JP2744272B2 - Device test equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Overview] The present invention relates to a test apparatus for testing the operation of a device on a performance board, and particularly to a test apparatus for preventing the occurrence of dew condensation when a low temperature is applied. The purpose of this is to provide a device test device that can effectively prevent the occurrence of dew condensation by sending in and out of the device from the inside to the outside. In a device test apparatus having a performance board for performing an operation test at a low temperature of a device in which wind is blown, a dry hot air generator is provided, and a flow tube through which hot air flows is provided in the performance board, and A hole provided in the performance board to allow hot air to flow out to the performance board surface; Is blown to the device, and the dry hot air from the dry hot air generator is sent to the performance board.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a test apparatus for preventing the occurrence of condensation when a low temperature is applied for a device operation test on a performance board.

Conventionally, when a performance board is used for a device test, it is performed by using two thermostreamers for blowing high temperature and thermostreaming for blowing low temperature air, or by switching the temperature of dry air. Therefore, it is easy to form dew on wirings, terminals, or devices on the performance board particularly when a low temperature is applied. In particular, the influence of dew on the plane of the performance board is large, and it has been demanded to develop an effective dew condensation preventing method.

2. Description of the Related Art When testing the operation of an electronic device, particularly a semiconductor device, it is necessary to change the ambient temperature to a high or low level in order to guarantee the operating temperature. A device is mounted on a circuit using a printed circuit board, and the operation of the device is tested by a semiconductor operation tester (tester) using the connected performance board. The performance board ensures electrical connection between the device and the tester. No measures are taken when the ambient temperature is increased or decreased. The structure for raising and lowering the ambient temperature of the device is as shown in FIG. In FIG. 3, 1 is a device under test, 2 is a performance board,
Reference numeral 3 denotes a tester head, 4-1 and 4-2 denote protection pins, and 5 denotes a thermostreamer as a whole. 5-1 indicates a thermostreamer head, 5-2 indicates a low-temperature air duct, 5-3 indicates a thermostreamer chamber, 5-4 indicates a device cover, and 5-5 indicates a contact portion between the thermostreamer and the performance board. Reference numeral 5-6 denotes a high-temperature air duct for the outer wall of the thermostreamer. The device 1 is powered by the performance board 2 and changes its atmosphere when in operation. The low-temperature air duct 5-2 of the thermostreamer 5 is switched to the high-temperature air duct, and high-temperature air is blown to the device. At this time, the device 1 and the performance board 2 do not have a problem such as dew condensation due to the high-temperature and dried air.

Next, when testing in a low-temperature atmosphere,
For example, a low-temperature wind of, for example, −30 ° C. is sent from the hot air duct 5-6, and a high-temperature wind of, for example, + 50 ° C. is sent from the high-temperature wind guide path 5-6. The low-temperature air uses dry nitrogen, and the inside of the chamber 5-3 and the device cover 5-
The device 1 is cooled via 4. After that, the low-temperature wind flows as indicated by the dashed arrow. The thermostreamer chamber 5-3 comes into contact with the performance board 2 through the contact portion 5-5, and is covered so as to sufficiently cool the device by the low-temperature air, and is brought into contact with, for example, rubber. Since high-temperature air flows through the outer wall of the chamber 5-3 via the conduit 5-6, it is possible to prevent the dew condensation on the outer wall of the chamber 5-3.

[Problems to be Solved by the Invention] Therefore, although the conventional dew condensation prevention measures can prevent the dew condensation in the thermostreamer chamber 5-3 and the outer wall, the contact portion 5-5 between the thermostreamer and the performance board, However, it is not possible to prevent dew condensation on the outside of the chamber, particularly on the back surface of the performance board immediately below the chamber, due to the low-temperature air (see the dashed arrow in FIG. 3) flowing out through the through hole formed in the performance board. This portion is a portion where the wiring is particularly concentrated, and there has been a problem that the electrical characteristics are deteriorated due to dew condensation.

The present invention solves the above-mentioned drawbacks, and a device test in which dew condensation is effectively prevented by sending dry warm air into a performance board on which a device is mounted and flowing out from the inside to the outside. It is intended to provide a device.

[Means for Solving the Problems] FIG. 1 is a diagram showing the principle configuration of the present invention. In FIG. 1, 1 is a device under test, 2 is a performance board, 6 is a dry hot air generator, 7 is a flow tube in the performance board, and 8-1, 8-2,. Show.

The present invention has the following configuration in a device test apparatus having a performance board for performing an operation test of a low-temperature wind of the device 1 when a low-temperature wind is blown from a thermostreamer low-temperature air guide path to the device 1 on the performance board 2. That is, a dry hot air generator 6 is provided, a flow tube 7 through which hot air flows in the performance board 2, and a hole provided in the performance board 2 for allowing hot air to flow from the flow tube 7 to the surface of the performance board 2. 8-1, 8-2,..., And sends the dry hot air from the dry hot air generator 6 to the performance board 2 when the low-temperature air is blown to the device 1.

[Operation] When a low-temperature test is performed on the device under test 1, the atmosphere of the device 1 is set to a low temperature by the same configuration as a conventional device, not shown. At that time, for example, the dry hot air generated in the dry hot air generator 6 at several tens of degrees C flows through the flow pipe 7 and inside the performance board 2, so that the temperature of the performance board 2 itself increases. Further, since dry hot air flows out of the holes 8-1, 8-2,... Provided in the performance board 2, the board surface atmosphere is dried and the temperature is raised. Therefore, the amount of saturated water vapor in the board surface and in the atmosphere near the surface increases, and dew condensation can be prevented.

Embodiment FIG. 2 is a view showing a cross section of a performance board as an embodiment of the present invention, in which a flow tube and an opening are enlarged and exaggerated. In FIG. 2, 9-1, 9-2... Are outflow direction adjusting plates, 10 is an adapter for connecting the dry hot air generator and the flow tube 7, and 11-1, 11-2. Shows a plug provided in an opening for which it is desired to prohibit spillage. The diameter of the flow tube 7 is gradually reduced as the flow tube 7 moves away from the adapter 10 to the inside of the performance board. Therefore, the hot air indicated by the arrows is maintained at a constant back pressure of the hot air at the outlet of each opening 8 to the surface of the performance board, the amount of the outflow becomes uniform at each point of the performance board 2, and the outflow direction is adjusted. The boards 9-1, 9-2,... Are caused to flow horizontally out of the board surface. Therefore, the drying efficiency of the surface of the board 2 can be increased. Although the device under test 1 is not shown, plugs 11-1, 11-2,... Are provided as necessary to provide a portion for preventing hot air from flowing out, and cover with a device cover. is required.

Although the holes 8-1, 8-2,... Are uniformly distributed in the performance board 2 in the above-described embodiment, the holes 8-1, 8-2,.

Also, the outflow direction adjusting plates 9-1, 9-2... Have the outflow direction of the warm air in the horizontal direction on the surface of the board 2, but may be limited to a predetermined direction or not provided at all.

[Effects of the Invention] As described above, according to the present invention, since dry warm air flows out of the performance board to the surface, it is possible to effectively prevent the occurrence of dew condensation on the performance board surface during a low-temperature test of the device. Therefore, it can greatly contribute to improvement in reliability and productivity in device testing.

[Brief description of the drawings]

FIG. 1 is a diagram showing a principle configuration of the present invention, FIG. 2 is a diagram showing a configuration of an embodiment of the present invention, and FIG. 3 is a diagram showing an apparatus configuration at the time of a low-temperature test of a conventional device. DESCRIPTION OF SYMBOLS 1 ... Device under test 2 ... Performance board 6 ... Dry hot air generator 7 ... Flow tube in performance board 8-1, 8-2 ... Holes provided on board

Claims (1)

(57) [Claims] A device test apparatus having a performance board for performing an operation test at a low temperature of a device (1) when a low-temperature air is blown from a thermostreamer low-temperature air passage to a device (1) on a performance board (2). A dry hot air generator (6); a flow pipe (7) through which hot air flows in the performance boat (2); and hot air flowing out of the flow pipe (7) to the surface of the performance board (2). Holes (8-1) (8-2)... Provided in the performance board (2) for drying the device from the dry hot air generator (6) when the low temperature air is blown on the device (1). A device test apparatus having a performance board, wherein hot air is sent to the performance board (2).