JP2717594B2 - Diamond coated cutting tool and method of manufacturing the same - Google Patents

Diamond coated cutting tool and method of manufacturing the same

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Publication number
JP2717594B2
JP2717594B2 JP2157615A JP15761590A JP2717594B2 JP 2717594 B2 JP2717594 B2 JP 2717594B2 JP 2157615 A JP2157615 A JP 2157615A JP 15761590 A JP15761590 A JP 15761590A JP 2717594 B2 JP2717594 B2 JP 2717594B2
Authority
JP
Japan
Prior art keywords
diamond
coated
cutting tool
cutting edge
mask material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2157615A
Other languages
Japanese (ja)
Other versions
JPH0448077A (en
Inventor
一隆 神田
精己 竹端
昇一 吉田
憲一郎 山岸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nachi Fujikoshi Corp
Original Assignee
Nachi Fujikoshi Corp
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Filing date
Publication date
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Priority to JP2157615A priority Critical patent/JP2717594B2/en
Publication of JPH0448077A publication Critical patent/JPH0448077A/en
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Publication of JP2717594B2 publication Critical patent/JP2717594B2/en
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Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は超硬合金基体上に多結晶質のダイヤモンド膜
を被覆したことを特徴とする切削工具に関し、さらに詳
しくは、切削工具の切れ刃部および切れ刃部の近傍を中
心とする切削工具の作用部にのみダイヤモンド膜を被覆
することによって、切り屑の処理性能を向上させ、さら
に切削工具基体の変形を無くすると共に、切れ刃部のダ
イヤモンド膜の中心線平均粗さを0.5μm以下にしたこ
とによって切れ味を向上させたことを特徴とするダイヤ
モンド被覆切削工具に関する。
Description: TECHNICAL FIELD The present invention relates to a cutting tool characterized by coating a polycrystalline diamond film on a cemented carbide substrate, and more particularly, to a cutting edge of the cutting tool. By coating the diamond film only on the working portion of the cutting tool centered on the vicinity of the cutting portion and the cutting edge portion, the processing performance of the chip is improved, and furthermore, the deformation of the cutting tool base is eliminated, and the cutting edge portion is removed. The present invention relates to a diamond-coated cutting tool having improved sharpness by reducing the center line average roughness of a diamond film to 0.5 μm or less.

(従来の技術) 特開昭58−91100号公報などに示される熱フィラメン
トCVD法、特開昭58−110494号公報などに示されるマイ
クロ波プラズマCVD法、特開昭63−85094号公報などに示
される直流放電プラズマCVD法、特開昭64−33096号公報
に示される熱プラズマCVD法などのダイヤモンドの気相
合成方法が発明されて以来、例えば特開昭60−208473号
公報あるいは雑誌ニューダイヤモンド;Vol3,No.3,p26−
31(1987)に示されるようにこの方法の切削工具への応
用に関する開発が盛んに行われてきた。気相合成法から
得られるダイヤモンド膜には、CVD法で得られる自形面
を持った多結晶質のダイヤモンド膜と、その他の方法で
得られ非晶質炭素が主成分であるダイヤモンド様膜があ
る。一般に前者のダイヤモンド膜は後者に較べ硬度が高
く、高い耐摩耗性が要求される切削工具の被膜として適
用するものである。本発明は前者のダイヤモンド膜を切
削工具基体上へ被覆した切削工具に関するものである。
(Prior Art) A hot filament CVD method disclosed in JP-A-58-91100, a microwave plasma CVD method disclosed in JP-A-58-110494, and a JP-A-63-85094 are disclosed. Since the gas-phase synthesis method of diamond such as the direct-current discharge plasma CVD method shown in JP-A-64-33096 and the thermal plasma CVD method shown in JP-A-64-33096 was invented, for example, JP-A-60-208473 or New Diamond Magazine ; Vol3, No.3, p26−
As shown in 31 (1987), development of application of this method to cutting tools has been actively conducted. The diamond film obtained by the vapor phase synthesis method includes a polycrystalline diamond film having an automorphic surface obtained by the CVD method and a diamond-like film obtained by other methods and containing amorphous carbon as a main component. is there. Generally, the former diamond film has a higher hardness than the latter, and is used as a film of a cutting tool that requires high wear resistance. The present invention relates to a cutting tool in which the former diamond film is coated on a cutting tool base.

しかしながら、一般にダイヤモンド膜を切削工具上へ
被覆すると、被覆しない切削工具に較べ切り屑の流れが
悪くなり切れ味も悪くなるという欠点があった。また、
必要な部分以外へも被覆されることにより切削工具が所
定の寸法から外れるという問題点もあった。
However, in general, when a diamond film is coated on a cutting tool, there is a disadvantage in that the flow of chips becomes worse and the sharpness becomes worse as compared with an uncoated cutting tool. Also,
There is also a problem that the cutting tool deviates from a predetermined size by being coated on a portion other than a necessary portion.

(発明が解決しようとする課題) 上述の切り屑の流れが悪くなる原因は前記CVD法によ
り被覆されたダイヤモンド膜が自形面を持った多結晶質
であるため、表面の凹凸が大きく、したがって切り屑と
ダイヤモンド膜の間の摩擦係数が大きくなるためであ
る。この影響は膜厚の増大とともに大きくなり表面の面
粗さが1μm以上でその影響が顕著となる。また、ダイ
ヤモンド膜被膜による切れ味低下の原因は被覆により切
れ刃が丸みをおびる点にある。切れ刃の丸みは膜厚とと
もに増大し、その結果膜厚とともに切れ味は悪くなる。
また、切削工具が所定の寸法から外れる要因としては、
被覆したダイヤモンド膜が厚すぎることの他にダイヤモ
ンド膜に生ずる内部応力のため切削工具が湾曲すること
が挙げられる。
(Problems to be Solved by the Invention) The cause of the above-mentioned poor chip flow is that the diamond film coated by the CVD method is polycrystalline having an automorphic surface, so that the surface unevenness is large, and This is because the coefficient of friction between the chips and the diamond film increases. This effect increases as the film thickness increases, and becomes significant when the surface roughness is 1 μm or more. The cause of the decrease in sharpness due to the diamond film coating is that the cutting edge is rounded by the coating. The roundness of the cutting edge increases with the film thickness, and as a result, the sharpness worsens with the film thickness.
Also, factors that cause the cutting tool to deviate from the specified dimensions include:
In addition to the coated diamond film being too thick, the cutting tool may be curved due to internal stresses generated in the diamond film.

CVD法により硬度の高いダイヤモンド膜を被覆する場
合には現在のところダイヤモンド膜の表面が粗くなり切
り屑の流れが悪くなるのは止むをえない現象である。ま
た、膜厚の増加とともに切れ刃が丸みをおびる現象や被
覆したダイヤモンド膜に生ずる内部応力で肉厚の薄い切
削工具が湾曲する現象もダイヤモンドを被覆したことに
より不可避的に起きる現象である。
At present, when a diamond film having a high hardness is coated by the CVD method, it is an unavoidable phenomenon that the surface of the diamond film becomes rough and the flow of chips is deteriorated. Further, a phenomenon in which the cutting edge becomes rounder as the film thickness increases and a phenomenon in which a thin cutting tool curves due to internal stress generated in the coated diamond film are unavoidable phenomena caused by coating the diamond.

(課題を解決するための手段) かかるダイヤモンド被覆の不都合を最小限に抑えるた
め、本発明では必要部以外にダイヤモンドが被覆されな
いかあるいは被覆されても後の処理工程で容易に除去で
きるような方法を発明し、その実施を試みた。
(Means for Solving the Problems) In order to minimize such inconvenience of diamond coating, in the present invention, a method is employed in which diamond is not coated except for necessary parts, or even if coated, diamond can be easily removed in a later processing step. And tried to implement it.

ダイヤモンド膜を付着強度高く基体上に被覆する試み
は従来より行われてきたが、この中からダイヤモンドと
の間で高い付着強度が得られる材料は比較的少ないこと
が判っている。高い付着強度が得られる材料としては、
例えばTa、W、Mo、Siなどの元素および炭化タングステ
ンあるいは窒化珪素などのセラミックスがあげられる。
そこで、これらを除く材料、すなわちダイヤモンドとの
間の付着強度の低い材料(マスク材)をダイヤモンド被
覆処理の前に切削工具基体上に被覆し、次いで付着強度
高くダイヤモンド膜を被覆したい部位すなわち切り刃お
よび切れ刃部近傍のマスク材を研磨あるいは化学的な方
法による溶解で除去し、切削工具基体の生地を出す。あ
るいは切れ刃部近傍に予めマスク材被覆防止材を被覆
し、マスク材被覆後、マスク材被覆防止材を除去するこ
とによって切れ刃部及び切れ刃部近傍のみを生地のまま
とする。しかる後にダイヤモンド被覆処理を行うことに
よって、切れ刃近傍に付着性良くダイヤモンドを被覆
し、他の部分すなわちマスク材の残っている部分につい
ては付着強度が低いためにダイヤモンド膜被覆処理後ダ
イヤモンド膜と切削工具基体との熱膨張係数差による応
力のため自然に剥離するか、あるいは小さな力を加える
ことによって簡単に除去することができる。
Attempts to coat a diamond film on a substrate with high adhesive strength have been made in the past, but it has been found that relatively few of these materials can provide high adhesive strength with diamond. Materials that can provide high adhesion strength include:
For example, there are elements such as Ta, W, Mo, and Si, and ceramics such as tungsten carbide and silicon nitride.
Therefore, a material other than these, that is, a material (mask material) having low adhesion strength to diamond is coated on the cutting tool base before the diamond coating treatment, and then a portion where the diamond film is to be coated with high adhesion strength, that is, a cutting edge Then, the mask material in the vicinity of the cutting edge portion is removed by polishing or dissolving by a chemical method, and the material of the cutting tool base is obtained. Alternatively, a mask material coating prevention material is previously coated on the vicinity of the cutting edge portion, and after the mask material coating, the mask material coating prevention material is removed, so that only the cutting edge portion and the vicinity of the cutting edge portion remain as cloth. After that, the diamond coating process is performed to coat the diamond with good adhesion to the vicinity of the cutting edge, and the other portion, that is, the remaining portion of the mask material, has low adhesion strength. It can be spontaneously peeled off due to a stress due to a difference in thermal expansion coefficient from the tool base, or can be easily removed by applying a small force.

切削工具基体としては少なくともその表層部分がダイ
ヤモンド膜との間で高い付着強度が得られる材料から成
っている必要がある。本発明ではその基体として、切削
工具材料として広く用いられており、かつダイヤモンド
膜との間で高い付着強度の得られる材料として炭化タン
グステン基超硬合金を母材として用いた。
At least the surface layer of the cutting tool base must be made of a material that can provide high adhesion strength with the diamond film. In the present invention, a tungsten carbide-based cemented carbide is used as a base material, which is widely used as a cutting tool material and has a high adhesion strength with a diamond film.

マスク材としては前記のダイヤモンド膜との間の付着
強度が高くない材料であり、かつダイヤモンド膜合成温
度(600〜1000℃)まで安定に基体表面に残っている材
料であれば何でも構わない。ちなみに、マスク材として
用いられる材料及びマスク材とならない材料とそれらの
特性を第1表に示した。また、マスク材の被覆は真空蒸
着法、イオンプレーティング法、スパッタ蒸着法などの
物理蒸着法、熱CVD法、プラズマCVD法などの各種CVD
法、溶射法、印刷法および鍍金法などの様々な公知の方
法で行うことができる。
As the mask material, any material may be used as long as it is a material that does not have a high adhesion strength with the diamond film and that remains stably on the substrate surface up to the diamond film synthesis temperature (600 to 1000 ° C.). Table 1 shows the materials used as the mask material and the materials that are not used as the mask material and their properties. In addition, the mask material is coated by various physical vapor deposition methods such as a vacuum vapor deposition method, an ion plating method, a sputter vapor deposition method, a thermal CVD method, and a plasma CVD method.
It can be performed by various known methods such as a spraying method, a thermal spraying method, a printing method, and a plating method.

マスク材を被覆し切れ刃部および切れ刃近傍以外の切
り屑の流れる部位へのダイヤモンド膜の被覆を防止する
ことにより切り屑の流れは大幅に改善される。しかし、
ダイヤモンドの膜厚が例えば5μm程度までのときは膜
表面の中心線平均粗さを0.5μm以下に被覆できるので
問題がないのであるが、これを越えると膜厚とともに切
れ刃近傍のダイヤモンド膜の面粗さのため切り屑の流れ
は悪くなり、また膜厚とともに切れ刃の丸みが大きくな
り切れ味が悪くなる。
By coating the mask material to prevent the diamond film from covering the cutting edge portion and the portion where the chip flows except the vicinity of the cutting edge, the flow of the chip is greatly improved. But,
When the diamond film thickness is, for example, about 5 μm, there is no problem because the center line average roughness of the film surface can be covered to 0.5 μm or less. Due to the roughness, the flow of the swarf becomes worse, and the roundness of the cutting edge increases with the film thickness, resulting in poor sharpness.

この問題を解決するため、本発明ではダイヤモンド膜
被覆後、切れ刃のすくい面に相当する部分もしくは逃げ
面に相当する部分またはその両方のダイヤモンド膜を研
磨し、その面粗さを1μm以下とすることによって切り
屑の流れが良く切れ味の良いダイヤモンド被覆切削工具
を製造することができた。また、切れ刃部以外へのダイ
ヤモンド膜の被覆を制限することによって切削工具の変
形を最小限に留めることができた。以下にその詳細を実
施例をもって示す。
In order to solve this problem, in the present invention, after coating the diamond film, the diamond film of the portion corresponding to the rake face and / or the flank face of the cutting edge is polished to reduce the surface roughness to 1 μm or less. As a result, it was possible to produce a diamond-coated cutting tool with good chip flow and sharpness. Also, the deformation of the cutting tool could be minimized by limiting the coating of the diamond film on portions other than the cutting edge. The details will be shown below with examples.

(実施例) 実施例1 直径6mmの超硬合金製ドリルを用い、先ずこのドリル
表面にイオンプレーティング法によりマスク材としての
炭化チタン膜を3μmの厚さに被覆した。次いでこのド
リルの主切れ刃の逃げ面及び先端から12mmまでのマージ
ン部の炭化チタン膜を研削により除去し、しかるのちこ
のドリルにマイクロ波プラズマCVD法によりダイヤモン
ド被覆処理を行った。ダイヤモンド被覆処理中はマスク
材を被覆した部分および除去した部分ともにダイヤモン
ドが付着していたが、被覆処理を終えてドリルを室温ま
で冷却した後はマスク材表面のダイヤモンド膜はすべて
剥離し、マスク材を除去した部分のダイヤモンド膜のみ
が残っていた。この処理によりドリルのマスク材を除去
した部分に被覆されたダイヤモンドの膜厚は5μmであ
った。
Example 1 Using a cemented carbide drill having a diameter of 6 mm, a titanium carbide film as a mask material was first coated on the surface of the drill to a thickness of 3 μm by an ion plating method. Next, the flank of the main cutting edge of the drill and the titanium carbide film in the margin portion from the tip to 12 mm were removed by grinding, and then the diamond was coated with the diamond by a microwave plasma CVD method. During the diamond coating process, diamond was adhered to both the part where the mask material was coated and the part where it was removed, but after the coating process was completed and the drill was cooled to room temperature, all the diamond film on the mask material surface was peeled off and the mask material was removed. Only the diamond film of the portion from which was removed remained. The film thickness of the diamond coated on the portion where the drill mask material was removed by this treatment was 5 μm.

比較のために同じ寸法のドリルにマスク材を被覆せず
にダイヤモンド被覆処理を行い、ドリルの先端から12mm
までの表面全体にダイヤモンド膜を5μmの厚さで被覆
した。
For comparison, the same size drill is coated with diamond without coating the mask material, 12 mm from the tip of the drill
The entire surface was coated with a diamond film at a thickness of 5 μm.

本発明のドリルおよび比較のために製作したドリルの
両者を用いてアルミ合金板の穴明け加工を行った。加工
の条件は以下の通りである。
Drilling of an aluminum alloy plate was performed using both the drill of the present invention and a drill manufactured for comparison. The processing conditions are as follows.

被加工材 アルミ合金(ADC12) 板 厚 12mm 回転数 8000rpm 送り速度 4000mm/min 切削油 水溶性エマルジョン 加工試験の結果、本発明のドリルは切り屑の流れが良
く、穴の精度も安定していた。これに対し、比較ドリル
は切り屑が太く曲がり、詰まり気味となるとともに切削
抵抗も増えた。
Work material Aluminum alloy (ADC12) Plate thickness 12mm Rotation speed 8000rpm Feed speed 4000mm / min Cutting oil Water-soluble emulsion As a result of the processing test, the drill of the present invention showed good chip flow and stable hole accuracy. On the other hand, in the comparative drill, the chips were bent thickly, tended to be clogged, and the cutting resistance increased.

実施例2 直径3mmの超硬合金製ドリルの表面にマスク材としてF
e−Cr合金をスパッタ蒸着法にて3μmの厚さで被覆し
た。次いで、このドリルの主切れ刃の第1逃げ面および
先端から6mmまでのマージン部のマスク材を研削により
除去し、しかる後にマイクロ波CVD法にてダイヤモンド
を15μmの厚さで被覆した。被覆処理終了後のマスク材
上のダイヤモンド膜は母材から浮き上がっており、軽く
力を加えることにより容易に除去できた。ダイヤモンド
被覆終了後、このドリルに被覆されたダイヤモンド膜表
面を研磨し膜の表面を平滑にし、かつダイヤモンド被覆
により丸みをおびた切れ刃を鋭利にした。
Example 2 F was used as a mask material on the surface of a drill made of cemented carbide having a diameter of 3 mm.
The e-Cr alloy was coated with a thickness of 3 μm by a sputter deposition method. Then, the first flank of the main cutting edge of the drill and the mask material in the margin portion from the tip to 6 mm were removed by grinding, and then the diamond was coated with a thickness of 15 μm by microwave CVD. The diamond film on the mask material after the coating process was lifted from the base material and could be easily removed by applying a light force. After completion of the diamond coating, the surface of the diamond film coated with the drill was polished to smooth the surface of the film, and the rounded cutting edge was sharpened by the diamond coating.

また、比較用として同じ寸法のドリルにマスク材を被
覆せずに先端から6mmの部分にダイヤモンドを15μmの
厚さで被覆した。
For comparison, a drill having a thickness of 15 μm was coated on a portion 6 mm from the tip without coating the mask material on a drill having the same dimensions.

本発明のドリルおよび従来法による比較ドリルを用い
てガラス繊維強化プラスチックの穴加工試験を行った。
加工条件は以下のとおりである。
A drilling test was performed on glass fiber reinforced plastic using the drill of the present invention and a comparative drill according to a conventional method.
The processing conditions are as follows.

被加工材 ガラス繊維強化プラスチック 板 厚 3mm 回転数 40000rpm 送り速度 500mm/min 切削油剤 なし 試験の結果、本発明ドリルはガラス繊維の切断性能と
切り屑の排出性が良く、その結果穴の寸法精度も高かっ
た。これに対し、比較ドリルは切れ刃が丸みをおびてい
るため繊維の切断性能が悪く穴の出口側にバリを生じ
た。また、切り屑の排出性も悪かった。また、ドリルの
寿命は本発明および従来法によるドリルとも約20000穴
であった。
Work material Glass fiber reinforced plastic plate Thickness 3mm Rotation speed 40000rpm Feed rate 500mm / min Cutting oil None As a result of the test, the drill of the present invention has good glass fiber cutting performance and good chip evacuation, and as a result, hole dimensional accuracy it was high. On the other hand, in the comparative drill, since the cutting edge was rounded, the cutting performance of the fiber was poor and burrs were generated on the outlet side of the hole. In addition, the discharge of chips was poor. The life of the drill was about 20,000 for both the present invention and the conventional drill.

実施例3 第1図にその概略図と断面図を示す超硬合金製のカッ
ター刃1を準備し、第2図に示す手順にてダイヤモンド
被覆カッター刃を作成した。すなわち、まず第2図aに
示す切れ刃2の先端から同図bのように両側1mmの範囲
を熱可塑性樹脂3で被覆し、次いで同図cのようにカッ
ター刃全体に2μmの厚さのNi鍍金4を施した。その
後、同図dに示すようにカッター刃の切れ刃部を被覆し
ていた樹脂を剥し、熱フィラメントCVD法により同図e
のようにダイヤモンドの被覆処理を行った。カッター刃
1の切れ刃部2には約15μmのダイヤモンド膜5が合成
され、鍍金部のダイヤモンド膜は被覆処理後全て剥離し
ていた。さらに同図fのようにダイヤモンド膜の表面を
研磨し、その中心線平均粗さを0.5μm以下とした。
Example 3 A cemented carbide cutter blade 1 whose schematic diagram and cross-sectional view are shown in FIG. 1 was prepared, and a diamond-coated cutter blade was prepared according to the procedure shown in FIG. That is, first, a range of 1 mm on both sides from the tip of the cutting edge 2 shown in FIG. 2A is coated with the thermoplastic resin 3 as shown in FIG. 2B, and then the entire cutter blade is formed to a thickness of 2 μm as shown in FIG. Ni plating 4 was applied. Thereafter, the resin covering the cutting edge portion of the cutter blade was peeled off as shown in FIG.
A diamond coating process was performed as follows. A diamond film 5 of about 15 μm was synthesized on the cutting edge portion 2 of the cutter blade 1, and the diamond film of the plated portion was all peeled off after the coating treatment. Further, the surface of the diamond film was polished as shown in FIG.

比較用として鍍金処理をしないカッター刃に15μmの
膜厚のダイヤモンド膜を被覆したところ刃が湾曲して寸
法が規格外となった。これはダイヤモンド膜がカッター
刃の両面に等しい厚さで被覆されないため、ダイヤモン
ド膜と超硬合金の熱膨張係数差による熱応力が刃の両面
で大きく違うことによるものである。切れ刃近傍のみに
ダイヤモンドを被覆した本発明の方法ではこの熱応力の
影響が小さいため湾曲せず、その後の工程のダイヤモン
ド膜の表面研磨加工も容易に行うことができ切削性能の
優れたカッター刃を得ることができた。
As a comparative example, a non-plated cutter blade was coated with a diamond film having a thickness of 15 μm. This is because the diamond film is not coated on both sides of the cutter blade with the same thickness, and the thermal stress due to the difference in thermal expansion coefficient between the diamond film and the cemented carbide is greatly different on both sides of the blade. According to the method of the present invention in which diamond is coated only in the vicinity of the cutting edge, the effect of this thermal stress is small, so that the method does not bend, and the surface of the diamond film in the subsequent step can be easily polished to provide excellent cutting performance. Could be obtained.

(効果) 本発明の方法によれば、切削工具の切れ刃の近傍のみ
にダイヤモンド膜を被覆することができ、したがって切
り屑の流れを阻害する要因やダイヤモンド膜を被覆した
ことによる切削工具の変形を最小限に抑えることができ
た。さらにこれらの切削工具の切れ刃に被覆されたダイ
ヤモンド膜の逃げ面側あるいはすくい面側ないしはその
両側を研磨によりその表面を平滑にすることにより切り
屑の流れが良く切れ味の優れた切削工具を提供すること
ができ、産業上非常に有益である。
(Effect) According to the method of the present invention, the diamond film can be coated only in the vicinity of the cutting edge of the cutting tool. Therefore, a factor that hinders the flow of chips and deformation of the cutting tool due to the coating of the diamond film. Was minimized. Furthermore, the flank side or rake face side or both sides of the diamond film coated on the cutting edge of these cutting tools is smoothed by polishing the surface to provide cutting tools with good chip flow and excellent sharpness. Can be industrially very beneficial.

【図面の簡単な説明】[Brief description of the drawings]

第1図イは本発明の実施例に係るカッター刃の斜視図、
同図ロは同図イのA−A線による断面図、第2図a乃至
fは本発明のダイヤモンド被覆カッター刃の被覆処理工
程を示した概略図である。 1……カッター刃基体 2……カッター刃の切れ刃 3……熱可塑性樹脂 4……Ni鍍金層 5……ダイヤモンド膜 6……表面研磨後のダイヤモンド膜
FIG. 1A is a perspective view of a cutter blade according to an embodiment of the present invention,
FIG. 2B is a cross-sectional view taken along the line AA of FIG. 1A, and FIGS. DESCRIPTION OF SYMBOLS 1 ... Cutter blade base 2 ... Cutter blade cutting edge 3 ... Thermoplastic resin 4 ... Ni plating layer 5 ... Diamond film 6 ... Diamond film after surface polishing

フロントページの続き (72)発明者 山岸 憲一郎 富山県富山市石金20番地 株式会社不二 越内 (56)参考文献 特開 平3−215669(JP,A)Continuation of front page (72) Inventor Kenichiro Yamagishi 20 Ishigane, Toyama City, Toyama Prefecture Fuji Koshiuchi Co., Ltd. (56) References JP-A-3-215669 (JP, A)

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】超硬合金製の切削工具基体の切れ刃部及び
切れ刃部近傍にのみダイヤモンド被覆膜を形成し、該ダ
イヤモンド被覆膜の膜表面を研磨し、その中心線平均粗
さを0.5μm以下としたことを特徴とするダイヤモンド
被覆切削工具。
1. A diamond coating film is formed only on a cutting edge portion and a vicinity of a cutting edge portion of a cutting tool substrate made of a cemented carbide, and the film surface of the diamond coating film is polished. The diamond-coated cutting tool is characterized by having a diameter of 0.5 μm or less.
【請求項2】超硬合金製の切削工具基体表面の切れ刃部
及び切れ刃部近傍にマスク材付着防止材を被覆したの
ち、基体表面にダイヤモンドとの付着強度の低いマスク
材を被覆し、次いで前記マスク材付着防止材を除去し、
しかるのちにCVD法にてダイヤモンド被覆処理を施し
て、前記切れ刃部及び切れ刃部近傍にのみダイヤモンド
を被覆せしめることを特徴とするダイヤモンド被覆切削
工具の製造方法。
2. A cutting tool portion made of a cemented carbide alloy and a cutting edge portion on the surface of the cutting tool substrate and a vicinity of the cutting edge portion coated with a mask material adhesion preventing material, and then the substrate surface is coated with a mask material having low adhesion strength to diamond. Next, the mask material adhesion preventing material is removed,
A method of manufacturing a diamond-coated cutting tool, wherein a diamond coating process is performed thereafter by a CVD method so that diamond is coated only on the cutting edge portion and near the cutting edge portion.
【請求項3】前記マスク材は元素周期律表の4A族、Taを
除く5A族、MoおよびWを除く6A族、8族および1B族元
素、並びにB、AlおよびSi各元素の単体もしくは二種以
上の合金、あるいは前記元素の一種または二種以上の炭
化物、酸化物、窒化物、炭窒化物、酸窒化物および黒鉛
の一種からなる単層、または二種以上からなる単層また
は複層から構成されていることを特徴とする請求項2に
記載のダイヤモンド被覆切削工具の製造方法。
3. The mask material is a single or double element of Group 4A, Group 5A excluding Ta, Group 6A, Group 8 and Group 1B excluding Mo and W, and each element of B, Al and Si in the periodic table of elements. Alloys of at least one kind, or a single layer of one or more of carbides, oxides, nitrides, carbonitrides, oxynitrides, and graphite of the above elements, or a single layer or a multilayer of two or more kinds The method for producing a diamond-coated cutting tool according to claim 2, wherein the method comprises:
【請求項4】請求項3に記載の構成からなるマスク材
を、超硬合金製の切削工具基体表面に被覆し、次いで基
体の切れ刃部および切れ刃部近傍に被覆された前記マス
ク材を除去し、次いでCVD法にてダイヤモンド被覆処理
を施して、前記マスク材を除去した部分にのみダイヤモ
ンドを被覆せしめることを特徴とするダイヤモンド被覆
切削工具の製造方法。
4. A mask material having the structure described in claim 3 is coated on the surface of a cemented carbide cutting tool substrate, and then the mask material coated on the cutting edge portion and the vicinity of the cutting edge portion of the substrate is removed. A method for producing a diamond-coated cutting tool, characterized in that the diamond-coated cutting tool is removed and then coated with diamond by a CVD method so that only the portion from which the mask material has been removed is coated with diamond.
JP2157615A 1990-06-18 1990-06-18 Diamond coated cutting tool and method of manufacturing the same Expired - Lifetime JP2717594B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2157615A JP2717594B2 (en) 1990-06-18 1990-06-18 Diamond coated cutting tool and method of manufacturing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2157615A JP2717594B2 (en) 1990-06-18 1990-06-18 Diamond coated cutting tool and method of manufacturing the same

Publications (2)

Publication Number Publication Date
JPH0448077A JPH0448077A (en) 1992-02-18
JP2717594B2 true JP2717594B2 (en) 1998-02-18

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ID=15653604

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Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP2717594B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3453033B2 (en) * 1996-10-23 2003-10-06 株式会社豊田中央研究所 Coating member and method of manufacturing the same
JP4747493B2 (en) * 2004-02-16 2011-08-17 三菱マテリアル株式会社 Shaft cutting tool capable of high-speed cutting of difficult-to-cut materials

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2778175B2 (en) * 1990-01-18 1998-07-23 三菱マテリアル株式会社 Artificial diamond-coated indexable insert and method of manufacturing the same

Also Published As

Publication number Publication date
JPH0448077A (en) 1992-02-18

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