JP2721849B2 - Liquid sterilization method - Google Patents

Liquid sterilization method

Info

Publication number
JP2721849B2
JP2721849B2 JP63320286A JP32028688A JP2721849B2 JP 2721849 B2 JP2721849 B2 JP 2721849B2 JP 63320286 A JP63320286 A JP 63320286A JP 32028688 A JP32028688 A JP 32028688A JP 2721849 B2 JP2721849 B2 JP 2721849B2
Authority
JP
Japan
Prior art keywords
liquid
ozone concentration
ozone
water
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP63320286A
Other languages
Japanese (ja)
Other versions
JPH02165032A (en
Inventor
公治 松村
英一 白川
雅文 野村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP63320286A priority Critical patent/JP2721849B2/en
Publication of JPH02165032A publication Critical patent/JPH02165032A/en
Application granted granted Critical
Publication of JP2721849B2 publication Critical patent/JP2721849B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) 本発明は、液体の殺菌方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial application field) The present invention relates to a method for sterilizing a liquid.

(従来の技術) 一般に、液体中に存在する特定の気体の濃度を測定す
る方法としては、従来から液体の一部を採取し、この液
体の所定波長の光の吸収量からこの液体中の気体濃度を
算出する方法が用いられている。
(Prior Art) In general, as a method of measuring the concentration of a specific gas present in a liquid, a part of the liquid is conventionally collected, and the gas in the liquid is determined based on an absorption amount of light of a predetermined wavelength of the liquid. A method of calculating the concentration is used.

例えば、水をオゾンによって殺菌する場合実用上、こ
の水中に残存するオゾンの濃度を測定してモニタリング
する必要があるが、このように水中に溶存するオゾンの
濃度を測定する場合、特にリアルタイムでこの測定値が
必要な場合には、オゾンが波長254nm付近の紫外線に吸
収ピークを持つことから、試料として採取した水の上記
波長の紫外線吸収量を測定し、この紫外線吸収量から水
中に溶存するオゾンの濃度を算出するという方法が従来
一般に用いられているほか、KI法等の滴定法が援用され
ているのが実情である。
For example, in the case of sterilizing water with ozone, it is practically necessary to measure and monitor the concentration of ozone remaining in the water, but when measuring the concentration of ozone dissolved in the water in this way, particularly in real time, When a measured value is required, since ozone has an absorption peak in the ultraviolet light near the wavelength of 254 nm, the amount of ultraviolet absorption at the above wavelength of water collected as a sample is measured, and the amount of ozone dissolved in water is determined from the amount of ultraviolet absorption. In general, a method of calculating the concentration of is conventionally used, and a titration method such as the KI method is used.

(発明が解決しようとする課題) 4 しかしながら、一般に、液体中に存在する特定の気
体の量は非常に微量で、このため上記説明の従来の液体
中の気体濃度測定方法では、微小な吸光度の差を検出可
能に構成された高精度な測定装置が必要となるという問
題あるいは滴定法では原理的に微小濃度の検出には誤差
を招きやすい傾向にあるという問題がある。
(Problems to be Solved by the Invention) 4 However, in general, the amount of a specific gas present in a liquid is very small. There is a problem that a high-precision measuring device configured to detect the difference is required or a problem that the titration method is liable to cause an error in detection of a very small concentration in principle.

本発明は、かかる従来の事情に対処してなされたもの
で、従来に較べて簡便にしかもリアルタイムにて液体中
のオゾン濃度を求めることができ、所望のオゾン濃度で
良好な殺菌を行うことのできる液体の殺菌方法を提供し
ようとするものである。
The present invention has been made in view of such a conventional situation, and it is possible to obtain the ozone concentration in a liquid more easily and in real time than in the past, and to perform good sterilization at a desired ozone concentration. It is an object of the present invention to provide a method for sterilizing a liquid.

[発明の構成] (課題を解決するための手段) すなわち本発明は、殺菌槽内の液体中にオゾンを含む
ガスを供給して、前記液体を殺菌する液体の殺菌方法で
あって、 前記殺菌槽内の気圧と前記殺菌槽内の気相中のオゾン
濃度と前記殺菌槽内の液体の温度とから算出した前記液
体中のオゾン濃度と、実測した前記液体中のオゾン濃度
とのずれ量を求める工程と、 前記前記殺菌槽内の気圧と、前記殺菌槽内の気相中の
オゾン濃度と、前記殺菌槽内の液体の温度と、前記ずれ
量から、前記液体中のオゾン濃度算出して、前記液体中
のオゾン濃度を監視しつつ、前記液体の殺菌を行う工程
とを具備し、 前記殺菌槽内に、前記液体を循環させつつ当該液体の
殺菌を行うことを特徴とする。
[Means for Solving the Problems] That is, the present invention is a liquid sterilization method for sterilizing the liquid by supplying a gas containing ozone into the liquid in the sterilization tank, The difference between the ozone concentration in the liquid calculated from the atmospheric pressure in the tank, the ozone concentration in the gas phase in the sterilization tank, and the temperature of the liquid in the sterilization tank, and the difference between the actually measured ozone concentration in the liquid. The step of obtaining, the atmospheric pressure in the sterilizing tank, the ozone concentration in the gas phase in the sterilizing tank, the temperature of the liquid in the sterilizing tank, and the ozone concentration in the liquid from the deviation amount, A step of sterilizing the liquid while monitoring the ozone concentration in the liquid, and sterilizing the liquid while circulating the liquid in the sterilization tank.

(作 用) 一般には、液体中の気体濃度、例えば水中のオゾン濃
度は、例えばヘンリーの式に代表されるように、水の周
囲の雰囲気の圧力(気圧)と、この雰囲気中のオゾンの
濃度と、水の温度と相関関係を有する。また、一般に水
中のオゾン濃度に較べて雰囲気中のオゾン濃度は高く、
その濃度を高精度で容易に測定することができる。
(Operation) In general, the gas concentration in a liquid, for example, the ozone concentration in water, is represented by the pressure (atmospheric pressure) of the atmosphere around water and the concentration of ozone in this atmosphere, as represented by, for example, Henry's equation. Has a correlation with the temperature of the water. In general, the ozone concentration in the atmosphere is higher than the ozone concentration in water,
Its concentration can be easily measured with high accuracy.

そこで、本発明の液体中の液体の殺菌方法では、上記
相関関係を利用して、容易に測定可能な雰囲気中の特定
気体の濃度と、雰囲気の圧力と、液体の温度とから液体
中の気体の濃度を算出する。例えば、水中のオゾン濃度
を測定する場合、雰囲気(空気)中のオゾン濃度と、雰
囲気の圧力(気圧)と、水の温度とから水中のオゾン濃
度を算出する。
Therefore, in the method for sterilizing a liquid in a liquid according to the present invention, the concentration of a specific gas in the atmosphere, the pressure of the atmosphere, and the temperature of the liquid, which can be easily measured, are utilized by utilizing the above-mentioned correlation. Is calculated. For example, when measuring the ozone concentration in water, the ozone concentration in water is calculated from the ozone concentration in the atmosphere (air), the pressure (atmospheric pressure) of the atmosphere, and the temperature of the water.

したがって、高精度な吸光度測定等を必要とせず、従
来に較べて簡便にしかも必要ならばリアルタイムにて液
体中の気体濃度を求めることができる。
Therefore, the gas concentration in the liquid can be determined more simply and in real time if necessary than in the past, without the need for highly accurate absorbance measurement or the like.

(実施例) 以下、本発明の一実施例を図面を参照して説明する。Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

殺菌槽1は、内部に殺菌処理を行うための水2を貯留
可能に構成されており、その上部および下部には、水2
を導入するための導入配管3および殺菌処理済みの水2
を導出するための導出配管4が接続されている。また、
この殺菌槽1の底部には、水2内にオゾン(オゾンを含
むガス)を供給するためのオゾン供給配管5が設けられ
ており、水2の上部に形成された気相6の部位には、排
気配管7が設けられている。
The sterilization tank 1 is configured to be able to store therein water 2 for performing a sterilization treatment.
Piping 3 for introducing water and sterilized water 2
Is connected. Also,
An ozone supply pipe 5 for supplying ozone (gas containing ozone) into the water 2 is provided at the bottom of the sterilization tank 1. , An exhaust pipe 7 is provided.

すなわち、上記構成の殺菌槽1では、導入配管3によ
って導入した水2を内部に貯留し、この水中2内にオゾ
ン供給配管5からオゾンを含むガスを供給、例えばバブ
リングして水2の殺菌を行うよう構成されている。な
お、この時排気配管7から排気を行うことによって殺菌
槽1内の圧力(気圧)は、ほぼ常圧(1気圧)に保たれ
るよう構成されている。
That is, in the sterilization tank 1 having the above configuration, the water 2 introduced by the introduction pipe 3 is stored therein, and a gas containing ozone is supplied into the water 2 from the ozone supply pipe 5, for example, bubbling is performed to sterilize the water 2. It is configured to do so. At this time, the pressure (atmospheric pressure) in the sterilizing tank 1 is maintained at substantially normal pressure (1 atm) by exhausting air from the exhaust pipe 7.

さらに、この殺菌槽1には、水2中に溶存するオゾン
濃度を測定するためのオゾン濃度測定装置10が設けられ
ている。
Further, the sterilization tank 1 is provided with an ozone concentration measuring device 10 for measuring the concentration of ozone dissolved in the water 2.

このオゾン濃度測定装置10には、殺菌槽1内の気相6
のオゾン濃度を測定するための気中オゾン濃度計11と、
殺菌槽1内の水2の温度を測定するための水温計12が設
けられている。なお、気中オゾン濃度計11としては、例
えば気相中6中の気体の一部を採取して紫外線吸収ある
いは触媒発熱等を利用して気中のオゾン濃度を測定する
周知の気中オゾン濃度計を用いることができる。
The ozone concentration measuring device 10 includes a gas phase 6 in the sterilization tank 1.
An air ozone concentration meter 11 for measuring the ozone concentration of
A water thermometer 12 for measuring the temperature of the water 2 in the sterilization tank 1 is provided. The aerial ozone concentration meter 11 is, for example, a well-known aerial ozone concentration measuring a part of the gas in the gas phase 6 and measuring the ozone concentration in the air by utilizing ultraviolet absorption or catalytic heat generation. Meter can be used.

また、気中オゾン濃度計11および水温計12の測定信号
は、水中オゾン濃度算出部13に入力されるよう構成され
ており、この水中オゾン濃度算出部13では、上記測定信
号から次のようにして水中のオゾン濃度を算出するよう
に構成されている。
Further, the measurement signals of the aerial ozone concentration meter 11 and the water temperature meter 12 are configured to be input to the underwater ozone concentration calculation unit 13, and the underwater ozone concentration calculation unit 13 performs the following based on the measurement signals as follows. To calculate the ozone concentration in the water.

すなわち、殺菌槽1内の水2と気相6との間で、ほぼ
オゾン濃度の平衡が成立しているとすると、殺菌槽1内
が常圧に保たれていることから、常圧におけるヘンリー
の式から、水2中のオゾン濃度CLと、気相6中のオゾン
濃度CGとの間には温度をTとして次式のような関係が導
出される。
That is, assuming that the equilibrium of the ozone concentration is substantially established between the water 2 and the gas phase 6 in the sterilizing tank 1, since the inside of the sterilizing tank 1 is maintained at normal pressure, Henry at normal pressure is maintained. from equation, the ozone concentration C L of water 2, is as follows relationships temperature as T between the ozone concentration C G of the gas phase 6 is derived.

CL=CG・0.604{1+(T/273)}/(1+0.063T) そこで、水中オゾン濃度算出部13では、気中オゾン濃
度計11の測定信号CGおよび水温計12の測定信号Tから上
式により水2中のオゾン濃度CLを算出する。
C L = C G · 0.604 {1+ (T / 273)} / (1 + 0.063T) Therefore, in the underwater ozone concentration calculation unit 13, the measurement signal C G of the aerial ozone concentration meter 11 and the measurement signal T of the water temperature meter 12 are obtained. calculating the ozone concentration C L in water 2 from the above equation from.

ここで、前述したように、水2中のオゾン濃度CLに較
べて気相6中のオゾン濃度CGは高く、容易に測定するこ
とができ、その測定装置も安価である。したがって、こ
の実施例では、従来方法に較べて安価な装置で、簡便に
水2中のオゾン濃度CLを求めることができる。
Here, as described above, the ozone concentration C G of the gas phase 6 compared to the ozone concentration C L in water 2 is high, can be easily measured, the measuring device is also inexpensive. Thus, in this embodiment, an inexpensive apparatus compared to conventional methods, conveniently it is possible to determine the ozone concentration C L in water 2.

また、上述したようなオゾンによる水の殺菌は、例え
ば第2図に示すように、冷房装置等の熱交換器31との間
をポンプ32によって循環される冷却水33をファン34によ
って冷却するクーリングタワー35における冷却水33の殺
菌に利用することができる。
The sterilization of water with ozone as described above is performed, for example, as shown in FIG. 2, by a cooling tower that cools a cooling water 33 circulated by a pump 32 between a heat exchanger 31 such as a cooling device by a fan 34. It can be used to sterilize the cooling water 33 in 35.

すなわち、このような場合、例えばクーリングタワー
35内の冷却水33中にオゾンを含むガスをバブリングする
オゾン供給機構36と、冷却水33上を覆う排気孔37を有す
る半密閉内蓋38を設けて冷却水33のオゾンによる殺菌を
行う。この場合、冷却水33がポンプ32によって循環され
るため、クーリングタワー35内の冷却水33と、その上部
に形成された気相39との間ではオゾン濃度の平衡が成立
していないと考えられる。このような場合は、予め上述
した式によって算出される値からのずれを実測によって
求めておき、オゾン濃度測定装置10の水中オゾン濃度算
出部13aにおいて、このずれを補正するよう構成すれ
ば、オゾン濃度の平衡が成立していない系においても本
発明方法を適用することができる。
That is, in such a case, for example, the cooling tower
An ozone supply mechanism 36 for bubbling a gas containing ozone into cooling water 33 in 35 and a semi-closed inner lid 38 having an exhaust hole 37 for covering the cooling water 33 are provided to sterilize the cooling water 33 with ozone. In this case, since the cooling water 33 is circulated by the pump 32, it is considered that the equilibrium of the ozone concentration is not established between the cooling water 33 in the cooling tower 35 and the gas phase 39 formed thereon. In such a case, if the deviation from the value calculated by the above-described formula is previously obtained by actual measurement, and the underwater ozone concentration calculating unit 13a of the ozone concentration measuring device 10 is configured to correct this deviation, the ozone The method of the present invention can be applied to a system in which concentration equilibrium is not established.

[発明の効果] 上述のように、本発明の液体の殺菌方法では、従来に
較べて簡便にしかもリアルタイムにて液体中のオゾン濃
度を求めることができ、所望のオゾン濃度で良好な殺菌
を行うことができる。
[Effects of the Invention] As described above, in the liquid sterilization method of the present invention, the ozone concentration in the liquid can be obtained more easily and in real time than in the past, and good sterilization is performed at a desired ozone concentration. be able to.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明の一実施例の液体中の気体濃度測定方法
を説明するための殺菌槽およびオゾン濃度測定装置の構
成を示す図、第2図は他の実施例方法を説明するための
クーリングタワーおよびオゾン濃度測定装置の構成を示
す図である。 1……殺菌槽、2……水、3……導入配管、4……導出
配管、5……オゾン供給配管、6……気相、7……排気
配管、10……オゾン濃度測定装置、11……気中オゾン濃
度計、12……水温計、13……水中オゾン濃度算出部。
FIG. 1 is a view showing a constitution of a sterilizing tank and an ozone concentration measuring device for explaining a method of measuring a gas concentration in a liquid according to one embodiment of the present invention, and FIG. 2 is a diagram for explaining a method of another embodiment. FIG. 3 is a diagram illustrating a configuration of a cooling tower and an ozone concentration measuring device. 1 ... sterilizing tank, 2 ... water, 3 ... introduction pipe, 4 ... outlet pipe, 5 ... ozone supply pipe, 6 ... gas phase, 7 ... exhaust pipe, 10 ... ozone concentration measuring device, 11… Aerial ozone concentration meter, 12… Water temperature meter, 13… Ozone concentration calculator in water.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】殺菌槽内の液体中にオゾンを含むガスを供
給して、前記液体を殺菌する液体の殺菌方法であって、 前記殺菌槽内の気圧と前記殺菌槽内の気相中のオゾン濃
度と前記殺菌槽内の液体の温度とから算出した前記液体
中のオゾン濃度と、実測した前記液体中のオゾン濃度と
のずれ量を求める工程と、 前記前記殺菌槽内の気圧と、前記殺菌槽内の気相中のオ
ゾン濃度と、前記殺菌槽内の液体の温度と、前記ずれ量
から、前記液体中のオゾン濃度算出して、前記液体中の
オゾン濃度を監視しつつ、前記液体の殺菌を行う工程と
を具備し、 前記殺菌槽内に、前記液体を循環させつつ当該液体の殺
菌を行うことを特徴とする液体の殺菌方法。
1. A method for sterilizing a liquid, comprising supplying a gas containing ozone into a liquid in a sterilizing tank to sterilize the liquid, wherein a gas pressure in the sterilizing tank and a gas phase in the sterilizing tank. A step of calculating the difference between the ozone concentration in the liquid calculated from the ozone concentration and the temperature of the liquid in the sterilization tank, and a deviation amount between the actually measured ozone concentration in the liquid, and the air pressure in the sterilization tank, The ozone concentration in the gas phase in the sterilization tank, the temperature of the liquid in the sterilization tank, and the ozone concentration in the liquid are calculated from the amount of deviation, while monitoring the ozone concentration in the liquid, And sterilizing the liquid while circulating the liquid in the sterilization tank.
JP63320286A 1988-12-19 1988-12-19 Liquid sterilization method Expired - Fee Related JP2721849B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63320286A JP2721849B2 (en) 1988-12-19 1988-12-19 Liquid sterilization method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63320286A JP2721849B2 (en) 1988-12-19 1988-12-19 Liquid sterilization method

Publications (2)

Publication Number Publication Date
JPH02165032A JPH02165032A (en) 1990-06-26
JP2721849B2 true JP2721849B2 (en) 1998-03-04

Family

ID=18119810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63320286A Expired - Fee Related JP2721849B2 (en) 1988-12-19 1988-12-19 Liquid sterilization method

Country Status (1)

Country Link
JP (1) JP2721849B2 (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926593U (en) * 1972-06-05 1974-03-07

Also Published As

Publication number Publication date
JPH02165032A (en) 1990-06-26

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