JP2003290208A - Multiple radiation source x-ray ct system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve economical efficiency by reducing maintenance costs for targets by suppressing the elevation of temperature of the targets in a multiple radiation source X-ray CT system. <P>SOLUTION: The multiple radiation source X-ray CT system is equipped with a vacuum container 11 provided while annularly surrounding an object to be examined, a number of X-ray generating means 13 provided side by side along the circumferential direction inside the vacuum container and equipped with cathodes 21, gates 23, anodes 22, targets 24 and holders 25 for holding the targets for irradiating the object to be examined with X-rays by generating the X-rays by generating electron beams with the cathodes, sucking the electron beams with the anodes and making the electron beams collides with the targets, and a detector provided while annularly surrounding the object to be examined on the inner peripheral side of the vacuum container for detecting X-rays transmitted through the object to be examined, and each holder 25 is equipped with a cooling pipe 31 for making a cooling fluid flow as a cooling means for cooling itself. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multi-source X-ray CT apparatus.

[0002]

2. Description of the Related Art Recently, a multi-ray source X-ray CT (Computed Tomgr) in which an industrial CT apparatus is applied to a medical field is used.
phy) devices have been proposed. This X-ray CT system
A vacuum container having an annular shape surrounding an object to be inspected (human body) around its body axis (center axis) is provided, and a large number of X-ray generating means are arranged inside the vacuum container along the circumferential direction. A detector is provided on the inner peripheral side of the vacuum container so as to surround the inspection object in an annular shape. The X-ray generating means is a cathode,
A gate, an anode, and a target are provided, and an electron beam is generated at the cathode, the electron beam is sucked at the anode, collides with the target, is converted into X-rays, and the inspection target is irradiated with X-rays. The detector detects X-rays transmitted through the inspection object.

A large number of X-ray generating means (X-ray sources) arranged in a ring around the object to be inspected are sequentially operated one by one in accordance with the arrangement order to generate X-rays and direct them to the object to be inspected. And irradiate. This X-ray is detected by a detector that faces the X-ray generation means with the object to be inspected in between, and high-speed imaging can be performed by switching the signal that drives each X-ray source.

Further, in each X-ray generating means, the target is attached to the vacuum container via the attachment member.

[0005]

This multi-source type X-ray CT
The device has the following problems. The target generates heat when the incident electron beam is converted into X-rays, and this heat raises the temperature to a high temperature, causing cracks on the surface, melting and evaporation, and conversion over time. X-ray quality is reduced. And the target is X from the start of use
The time until the quality of the wire deteriorates and the wire becomes unusable, that is, the service life is short, and as a result, the number of replacements per unit period increases, the maintenance cost increases, and the economy is poor.

It is an object of the present invention to provide a multi-source X-ray CT apparatus which suppresses the temperature rise of the target to prolong its life, reduces the maintenance cost of the target and improves the economical efficiency.

[0007]

Multi-source X-ray C according to the present invention
The T device includes a vacuum container that surrounds an object to be inspected in an annular shape, a large number of cathodes, gates, anodes, targets, and a holder that holds the target inside the vacuum container in a line along the circumferential direction. X-ray generating means for generating an electron beam at the cathode, attracting the electron beam at the anode, colliding with the target to generate an X-ray, and irradiating the inspection object with the X-ray, A cooling device is provided which surrounds the object to be inspected annularly on the inner peripheral side of the vacuum container and is provided in the apparatus body to detect X-rays transmitted through the object to be inspected, and the holding body cools itself. It is characterized by comprising means.

Further, the multi-source X-ray CT apparatus of the present invention is
The holding body is formed of a material having good thermal conductivity.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION A first embodiment of the present invention will be described with reference to FIGS. Figure 1 shows X-ray CT
FIG. 2 is a diagram schematically showing the apparatus, and FIG. 2 shows X in the X-ray CT apparatus.
FIG. 4 is a cross-sectional view schematically showing the line generating means and the detector when viewed from the front, FIG. 3 is an enlarged cross-sectional view of the X-ray CT apparatus, and FIG.
FIG. 4 is an enlarged cross-sectional view showing an anode, a target and a holder in the X-ray generating means.

In FIG. 1, reference numeral 1 denotes a main body of the apparatus, and the main body 1 of the apparatus has an annular shape drawn with a horizontal axis, and its cross section is, for example, a quadrangle. The apparatus main body 1 has a circular space 2 in which a human body M, which is an inspection object, is placed in a central portion surrounded by the annular body by forming the annular body. A window (not shown), which faces the space 2 and transmits X-rays, is provided on the inner peripheral surface of the apparatus body 1 along the circumferential direction.

Reference numeral 3 denotes a table on which an object M (human body) to be inspected is placed, which is installed on a pedestal and provided parallel to the horizontal central axis of the apparatus body 1. The apparatus main body 1 and the table 3 are moved relatively toward and away from each other by a drive mechanism (not shown), and the table 3 on which the inspection object M is placed at the time of photographing is along the central axis O of the apparatus main body 1. It is designed to move. That is, the table 3 moves along the central axis O from a position away from the device body 1 to enter the central space portion 2 of the device body 1, and moves from the central space portion 2 to a position away from the device body 1.

A vacuum container 11 and a detector 12 are provided inside the apparatus main body 1. The vacuum vessel 11 has an annular shape drawn with a predetermined diameter around the horizontal central axis O of the apparatus body 1 and has a circular cross section. Vacuum container 11
Are arranged concentrically inside the apparatus main body 1 and are attached by attachment members 29 and 53.

Inside the vacuum vessel 11, X-ray generating means 13 is provided.
Are provided in the circumferential direction. Like the triode vacuum tube, the X-ray generation means 13 has a cathode (cathode) 21, an anode (anode) 22, a gate (gate) 23 located between the cathode 21 and the anode 22, and a front side of the anode 22. The target 24 located at the target and the holding body 25 that holds the target 24 are provided.

The cathode 21 emits thermoelectrons by heating, and the gate 23 electrically opens and closes the path of accelerated electrons. The cathode 21 and the gate 23 are attached to the attachment member 26, and are provided inside the vacuum container 11 on one side portion in the cross-sectional diameter direction. That is, the vacuum container 11 is divided, and the attachment member 26 is sandwiched and attached to the divided portion. The cathode 21, the gate 23, and the mounting member 26 form a unit, and a number of these units are arranged side by side in the circumferential direction of the vacuum container 11.

The anode 22 becomes the cathode 2 due to the applied high voltage.
The thermoelectrons emitted from No. 1 are attracted and accelerated to a high speed. The anode 22 is provided inside the vacuum container 11 so as to face the cathode 21 and the gate 23 and on the other side portion in the cross-sectional diametrical direction of the vacuum container 11. The anode 22 has an annular shape with the center axis O of the apparatus main body 1 as the center and the positions of the cathode 21 and the gate 23 as radii, and is attached to a mounting member 27 also having an annular shape. The vacuum container 11 has a plurality of terminals 2 for supplying a high voltage to the anode 22.
8 are provided.

The target 24 and the holder 25 will be described. The target 24 is located in front of the anode 22 in the electron beam traveling direction, and collides with the electron beam P accelerated by the anode 22 to generate the X-ray R. The target 24 is made of a refractory metal, for example, tungsten because the electron beam P collides with it and becomes high in temperature, and a number corresponding to the number of the X-ray generating means 13 is prepared.
The holder 25 has an annular shape drawn around the central axis O of the apparatus main body 1, and is made of a material having good thermal conductivity, such as copper, which is made of metal so as to release the heat of the target 24 to the outside. .

The surface of the target 24 facing the anode 22 is a surface on which the electron beam P emitted from the cathode 21 collides, and in this embodiment, the anode 22 is oriented in the radial direction of the holder 25, which has a ring shape. It has a sloping flat surface so that it can fall toward. Each target 24 is held on the surface portion (inner peripheral surface portion) of the holder 25 facing the anode 22. That is, on the surface portion of the holding body 25 located on the anode side, the X-ray generating means 13 is provided over the entire circumferential direction.
The concave portions corresponding to the number of the above are formed side by side, and the concave portions are fitted with the targets 24 of the respective X-ray generating means 13 and fixed by an appropriate method. The surface of the target 24 and the surface of the holder 25 form the same plane.

In this way, the target 24 is held by the holder 2.
5 is held in contact with. The cross-sectional area of the holding body 25 is set so that the heat of the target 24 can be satisfactorily conducted and released into the air.

Further, as shown in FIGS. 2 to 4, inside the holding body 25, a cooling pipe 31 is provided over the entire circumference. The cooling pipe 31 is one form of cooling means for cooling the holding body 25.

This cooling pipe 31 uses a pipe having a round cross section with both ends closed, and is formed in an annular shape as a whole, and the circumference formed by the cooling pipe 31 having an annular shape at both ends is formed. Butt against each other above. The pipe diameter of the cooling pipe 31 is large enough to fit in the cross section of the holder 25, and the diameter of the ring is smaller than the maximum diameter of the holder 25.
The cooling pipe 31 is the target 24 inside the holder 25.
It is provided concentrically with the holding body 25 so as to surround the outer peripheral portion of the region where is provided.

The holder 25 is constructed by combining an inner ring 25A having the targets 24 arranged side by side and an outer tube 25B surrounding the inner ring 25A inside and outside. On the outer peripheral surface of the inner ring 25A and on the inner peripheral surface of the outer ring 25B facing the inner ring 25A, grooves 32A and 32B each having a semicircular cross section are formed over the entire circumferential direction. When the inner ring 25A and the outer pipe 25B are combined, both grooves 32A and 32B are formed.
Are combined with each other to form an annular space, and the cooling pipe 31 is housed and arranged in this space. Combined inner ring 25A
Although not shown, the outer tube 25B and the outer tube 25B are joined and fixed by, for example, inserting bolts into both. Inner ring 25A and outer tube 25
A seal member 33 is provided at the joint with B for sealing.

An inflow pipe 34 is connected to one end of the cooling pipe 31 as shown in FIGS. 2 to 4, and a cooling fluid such as cooling oil is fed into the cooling pipe 31 from the inflow pipe 34. ing. The inflow pipe 34 is supplied with cooling oil by a cooling oil supply device (not shown), and is inserted into the outer ring 25B from the outside and connected to the cooling pipe 31, for example. At the other end of the cooling pipe 31, as shown in FIG.
Are connected, and the insulating oil inside the cooling pipe 31 is made to flow out to the outside by the outflow pipe. Inflow pipe 34
The outflow pipe 35 is inserted into the outer ring 25B from the outside, for example, and is connected to the end of the cooling pipe 31.

The holder 25 is oriented so that the target 24 faces the cathode 21, and the vacuum container 11
Is disposed on the other side in the diametrical direction of the cross section. The holding body 25 is attached to the attachment member 2 via the arm member 30.
It is attached to 9. Target 24 and holder 2
The surface of No. 5 is provided with a predetermined distance interval suitable for generating X-rays with respect to the cathode 21. The attachment member 29 is attached to the attachment member 53 attached to the apparatus body 1.

The X-ray generating means 13 is constructed in this manner, and a large number of X-ray generating means 13 are provided inside the vacuum container 1 side by side in the circumferential direction.

A central space 2 is formed on the inner surface of the vacuum container 11.
A window 41 that opens to face is formed continuously over the entire circumferential direction. The window 41 allows the X-rays generated by the X-ray generation means 13 and applied to the inspection object M to pass therethrough. A collimator 42 is provided on the inner peripheral surface of the vacuum container 11 so as to cover the window 41. This collimator 4
X is emitted from the X-ray generation means 13 through the window 41.
The irradiation field of the line R with respect to the inspection object M is defined.

The detector 12 has a circular annular shape drawn with a diameter smaller than that of the vacuum container 11 around the horizontal central axis of the apparatus body 1 and has a predetermined width in the central axis direction. It is configured in combination. The detector 12 receives X-rays emitted from the X-ray generation means 13 and transmitted through the inspection object M. The detector 12 is attached to the inner peripheral surface of the vacuum container 11 by an attachment member 44. For example, the vacuum container 11 is provided with 240 X-ray generation means 13, and the detector 12 is provided with 2048
A number of detection elements are provided.

Further, the apparatus body 1 is provided with a vacuum pump 51 around the vacuum container 11. This vacuum pump 5
1 is a rotary pump such as a turbo pump, which is connected to the inside of the vacuum container 11 via a pipe line 52. That is, the vacuum pump 51 vacuums the inside of the vacuum container 11 to maintain a vacuum state.

In the multi-source CT apparatus thus constructed, the data recording apparatus outputs an X-ray generation command to the X-ray generation control apparatus, and the X-ray generation control apparatus outputs the X-ray generation control apparatus based on the command.
The generation of X-rays R from the line generation means 13 is controlled. That is, an X-ray generation command is transmitted from the pulse generation control port to the same number of pulse generators as the X-ray generation means provided in the X-ray generation control device, and the corresponding X-ray generation means 13 generates X-rays R.

That is, in the X-ray generating means 13 which receives the pulse generated by the pulse generator, the thermoelectrons emitted by heating the filament of the cathode 21 are attracted to the anode 22 by the high voltage applied between the electrodes. The electron beam P is accelerated to reach the anode 22 through the opening of the gate 23. The electron beam reaching the anode 22 collides with the surface of the target 24, that is, the surface facing the anode 22, and generates X-rays R.

Here, the generated X-rays spread uniformly in all directions toward the entire spherical space formed around the point where the electron beam collides. That is, the target 24 and the holding body 25 spread toward the front of the surface of the target 24 and the holding body 25 which is a plane along the diametrical direction so as to form a hemisphere. X that spreads out like this forming a hemisphere
A portion of the line directed to the central space portion 2 of the apparatus body 1 passes through the window 41 of the vacuum container 11 and the collimator 42, and is irradiated toward the inspection object M located in the central space portion 2 of the apparatus body 1, When passing through the inspection object M, it is absorbed according to its transmittance.

Next, the X-ray transmitted through the inspection object M is
The detector 12 arrives at a position on the inner peripheral surface corresponding to the X-ray emitting means 13 that has generated X-rays with the inspection object M sandwiched therebetween. The detection element of the detector 12 detects the X-ray R and outputs a signal proportional to the transmitted X-ray dose. This signal is subjected to signal processing in a data processing device via a preamplifier (indicated by 14 in FIG. 3), a main amplifier, and a data recording device. The X of the object to be inspected by this signal-processed data
A line CT image is obtained.

Then, a large number of X-ray generating means 13 arranged in an annular shape surrounding the object M to be inspected are electrically switched to irradiate the object M to be inspected with X-rays for imaging.
Obtain line CT image information.

In photographing, a large number of X-ray generating means 13 arranged in an annular shape surrounding the object M to be inspected are sequentially switched over one turn in order to irradiate the object M to be inspected with X-rays R. There is a method of obtaining an X-ray CT image.

Further, one of a large number of X-ray generating means 13 surrounding the object M to be inspected and arranged in an annular shape is selected, and an X-ray R is irradiated from one direction by selecting one located at a predetermined angle. There is a direction to irradiate M and obtain an X-ray CT image. This case can be applied to the case of imaging a site of a certain area of the inspection object M such as an X-ray fluoroscopic apparatus.

Further, one round 360 of a circle surrounding the object M to be inspected
.Degree. Is divided into a plurality of desired angles .theta..degree., And the X-ray generating means 13 arranged in each of the divided areas are sequentially switched to irradiate the inspection object M with the X-ray R for one round. There is a method of taking an image and reconstructing the imaged data to obtain an image.

Then, a large number of X-ray generating means 13 arranged in an annular shape surrounding the object M to be inspected are electrically switched to irradiate the object M to be inspected with X-rays for imaging.
Since the CT image information is obtained, the imaging time can be shortened and the multi-source type can be achieved, the amount of X-rays received by the inspection object M can be reduced, and "blur" due to movement can be ignored. The time resolution of can be obtained. Further, unlike the conventional case, it is not necessary to change the direction of the inspection object M toward the X-ray generation means 13 in accordance with the region requiring the imaging, which reduces the burden on the inspection object M and improves the operability of imaging. Can be improved.

This multi-source X-ray CT apparatus has the following features. When the electron beam collides with the surface of the target 24, the target 24 generates heat. This heat is conducted from the target 24 to the holding body 25 that holds the target 24, and is further released into the air.

The holder 25 is made of a material having good thermal conductivity, such as copper or copper alloy. Therefore, each X
The heat generated by each target 24 provided in each of the line generating means 13 and arranged in the circumferential direction of the holding body 25 is well conducted through the holding body 25 and is radiated into the air. The temperature rise can be effectively suppressed.

The holder 25 is provided with a cooling pipe 31 through which a cooling fluid such as cooling oil flows. The cooling oil is fed into the inside from one end of the cooling pipe 31 through the inflow pipe 34. The cooling oil flows from one end to the entire length inside the cooling pipe 31, reaches the other end, and flows out of the cooling pipe 31 from the outflow pipe 35. The cooling pipe 31 has an annular shape and is arranged over the entire circumferential direction of the annular holder 25. Therefore, the cooling oil flows along the entire length of the cooling pipe 31 and thus the entire circumferential direction of the holding body 31. The cooling oil flows through the entire length of the cooling pipe 31, thereby absorbing the heat generated in the targets 24 of the respective X-ray generating means 13 arranged in the entire circumferential direction of the holding body 25 and conducted to the holding body 25, thereby holding the holding body. Cool 25. That is, heat exchange is performed between the holding body 25 and the cooling fluid to cool the holding body 31, and thereby the target 2
The heat of 4 can be taken away and the target 24 can be cooled.

By causing the cooling oil to flow through the cooling pipe 31 in this manner, each target 2 which collides with the electron beam and generates heat.
4 can be cooled quickly and effectively via the holding body 25, and the temperature rise of the target 24 can be suppressed effectively.

Therefore, it is possible to suppress the rate at which the surface of the target 24 is cracked or melt and evaporate due to an increase in temperature to prolong the life of the target 24 and to reduce the number of replacements per unit period to reduce the maintenance cost. it can.

In this embodiment, the holder 25 has a ring shape surrounding the object M to be inspected, and the targets 24 of the respective X-ray generating means 13 are arranged and held. Therefore, the holders are individually provided for the respective targets 24. As compared with the case where the cooling pipes are provided and the cooling pipes are individually provided for each holding body, the cooling pipes can be made common to each target 24, and a large number of targets 24 can be effectively cooled with a simple configuration. it can.

In this embodiment, the cooling pipe 31 is attached to the holder 2.
5 is provided inside, it is possible to cool the entire holding body 25 surrounding the cross-section periphery of the cooling pipe 31 by exerting a heat exchange action of the cooling oil. Therefore, the cooling oil can effectively cool the entire inside of the holder 25 to enhance the cooling effect on the target 24.

When the targets 24 are replaced, the holder 25 is replaced and the entire target 24 is replaced, or each target 24 is detachably fixed to the holder 25 and replaced individually. .

It should be noted that instead of using a cooling pipe as a pipe through which the cooling fluid flows, holes may be formed inside the holder.

In this embodiment, oil is used as the cooling fluid flowing through the cooling pipe 31, but the oil has excellent cooling capacity and high electrical insulation. For this reason, when an electrical accident occurs, the cooling fluid does not have a function of expanding the accident, and the safety is high.

FIG. 5 is an enlarged view of the anode, target and holder in the second embodiment. The same parts as those in FIG. 4 are designated by the same reference numerals. In this embodiment, the cooling pipe is not provided inside the holding body 25 but is provided outside the holding body 61, and the cooling pipe is externally attached. That is, the cooling pipe 31 is arranged and fixed to the outer peripheral surface of the annular holding member 61 so as to surround the entire circumferential direction. The holding body 61 is made of a material having good thermal conductivity, for example, copper, and has no hole for accommodating and arranging the cooling pipe therein. The cooling pipe 31 is made of a material having a good thermal conductivity, for example, a round pipe made of copper and formed into an annular shape.
It is arranged in contact with the outer peripheral surface of 9 and is fixed by welding, for example. An inflow pipe 34 is connected to one end of the cooling pipe 31, and an outflow pipe 35 (not shown in FIG. 5) is connected to the other end of the cooling pipe 31, so that a cooling fluid, for example, a cooling oil flows inside the cooling pipe 31. It is like this. The cooling fluid flowing through the cooling pipe 31, for example, cooling oil absorbs the heat of the target 24 conducted through the holding body 31 to cool the holding body 31 and suppress the temperature rise of the target 24.

The cooling pipe 31 may have a quadrangular cross section in order to increase the contact area with the holder 61.

In this embodiment, since the cooling pipe 31 is provided on the outer peripheral surface of the holding body 61, the structure for providing the cooling pipe 31 is simple and easy to manufacture.

The first and second embodiments described so far are the X-ray generating means in which the cathode, the anode, the gate, the target and the target are individually provided, and the holder is made of a material having good conductivity. And the provision of a cooling line in the holder. However, the present invention is not limited to this, and it is possible to adopt only one of the above points.

FIG. 6 shows an X-ray C according to the third embodiment.
FIG. 7 is a sectional view showing a T-apparatus, and FIG. 7 is an enlarged sectional view showing an anode and a target in the X-ray generating means. 6 and 7, the same parts as those in FIGS. 3 and 4 are denoted by the same reference numerals. In this embodiment, the anode and the target are integrally formed, and the holder has a function of discharging the heat of the target and the conductor for supplying electric power to the anode into the air.

That is, the X-ray generation means 13 in this embodiment has a cathode 21, a gate 23, an anode 71, and a target 72 formed integrally with this anode 71. The anode 71 is made of a material having good electric conductivity and heat conductivity, for example, a plate material made of copper. A target 72 made of a heavy metal such as tungsten is integrally formed on the surface of the anode 71 (the surface on which the electron beam collides).

In the figure, reference numeral 73 denotes a holder, which is a ring-shaped member made of a material having good electric and thermal conductivity, for example, copper. The anodes 71 of the respective X-ray generating means 13 are arranged and fixed in the circumferential direction on one side surface of the holder 71. The holder 73 is electrically connected to the terminal 28 that supplies power to the target 72.

In this structure, the holder 73 has a function of causing the current supplied from the terminal 28 to flow to the target 72 and a function of conducting the heat generated at the target 72 and discharging it into the air.

In this embodiment, the holding body 73 is not provided with a cooling pipe, but a cooling pipe may be provided inside or outside the holding body 73 to cool the holding body 73. In this case, if water is used as the cooling fluid flowing through the cooling pipe,
Since an electric current is passed through the holder 73, the electric current may leak into the water flowing through the cooling pipe or the water may be electrolyzed.
For this reason, oil having excellent electrical insulation is used as the cooling fluid that flows through the cooling pipe.

The present invention is not limited to the above-described embodiments, but can be modified in various ways. The multi-source X-ray CT apparatus of the present invention is particularly suitable for medical diagnosis, but can also be used industrially.

[0057]

According to the multi-source X-ray CT apparatus of the present invention, the holder for holding the target is provided with the cooling means for cooling itself, so that when the electron beam collides with the X-ray to convert it into X-ray. Cools the target that generates heat, suppresses the rate at which the target cracks or melts and evaporates due to temperature rise, extending the life of the target, reducing the number of replacements per unit period, and reducing maintenance costs. Can be reduced.

According to the present invention, the holding means can be effectively cooled by using the cooling means as the conduit through which the cooling fluid flows. Further, by providing this pipe line inside the holder, the holder can be effectively cooled. In addition, by holding this conduit in contact with the outer surface of the holder, the conduit can be provided in the holder with a simple configuration. Also, by flowing oil as a cooling fluid in the pipeline,
The cooling fluid can be provided with electrical insulation and the safety against electrical accidents can be enhanced.

According to the multi-source X-ray CT apparatus of the present invention,
The holder is made of a material having good thermal conductivity, such as copper, so that the heat generated in the target when the electron beam collides and is converted into X-rays can be satisfactorily conducted and released to the outside. it can.

[Brief description of drawings]

FIG. 1 is a cross-sectional view schematically showing an X-ray CT apparatus according to a first embodiment.

FIG. 2 is a diagram schematically showing an X-ray generation unit and a detector of the X-ray CT apparatus according to the same embodiment, as viewed from the front.

FIG. 3 is a cross-sectional view showing the X-ray CT apparatus according to the same embodiment as viewed from the side.

FIG. 4 is an enlarged cross-sectional view showing a target and a holder in the X-ray CT apparatus according to the same embodiment.

FIG. 5 is an enlarged cross-sectional view showing a target and a holder in the X-ray CT apparatus according to the second embodiment.

FIG. 6 is a cross-sectional view showing an X-ray CT apparatus according to a third embodiment as viewed from the side.

FIG. 7 is an enlarged cross-sectional view showing a target and a holder of an X-ray CT apparatus according to a third embodiment.

[Explanation of symbols]

1 ... Device body 2 ... Central space 11 ... Vacuum container 12 ... Detector 13 ... X-ray generating means 21 ... Cathode 22 ... Anode 23 ... Gate 24 ... Target 25 ... Holder 31 ... Cooling tube 34 ... Distribution pipe 35 ... Cooling pipe 61 ... Holder 73 ... Holder

─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. ⁷ Identification code FI theme code (reference) H01J 35/12 H01J 35/12 H05G 1/02 H05G 1/02 P (72) Inventor Kazuhiro Tsukuda Hiroshima, Hiroshima 4-6-22 Kannon-Shinmachi, Nishi-ku, Mitsubishi Heavy Industries, Ltd. Hiroshima Works (72) Inventor Akira Ishibashi 2-5-1, Marunouchi, Chiyoda-ku, Tokyo Sanryo Heavy Industries Co., Ltd. (72) Inventor Akatsu Shin Hiroshima Prefecture 4-6-22 Kannon Shinmachi, Nishi-ku, Hiroshima City Mitsubishi Heavy Industries, Ltd. Hiroshima Factory F-term (reference) 4C092 AA01 AA05 AC01 AC17 BD01 BD05 BD17 BD19 BE02 4C093 AA22 BA05 CA36 EA02 EA06 EB12 EB13 EB16 EC12 EC43

Claims (7)

[Claims] 1. A vacuum container surrounding an object to be inspected in a ring shape, and a plurality of cathodes, gates, anodes, targets, and a holder for holding the targets, which are arranged side by side along the circumferential direction inside the vacuum container. An X-ray generating means for generating an electron beam at the cathode, causing an electron beam to be sucked at the anode to collide with the target to generate an X-ray, and irradiating the object to be inspected with the X-ray; The holding body cools itself, comprising a detector provided in the apparatus main body surrounding the inspection object in an annular shape on the inner peripheral side of the vacuum container and detecting X-rays transmitted through the inspection object. A multi-source CT apparatus, characterized by comprising a cooling means. 2. The multi-source CT apparatus according to claim 1, wherein the cooling means is a pipeline through which a cooling fluid flows. 3. The multi-source CT apparatus according to claim 2, wherein the conduit is provided inside the holder. 4. The multi-source CT apparatus according to claim 2, wherein the conduit is provided outside the holder. 5. The multi-source CT apparatus according to claim 2, wherein the cooling fluid flowing through the pipe is oil. 6. A vacuum container surrounding an inspection object in a ring shape, and a plurality of cathodes, gates, anodes, targets, and a holder for holding the targets, which are arranged side by side along the circumferential direction inside the vacuum container. An X-ray generating means for generating an electron beam at the cathode, causing an electron beam to be sucked at the anode to collide with the target to generate an X-ray, and irradiating the object to be inspected with the X-ray; A detector for detecting X-rays transmitted through the object to be inspected, which is provided in the apparatus main body so as to surround the object to be inspected annularly on the inner peripheral side of the vacuum container, and the holder has a thermal conductivity. A multi-ray source CT apparatus characterized by being formed of a good material. 7. The multi-source CT apparatus according to claim 6, wherein the material having good thermal conductivity is copper.