部には、固定部17の内側筒
部である排水導管20が設けられ、回転部16と排水導管20
との間には水路Ｄ（第３の冷却水路）が形成され、排水
導管の先端部20aは回転対陰極の裏面空間に延びて回転
対陰極の裏面を冷却するための水路Ｅ（第４の冷却水
路）を形成している。こうして、固定部に設けられた給
水口18よりベアリングの背面、磁気シール11へ至る水路
Ａ、水路Ａから磁気シールの背面に沿って回り、再度磁
気シール背面を通る水路Ｂ、水路Ｂに接続されて水シー
ル部を冷却する水路Ｃ、回転部と排水導管との間の水路
Ｄ、回転体陰極裏面の水路Ｅ、排水導管の水路Ｆ（第５
の冷却水路）により一系統の冷却水路が形成されてい
る。なお、水路Ａ、水路Ｂは構造上の制約から管径を大
きくとれないので、２本の管で構成し、抵抗を小さくす
るようにしている。もちろん、２本に限らず必要に応じ
て本数は設定すればよい。そして、３気圧程度の圧力を
かけて給水口より冷却水の供給を行う。また、フランジ
22は回転対陰極を真空室に取りつけて固定するためのも
のである。In the figure, a rotating anti-cathode 10 is provided with a pulley 15,
It is integrally formed with a rotating part 16 rotatably supported by a fixed part 17 by bearings 13 and 14. The fixed portion and the rotating portion are vacuum-sealed by a magnetic seal 11 so that the rotating anti-cathode side is maintained in a vacuum. Further, the pulley and the bearing side are kept watertight by the water seal 20. The cooling system is formed by one system of water passage extending between the fixed part 17 and the rotating part 16. The fixing portion 17 has a hollow cylindrical shape, and water passages A (first cooling water passage), B (first cooling water passage), and C (second cooling water passage) are formed in the outer cylindrical portion of the fixing portion 17. The hollow portion is further provided with a hollow cylindrical rotating portion 16. In the hollow part of the rotating part 16, a drain pipe 20 which is an inner cylindrical part of the fixed part 17 is provided, and the rotating part 16 and the drain pipe 20 are provided.
A water passage D (third cooling water passage) is formed between the water passage E and a water passage E (fourth cooling water passage) for cooling the back surface of the rotating anti-cathode by extending the distal end portion 20a of the drainage conduit to the space behind the rotating anti-cathode. Cooling water channel). In this manner, the water passage A from the water supply port 18 provided in the fixed portion to the back of the bearing, the magnetic seal 11, the water passage A goes along the back of the magnetic seal from the water passage A, and is again connected to the water passage B and the water passage B passing through the back of the magnetic seal. A water passage C for cooling the water seal portion, a water passage D between the rotating portion and the drainage conduit, a water passage E on the back surface of the rotating body cathode, and a water passage F for the drainage conduit (fifth embodiment).
Cooling water channel) forms one system of cooling water channels. Note that the water channel A and the water channel B cannot be made large in diameter due to structural restrictions. Therefore, the water channel A and the water channel B are configured with two pipes to reduce the resistance. Of course, the number is not limited to two, and may be set as needed. Then, cooling water is supplied from a water supply port by applying a pressure of about 3 atm. Also, the flange
Numeral 22 is for fixing the rotating cathode to the vacuum chamber.
このような構成において、図示しないモータによりプ
ーリ15を介して回転対陰極10を高速回転させ、この周側
面に電子線を照射してＸ線を発生させる。同時に３気圧
程度の圧力をかけて給水口18を通して冷却水を供給し、
水路Ａを通って磁気シールの背面側を回し、水路Ｂに導
いてベアリングの背面に導入し、さらに水路Ｃを通して
水シール20を冷却する。さらに回転部と排水導管との間
の水路Ｄ、回転対陰極の裏面の水路Ｅ、排水導管の水路
Ｆを通して排水口19より排出する。このように、一系統
の冷却水路で回転対陰極、真空シールとしての磁気シー
ル、水シール等を冷却することにより、第２図に示した
ようなホース8a、8bを省略し、２本のホースのみで冷却
水の供給、排水ができるので回転対陰極周りのスペース
を確保することができ、装置の操作性を向上させること
が可能となる。In such a configuration, the rotating anti-cathode 10 is rotated at high speed by a motor (not shown) via the pulley 15, and the peripheral side surface is irradiated with an electron beam to generate X-rays. At the same time, applying a pressure of about 3 atmospheres and supplying cooling water through the water supply port 18,
The back side of the magnetic seal is turned through the channel A, guided to the channel B and introduced into the back of the bearing, and the water seal 20 is cooled through the channel C. Further, the water is discharged from a drain port 19 through a water path D between the rotating part and the drain pipe, a water path E on the back surface of the rotating anti-cathode, and a water path F of the drain pipe. In this way, by cooling the rotating anti-cathode, the magnetic seal as a vacuum seal, the water seal, and the like in one cooling water passage, the hoses 8a and 8b as shown in FIG. Since cooling water can be supplied and drained only by using the cooling water, a space around the rotating anti-cathode can be secured, and the operability of the apparatus can be improved.
本発明の回転対陰極は、真空シール部を冷却するため
の第１の冷却水路を備えているので、真空シール部は確
実に冷却され、真空シール部の寿命は延びる。また、冷
却路を一系統にすることにより、２本のホースのみで回
転対陰極及び真空シールへの冷却水の供給、排出を行う
ことが可能となるので、回転対陰極周りのスペースを確
保することができ、例えば分析装置として利用してゴニ
オメータ、カメラ類等を使用する場合でもその操作性を
向上させることが可能となる。Since the rotating anode of the present invention is provided with the first cooling water passage for cooling the vacuum seal portion, the vacuum seal portion is reliably cooled, and the life of the vacuum seal portion is extended. In addition, by using a single cooling passage, it is possible to supply and discharge the cooling water to the rotating anode and the vacuum seal with only two hoses, so that space around the rotating anode is secured. For example, even when a goniometer, cameras, and the like are used as an analyzer, the operability can be improved.
第１図は本発明の水冷形回転対陰極の一実施例を示す
図、第２図は従来の回転対陰極線発生装置の全体構成を
示す斜視図である。 10…回転対陰極、11…磁気シール、13、14…ベアリン
グ、15…プーリ、16…回転部、17…固定部、18…給水
管、20…排水導管、21…水シール。FIG. 1 is a view showing one embodiment of a water-cooled rotary anti-cathode of the present invention, and FIG. 2 is a perspective view showing the entire configuration of a conventional rotary anti-cathode generator. 10 rotating anti-cathode, 11 magnetic seal, 13, 14 bearing, 15 pulley, 16 rotating part, 17 fixed part, 18 water supply pipe, 20 drainage pipe, 21 water seal.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭64−59743（ＪＰ，Ａ) 特開 昭62−119843（ＪＰ，Ａ) 特開 平２−278637（ＪＰ，Ａ) (58)調査した分野(Int.Cl.6，ＤＢ名) H01J 35/08,35/10────────────────────────────────────────────────── ─── Continued from the front page (56) References JP-A-64-59743 (JP, A) JP-A-62-119843 (JP, A) JP-A-2-278637 (JP, A) (58) Field (Int.Cl. 6 , DB name) H01J 35 / 08,35 / 10
Claims (1)
線を発生させるようにした水冷形回転対陰極において、
内側筒部と外側筒部を有する固定部と、該固定部の内側
筒部と外側筒部間に配置された筒状の回転部と、該回転
部に取り付けられた中空状の回転対陰極と、前記外側筒
部と回転部間に設けられた軸受と、前記外側筒部と回転
部間を真空シールする真空シール部と、前記外側筒部内
に設けられた、前記真空シール部を冷却するための第１
の冷却水路と、該第１の冷却水路に通じ、前記外側筒部
と前記回転部間を結ぶ第２の冷却水路と、該第２の冷却
水路に通じ、前記回転部と前記内側筒部間に設けられた
第３の冷却水路と、該第３の冷却水路に通じ、前記回転
対陰極の中空部に設けられた第４の冷却水路と、該第４
の冷却水路に通じ、前記内側筒部内に設けられた第５の
冷却水路と、前記内側筒部と前記固定部間を水シールす
る水シール部を備えた、第１の冷却水路と第５の冷却水
路の間に一系統の冷却路を形成したことを特徴とする回
転対陰極。An X-ray detector is disposed in a vacuum chamber, and is irradiated with X-rays by an electron beam.
In a water-cooled rotating anti-cathode that generates lines,
A fixed portion having an inner tubular portion and an outer tubular portion, a tubular rotating portion disposed between the inner tubular portion and the outer tubular portion of the fixed portion, and a hollow rotating anti-cathode attached to the rotating portion; A bearing provided between the outer cylindrical portion and the rotating portion, a vacuum seal portion for vacuum-sealing the outer cylindrical portion and the rotating portion, and a cooling device for cooling the vacuum seal portion provided in the outer cylindrical portion. First
And a second cooling water passage communicating with the first cooling water passage and connecting the outer cylindrical portion and the rotating portion; and a second cooling water passage communicating with the second cooling water passage and between the rotating portion and the inner cylindrical portion. A fourth cooling water passage provided in the hollow portion of the rotating anti-cathode and communicating with the third cooling water passage;
A fifth cooling water passage provided in the inner cylindrical portion, and a water sealing portion for water-sealing between the inner cylindrical portion and the fixed portion. A rotating anti-cathode characterized by forming a single cooling passage between cooling water passages.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1195355A JP2766678B2 (en) | 1989-07-27 | 1989-07-27 | Rotating anti-cathode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1195355A JP2766678B2 (en) | 1989-07-27 | 1989-07-27 | Rotating anti-cathode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0359934A JPH0359934A (en) | 1991-03-14 |
| JP2766678B2 true JP2766678B2 (en) | 1998-06-18 |
Family
ID=16339794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1195355A Expired - Lifetime JP2766678B2 (en) | 1989-07-27 | 1989-07-27 | Rotating anti-cathode |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2766678B2 (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2531698B2 (en) * | 1987-08-29 | 1996-09-04 | 株式会社 マックサイエンス | Rotating anticathode X-ray device |
-
1989
- 1989-07-27 JP JP1195355A patent/JP2766678B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0359934A (en) | 1991-03-14 |
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