JP2701101B2 - Integrally assembled hot zone and method of attaching and detaching it - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a core (hereinafter, referred to as a hot zone) of a single crystal manufacturing apparatus for manufacturing a silicon single crystal using the Czochralski method.

More specifically, an integrally assembled hot zone which is detachably integrated and an integrally assembled hot zone which is attached to or detached from a furnace (hereinafter referred to as a chamber) of a single crystal manufacturing apparatus. The method of desorption.

[0003]

2. Description of the Related Art Generally, a hot zone used in a Czochralski single crystal manufacturing apparatus (hereinafter referred to as a pulling machine) is a component for heat retention from silicon melting to single crystal pulling, and its use. Because the conditions are harsh,
The components constituting the hot zone are made of a high-purity graphite material, and are usually composed of several tens of graphite components.

Conventionally, a hot zone has been attached to a hoisting machine by opening a chamber of the hoisting machine and manually assembling components of the hot zone one by one at predetermined locations in the chamber.

Since the graphite material is fragile and easily consumed, it is essential to remove the hot zone from the chamber for maintenance or the like after the production of the single crystal. After the temperature has been sufficiently lowered, a method has been adopted in which the drawer chamber is opened and the hot zone components are removed one by one.

For these reasons, the conventional hot zone installation / removal operation in the chamber is extremely poor in workability, requires a long time, and promotes dust generation around the lifting machine. I was

[0007]

However, due to the tendency of the pulling machine to be larger due to the recent increase in the diameter of the single crystal, the hot zone used for this is also necessarily larger and heavier. This is a factor that further lowers the working efficiency in the operation of attaching and detaching the hot zone to and from the chamber by the conventional method.

Accordingly, the stop time of the pulling machine required for attaching and detaching the hot zone in the entire single crystal pulling process becomes longer, which is a major obstacle to improving the productivity. In addition, in order to supply single crystals for highly integrated devices as devices become more highly integrated, the environment in which the pulling machine is installed must maintain an extremely clean environment to stabilize the quality of the single crystals. Must. Therefore, work involving dust generation must be avoided in the single crystal manufacturing chamber, but the work of attaching and detaching the hot zone to and from the chamber by the conventional method does not satisfy this requirement.

In addition, as the components of the hot zone become larger and heavier, it is not always possible to ensure the safety of the mounting, disassembly, transporting, etc. of the hot zone using conventional methods. The situation is coming.

In view of such problems, the present inventors have conducted intensive studies on the functions and shapes of the hot zone parts, and as a result, have succeeded in developing the integrally assembled hot zone of the present invention. A special jig for attaching and detaching the integrated hot zone of the present invention has also been developed, and the integrated integrated hot zone can be directly attached to the chamber without assembling the hot zone in the chamber. A completely new concept of detachment has led to the completion of a new hot zone desorption method that can solve all of the disadvantages of the conventional method.

The present invention provides an integrated hot zone in which the components constituting the hot zone are integrated, a method of attaching and detaching the hot zone to and from the chamber, and a method of attaching and detaching the hot zone using a special jig for attachment and detachment. The present invention provides a method for desorption into a chamber, and is an invention completed as a result of overcoming the following technical problems. 1. In the limited space occupied by the hot zone in the chamber, a large number of components having functions such as heating, conduction, insulation, and heat insulation must be mounted. Even if the hot zone is moved, the mounting position of each component High assembly accuracy that does not cause errors in the assembly. 2. A hot zone must be accurately and reliably attached to a predetermined position of the driving unit, the electrode unit, the melting unit, and the gas supply unit in the lifting machine. 3. To ensure insulation between the electrode part and other parts in a hot zone composed mainly of a graphite material.

[0012]

SUMMARY OF THE INVENTION It is an object of the present invention to significantly reduce the working time of a hot zone installation / removal process in a chamber, promote productivity improvement of a single crystal, and assemble and disassemble in a chamber of a pulling machine. An object of the present invention is to produce a high-purity single crystal by minimizing the work to suppress dust generation inside and around the pulling machine, reduce impurities mixed into the pulling machine, and produce high-purity single crystals.

Another object of the present invention is to ensure the safety of the work of attaching and detaching a hot zone, which is large and heavy, to and from a chamber.

[0014]

According to the present invention, there is provided a Czochralski single crystal manufacturing apparatus characterized in that a heating element, its attached part, and a heat shield are connected so as to be separable from each other and integrated. An integrated hot zone is provided. As an embodiment of the present invention, the heat shield is a heat shield tube, a heat shield plate, a bottom heat shield tube, and a bottom heat shield plate,
There is an integrally assembled hot zone comprising an electrode protection tube, wherein the heating element and its attached part comprise a graphite heating element, a heating element electrode, and an insulator.

Further, according to the present invention, a detachable jig is fixed to the integrally assembled hot zone, and a main shaft is mounted coaxially and vertically on a crucible shaft, and the crucible shaft at the bottom of the integrally assembled hot zone is mounted on the main shaft. An object of the present invention is to provide a method for attaching and detaching an integrally assembled hot zone, wherein the attaching and detaching jig is moved so as to penetrate an insertion hole.

Further, the present invention provides a method for attaching and detaching an integrally assembled hot zone, wherein the integrally assembled hot zone is attached to and detached from a chamber of a Czochralski single crystal manufacturing apparatus in an integrally assembled state. Is provided.

A detachable jig is fixed to the integrally assembled hot zone of the present invention, and a main shaft is mounted coaxially and vertically on the crucible shaft, and the main shaft penetrates a crucible shaft insertion hole at the bottom of the integrally assembled hot zone. The detachable jig is moved in such a manner that the integrally assembled hot zone is integrally assembled and attached to and detached from the chamber of the Czochralski single crystal manufacturing apparatus in an integrated manner. An embodiment of the method for desorption is provided.

[0018]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail based on embodiments with reference to the drawings. FIG. 1 shows an embodiment of an integrated hot zone according to the present invention. The integrated hot zone shown in FIG. 1 includes a heat shield tube 1a, a graphite heating element 1b, a heating element electrode 1c, an insulator 1d, a heat shield plate 1e, a bottom heat shield tube 1f, a bottom heat shield plate 1g, and an electrode protection tube. 1h and a set screw 1i. The bottom heat shield plate 1g and the bottom heat shield cylinder 1f have a structure that has a strength to support the weight of the whole integrally assembled hot zone, and are connected to be separable by set screws 1i to form other integrally assembled hot zones. Is the base for connecting The furnace electrode 4 penetrates through the bottom heat shield plate 1g and enters the bottom heat shield cylinder 1f.
An electrode protection cylinder 1h is fixed to a portion where c protrudes, and an insulator 1d and a heating element electrode 1c are connected to the upper part in this order, and finally a graphite heating element 1b is positioned and fixed on the heating element electrode 1c. Have been. These graphite heating element 1b, heating element electrode 1c, insulator 1d, and electrode protection cylinder 1h are fixed by making the respective parts uneven and engaging with each other, and moving the integrally assembled hot zone. However, it has a structure in which each part does not come off. On the other hand, the upper part of the hot zone integrally assembled with the heat shield plate 1e and the heat shield tube 1a is mounted and fixed on the bottom heat shield tube 1f. The heat shield plate 1e and the heat shield cylinder 1a are fixed by providing irregularities on the respective parts and engaging with each other as in the case of other parts.

FIG. 2 shows an embodiment of a SUS lifting jig for use in the present invention. The lifting rod 2f and the gripper 2g are means for lifting the integrated hot zone, the positioning arm 2e is a means for positioning the integrated hot zone accurately to the chamber, and the lifting hand 2b is a crucible shaft. The lifting spindle 2a is a means for attaching the main spindle located above, and the lifting wheel 2a is a fixing means for moving the entire lifting / removing jig, which is connected to the transporter, and lifts the integrally assembled hot zone by the lifting / removing jig. It is to be moved to an arbitrary place in the state.

"Attaching Method of Integrally Assembling Type Hot Zone to Lifting / Removing Jig" The lifting jig 2 is attached to the lifting machine chamber 4, and is integrally assembled as shown in FIG. Install in hot zone 1. The lifting jig 2 is attached to the integrated hot zone 1 because the integrated hot zone 1 is made of a high-purity graphite material. The purpose is to protect against distortion caused by movement and to enable the use of transportation equipment. The lifting jig 2 is attached to the integrated hot zone 1 by assembling the upper end portion of the lower heat shielding cylinder which is exposed by cutting the heat shielding plate 1e into the gripping hand 2g during assembly of the integrated hot zone 1. After the assembly of the integrated hot zone, the lifting rod 2f is hung on the gripping hand 2g. A lifting jig integrating the lifting device 2d, the support 2c, and the lifting wheel 2a is dropped from above the integrally assembled hot zone, the lifting rod 2f is inserted into the lifting device 2d, and the upper end of the lifting rod 2f is inserted into the lifting device 2d. When the is inserted, the lowering of the hanging jig is stopped, the lifting rod 2f is locked by the lifting device 2d, the lifting rod 2f is fixed, and the mounting of the integrally assembled hot zone to the lifting jig is completed.

[Attaching Method of the One-piece Hot Zone to the Chamber] The one-piece hot zone 1 is attached to the pulling machine chamber 4 first on the crucible shaft 4b of the chamber 4 as shown in FIG. A main shaft 3 made of graphite, which functions as a positioning when the integrally assembled hot zone 1 is attached to the main body 1 and as a vibration stopper when the hot zone 1 is taken out, is set up. The main shaft 3 is provided with a main body 3c, a shaft head protector 3a made of Teflon resin for preventing the integrally assembled hot zone from directly colliding with the main shaft body 3c and being damaged when the integrally assembled hot zone is inserted. And a suspension ring 3b used for A conveyor is mounted on the lifting wheel 2a of the integral assembly hot zone to which the lifting jig 2 is attached, and the integral assembly hot zone is carried to the upper part of the chamber 4, and the main shaft 3 is inserted into the crucible shaft insertion position of the integral assembly hot zone. After insertion, the integrated hot zone is lowered into the chamber 4. In this process, the positioning arm 2e is inserted into the positioning hole 4a of the chamber in order to position the integrally assembled hot zone 1 in the rotation direction, and the accurate positioning of the integrally assembled hot zone is performed. The integrated hot zone is lowered until the bottom of the hot zone 1 contacts. FIG. 5 shows a state in which the integrally assembled hot zone 1 is lifted and attached to the inside of the chamber using the main shaft 3 by the detachable jig 2. Then, the suspension ring 3b of the spindle 3
Is hung on the lifting hand 2b, the lifting rod 2f is removed from the lifting device 2d, the lifting jig 2 is pulled up, the lifting jig 2 and the spindle 3 are simultaneously taken out of the chamber 4 from the integrally assembled hot zone 1 and integratedly assembled. Mold hot zone 1
Is completed in the chamber 4. After that, the crucible base and the graphite crucible are attached to the crucible shaft, and the preparation for manufacturing the pulling machine is completed.

"How to remove the integrally assembled hot zone in the chamber" First, the crucible base and the graphite crucible are removed from the chamber 4, and the main shaft 3 is set up on the crucible shaft 4b. Next, the lifting jig 2 hung by the transfer machine through the lifting wheel 2a is centered from above the chamber, and the lifting jig 2f is inserted into the lifting device 2d so that the tip of the lifting rod 2f left in the chamber 4 enters. 2 is lowered and stopped when it comes into contact with the heat shielding cylinder 1a of the integrally assembled hot zone 1. Thereafter, the lifting device 2d is locked, the lifting rod 2f is fixed to the lifting device 2d, and the lifting / removing jig is gently pulled up to take out the integrally assembled hot zone 1 from the chamber 4. The taken-out integrated hot zone 1 is moved to a predetermined place while being connected to the lifting / removing jig 2, and finally, the main shaft 3 remaining in the chamber 4 is taken out, and the work of taking out the integrated disassembly type hot zone is performed. Complete.

[Disassembly of Hot-Zone Assembly Type] The lifting / removing jig 2 is detached from the hot-zone assembly type 1 by unlocking the lifting device 2d of the lifting / removing jig 2 and the lifting / removing jig 2. Release the lifting rod 2f and remove the lifting jig 2 from the integrally assembled hot zone 1. The lifting rod 2f that has become free is removed from the gripping hand 2g, and the gripping hand 2g remaining in the integrated hot zone 1 finally removes the heat shielding cylinder 1a and the heat shielding plate 1e when disassembling the integrated hot zone 1. After removal, the mounting screws are loosened and removed from the integrally assembled hot zone 1, and the removal of the lifting jig 2 is completed. Thereafter, the integrally assembled hot zone 1 is disassembled into individual parts. The disassembly of the integrally assembled hot zone 1 includes a heat shielding cylinder 1a, a heat shielding plate 1
e, the components located above the integrated hot zone 1 are removed, and then the graphite heating element 1b, the heating element electrode 1c, the insulator 1d, and the electrode protection cylinder 1h are sequentially removed from the integrated hot zone 1. Remove the parts. Since the removal of each part is performed by giving irregularities to the connection between the parts, the parts can be removed by lifting up the removed parts in order. Finally, the set screw 1i connecting the bottom heat shield cylinder 1f and the bottom heat shield plate 1g is removed to complete the disassembly of the integrally assembled hot zone 1.

[0024]

According to the present invention, the following items can be raised as beneficial effects. 1. The integrated hot zone eliminates the need to manually attach or remove each component in the chamber, and all hot zone components are assembled into the chamber of the pulling machine in an integrated state. Attach,
In addition, since the present invention can be removed, when the present invention is carried out, the operation time is reduced to 1/3 compared with the conventional method.
And the operating rate of the lifting machine was greatly improved.

2. The installation and removal of the hot zone from the chamber, and the operations of moving and transporting the hot zone do not require disassembly of the hot zone into individual parts, and the integrated hot zone is directly attached, removed and moved. Since it can be transported, it is possible to work with machines such as a transfer device and a transfer device, so that the work becomes easy and the work can be safely performed by one person.

3. Since the components of the hot zone can be integrated, the movement of the hot zone can be performed in a short time and easily. In order to be able to do
Hot zone maintenance work, which is a major source of dust generation, can be separated and separated from the single crystal production room, making it possible to maintain a constant degree of cleanliness in the crystal production room. The response has become a reality.

4. The above-mentioned effects are very useful and valuable effects in the current situation where the size and weight of the hot zone are increased due to the increase in the diameter of the single crystal.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of an integrated one-piece hot zone according to the present invention.

FIG. 2 is a vertical sectional view of a lifting / removing jig used to lift and move the integrally assembled hot zone of the present invention.

FIG. 3 is a longitudinal sectional view showing a state in which the integrated one-piece hot zone of the present invention is attached to a lifting jig.

FIG. 4 is a longitudinal sectional view showing a state in which a main shaft is mounted on a crucible shaft in order to mount an integrated hot zone in a chamber.

FIG. 5 is a longitudinal sectional view showing the relationship among an integrally assembled hot zone, a lifting jig, a spindle, and a chamber when the hot zone is attached to or detached from a chamber.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Integrated hot zone 1a Heat shield tube 1b Graphite heating element 1c Heating element electrode 1d Insulator 1e Heat shield plate 1f Bottom heat shield tube 1g Bottom heat shield plate 1h Electrode protection tube 1i Set screw 2 Detachment jig for lifting and moving 3 Main shaft 4 chamber

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Shoshin Sato Fukushima Prefecture Nishishirakawa-gun Nishigo-mura Odakura character Taihei 150 Shin-Etsu Semiconductor Co., Ltd. No. 150, Taihei Shin-Etsu Semiconductor Shirakawa Works (56) References JP-A-61-155287 (JP, A) Jpn.

Claims (4)

(57) [Claims] An integrated hot zone for a Czochralski single crystal manufacturing apparatus, characterized in that a heating element, its attached part and a heat shield are connected to each other so as to be separable and integrated. 2. The heat shield comprises a heat shield tube, a heat shield plate, a bottom heat shield tube, a bottom heat shield plate, and an electrode protection tube, wherein the heating element and its attached part are graphite heating elements. When,
The integrated hot zone according to claim 1, comprising a heating element electrode and an insulator. 3. A detachable jig is fixed to the integrally assembled hot zone, and a main shaft is coaxially and vertically mounted on a crucible shaft, and the main shaft penetrates a crucible shaft insertion hole at the bottom of the integrally assembled hot zone. And moving the attachment / detachment jig in such a manner that the attachment / detachment jig is moved. 4. An integrally assembled hot zone as claimed in claim 1 or 2, which is attached to or detached from a chamber of a Czochralski single crystal manufacturing apparatus in a state in which the hot zone is integrally assembled. How to attach and detach the zone.