JP2691955B2 - Color filter substrate and liquid crystal element - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [0001] BACKGROUND OF THE INVENTION The present invention relates to a liquid crystal display device and a liquid crystal display.
Color filter substrates used for optical shutter arrays, etc.
AndLiquid crystal elementFor more details on the initial alignment of liquid crystal molecules,
By improving the orientation, a uniform product without alignment defects can be obtained.
Obtain the liquid crystal phase of the domain and improve the display and drive characteristics.
Color filter substrate having a colored filter and
And used itLiquid crystal elementIt is about. [0002] 2. Description of the Related Art As a conventional liquid crystal element, for example,
M. Schadt and W. Helfry
"Applied Fiji" by W. Helfrich
X. Letters "(" Applied Physic "
s Letters ") Volume 18, Issue 4 (1971)
(Published February 15), pages 127-128, "Voltage"
The Dependant Optical Activity
・ A Twisted Nematic Liquid Qu
Listal ("Voltage Dependent O
optical Activity of a Twis
ted Nematic Liquid Crystal
l ") shown in Twisted Nematic (Twis
Ted nematic) liquid crystal is known
I have. This TN liquid crystal is a matrix with high pixel density.
Generates crosstalk during time-divisional drive using electrode structure
However, the number of pixels is limited because of the problem. In addition, a thin film transistor is used for each pixel.
Connect an switching element to switch each pixel
Although a display device of the type is known, a thin film transistor is mounted on the substrate.
The process of forming a transistor is extremely complicated, and a large area is displayed.
There is a problem in that it is difficult to create an element. As a means for solving these problems,
Clark et al., U.S. Pat. No. 4,367,
A ferroelectric liquid crystal device is proposed in the specification of No. 924. FIG. 2 is a diagram for explaining the operation of the ferroelectric liquid crystal.
3 is a schematic drawing of an example of a cell. 21a and 21b
Is In₂  O₃  , SnO₂  And ITO (Indiu
mTin Oxide) and other transparent electrodes
Covered substrate (glass plate) between which multiple liquid crystals
SmC oriented so that the molecular layer 22 is perpendicular to the glass surface
^*  Phase or SmH^*  The liquid crystal of the phase is enclosed. Thick
A line 23 shown by a line represents a liquid crystal molecule.
The molecule 23 has a dipole moment in the direction orthogonal to the molecule.
(P⊥) 24. On boards 21a and 21b
When a voltage above a certain threshold is applied between the electrodes, liquid crystal molecules
23 spiral structure is unwound, dipole moment (P⊥)
Alignment of liquid crystal molecules 23 so that all 24 are oriented in the electric field
You can change direction. The liquid crystal molecules 23 have an elongated shape
Has a refractive index anisotropy in the major axis direction and the minor axis direction.
, Thus crossing each other above and below the glass surface, for example.
If the polarizer placed in the position of the coll is placed, the voltage application pole
It becomes a liquid crystal optical modulator that changes its optical characteristics depending on its properties.
Is easily understood. Preferably used in the ferroelectric liquid crystal device of the present invention
The liquid crystal cell to be formed has a sufficiently small thickness (for example, 10
μ or less). In this way the liquid crystal phase becomes thin
Therefore, no electric field is applied as shown in Fig. 3.
Even in the state, the helical structure of the liquid crystal molecule is unwound, and the non-helical structure is
And its dipole moment Pa or Pb is upward.
(34a) or downward (34b)
You. In such a cell, a certain threshold value or more as shown in FIG.
When an electric field Ea or Eb having different polarities is applied,
The child moment is paired with the electric field vector of the electric field Ea or Eb.
Accordingly, the direction is changed to upward 34a or downward 34b,
Accordingly, the liquid crystal molecules are in the first stable state 33a or
Are oriented in one of the second stable states 33b. Such a ferroelectric liquid crystal is used as an optical modulator.
As described above, there are two advantages of using the same. That
The first is that the response speed is extremely fast, and the second is the liquid crystal.
The orientation of molecules has bistability. Second point
Will be further explained, for example, with reference to FIG.
When added, the liquid crystal molecules are aligned in the first stable state 33a.
However, this state is stable even when the electric field is cut off. Also, the opposite direction
When an electric field Eb of is applied, the liquid crystal molecules are in the second stable state 3
It is oriented to 3b and changes the direction of its molecule, but
It remains in this state even if the world is cut. Also give the electric field
As long as Ea does not exceed a certain threshold, each orientation state
Is still maintained. Such response speed
In order for bistability to be effectively realized,
The thinner the better, the better. This ferroelectric liquid crystal element has a predetermined driving characteristic.
In order to exert the force, it is forced to be placed between a pair of parallel substrates.
The electric liquid crystal has the above two characteristics regardless of the applied state of the electric field.
A molecular arrangement that allows efficient conversion between stable states
You need to be in a state. For example, chiral smecte
Chirals for ferroelectric liquid crystals with a strong phase
The liquid crystal molecular layer of the memetic phase is perpendicular to the substrate surface,
Therefore, when the liquid crystal molecular axes are aligned almost parallel to the substrate surface,
Area (mono domain) needs to be formed. But
However, in conventional ferroelectric liquid crystal devices,
The alignment state of a liquid crystal having such a monodomain structure must be
However, because it was not formed satisfactorily, sufficient characteristics were obtained.
It is the fact that it was not done. FIG. 4 is a sectional view of a conventional ferroelectric liquid crystal device.
Fig. 5 shows the orientation of conventional ferroelectric liquid crystal devices.
It is a schematic explanatory drawing showing the state of a defect. That is, the conventional ferroelectric liquid crystal shown in FIG.
The element 40 has a pair of parallel substrates 41 and 42,
The substrates 41 and 42 each have a matrix electrode structure.
Striped transparent electrodes 43 and 44 are provided. Generally, color filters are red (R) and green.
(G), blue (B) dye or a layer containing this
However, the film thickness of each dye layer is the same regardless of the formation method.
Since they are different from each other, a step A of about 2000Å to 1 μm is formed.
Is done. As a result, orientation control is performed using the temperature decrease process.
As a result, the above-mentioned step A causes the step A to become a boundary.
As a result, an alignment defect is generated in the ferroelectric liquid crystal 47.
Also, on the substrates 41 and 42 where this step A exists,
When the alignment control films 45 and 46 are provided, the alignment control films are formed.
Also, the step C formed corresponding to the step A is almost the film thickness of the pixel.
Occurs in the same manner as described above, and an alignment defect is generated in the ferroelectric liquid crystal 47 as described above.
Occurs. FIG. 5 shows a cross-coupled structure of the above ferroelectric liquid crystal device.
It is a sketch when observing with Kol's polarizing microscope, it is white in the figure
The line 51 indicates the spacer (not shown) used for the liquid crystal element.
Corresponding to the lines, lines 52 and 53 are on the substrate 41 of FIG.
It is observed corresponding to the step C. Also, part 5 in the figure
Reference numeral 4 is a ferroelectric liquid crystal sandwiched between opposing electrodes. Polarization
A large number of blade lines 55 appearing in the microscope indicate the ferroelectric liquid crystal alignment.
It represents a defect. As described above, the closer to the surface the ferroelectric liquid crystal contacts,
If there is a level difference, an alignment defect is generated from the level difference,
Monodomain formation of ferroelectric liquid crystals is hindered. [0014] SUMMARY OF THE INVENTION
Steps on a transparent substrate, especially color filters with ferroelectric liquid crystal
When installed in the device, the spacing between each pixel exceeded 5 μm
In this case, the resulting level difference is notable for the ferroelectric liquid crystal.
Experiments show that it is the cause of the fall
I did it. The object of the present invention is to prevent the occurrence of the above-mentioned alignment defects.
Prevents high-speed response that ferroelectric liquid crystal elements originally have
And color that can fully demonstrate the memory effect characteristics
-Filter substrate andLiquid crystal elementTo provide
You. [0016] The present inventors have found that the
Dielectric liquid crystal has a liquid crystal phase (low temperature state) rather than an isotropic phase (high temperature state).
Focusing on the initial orientation during the temperature drop process,
Operational characteristics of devices based on bistability of ferroelectric liquid crystals and liquid crystals
Ferroelectricity with a structure that can achieve both mono-domain properties of layers
This is a finding of a liquid crystal element. The liquid crystal element of the present invention is based on such findings.
More specifically, it should be placed on the surface in contact with the liquid crystal layer.
There is no step that induces a defect, that is, the thickness of the liquid crystal layer
To prevent a sudden change in
The initial orientation in the
It is characterized in that it forms a no domain. That is, the present invention isMolecule with a photosensitive group
Within 90% or more in the wavelength range of 400 nm to 700 nm
It has the above-mentioned light transmittance and is a resin that cures at temperatures below 200 ° C.
Liimide resin and coloring dispersed in the polyimide resin
Color with almost uniform film thickness with colored resin consisting of
A color filter substrate having a filter on the substrate.
WhatThe distance between the color filters of adjacent pixels is α
(Μm), the relationship of 0 μm <α ≦ 5 μmConsists of
Standing,Protective layer and pattern shape on the color filter
Transparent electrodesProvidedCarafe characterized by
It is a filter substrate. The present invention also provides a chisel between a pair of substrates.
Ral smectic liquid crystalSandwich,At least one substrate
Color filter toHaveA liquid crystal element,TheKara
-The filter has a photosensitive group in the molecule,400 nm
Has a light transmittance of 90% or more in the wavelength range of ~ 700 nm,
A polyimide resin that cures at a temperature of 200 ° C or lower, and
Consists of a colored material dispersed in a polyimide resinRed tree
The color filter having oil, blue resin and green resin
Film thickness ofIs uniform and the color filter for each adjacent pixel is
Luther'sThe interval α is 5 μm or less,The color filter
-OnProtective layer and transparent electrode with pattern
It is a liquid crystal element characterized by having.[0020] Hereinafter, the present invention will be described with reference to the drawings. Figure
Reference numeral 1 shows the basic structure of a ferroelectric liquid crystal device according to the present invention.
It is sectional drawing. In FIG. 1, the ferroelectric liquid crystal element 1 is
Substrate using transparent plate such as lath plate or plastic plate
It has two and three, and the ferroelectric liquid crystal 4 is sandwiched between them.
I have. Matrix electrode structure is formed on each substrate 2 and 3
Striped pattern-shaped transparent electrodes 5 and 6 are provided.
Orientation control films 7 and 8 are formed on the transparent electrode.
Have been. R (red), G (green), B (blue)
The filter has the desired spectral characteristics with the same film thickness.
The colorant concentration is set in advance.
Have been. On the other hand, in order to achieve more flatness,
Then, the light-shielding layer 10 is formed in the depression between the color filters.
Formed, and a protective film or a planarizing film 9 is further formed thereon
Have been. In the substrate having the above structure, the color fill
The film thickness of the target is set to be almost the same, and between the pixels
By keeping the interval of 5 μm or less,
Since the step difference due to
Even if the orientation control film is sequentially formed, it is necessary to keep the substrate surface almost flat.
Can be. According to the present invention, the above-mentioned flattening causes the color
It is possible to make the step of the filter substrate less than 1000Å
However, it is desirable to set it to 500 Å or less.
If this step exceeds 1000Å, in other words, each pixel
Use a non-planarization layer with a gap of more than 5 μm
The liquid crystal element had the alignment defect of the edge line shown in FIG.
Will occur. As a color filter suitable for the present invention
, The film thickness of each pixel can be set to be almost the same.
However, the effect of the present invention is particularly large.
Fine patterns are formed by a simple and easy manufacturing process
In addition to mechanical properties, heat resistance,
Color filter with excellent properties such as light resistance and solvent resistance
The following method is preferable. That is, the color filter most suitable for the present invention.
Is a low-temperature-curable poly-containing polymer having a photosensitive group in the molecule.
A colored resin foam prepared by dispersing a coloring material in an imide resin.
This is a method of forming by repeating the triso process. More specifically, it has a color filter.
There is a photosensitive group in the molecule that forms the colored resin layer.
Low temperature curing type polyimide resin (hereinafter
Resin), a cured film can be obtained at 200 ° C or below.
Films that can be cured by heat of 150 ° C x 30 minutes
Can form, for example, a fragrance having a photosensitive group in its molecule
Group-based polyimide resin, especially in the visible wavelength range (400
~ 700 nm) without specific light absorption characteristics (light
The transmittance is preferably about 90% or more). This perspective
From the above, an aromatic polyimide resin is particularly preferable. Further, a group having photosensitivity in the present invention
In addition, a photosensitive hydrocarbon unsaturated group such as
One aromatic chain, for example, (1) Benzoic acid esters [0027] Embedded image (Where R₁  Is CHX = CY-COO-Z
-, X is -H or -C₆  H₅  , Y is -H or -CH
₃  , Z represents — or an ethyl group or a glycidyl group) (2) Benzyl acrylates [0029] Embedded image (Where Y is --H or CH₃  Indicates) (3) diphenyl ethers [0031] Embedded image (Where R₂  Is CHX = CY-CONH
-, CH₂  = CY-COO- (CH₂  )₂  -OC
O- or CH₂  = CY-COO-CH₂  -One or more
What is included above, X and Y have the above meanings) (4) Chalcone and other compound chains [0033] Embedded image (Where R₃  Is H-, an alkyl group, an alcohol
Indicates a shiki group) [0035] Embedded image And the like. Aromatic poly-containing compounds having these groups in the molecule
A specific example of the imide resin is "Lisocoat PI-40.
0 ”(trade name, manufactured by Ube Industries, Ltd.) and the like. Photosensitivity generally used in photolithography process
Resins are mechanical, though they differ depending on their chemical structure.
Excellent durability including heat resistance, light resistance, solvent resistance, etc.
There are few things that were damaged. On the other hand, the photosensitive
Liimide resin has excellent chemical durability and durability.
Resin system, and color filters formed using these
The durability of Luther is also very good. In particular,
May cause problems as color filters for electronic liquid crystal devices
Heat resistance during sputter formation of transparent conductive film and liquid crystal element assembly
Color filter with inner spacer when standing up
It exhibits excellent performance against damage and the like. The color filter of the present invention has
As a coloring material for forming the colored resin layer, organic pigments or
Among the machine pigments, dyes, etc. that can obtain the desired spectral characteristics
If there is, it is not particularly limited. In this case, each material
It is also possible to use the charges alone or to mix some of these.
It can also be used as a compound. However, dye was used
In some cases, due to the durability of the dye itself, a color filter
However, the performance of the resin system of the present invention is used.
Performance is superior to ordinary dyed color filters
Can be formed. Therefore, the color filter
Considering color characteristics and various properties, organic pigments can be used as coloring materials.
And most preferred. Organic pigments include soluble azo pigments and insoluble pigments.
Azo-based pigments such as azo-based and condensed azo-based pigments
Nin-based pigments, and indigo-based, anthraquinone-based, pigment
Rylene, Perinone, Dioxazine, Quinacridone
Series, isoindolinone series, phthalone series, methine / azome
There are condensed polycyclic pigments including tin-based and other metal complex-based pigments.
Or mixtures of some of these are used. In the present invention, the colored resin layer is formed.
The colored resin used for this purpose is the above-mentioned photosensitive polyimide resin solution.
The above coating, which has the desired spectral characteristics with the same film thickness for each color, is applied to the liquid.
Color materials are mixed in any proportion of 10 to 50%
Then, disperse thoroughly with ultrasonic waves or three rolls.
After that, it is preferable to increase the particle size with a filter of 1 μm or less.
Prepare by removing the threshold. The color filter of the present invention has
The colored resin layer is formed by coating the colored resin with a spinner or a roll coater.
Coating on the substrate with a coating device such as
It is formed in a pattern depending on the process, and its layer thickness is as desired
Determined according to the spectral characteristics, but usually the same film thickness for each color
And about 0.5 to 5 μm, preferably 0.5 to 1.5 μm
About m is desirable. The adhesiveness between the colored resin layer and the underlying substrate is changed.
Silane on the substrate in advance if
Colored resin pattern after applying thinly with a coupling agent etc.
Or the sills are pre-formed in the colored resin.
Color with a small amount of coupling agent added
It is more effective by forming a filter. The color filter of the present invention
The colored resin layer possessed by itself has good durability.
Composed of good materials, but especially more environmentally friendly
To protect the colored resin layer from the
In order to flatten the Luther surface, on the surface of the colored resin layer,
Polyamide, Polyimide, Polyurethane, Polycarbonate
Silicon, organic resin such as silicon, Si₃  N₄  , Si
O₂  , SiO, Al₂  O₃  , Ta₂  O₃  Etc.
It is a method of spin coating or roll coating of an inorganic film.
Or as a protective film or a flattening film by a vapor deposition method
Can be In this case, the color filter surface is
Since the shape is more stepless, the strength of the present invention is improved.
It is more suitable for eliminating the alignment defect of the dielectric liquid crystal.
Further, the film thickness of the protective film 9 determines the film thickness of the ferroelectric liquid crystal 4.
Therefore, the liquid crystal material type and
It depends on the response speed, but generally 0.2
μm to 20 μm, preferably 0.5 μm to 10 μm
Is set to Further, in some cases, the display characteristics are improved.
And to fill the gap between each pixel,
In order to make the twisting step smaller, align it with each pixel
The light-shielding layer is a metal such as chrome or aluminum that has a light-shielding ability.
The thin film is deposited by vapor deposition or in a photosensitive polyimide resin.
Carbon black, complex oxide black pigment, metal powder, etc.
Forming a light-shielding resin layer in which a material having strength is dispersed by a coating method
can do. As a material for the orientation control film used in the present invention
For example, polyvinyl alcohol, polyimide,
Liamide imide, polyester, polycarbonate, pi
Livinyl acetal, polyvinyl chloride, polyvinyl acetate
Resin, polyamide, polystyrene, cellulose resin, mel
Resins such as min resin, urea resin, acrylic resin,
Ruiya photosensitive polyimide, photosensitive polyamide, ring rubber
Photoresist, phenol novolac photoresist
Strike or electron beam photoresist (polymethylmethacrylate)
(Relate, epoxidized-1,4-polybutadiene, etc.)
And the like. Alignment control film 7
Depends on the film thickness of the ferroelectric liquid crystal, but is generally 1
0Å ~ 1μm, preferably in the range of 100Å ~ 3000Å
Set. Particularly suitable as a liquid crystal material used in the present invention.
Is a liquid crystal with bistability,
Have Specifically, chiral smectic
Phase C (SmC^*  ), H phase (SmH^*  ), Phase I
(SmI^*  ), J phase (SmJ^*  ), K phase (SmK^*
  ), G phase (SmG^*  ) Or F phase (SmF^*  )of
Liquid crystal can be used. Regarding this ferroelectric liquid crystal, "Le Jou
Lunar de Physique Luther ”(“ LE JO
URNAL DE PHYSIQUE LETTRE
S ”) 1975,36(L-69), "Ferroele
Ktrick Liquid Crystals "(" Ferro
electric Liquid Crystal
s ");" Applied Physics Letters "
("Applied Physics Letter
s ") 1980,36(11), "Submicro
Second bistable electro-optics
Itching In Liquid Crystals "(" Su
bmicro Second Bistble Ele
ctropic Switching in Li
"quid Crystals"); "Solid State Physics" 198
1 year,16(141), "Liquid crystal"
In the present invention, the ferroelectric liquids disclosed therein are
Crystals can be used. As a concrete example of the ferroelectric liquid crystal, for example,
Siloxybenzylidene-p'-amino-2-methylbutyrate
Lucinnamate (DOBAMBC), Hexyloxybe
Njilidene-p'-amino-2-chloropropylcinna
Mate (HOBACPC), 4-o- (2-methyl)-
Butyl resorcylidene-4'-octylaniline (MB
RAS). When a device is formed using these materials,
If the liquid crystal compound has a chiral smectic phase,
Element as needed to maintain a stable temperature
Can be supported by blocks etc.
You. [0052] Function: The color filter substrate of the present invention and the same
WasLiquid crystal elementThe color filters of each pixel are almost the same
Color filter for each pixel that is formed to a film thickness and is adjacent
Substrate spacing α (μm) is 0 ≦ α ≦ 5 μm, the substrate
Since the flatness of the liquid crystal becomes good, there is a step on the surface in contact with the liquid crystal phase.
And the liquid crystal phase sandwiched between the substrates having good flatness is an isotropic phase.
Therefore, it is possible to gradually cool in the temperature decreasing process of transitioning to the liquid crystal phase.
, The liquid crystal phase region gradually expands and becomes uniform.
Liquid crystal phase is formed. For example, the liquid crystal exhibits a ferroelectric liquid crystal phase.
Explaining the above-mentioned DOBAMBC as an example, DOB
When gradually cooling from the isotropic phase of AMBC, at about 115 ° C
The phase transitions to the smectic A phase (SmA phase). this
When rubbing or SiO on the substrate₂  Diagonal deposition
When the alignment treatment is performed, the molecular axes of liquid crystal molecules are
A monodomain that is parallel and oriented in one direction
Is done. Furthermore, as the cooling progresses, the thickness of the liquid crystal layer will decrease.
The chiral smear depends on the specific temperature between about 90 and 75 ° C.
Ctic C phase (SmC^*  Phase). Ma
When the thickness of the liquid crystal layer is about 2 μm or less, SmC
^*  The phase spiral unravels and exhibits bistability. [0054] EXAMPLES The present invention will be more specifically described below with reference to examples.
explain. Example 1 6A to 6F show the formation of R, G, and B color pixels.
It is process drawing which shows a process. First, Corning's # 7059 glass substrate
On the plate 61, a blue layer that can obtain the desired spectral characteristics
Color Resin Material [Heliogen Blue
Blue) L7080 (trade name, manufactured by BASF Corporation, C.I.
I. No. 74160) to PI-400C (trade name,
Ube Industries, Ltd., polymer content = 10%, solvent: N-methyl
2-pyrrolidone, pigment: polymer = 1: 2 blended)
Dispersed photosensitive resin material] spinner applied
Method to form a colored resin layer 62 with a thickness of 1.5 μm.
Was formed. (See FIG. 6 (a)) Next, the colored resin layer 62 is applied to the colored resin layer 62 at 80 ° C. for 30 minutes.
Pattern to be formed after pre-baking
A high-pressure mercury lamp through a photomask 63 corresponding to the shape
Exposed. (See FIG. 6 (b)) After the exposure, as shown in FIG. 6C, photocuring is performed.
Only the unexposed portion of the colored resin layer 62 having the portion 62a is melted.
Dedicated developer to be solved (mainly composed of N-methyl-2-pyrrolidone
(Developer solution to be used) and develop using ultrasonic waves.
Liquid (for example, isopropyl alcohol as the main component
Rinsing solution), and then rinse at 200 ° C for 30 minutes.
A blue pattern with a pattern shape that is stoved.
The awning colored resin layer 64 was formed. (See FIG. 6 (d)) Subsequently, the gas on which the blue coloring pattern was formed was formed.
The second colored green resin material [Riono
Lion Green 6YK
(Product name, manufactured by Toyo Ink Co., CI No. 7426
5) is PI-400C (trade name, Ube Industries, Ltd., polymer
-Min = 10%, solvent: N-methyl-2-pyrrolidone, face
Material: Polymer = 1: 2)
[Colored resin material]
Color pattern colored resin layer 65 at a predetermined position on the substrate
Formed by setting the gap to the blue colored resin layer to 5 μm or less
Was. Further, in this way, blue and green patterns
As a third color on the substrate on which the
Color resin material [Irgazin Re
d) BPT (trade name, Ciba-Gei
gy), C.I. I. No. 71127) to PI-40
0C (trade name, manufactured by Ube Industries, polymer content = 10%, melted
Agent: N-methyl-2-pyrrolidone, Pigment: Polymer =
1: 2 blending) to produce a photosensitive colored resin material]
Except for using
The blue colored resin layer 66 is provided at a predetermined position on the substrate.
And the space between the green colored resin layer and each is less than 5μm
Set and form, three colors of R (red), G (green), B (blue)
A striped colored pattern was obtained. (See FIG. 6 (e)) Next, a glass with a three-color coloring pattern is formed.
As a light-shielding layer on the substrate, a black colored resin material [carbon
Black (C.I. No. 77266) is PI-400
C (polymer content = 10%, pigment: polymer = 1: 4)
A photosensitive colored resin material prepared by dispersing
Match the gap between each pixel in the same way as above.
A light shielding layer 67 having a light shielding pattern was formed. This allows each
The interval α (μm) between pixels is in the range of 0 ≦ α ≦ 5 μm.
I was able to calm down. The color filter pattern obtained in this way
Coloring resin as a protective film or flattening film 68 on the turn
The same transparent resin material as used for the material [PI-400C
(Product name, Ube Industries, Polymer content = 10%, solvent:
N-methyl-2-pyrrolidone)] spinner coating method
To a thickness of about 0.5 μm. (Fig. 6
(Refer to (f)) Due to the above, the same color plane
The Luther substrate could be formed. Next, as shown in FIG. 1, ITO of 500 Å
A transparent electrode 5 is formed by sputtering to a thickness.
Was. As the alignment control film 7, a polyimide forming solution is formed thereon.
(Hitachi Chemical Industry "PIQ") rotates at 3000 rpm
Coating with a spinner and heating at 150 ° C for 30 minutes
To form a 2000 Å polyimide film. After a while
The surface of this polyimide coating was rubbed. Color filter formed in this way
The substrate and the opposing substrate 3 are bonded together to form a cell,
Liquid crystal was injected and sealed to obtain a liquid crystal element. This liquid crystal element
When observed with a crossed Nicol polarizing microscope,
It was confirmed that the liquid crystal molecules did not have alignment defects. [0064]Comparative Example 1 Photosensitive polyimide resin used for the colored resin material of Example 1
The oil is treated with "photo" which is a photosensitive polyimide resin other than the present invention.
Nice ”UR-3100 (trade name, manufactured by Toray Industries, Inc., solid
Min = 17%, solvent: N-methyl-2-pyrrolidone / meth
Instead of the Lucerosolve mixed system), a dedicated developer (“DV-1
40 "), special rinse liquid (isopropyl alcohol)
Patterning using the
R is carried out in the same manner as in Example 1 except that the R treatment is performed.
(Red), G (green), B (blue) 3 color stripe color
I got a filter. Color filter thus obtained
Has a lower affinity for the resin and the pigment than in the case of Example 1.
Is formed using a colored resin material that is poorly dispersed.
Therefore, the surface flatness was poor. In addition, the characteristics of the resin
The color filter was inferior in transparency due to its properties. Further, the obtained color filter substrate is
Using the same method as in Example 1, a ferroelectric liquid crystal device was formed.
And observed under a crossed Nicol polarization microscope.
However, defective alignment was found in the area with poor surface flatness.
Affect the display characteristics, and display contrast at this time
Stroke is different from the display contrast obtained in the first embodiment.
It was decreased by 0.5 times. Comparative Example 2 Photosensitive polyimide resin used for the colored resin material of Example 1
"Photorec" RF which is a photosensitive acrylic resin
G-10 (trade name, manufactured by Sekisui Fine Chemical Co., Ltd., solid
Form = 10%, solvent: cyclohexane)
Image liquid (developing liquid mainly composed of MEK), dedicated rinse liquid
Patani using (rinse liquid containing MIBK as a main component)
And bake at 180 ℃ for 30 minutes.
R (red), G
(Green), B (blue) 3 color stripe color filter
Obtained. Color filter thus obtained
Compared with the case of Example 1, the resin and face Low affinity with food
Is formed using a colored resin material that is poorly dispersed.
Therefore, the surface flatness was poor. In addition, the characteristics of the resin
The color filter was inferior in durability due to its excellent properties. Further, the obtained color filter substrate is
Using the same method as in Example 1, a ferroelectric liquid crystal device was formed.
And observed under a crossed Nicol polarization microscope.
However, defective alignment was found in the area with poor surface flatness.
And the display characteristics were affected. Display at this time
The contrast is the same as the display contrast obtained in the first embodiment.
It was 0.4 times lower. Comparative Example 3 Photosensitive polyimide resin used for the colored resin material of Example 1
ODUR-11 which is a negative resist for deep UV
0WR (trade name, manufactured by Tokyo Ohka Co., Ltd., solvent: xylene)
In place of the
Patterning with a cleaning solution, and
Same as Example 1 except that the stove treatment is performed.
R (red), G (green), B (blue)
I got the Rahl filter. Color filter thus obtained
Has a lower affinity for the resin and the pigment than in the case of Example 1.
Is formed using a colored resin material that is poorly dispersed.
Therefore, the surface flatness was poor. In addition, the characteristics of the resin
The color filter was inferior in durability due to its excellent properties. Furthermore, the obtained color filter substrate is
Using the same method as in Example 1, a ferroelectric liquid crystal device was formed.
And observed under a crossed Nicol polarization microscope.
However, defective alignment was found in the area with poor surface flatness.
And the display characteristics were affected. Display at this time
The contrast is the same as the display contrast obtained in the first embodiment.
On the other hand, it was decreased by 0.5 times. [0073] Comparative Example 4 Photosensitive polyimide resin used for the colored resin material of Example 1
FR-14 (trade name, wealth), which is a photosensitive PVA resin
Diazo compound added to Shiyaku Kogyo Co., Ltd., solvent: water)
Patterning with water and rinsing
And post-baking at 120 ° C for 30 minutes
Outside, in the same manner as in Example 1, R (red), G (green), B
A (blue) three-color striped color filter was obtained. Color filter obtained in this way
Has a lower affinity for the resin and the pigment than in the case of Example 1.
Is formed using a colored resin material that is poorly dispersed.
Therefore, the surface flatness was poor. In addition, the characteristics of the resin
The color filter was inferior in durability due to its excellent properties. Further, the obtained color filter substrate is
Using the same method as in Example 1, a ferroelectric liquid crystal device was formed.
And observed under a crossed Nicol polarization microscope.
However, defective alignment was found in the area with poor surface flatness.
And the display characteristics were affected. Display at this time
The contrast is the same as the display contrast obtained in the first embodiment.
On the other hand, it decreased to 0.4 times. Comparative Example 5 In Example 1, using a photosensitive colored polyimide resin
Instead of 3 colors using non-photosensitive colored polyimide resin
A color filter was formed. That is, a blue-colored polyimide is formed on the glass substrate.
Mido resin material [Heliogen Blue (Heliogen
Blue) L7080 (trade name, manufactured by BASF Corporation, C.I.
I. No. 74160) to Semicofine SP-910
(Product name, Toray, solid content = 22%, pigment: polymer
= 1: 2 mix) and made a colored resin material]
It was applied to a film thickness of 2.0 μm by the inner coating method. Next
Then, after drying the colored resin layer at 150 ° C. for 30 minutes, 2
Heated at 00 ° C. for 30 minutes. [0078] Then, a positive resist [O
FPR-2 (trade name, made by Tokyo Ohka Co., Ltd.)] spinner coating
Cloth, pre-bake at 80 ° C for 20 minutes, then try to form
Through the pattern mask corresponding to the pattern shape
It was exposed with a pressure mercury lamp. After the exposure is completed, the resist is removed with an alkali developing solution.
As it develops, the blue layer is etched and subsequently etched.
The resist is stripped with a seton, and the temperature is kept at 250 ° C for 30 minutes.
A blue colored resin film having a pattern shape is formed by heating and baking.
Formed. Next, a glass with a blue coloring pattern is formed.
Second color green colored polyimide resin material on the substrate
[Lionol Green]
6YK (trade name, manufactured by Toyo Ink Co., CI No. 7
4265) is a semicofine (trade name, manufactured by Toray Industries, Inc., solid
Min = 22%, pigment: polymer = 1: 2 blended)
Except that the created colored resin material] is used.
To form a green colored pattern at a predetermined position on the substrate.
Was. Further, in this way, blue and green patterns
As a third color on the substrate on which the
Color polyimide resin material [Irgazin Red (Irgaz
inRed) BPT (trade name, Ciba Geigy (Ciba
-Geigy), C.I. I. No. 71127)
Semicofine (trade name, manufactured by Toray, solid content = 22%,
Pigment: Polymer = 1: 2)
Coloring in the same manner as above, except that a resin material] is used.
A pattern is formed at a predetermined position on the substrate, and R (red), G
(Green), B (blue) 3 color stripe color filter
Obtained. Color filter thus obtained
Has a lower affinity for the resin and the pigment than in the case of Example 1.
Is formed using a colored resin material that is poorly dispersed.
Therefore, the surface flatness was poor. Also, the transparency of the resin is inferior to that of the resin.
-It was a filter. Furthermore, a cash register for patterning
Stroke process is required for each color formation, so it is very complicated.
Professional It was a process and was inferior in productivity. Subsequently, the obtained color filter substrate is
Using the same method as in Example 1, a ferroelectric liquid crystal device was formed.
And observed under a crossed Nicol polarization microscope.
However, defective alignment was found in the area with poor surface flatness.
And the display characteristics were affected. Display at this time
The contrast is the same as the display contrast obtained in the first embodiment.
On the other hand, it was down to 0.3 times. [0085] As described above, according to the present invention,
There is no difference in the film thickness of the color filter layer on the plate, and each pixel
Keep the distance α (μm) within the range of 0 ≦ α ≦ 5 μm
Position, and if necessary, light-shielding layer, protective film, flattening
By providing a film, the color filters are created between each pixel.
Alignment defects
It is possible to prevent the occurrence of
Can be demonstrated in minutesLiquid crystal elementCan be provided. Furthermore, according to the present invention, the mechanical strength is also improved.
Excellent and excellent in various properties such as heat resistance, light resistance, solvent resistance, etc.
The color filter part with a fine pattern
It is possible to manufacture by a convenient manufacturing process, and color
Easily provide ferroelectric liquid crystal elements with excellent performance
can do.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a sectional view showing a basic structure of a ferroelectric liquid crystal device according to the present invention. FIG. 2 is a perspective view schematically showing a ferroelectric liquid crystal used in the present invention. FIG. 3 is a perspective view schematically showing a ferroelectric liquid crystal used in the present invention. FIG. 4 is a sectional view of a conventional ferroelectric liquid crystal element. FIG. 5 is a schematic explanatory view showing a state of alignment defects appearing in a conventional ferroelectric liquid crystal element. FIG. 6 is a process chart showing a process of forming a color pixel of the present invention. [Explanation of symbols] 1,40 Ferroelectric liquid crystal element 2,3,41,42,61 Substrate 4,47 Ferroelectric liquid crystal 5,6,43,44 Transparent electrode 7,8,45,46 Alignment control film 9 , 48,68 Protective film (flattening film) 10,67 Light-shielding layer

Continuation of front page    (72) Inventor Miki Tamura               3-30-2 Shimomaruko, Ota-ku, Tokyo               Inside Canon Inc. (72) Inventor Yu Kamio               3-30-2 Shimomaruko, Ota-ku, Tokyo               Inside Canon Inc. (72) Inventor Nobuyuki Sekimura               3-30-2 Shimomaruko, Ota-ku, Tokyo               Inside Canon Inc.                (56) References JP-A-59-191015 (JP, A)                 JP-A-60-237403 (JP, A)                 JP-A-61-156027 (JP, A)                 JP-A-60-229929 (JP, A)                 JP-A-61-166523 (JP, A)

Claims (1)

(57) [Claims] Having a photosensitive group in the molecule, 400 nm to 700 nm
Has a light transmittance of 90% or more in the wavelength range of 200 ℃ or less
And a polyimide resin that cures at the temperature
Having a colored resin consisting of a colored material dispersed therein.
Color with a uniform color filter on the substrate
In the filter substrate, when the distance between the color filters of adjacent pixels is α (μm), 0 μm <α ≦ 5
A color filter substrate comprising a protective layer and a pattern-shaped transparent electrode provided on the color filter , with a relationship of μm. 2. A chiral smectic liquid crystal is sandwiched between a pair of substrates
And, a <br/> liquid crystal device having a color filter on at least one substrate, the color filter has a photosensitive group in the molecule, in the wavelength range of 400 nm to 700 nm 90
It has a light transmittance of more than 100% and cures at a temperature of 200 ° C or less
And a polyimide resin dispersed in the polyimide resin.
It has a red resin, a blue resin and a green resin which are made of a coloring material, and the film thickness of the color filter is almost uniform
The liquid crystal element is characterized in that an interval α between color filters of adjacent pixels is 5 μm or less, and a protective layer and a patterned transparent electrode are provided on the color filter .