JP2757374B2 - Vacuum container - Google Patents
Vacuum containerInfo
- Publication number
- JP2757374B2 JP2757374B2 JP63127718A JP12771888A JP2757374B2 JP 2757374 B2 JP2757374 B2 JP 2757374B2 JP 63127718 A JP63127718 A JP 63127718A JP 12771888 A JP12771888 A JP 12771888A JP 2757374 B2 JP2757374 B2 JP 2757374B2
- Authority
- JP
- Japan
- Prior art keywords
- container
- vacuum
- view
- vacuum vessel
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 産業上の利用分野 本発明は加熱，冷却，保温装置を備えた真空容器に関
するものである。Description: TECHNICAL FIELD The present invention relates to a vacuum vessel provided with a heating, cooling, and heat retaining device.
従来の技術 第４図は従来の真空容器の構成を示す。FIG. 4 shows the structure of a conventional vacuum vessel.
１は容器、２は蓋、３は排気装置、４は排気管、５は
容器の内部空間、９はシール部材である。容器１の内部
空間５の気体は排気装置３により排気され、またシール
部材９により容器１の内部空間５と外部空間を隔離する
ことにより容器１の内部空間５を真空状態に保つ。1 is a container, 2 is a lid, 3 is an exhaust device, 4 is an exhaust pipe, 5 is an internal space of the container, and 9 is a sealing member. The gas in the internal space 5 of the container 1 is exhausted by the exhaust device 3, and the internal space 5 of the container 1 is kept in a vacuum state by separating the internal space 5 and the external space of the container 1 by the seal member 9.
発明が解決しようとする課題 しかし、第４図で示すような従来構成では容器１の内
部空間５を大気開放した際などに外部空間より気体が内
部空間５に侵入し、気体分子が容器１の内壁面に付着す
るが再度容器１の内部空間５と外部空間とを隔離し排気
装置３で内部空間５内の気体を排気する際に容器１の内
壁面に付着した気体分子が容易に排気されず、容器１の
内部空間５内に間欠的に放出されるために、内部空間５
内が一定の真空度に達するために必要な時間が長くな
る。However, in the conventional configuration as shown in FIG. 4, when the internal space 5 of the container 1 is opened to the atmosphere, gas enters the internal space 5 from the external space, and gas molecules of the container 1 Gas molecules adhering to the inner wall surface are separated again from the inner space 5 of the container 1 and the outer space, and gas molecules adhering to the inner wall surface of the container 1 are easily exhausted when the gas in the inner space 5 is exhausted by the exhaust device 3. To be discharged intermittently into the internal space 5 of the container 1,
The time required for the inside to reach a certain degree of vacuum increases.
課題を解決するための手段 上記課題を解決するために、本発明は、真空容器の壁
面内に加熱装置及び冷却装置を設け、かつその外側に真
空層を設けた真空容器である。Means for Solving the Problems In order to solve the above problems, the present invention is a vacuum vessel provided with a heating device and a cooling device inside a wall surface of a vacuum vessel and a vacuum layer outside the same.
作用 本発明の作用は、真空容器の壁面内の加熱装置及び冷
却装置の外側に設けられた真空層により、例えば真空容
器を加熱装置で加熱する際に熱の外部空間への放散を遮
断できる。Operation According to the operation of the present invention, the vacuum layer provided outside the heating device and the cooling device in the wall surface of the vacuum container can prevent heat from being diffused to the external space when the vacuum container is heated by the heating device.
実施例 以下本発明の第１の実施例について、図面を参照しな
がら説明する。First Embodiment Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.
第１図ａは第１の実施例その１の真空容器の縦断面
図、第１図ｂは第１図ａのＡ矢視図、第１図ｃは第１図
の実施例その２の真空容器の縦断面図、第１図ｄは第１
図ｃのＡ矢視図である。FIG. 1a is a longitudinal sectional view of the vacuum vessel of the first embodiment, part 1; FIG. 1b is a view of arrow A of FIG. 1a; FIG. 1c is the vacuum of the embodiment 2 of FIG. FIG. 1 d is a longitudinal sectional view of the container.
FIG. 10 is a view as viewed from an arrow A in FIG. C.
第１図a,第１図b,第１図ｃおよび第１図ｄにおいて、
１は容器、２は蓋、３は排気装置、４は排気管、５は容
器の内部空間、６は加熱装置、９はシール部材である。1a, 1b, 1c and 1d,
1 is a container, 2 is a lid, 3 is an exhaust device, 4 is an exhaust pipe, 5 is an internal space of the container, 6 is a heating device, and 9 is a sealing member.
容器の内部空間５内の気体は排気装置３により排気さ
れる。同時に加熱装置６で容器１および蓋２を加熱し、
容器１および蓋２の内壁面に付着した気体分子を容器の
内部空間５内に放出させ、排気装置３で排気することに
より容器の内部空間５を短時間で一定の真空度にすると
ともに到達真空度を高くすることが可能となる。The gas in the inner space 5 of the container is exhausted by the exhaust device 3. At the same time, the container 1 and the lid 2 are heated by the heating device 6,
Gas molecules adhering to the inner wall surfaces of the container 1 and the lid 2 are discharged into the inner space 5 of the container, and are evacuated by the exhaust device 3 so that the inner space 5 of the container is reduced to a certain degree of vacuum in a short time and the ultimate vacuum is reached. It is possible to increase the degree.
以下本発明の第２の実施例について、図面を参照しな
がら説明する。Hereinafter, a second embodiment of the present invention will be described with reference to the drawings.
第２図ａは第２の実施例その１の真空容器の縦断面
図、第２図ｂは第２図ａのＡ矢視図、第２図ｃは第２の
実施例その２の真空容器の縦断面図、第２図ｄは第２図
ｃのＡ矢視図である。2a is a longitudinal sectional view of the vacuum vessel of the second embodiment, part 1, FIG. 2b is a view taken in the direction of arrow A in FIG. 2a, and FIG. 2c is the vacuum vessel of the second embodiment, part two. 2d is a view taken in the direction of arrow A in FIG. 2c.
第２図a,第２図b,第２図ｃおよび第２図ｄにおいて、
７は冷却装置である。2a, 2b, 2c and 2d,
7 is a cooling device.
加熱装置６で容器１および蓋２を加熱し容器１および
蓋２の内壁面に付着した気体分子を容器の内部空間５に
放出させ排気装置３で排気した後、容器１および蓋２を
冷却装置７で短時間で冷却しながら排気装置３で排気す
ることにより、温度の関数である容器の内部空間５の圧
力を更に下げる（真空度を高くする。）ことが可能とな
る。The heating device 6 heats the container 1 and the lid 2 to release gas molecules attached to the inner wall surfaces of the container 1 and the lid 2 into the inner space 5 of the container and exhaust the gas by the exhaust device 3. By evacuating the interior space 5 of the container, which is a function of the temperature, by evacuation with the evacuation device 3 while cooling in a short time at 7, it becomes possible to further reduce the degree of vacuum.
以下本発明の第３の実施例について、図面を参照しな
がら説明する。Hereinafter, a third embodiment of the present invention will be described with reference to the drawings.
第３図ａは第３の実施例その１の真空容器の縦断面
図、第３図ｂは第３図ａのＡ矢視図、第３図ｃは第３の
実施例その２の真空容器の縦断面図、第３図ｄは第３図
ｃのＡ矢視図である。FIG. 3a is a longitudinal sectional view of the vacuum vessel of the third embodiment, part 1, FIG. 3b is a view taken in the direction of arrow A of FIG. 3a, and FIG. 3c is the vacuum vessel of the third embodiment, part two. 3d is a view as seen in the direction of arrow A in FIG. 3c.
第３図a,第３図b,第３図ｃおよび第３図ｄにおいて、
８は真空層、10の矢印は真空層８内を真空に保つための
排気方向を示す。3a, 3b, 3c and 3d,
Reference numeral 8 denotes a vacuum layer, and an arrow 10 denotes an exhaust direction for keeping the inside of the vacuum layer 8 at a vacuum.
真空層８を加熱装置６および冷却装置７の外側に備え
ることにより、加熱装置６で容器１および蓋２を加熱す
る際に外部空間への熱の放散を遮断することができる。
また、冷却装置７で容器１および蓋２を冷却する際に外
部空間からの熱伝達を遮断することができる。By providing the vacuum layer 8 outside the heating device 6 and the cooling device 7, when the heating device 6 heats the container 1 and the lid 2, heat dissipation to the external space can be blocked.
Further, when the cooling device 7 cools the container 1 and the lid 2, heat transfer from the external space can be cut off.
発明の効果 以上述べたように、本発明によれば、真空層を加熱装
置および冷却装置の外側に備えることにより、加熱装置
で真空容器を加熱する際に外部空間への放散を遮断し効
率的な加熱ができるとともに、冷却装置で真空容器を冷
却する際に外部空間からの熱伝導を遮断し効率的な冷却
ができる。Effect of the Invention As described above, according to the present invention, by providing the vacuum layer outside the heating device and the cooling device, when the heating device heats the vacuum vessel, the radiation to the external space is cut off and efficient. In addition to efficient heating, cooling of the vacuum vessel by the cooling device cuts off heat conduction from the external space, thereby enabling efficient cooling.
第１図ａは本発明の第１の実施例その１真空容器の縦断
面図、第１図ｂは第１図ａのＡ矢視図、第１図ｃは本発
明の第１の実施例その２の真空容器の縦断面図、第１図
ｄは第１図ｃのＡ矢視図、第２図ａは本発明の第２の実
施例その１の真空容器の縦断面図、第２図ｂは第２図ａ
のＡ矢視図、第２図ｃは本発明の第２の実施例その２の
真空容器の縦断面図、第２図ｄは第２図ｃのＡ矢視図、
第３図ａは本発明の第３の実施例その１の真空容器の縦
断面図、第３図ｂは第３図ａのＡ矢視図、第３図ｃは本
発明の第３の実施例その２の真空容器の縦断面図、第３
図ｄは第３図ｃのＡ矢視図、第４図は従来の真空容器の
縦断面図である。 １……容器、２……蓋、３……排気装置、４……排気
管、６……加熱装置、７……冷却装置、８……真空層。1a is a longitudinal sectional view of a first embodiment of the present invention, part 1 of a vacuum vessel, FIG. 1b is a view taken in the direction of arrow A in FIG. 1a, and FIG. 1c is a first embodiment of the present invention. FIG. 1D is a vertical sectional view of the vacuum vessel of FIG. 1C, FIG. 2A is a longitudinal sectional view of the vacuum vessel of the second embodiment of the present invention, FIG. Figure b shows Figure 2a
FIG. 2C is a longitudinal sectional view of a vacuum vessel of a second embodiment 2 of the present invention, FIG. 2C is a view of FIG.
Fig. 3a is a longitudinal sectional view of a vacuum vessel according to a third embodiment of the present invention, part 1; Fig. 3b is a view as viewed from an arrow A in Fig. 3a; Fig. 3c is a third embodiment of the present invention. Example 2 vertical sectional view of the vacuum vessel,
Fig. D is a view taken in the direction of arrow A in Fig. 3c, and Fig. 4 is a longitudinal sectional view of a conventional vacuum vessel. DESCRIPTION OF SYMBOLS 1 ... Container, 2 ... Cover, 3 ... Exhaust device, 4 ... Exhaust pipe, 6 ... Heating device, 7 ... Cooling device, 8 ... Vacuum layer.
Claims (1)
部空間と外部空間とを隔離する蓋と、前記容器の内部空
間を真空状態に保つための排気装置と、前記排気装置と
前記容器の内部空間とを連通させる排気管と、前記容器
及び前記蓋の壁面内にそれぞれ埋め込まれた加熱装置お
よび冷却装置と、前記容器及び前記蓋の壁面内の前記加
熱装置及び前記冷却装置の外側に真空層を備えているこ
とを特徴とする真空容器。1. A container having a space inside, a lid for separating the internal space of the container from the external space, an exhaust device for keeping the internal space of the container in a vacuum state, the exhaust device and the container An exhaust pipe communicating with the internal space of the container, a heating device and a cooling device embedded in the wall surface of the container and the lid, respectively, and a heating device and a cooling device inside the wall surface of the container and the lid outside the heating device and the cooling device. A vacuum vessel comprising a vacuum layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63127718A JP2757374B2 (en) | 1988-05-25 | 1988-05-25 | Vacuum container |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63127718A JP2757374B2 (en) | 1988-05-25 | 1988-05-25 | Vacuum container |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01296069A JPH01296069A (en) | 1989-11-29 |
| JP2757374B2 true JP2757374B2 (en) | 1998-05-25 |
Family
ID=14966990
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63127718A Expired - Lifetime JP2757374B2 (en) | 1988-05-25 | 1988-05-25 | Vacuum container |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2757374B2 (en) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5826799A (en) * | 1981-08-08 | 1983-02-17 | 日本ケ−ブル・システム株式会社 | Automatic absorbing mechanism for elongation of wire |
| JPS61165096A (en) * | 1984-09-28 | 1986-07-25 | Hitachi Ltd | Vacuum container |
| JPS61202423A (en) * | 1985-03-05 | 1986-09-08 | Matsushita Electric Ind Co Ltd | Amorphous semiconductor manufacturing equipment |
| JPS6248451U (en) * | 1985-09-10 | 1987-03-25 |
-
1988
- 1988-05-25 JP JP63127718A patent/JP2757374B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01296069A (en) | 1989-11-29 |
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