JP2690598B2 - Method of forming a film with excellent heat and wear resistance and sliding resistance on titanium or titanium alloy - Google Patents

Method of forming a film with excellent heat and wear resistance and sliding resistance on titanium or titanium alloy

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Publication number
JP2690598B2
JP2690598B2 JP2129268A JP12926890A JP2690598B2 JP 2690598 B2 JP2690598 B2 JP 2690598B2 JP 2129268 A JP2129268 A JP 2129268A JP 12926890 A JP12926890 A JP 12926890A JP 2690598 B2 JP2690598 B2 JP 2690598B2
Authority
JP
Japan
Prior art keywords
film
titanium
resistance
forming
nickel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2129268A
Other languages
Japanese (ja)
Other versions
JPH0426777A (en
Inventor
一吉 黒澤
英次 平井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Parkerizing Co Ltd
Original Assignee
Nihon Parkerizing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Parkerizing Co Ltd filed Critical Nihon Parkerizing Co Ltd
Priority to JP2129268A priority Critical patent/JP2690598B2/en
Priority to CA002035970A priority patent/CA2035970C/en
Priority to EP91301020A priority patent/EP0441636B1/en
Priority to DE69102553T priority patent/DE69102553T2/en
Priority to US07/653,087 priority patent/US5116430A/en
Publication of JPH0426777A publication Critical patent/JPH0426777A/en
Application granted granted Critical
Publication of JP2690598B2 publication Critical patent/JP2690598B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【発明の詳細な説明】 [産業上の利用分野] チタンまたはチタン合金は、自動車やオートバイのエ
ンジンバルブ、ロッカーアーム、バルブリテーナ、コネ
クティングロッド、クランクシャフト等の軽量化を目指
す機能部品や、耐食性を目指す化学工業用のポンプ部品
等への利用が拡大している。これ等のチタン合金は、耐
熱性、耐摩耗性、耐摺動性を併せ望まれる場合が多い。
DETAILED DESCRIPTION OF THE INVENTION [Industrial application] Titanium or titanium alloys are used for functional parts aiming at weight reduction of engine valves, rocker arms, valve retainers, connecting rods, crankshafts, etc. of automobiles and motorcycles, and corrosion resistance. The use for pump parts for the chemical industry is expanding. These titanium alloys are often desired to have heat resistance, wear resistance and sliding resistance.

本発明は、耐熱性、耐摩耗性、耐摺動性に優れた皮膜
を、チタンまたはチタン合金に形成させる方法に関す
る。
The present invention relates to a method for forming a film having excellent heat resistance, wear resistance, and sliding resistance on titanium or a titanium alloy.

[従来の技術] チタンまたはチタン合金に皮膜を形成する方法として
は、ガス窒化法、塩浴窒化法がある。しかし窒化法は処
理温度が高いため、熱歪による変形が大きく処理のまゝ
使用し難く、さらに硬化層を得るのに長時間を要するた
め生産性が低いという問題点がある。
[Prior Art] As a method of forming a film on titanium or a titanium alloy, there are a gas nitriding method and a salt bath nitriding method. However, since the nitriding method has a high treatment temperature, it is difficult to use until the treatment because it is largely deformed by thermal strain, and further, it takes a long time to obtain a hardened layer, so that the productivity is low.

イオンプレーティング、CVD、PVD等の乾式メッキ法や
各種の湿式メッキ法もあるが、これ等のメッキ法では、
チタンまたはチタン合金と形成された皮膜との密着性が
低く、使用に際して皮膜剥離が生ずるという問題点があ
る。
There are also dry plating methods such as ion plating, CVD, PVD and various wet plating methods. With these plating methods,
There is a problem that the adhesion between titanium or a titanium alloy and the formed film is low, and the film peels off during use.

特開昭64−79397号はマルチン・トーマの方法で、チ
タンまたはチタン合金に摩耗防止層を形成する方法であ
る。この方法では、イ.酸化雰囲気で熱処理するため、
化学的析出法で形成されたニッケル皮膜が酸化し、次工
程で電気メッキ法でクロム皮膜を形成する際に、既形成
皮膜を除去しなければならないという問題点があり、ま
たロ.耐摩耗層として形成したクロム皮膜は耐焼付き性
が不十分であるという問題点がある。
Japanese Unexamined Patent Publication (Kokai) No. 64-79397 discloses a method of forming a wear-preventing layer on titanium or titanium alloy by a method of Martin Thoma. In this method, Because it is heat treated in an oxidizing atmosphere,
There is a problem that the nickel film formed by the chemical deposition method is oxidized and the formed film must be removed when the chromium film is formed by the electroplating method in the next step. The chromium film formed as the wear resistant layer has a problem that the seizure resistance is insufficient.

[発明が解決しようとする課題] 本発明者等は、チタンまたはチタン合金に耐熱性と耐
摩耗性に優れた皮膜を形成する方法を発明して、特願平
2−30494号で既に特許出願した。
[Problems to be Solved by the Invention] The present inventors have invented a method for forming a film having excellent heat resistance and wear resistance on titanium or a titanium alloy, and have already applied for a patent in Japanese Patent Application No. 2-30494. did.

本発明者等は更に研究を行った結果、チタンまたはチ
タン合金に、耐熱性と耐摩耗性に優れ、更に耐摺動性に
も優れた皮膜を形成する方法を発明した。即ち本発明
は、耐熱性、耐摩耗性、耐摺動性を併せ有する皮膜を、
チタンまたはチタン合金に形成する方法の開示を課題と
している。本発明の皮膜を形成したチタンまたはチタン
合金は、耐摺動性にも優れているため、その優れた耐熱
性、耐摩耗性と相俟って、一層広い使用分野に用いる事
ができる。
As a result of further research, the present inventors have invented a method for forming a film on titanium or a titanium alloy, which has excellent heat resistance and wear resistance, and further has excellent sliding resistance. That is, the present invention provides a coating having heat resistance, wear resistance, and sliding resistance.
It is an object to disclose a method of forming titanium or a titanium alloy. The titanium or titanium alloy on which the film of the present invention is formed is also excellent in sliding resistance, and in combination with its excellent heat resistance and wear resistance, it can be used in a wider field of use.

[課題を解決するための手段] 本発明の第1工程ではチタンまたはチタン合金の表面
を酸洗で清浄化する。この清浄化は例えばアルミナ粒子
によるショットブラストを行った後、例えば約15%の塩
酸で常温で約30秒間酸洗し、水洗する事によって達せら
れる。表面清浄を酸洗で行うと、また特に塩酸で行う
と、次の工程でのストライクメッキの付着性が良好とな
る。例えば表面に油性物質が付着している場合は、ショ
ットブラスト処理前に、予めアルカリ洗浄またはトリク
レン蒸気等を用いた有機溶剤で洗浄し、油分を除去して
おく。
[Means for Solving the Problems] In the first step of the present invention, the surface of titanium or a titanium alloy is cleaned by pickling. This cleaning can be achieved, for example, by performing shot blasting with alumina particles, followed by pickling with, for example, about 15% hydrochloric acid at room temperature for about 30 seconds and then with water. If the surface is cleaned by pickling, and particularly by using hydrochloric acid, the adhesion of strike plating in the next step becomes good. For example, when an oily substance is attached to the surface, the oil content is removed in advance by washing with an alkali or an organic solvent such as trichlene vapor before the shot blasting treatment.

本発明の第2工程では、チタンまたはチタン合金に、
銅またはニッケルのストライクメッキ処理を施す。この
ストライクメッキは、チタンまたはチタン合金の表面に
密着性の優れた緻密な皮膜を形成させるために行う。銅
のストライクメッキは例えば、硫酸銅60g/,ロッセル
塩160g/,苛性ソーダー50g/の常温の溶液を用い
て、またニッケルのストライクメッキは例えば塩化ニッ
ケル100g/,塩酸30g/の常温の溶液を用いて通電メ
ッキする事によって得られる。
In the second step of the present invention, in titanium or titanium alloy,
Strike plating of copper or nickel. The strike plating is performed to form a dense film having excellent adhesion on the surface of titanium or titanium alloy. For copper strike plating, for example, a solution of copper sulfate 60 g /, Roussel salt 160 g /, caustic soda 50 g / at room temperature is used, and for nickel strike plating, for example, nickel chloride 100 g /, hydrochloric acid 30 g / at room temperature is used. It is obtained by electroplating.

本発明者等の知見によると、このストライクメッキ皮
膜の厚さは1〜5μmが適当である。1μm以下では皮
膜厚さの変動によりチタンまたはチタン合金の表面をス
トライク皮膜で完全に覆うことは難しい。また5μm以
上は処理時間が長くなるだけで経済的ではない。
According to the findings of the present inventors, the thickness of the strike plating film is appropriately 1 to 5 μm. If the thickness is 1 μm or less, it is difficult to completely cover the surface of titanium or titanium alloy with the strike film due to the variation of the film thickness. On the other hand, when the thickness is 5 μm or more, the processing time becomes long, which is not economical.

本発明の第3工程では、ストライクメッキ上にニッケ
ル電気メッキまたはニッケル・リン電気メッキを施す。
In the third step of the present invention, nickel electroplating or nickel-phosphorus electroplating is applied on the strike plating.

ニッケル電気メッキは、例えばスルファミン酸ニッケ
ル800g/,塩化ニッケル15g/,ほう酸30g/を含有
するメッキ液を用いて、またニッケル・リン電気メッキ
は、例えばスルファミン酸ニッケル800g/,塩化ニッ
ケル15g/,ホウ酸30g/,次亜りん酸ソーダ3g/を
含有するメッキ液を用いて、通電メッキすることによっ
て得られる。本発明者等の知見では、第3工程で形成す
る電気メッキ皮膜の厚さは5〜20μmが適当である。後
で述べる如く、本発明では、更に真空加熱や耐摩耗皮膜
の形成や固体潤滑皮膜の形成を行うが、第3工程におけ
る電気メッキ皮膜の厚さを5〜20μmとする事によっ
て、密着性のよい耐熱性、耐摩耗性、耐摺動性の皮膜が
形成される。
Nickel electroplating uses a plating solution containing, for example, nickel sulfamate 800 g /, nickel chloride 15 g /, boric acid 30 g /, and nickel-phosphorus electroplating, for example, nickel sulfamate 800 g /, nickel chloride 15 g /, boric acid. It can be obtained by electroplating using a plating solution containing 30 g / acid and 3 g / sodium hypophosphite. According to the knowledge of the present inventors, the thickness of the electroplating film formed in the third step is preferably 5 to 20 μm. As will be described later, in the present invention, vacuum heating, formation of a wear-resistant coating, and formation of a solid lubricating coating are further performed. However, by setting the thickness of the electroplating coating in the third step to 5 to 20 μm, the adhesion can be improved. A film with good heat resistance, wear resistance and sliding resistance is formed.

ニッケル電気メキ皮膜は約200℃まで十分な硬度を有
し、ニッケル・リン複合電気メッキ皮膜は約350℃まで
十分な硬度を有する。本発明では後で述べる耐摩耗性皮
膜の形成処理における耐摩耗性皮膜を考慮し、ニッケル
電気メッキあるいはニッケル・リン電気メッキの何れか
を選定する。
The nickel electroplating film has a sufficient hardness up to about 200 ° C, and the nickel-phosphorus composite electroplating film has a sufficient hardness up to about 350 ° C. In the present invention, either nickel electroplating or nickel-phosphorus electroplating is selected in consideration of the wear resistant coating in the treatment for forming the wear resistant coating described later.

本発明の第4工程では、真空度が10-1〜10-5torrの範
囲で、少なくとも450℃で1時間以上加熱する真空加熱
処理を行う。真空度が10-1torr以下では第2工程までに
形成した皮膜が酸化される危険があり、一方10-5torr以
上の真空度を得るにはコストがかゝり経済的でない。こ
の真空加熱処理は、Ti2Ni,TiNi,TiNi3のチタン・ニッケ
ル合金層やTiCu,TiCu2等のチタン・銅合金層を形成する
ために行うが、これ等の金属層を形成するためには、少
なくとも450℃以上で、1時間以上加熱する事が好まし
い。真空加熱後の冷却は、特に高温度域の冷却は、上記
の真空度に保持したまゝで行う事が好ましい。酸化雰囲
気下で冷却すると表面が酸化されて、後で述べる表面活
性化処理で、処理時間が長くなる。この真空加熱と真空
下での冷却を行うと、酸化させずに密着性に優れた合金
層が形成されるため、後で述べる表面活性化処理におい
て、特開平1−79397号で述べたような余分な皮膜の除
去は不必要で、簡易な表面活性化処理によって、後で述
べる耐熱耐摩耗皮膜が形成される。
In the fourth step of the present invention, a vacuum heat treatment is performed in which the degree of vacuum is in the range of 10 -1 to 10 -5 torr and heating is performed at least 450 ° C for 1 hour or more. If the degree of vacuum is 10 -1 torr or less, there is a risk that the film formed up to the second step will be oxidized, while obtaining a degree of vacuum of 10 -5 torr or more is costly and uneconomical. This vacuum heat treatment is performed to form a titanium / nickel alloy layer of Ti 2 Ni, TiNi, TiNi 3 or a titanium / copper alloy layer of TiCu, TiCu 2, etc., but to form these metal layers. Is preferably heated at least at 450 ° C. for 1 hour or more. Cooling after heating in vacuum, particularly in the high temperature range, is preferably performed while maintaining the above vacuum degree. When cooled in an oxidizing atmosphere, the surface is oxidized and the treatment time becomes longer in the surface activation treatment described later. When this vacuum heating and cooling under vacuum are performed, an alloy layer having excellent adhesion is formed without being oxidized, so that in the surface activation treatment described later, as described in JP-A-1-79397. Excessive film removal is unnecessary, and a heat-resistant and abrasion-resistant film described later is formed by a simple surface activation treatment.

本発明の第5工程では表面活性化処理を行うが、既に
述べた如くこの表面活性化は、簡易な方法例えば5%フ
ッ化水素酸を含有する硝フッ酸溶液に浸漬する事により
達成できる。この表面活性化処理によって、第4工程ま
でに形成された既形成皮膜は保持されて、かつ既形成皮
膜が若干エッチングされて、後の第6工程で形成する耐
熱耐摩耗皮膜との密着性を高める。本発明者等の知見に
よると、3〜10%の弗化水素酸と50〜70%の硝酸とを含
有する水溶液に2〜5秒間接触させるのが適当である。
The surface activation treatment is carried out in the fifth step of the present invention, but as mentioned above, this surface activation can be achieved by a simple method, for example, by immersing in a nitric hydrofluoric acid solution containing 5% hydrofluoric acid. By this surface activation treatment, the preformed film formed up to the fourth step is retained, and the preformed film is slightly etched to improve the adhesion with the heat resistant and abrasion resistant film formed in the subsequent sixth step. Increase. According to the knowledge of the present inventors, it is suitable to contact with an aqueous solution containing 3 to 10% hydrofluoric acid and 50 to 70% nitric acid for 2 to 5 seconds.

本発明の第6工程では耐熱耐摩耗皮膜を更に形成す
る。この耐熱耐摩耗皮膜は、SiC,Si3N4,Al2O3,WC,ZrB2,
ダイヤモンド,CrB等のファインセラミックスから選ばれ
る1種または2種以上の微粉をマトリックスに分散させ
たニッケル・リン合金またはコバルトの皮膜である。マ
トリックスがニッケル・リン合金の耐熱耐摩耗皮膜は、
例えばスルファミン酸ニッケル800g/,塩化ニッケル1
5g/,ほう酸30g/,次亜りん酸ソーダ3g/の溶液
に、またマトリックスがコバルトの耐熱耐摩耗皮膜は、
例えば、スルファミン酸コバルト300g/,塩化コバル
ト15g/,ほう酸30g/の溶液に、平均粒径が例えば1
μmのSiC,Si3N4,Al2O3,WC,ZrB2,CrB,ダイヤモンドから
選ばれる1または2以上の微粉を例えば200g/添加
し、これを電解液として通電メッキする事によって得ら
れる。耐熱耐摩耗皮膜を形成する際に用いる微粉の粒子
径は0.1〜10.0μmが適当である。0.1μm以下では耐摩
耗性および耐摺動性が十分でなく、また10.0μm以上で
はマトリックス中に均一に分散させることが難しい。ま
た耐熱耐摩耗皮膜の厚さは5μm〜500μmが好まし
い。5μm以下では耐摩耗性皮膜としての性能が不十分
であり、500μm以上は現実的でない。
In the sixth step of the present invention, a heat resistant and abrasion resistant film is further formed. This heat and wear resistant coating is composed of SiC, Si 3 N 4 , Al 2 O 3 , WC, ZrB 2 ,
It is a nickel-phosphorus alloy or cobalt film in which one or more fine powders selected from fine ceramics such as diamond and CrB are dispersed in a matrix. The matrix is a nickel-phosphorus alloy heat and wear resistant coating,
For example, nickel sulfamate 800g /, nickel chloride 1
A solution of 5g /, boric acid 30g /, sodium hypophosphite 3g /, and a heat-resistant wear-resistant coating with cobalt as the matrix,
For example, in a solution of cobalt sulfamate 300 g /, cobalt chloride 15 g /, and boric acid 30 g /, the average particle size is 1
It can be obtained by adding 200g / of 1 or 2 or more fine powders selected from SiC, Si 3 N 4 , Al 2 O 3 , WC, ZrB 2 , CrB, and diamond of μm, and electroplating this as an electrolytic solution. . The particle size of the fine powder used when forming the heat resistant and abrasion resistant film is suitably 0.1 to 10.0 μm. If it is 0.1 μm or less, abrasion resistance and sliding resistance are not sufficient, and if it is 10.0 μm or more, it is difficult to disperse it uniformly in the matrix. The thickness of the heat and abrasion resistant film is preferably 5 μm to 500 μm. If it is 5 μm or less, the performance as an abrasion resistant film is insufficient, and if it is 500 μm or more, it is not practical.

マトリックスとしてニッケル・リン合金は約350℃程
度までは、温度上昇によってNi3Pを析出して硬化する。
またコバルトは約500℃の高温においても硬度低下が生
じない。本発明ではファイセラミックスの微粉をマトリ
ックスに、例えば2〜20重量%分散せしめる。分散させ
る微粉は、例えばSiC(微小硬度約3000),Si3N4(微小
硬度約2000),WC(微小硬度約2500),ダイヤモンド
(微小硬度約8000)等の高硬度の微粉である。これ等の
微粉をマトリックスに分散させることによって、摺動時
に十分な耐摩耗性を発揮する。
As a matrix, nickel-phosphorus alloy precipitates Ni 3 P and hardens due to temperature rise up to about 350 ° C.
In addition, cobalt does not decrease in hardness even at a high temperature of about 500 ° C. In the present invention, fine powder of phi ceramics is dispersed in a matrix, for example, 2 to 20% by weight. The fine powder to be dispersed is a high-hardness fine powder such as SiC (micro hardness about 3000), Si 3 N 4 (micro hardness about 2000), WC (micro hardness about 2500) and diamond (micro hardness about 8000). By dispersing these fine powders in the matrix, sufficient abrasion resistance is exhibited during sliding.

本発明の第7工程では耐熱耐摩耗皮膜の表面を、Rz:
1.0〜10.0μmの表面粗さとする粗面化処理を行う。こ
の粗面化処理は、例えば乾式法または湿式法で120番〜2
70番のアルミナ粒子を耐熱耐摩耗皮膜に投射する事によ
って得られる。この粗面化処理によって、密着性と保持
性が十分な、後で述べる固体潤滑皮膜を、耐熱耐摩耗性
皮膜の上に形成する事ができる。Rzが1.0μm未満では
固体潤滑皮膜の密着性および保持性が不十分である。ま
たRz10.0μm超にしても固体潤滑皮膜の密着性および保
持性は10.0μmの場合と差がなく、製品の寸法公差を考
慮すると10.0μm以下が好ましい。
In the seventh step of the present invention, the surface of the heat and wear resistant film is coated with Rz:
Roughening treatment with a surface roughness of 1.0 to 10.0 μm is performed. This roughening treatment is, for example, 120 to 2 by a dry method or a wet method.
It is obtained by projecting No. 70 alumina particles on a heat and wear resistant film. By this surface roughening treatment, a solid lubricating film, which will be described later, having sufficient adhesiveness and holding property can be formed on the heat resistant and abrasion resistant film. When Rz is less than 1.0 μm, the solid lubricant coating has insufficient adhesion and retention. Further, even if Rz exceeds 10.0 μm, there is no difference in adhesion and holding property of the solid lubricating film from that in the case of 10.0 μm, and considering the dimensional tolerance of the product, 10.0 μm or less is preferable.

本発明の第8工程では、粗面化処理をした後で、Mo
S2,グラファイト,ボロンナイトライド,フッ素樹脂か
ら選ばれる1種または2種以上を含有する固体潤滑皮膜
の形成焼付を行う。粗面化処理した表面を、例えばアル
カリ洗浄または有機洗剤洗浄により清浄化し、スプレー
法や浸漬法で、MoS2,グラファイト,ボロンナイトライ
ドまたは弗素樹脂を塗着し、これを例えば180℃に加熱
して焼付けて固体潤滑皮膜を形成する。本発明者等の知
見によると、固体潤滑皮膜の厚さを5〜30μmに形成す
ると、長期間に亘って耐摺動性に優れた表面となる。
In the eighth step of the present invention, after the roughening treatment, the Mo
Form and bake a solid lubricating coating containing one or more selected from S 2 , graphite, boron nitride and fluororesin. The roughened surface is cleaned by, for example, alkali cleaning or organic detergent cleaning, and MoS 2 , graphite, boron nitride or fluororesin is applied by a spray method or a dipping method, and this is heated to, for example, 180 ° C. And bake to form a solid lubricating film. According to the knowledge of the present inventors, when the thickness of the solid lubricating coating is 5 to 30 μm, the surface has excellent sliding resistance over a long period of time.

[作用] 本発明により形成される皮膜が耐熱性に優れている理
由を説明する。本発明の第6工程で特定する耐熱耐摩耗
皮膜のマトリックスは耐熱性のあるニッケル・リン合金
またはコバルトである。また第8工程で特定した固体潤
滑皮膜はいずれも約400℃の高温に十分耐え得る。摺動
に際して、チタンまたはチタン合金の温度は上昇する
が、本発明の皮膜は、前記の如く、この温度の上昇に十
分に耐える耐熱性を有している。
[Operation] The reason why the film formed by the present invention is excellent in heat resistance will be described. The matrix of the heat and abrasion resistant film specified in the sixth step of the present invention is a nickel-phosphorus alloy or cobalt having heat resistance. Further, all of the solid lubricating coatings specified in the eighth step can withstand a high temperature of about 400 ° C. While sliding, the temperature of titanium or titanium alloy rises, but the coating of the present invention has heat resistance sufficient to withstand this rise in temperature, as described above.

本発明により形成される皮膜が耐摩耗性に優れている
理由を説明する。本発明の第6工程で特定する耐熱耐摩
耗皮膜には、高硬度の微粉が複合されている。例えばSi
Cは微小硬度が約3000,Si3Nは微小硬度が約2000,WCは微
小硬度が約2500,ダイヤモンドは微小硬度が約8000で、
極めて高硬度で、高硬度のこれ等の微粉を分散した皮膜
がチタンまたはチタン合金を覆っている。従って本発明
の皮膜は耐摩耗性に優れている。
The reason why the film formed by the present invention has excellent wear resistance will be described. The heat resistant and abrasion resistant coating specified in the sixth step of the present invention contains fine powder of high hardness. For example Si
C has a micro hardness of about 3000, Si 3 N has a micro hardness of about 2000, WC has a micro hardness of about 2500, and diamond has a micro hardness of about 8000.
A film in which these fine powders of extremely high hardness and high hardness are dispersed covers titanium or a titanium alloy. Therefore, the coating film of the present invention has excellent wear resistance.

本発明により形成される皮膜が耐摺動性に優れている
理由を説明する。本発明は第7工程で特定する粗面化処
理により、表面に凹凸が形成されるが、この凹凸を有す
る表面に本発明の第8工程で特定する固体潤滑皮膜を形
成する。この際固体潤滑皮膜は、凹凸形状のくさび効果
により、強い密着強度で形成されている。また摺動時に
は固体潤滑剤は凹部に埋め込まれ、高い面圧下で摺動し
ても取り去られることがない。以上の如く、本発明の摺
動面には、摺動摩擦係数を低くするMoS2やグラファイト
やボロンナイトライドが常時存在する。従って耐摺動性
能を向上させ、長時間使用しても焼付きの発生を防止し
ている。
The reason why the film formed by the present invention is excellent in sliding resistance will be described. In the present invention, unevenness is formed on the surface by the roughening treatment specified in the seventh step, and the solid lubricating coating specified in the eighth step of the present invention is formed on the surface having the unevenness. At this time, the solid lubricating film is formed with strong adhesion strength due to the wedge effect of the uneven shape. Further, during sliding, the solid lubricant is embedded in the recesses and is not removed even when sliding under a high surface pressure. As described above, the sliding surface of the present invention always contains MoS 2 , graphite, and boron nitride that reduce the sliding friction coefficient. Therefore, the sliding resistance is improved and the occurrence of seizure is prevented even after long-term use.

本発明のチタンまたはチタン合金に形成した皮膜は以
上の如く、優れた耐熱性、耐摩耗性、耐摺動性を有する
が、これ等の優れた性能は、形成皮膜の密着性が極めて
優れていることに基づいてもたらされた効果である。即
ち、チタンまたはチタン合金との密着性は、第1工程の
酸洗と第2工程のストライクメッキ処理によりもたらさ
れる。優れた密着性はまた第3工程の電気メッキ皮膜の
形成と第4工程の真空加熱によってもたらされる。即ち
真空加熱により酸化させることなくチタンまたはチタン
合金は電気メッキ金属と合金層を形成する。更に第5工
程の表面活性化処理は第6工程の耐熱耐摩耗皮膜を強い
密着力で形成し、また第7工程の粗面化処理は密着性の
よい固体潤滑皮膜を形成する。
As described above, the film formed on the titanium or titanium alloy of the present invention has excellent heat resistance, wear resistance, and sliding resistance, but these excellent performances indicate that the adhesion of the formed film is extremely excellent. It is an effect that is brought about by being present. That is, the adhesion with titanium or titanium alloy is brought about by the first step of pickling and the second step of strike plating. Excellent adhesion is also brought about by the formation of the electroplating film in the third step and the vacuum heating in the fourth step. That is, titanium or titanium alloy forms an alloy layer with the electroplated metal without being oxidized by vacuum heating. Further, the surface activation treatment of the fifth step forms the heat resistant and abrasion resistant coating of the sixth step with a strong adhesion, and the surface roughening treatment of the seventh step forms a solid lubricating coating having good adhesion.

本発明の作用を更に具体的に説明する。本発明者等
は、Ti−6Al−4V合金(直径10mmφ)のピン材に第1表
に示した各種の処理を施した試験片を用いて、乾式条件
下のファレックス摩耗試験を行った。尚試験に用いたブ
ロック材はSUJ−2(硬度HRC60,90゜V型)である。第
1表の焼付き限界荷重および第1図の摺動摩擦係数はそ
の結果である。
The operation of the present invention will be described more specifically. The inventors of the present invention conducted a Falex wear test under dry conditions using a test piece obtained by subjecting a pin material of Ti-6Al-4V alloy (diameter 10 mmφ) to various treatments shown in Table 1. The block material used in the test is SUJ-2 (hardness HRC60, 90 ° V type). The seizure limit load in Table 1 and the sliding friction coefficient in FIG. 1 are the results.

第1表のNo1は皮膜処理を全く行わなかった試験片で
あるが、第1図に示す如く、試験開始直後に焼付きが発
生した。
No. 1 in Table 1 is a test piece which was not subjected to coating treatment at all, but as shown in FIG. 1, seizure occurred immediately after the start of the test.

第1表のNo2〜No5は、特願平2−30494号の方法で皮
膜を形成した。即ち、 No2は、酸洗、銅ストライクメッキ、ニッケル・リン
電気メッキ、10-3torrで500℃で3時間の真空加熱処
理、ニッケル・リンとSiCの耐熱耐摩耗皮膜の形成を行
ったもので、皮膜厚さが20μmの試験片、 No3は、耐熱耐摩耗皮膜がニッケル・リンとSi3N4で、
他はNo2と同じ試験片 No4は、耐熱耐摩耗皮膜がコバルトとZrB2で他はNo2と
同じ試験片 No5は、耐熱耐摩耗皮膜がコバルトとSiCで他はNo2と
同じ試験片である。
No. 2 to No. 5 in Table 1 were formed by the method of Japanese Patent Application No. 2-30494. That is, No. 2 is pickled, copper strike plated, nickel-phosphorus electroplated, vacuum heat treated at 10 -3 torr at 500 ° C for 3 hours, and formed with a heat-resistant and abrasion-resistant film of nickel-phosphorus and SiC. The test piece with a thickness of 20 μm, No3, the heat and wear resistant coating is nickel phosphorus and Si 3 N 4 ,
Others are the same test pieces as No. 2 No. 4 is the same heat resistance and wear resistant coating as cobalt and ZrB 2. Others are the same as No. 2 No. 5 is the same heat resistance and wear resistant coating as cobalt and SiC.

No2〜No5は、本発明の第7および第8工程による固体
潤滑皮膜を形成しなかったために、油潤滑のない乾式下
の摺動においては、摺動摩擦係数は第1図にみられる如
く、0.12〜0.15と大きく、また焼付き限界荷重は第1表
にみられる如く65kg以下で小さい。
No. 2 to No. 5 did not form the solid lubricating film according to the seventh and eighth steps of the present invention, so that the sliding friction coefficient was 0.12 as shown in FIG. It is as large as ~ 0.15, and the seizure limit load is as small as 65 kg or less as seen in Table 1.

No6は、本発明の耐熱耐摩耗皮膜を形成しないで、固
体潤滑皮膜のみを形成した例である。即ち、Ti−6Al−4
V合金を220番のアルミナ粒子でショットブラストし、有
機溶剤で洗浄し、スプレー法によりFBT−116(MoS2粒子
を含有するフェノール樹脂皮膜(株)川邑研究所製)の
固体潤滑皮膜を10μmの厚さにコーティングし180℃で
1時間乾燥した試験片である。以上の如くNo6は、耐熱
耐摩耗皮膜を形成しないで直径固体潤滑皮膜をコーティ
ングした試験片であるが、第1図および第1表にみられ
る如く、素材表面硬度が低いため、ブロック荷重が65kg
で焼付きが発生している。以上の如く、固体潤滑皮膜
は、高硬度の表面に施さなければ効果がでない。
No. 6 is an example in which only the solid lubricating coating was formed without forming the heat resistant and abrasion resistant coating of the present invention. That is, Ti-6Al-4
The V alloy is shot blasted with No. 220 alumina particles, washed with an organic solvent, and a solid lubricant film of FBT-116 (phenol resin film containing the MoS 2 particles, manufactured by Kawamura Laboratory Co., Ltd.) containing 10 μm is sprayed by a spray method. Is a test piece coated to a thickness of 1 and dried at 180 ° C. for 1 hour. As mentioned above, No. 6 is a test piece coated with a diameter solid lubricant film without forming a heat and wear resistant film. However, as shown in Fig. 1 and Table 1, since the material surface hardness is low, the block load is 65 kg.
The seizure has occurred. As described above, the solid lubricating film has no effect unless it is applied to a high hardness surface.

第1表および第1図でNo7〜No10は本発明の方法によ
る試験片である。即ち No7はNo2の方法で耐熱耐摩耗皮膜を形成し、更に粗面
化処理を行い、厚さ10μmのFBT−116の固体潤滑皮膜を
形成した試験片であり、 No8はNo3の方法で耐熱耐摩耗皮膜を形成し、更に粗面
化処理を行い、厚さ10μmのFBT−116の固体潤滑皮膜を
形成した試験片であり、 No9はNo4の方法で耐熱耐摩耗皮膜を形成し、更に粗面
化処理を行い、厚さ10μmのFH−70(弗素樹脂を含有す
るエポキシ樹脂皮膜(株)川邑研究所製)の固体潤滑皮
膜を形成した試験片であり、 No10はNo5の方法で耐熱耐摩耗皮膜を形成し、更に粗
面化処理を行い、厚さ10μmのHMB−4A(MoS2粒子を含
有したポリイミド系樹脂皮膜、(株)川邑研究所製)の
固体潤滑皮膜を形成した試験片である。
No. 7 to No. 10 in Table 1 and FIG. 1 are test pieces according to the method of the present invention. That is, No. 7 is a test piece on which a heat and wear resistant film was formed by the method of No. 2 and further roughened to form a solid lubricating film of FBT-116 with a thickness of 10 μm. This is a test piece with a wear film formed and further roughened to form a solid lubricant film of FBT-116 with a thickness of 10 μm. No9 is a heat resistant wear resistant film formed by the method of No4. Is a test piece on which a solid lubricating film of FH-70 (made by Kawamura Laboratory, which contains epoxy resin film containing fluorine resin) with a thickness of 10 μm was formed by heat treatment. Test of forming a wear film and further roughening the surface to form a solid lubricant film of HMB-4A (polyimide resin film containing MoS 2 particles, Kawamura Laboratory Co., Ltd.) with a thickness of 10 μm It's a piece.

本発明の方法で作成した試験片No7〜No10は、耐熱耐
摩耗皮膜と固体潤滑皮膜とを組み合わせたため、第1図
にみられる如く、ブロック荷重200kg以上での摺動摩擦
係数は0.02〜0.04程度で非常に小さく、また第1図およ
び第1表に示す如く焼付き限界荷重は715〜780kgとな
り、極めて優れた耐摺動性を有している。
Since the test pieces No7 to No10 made by the method of the present invention are a combination of the heat resistant and abrasion resistant coating and the solid lubricating coating, the sliding friction coefficient at a block load of 200 kg or more is about 0.02 to 0.04 as shown in FIG. It is extremely small and has a seizure limit load of 715 to 780 kg as shown in FIG. 1 and Table 1, and has extremely excellent sliding resistance.

[実施例] 実施例1 処理材:ファレックス摩耗試験片のピン材、 6Al−4V−Ti(10mmφ、35mmL) ピン材の表面処理 1.グリッド220番のアルミナ粒子でのショットブラスト
処理 2.有機溶剤洗浄(トリクレン蒸気洗浄) 3.アルカリ脱脂処理(FC−315、日本パーカライジング
社製弱アルカリクリーナー)、50gr/、70℃、3分浸
漬 4.水洗 5.塩酸(17%)による酸洗、常温、30秒 6.水洗 7.銅ストライクメッキ処理 浴組成 硫酸銅60gr/、ロッセル塩160gr/ カセイソーダ50gr/ 処理温度 常温、 電流密度 0.5A/dm2 皮膜厚 2μm 8.水洗 9.ニッケル・リン合金メッキ処理 浴組成 スルファミン酸ニッケル800gr/ 塩化ニッケル15gr/、ホウ酸30gr/ 次亜リン酸ソーダ3gr/ 処理温度 57℃ 電流密度 15A/dm2 皮膜厚 10μm 10.水洗 11.熱風乾燥(約80℃) 12.真空加熱処理 真空度 10-3Torr、 処理温度 500℃ 処理時間 3時間、 13.活性化処理 処理液 HF5%、HNO3 60% 常温、3秒浸漬 14.水洗 15.ニッケル・リン・SiC複合メッキ処理 浴組成 スルファミン酸ニッケル800gr/ 塩化ニッケル15gr/ ホウ酸30gr/ 次亜リン酸ソーダ3gr/ SiC200gr/ 処理温度 57℃ 電流密度 15A/dm2 皮膜厚 20μm 16.水洗 17.熱風乾燥(約80℃) 18.グリッド200番アルミナ粒子によるショットブラスト
処理 19.有機溶剤洗浄(トリクレン蒸気洗浄) 20.固体潤滑皮膜処理 スプレー法、FBT−116(Defric Coat)10μm 21.乾燥(180℃、1時間) 実施例2 処理材は実施例1に同じ ピン材の表面処理 1.〜14.は実施例1に同じ 15.コバルト・SiC複合メッキ処理 浴組成 スルファミン酸コバルト300gr/ 塩化コバルト15gr/ ホウ酸30gr/ SiC200gr/ 処理温度57℃ 電流密度15A/dm2 皮膜厚 20μm 16.〜21.は実施例1に同じ 比較例1 処理材は実施例1に同じ ピン材の表面処理 1.グリッド220番のアルミナ粒子によるショットブラス
ト処理 2.有機溶剤洗浄(トリクレン蒸気洗浄) 3.固体潤滑皮膜処理 実施例1,20に同じ。スプレー法、FBT−116(Defric C
oat)10μm 4.乾燥(180℃、1時間) 参考例1 処理材は実施例1に同じ。
[Examples] Example 1 Treated material: surface treatment of pin material of a Falex wear test piece, 6Al-4V-Ti (10mmφ, 35mmL) pin material 1. Shot blast treatment with alumina particles of grid No. 220 2. Organic Solvent cleaning (Triclin steam cleaning) 3. Alkaline degreasing treatment (FC-315, weak alkaline cleaner manufactured by Nippon Parkerizing Co., Ltd.), 50 gr /, 70 ° C, 3 minutes immersion 4. Washing with water 5. Pickling with hydrochloric acid (17%), room temperature , 30 seconds 6. Washing with water 7. Copper strike plating bath composition Copper sulfate 60gr /, Rossel salt 160gr / Caustic soda 50gr / Treatment temperature Normal temperature, Current density 0.5A / dm 2 Coating thickness 2μm 8. Washing 9. Nickel-phosphorus alloy plating Treatment bath composition Nickel sulfamate 800gr / Nickel chloride 15gr /, Boric acid 30gr / Sodium hypophosphite 3gr / Treatment temperature 57 ℃ Current density 15A / dm 2 Film thickness 10μm 10. Washing 11. Hot air drying (about 80 ℃) 12 . vacuum heat treatment vacuum 10 -3 Torr, a treatment temperature 500 Treatment time 3 hours, 13. activation treatment liquid HF 5%, HNO 3 60% normal temperature, 3 seconds immersion 14. washing 15. Nickel-phosphorus-SiC composite plating bath composition nickel sulfamate 800Gr / nickel chloride 15 gr / boric acid 30gr / Sodium hypophosphite 3gr / SiC 200gr / Treatment temperature 57 ℃ Current density 15A / dm 2 Film thickness 20μm 16. Water washing 17. Hot air drying (about 80 ℃) 18. Grid 200 shot blasting with alumina particles 19. Organic Solvent cleaning (tricklene vapor cleaning) 20. Solid lubricant film treatment Spray method, FBT-116 (Defric Coat) 10 μm 21. Drying (180 ° C, 1 hour) Example 2 The same treatment material as in Example 1 surface treatment of pin material 1. to 14. are the same as in Example 1. 15. Cobalt / SiC composite plating treatment Bath composition Cobalt sulfamate 300gr / Cobalt chloride 15gr / Boric acid 30gr / SiC 200gr / Treatment temperature 57 ° C Current density 15A / dm 2 Coating thickness 20μm 16 . ~ 21. Are the same as in Example 1 Comparative Example 1 Shot blasting Example 1 by surface treatment 1. Alumina particles of the grid 220 No. same pin member 2. Organic solvent cleaning (trichlorethylene vapor cleaning) 3. Solid lubricating film processing examples 1,20 to the same. Spray method, FBT-116 (Defric C
oat) 10 μm 4. Drying (180 ° C., 1 hour) Reference Example 1 The treatment material is the same as in Example 1.

ピン材の表面処理 特願平2−30494の方法、1.〜17.まで実施例1に同
じ。ニッケル・リン・SiC複合メッキ皮膜 以上の実施例、比較例、参考例でそれぞれピン材に形
成された皮膜を、SUJ−2(硬度HRC60)のブロック材
と組み合わせて、油潤滑なしの乾式条件下でファレック
ス摩耗試験を行い、焼付き限界荷重(第2表)と摺動摩
擦係数の履歴(第2図)を測定した。その結果を次に示
す。
Surface treatment of pin material The method of Japanese Patent Application No. 2-30494, 1. to 17. The same as in Example 1. Nickel-Phosphorus-SiC composite plating film The films formed on the pin materials in the above examples, comparative examples, and reference examples were combined with SUJ-2 (hardness HRC60) block material, and dry conditions without oil lubrication The Falex wear test was carried out to measure the seizure limit load (Table 2) and the history of the sliding friction coefficient (Fig. 2). The results are shown below.

比較例1はブロック荷重320kgで、又参考例1は256kg
で焼付きを発生したが、本発明法により形成させた皮膜
(実施例1、実施例2)では焼付き限界荷重を1000kg以
上に向上させることが可能で、しかも、摺動摩擦係数も
高荷重下では0.02〜0.03と小さく、すぐれた摺動性を示
している。
Comparative example 1 has a block load of 320 kg, and reference example 1 has 256 kg.
Seizure occurred in the film, but with the films formed by the method of the present invention (Examples 1 and 2), the seizure limit load can be improved to 1000 kg or more, and the sliding friction coefficient is also high under load. Shows as small as 0.02 to 0.03 and shows excellent slidability.

[発明の効果] 以上説明したように、本発明により形成させた皮膜
は、油潤滑のない乾式条件下の摺動においても、摺動摩
擦係数を驚異的に低下させることが可能で、耐焼付き性
を向上させ得る非常に摺動性に優れた皮膜である。
[Effects of the Invention] As described above, the film formed according to the present invention can surprisingly reduce the sliding friction coefficient even under sliding under dry conditions without oil lubrication, and has seizure resistance. It is a film with excellent sliding properties that can improve the

本発明法を応用することにより、油系の潤滑を使用で
きない摺動部材へのチタン又はチタン合金の適用を可能
ならしめることができ、自動車部品をはじめ、軽量かつ
高負荷性能を要求される部品に利用して特に効果があ
る。
By applying the method of the present invention, it is possible to apply titanium or a titanium alloy to a sliding member that cannot use oil-based lubrication, and it is required to be lightweight and have high load performance including automobile parts. Especially effective when used for.

【図面の簡単な説明】[Brief description of the drawings]

第1図は乾式条件下のファレックス摩耗試験結果を示す
図 第2図は実施例におけるファレックス摩耗試験結果を示
す図 である。
FIG. 1 is a diagram showing the result of a Falex wear test under dry conditions. FIG. 2 is a diagram showing the result of a Falex wear test in Examples.

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭59−126773(JP,A) 特開 平1−159358(JP,A) 特開 昭64−79397(JP,A) 特開 昭53−11131(JP,A) 特開 昭63−78741(JP,A) 特開 昭61−87894(JP,A) 特開 昭53−18436(JP,A) 特開 平2−70073(JP,A) 特公 昭45−12202(JP,B1) ─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP-A 59-126773 (JP, A) JP-A 1-159358 (JP, A) JP-A 64-79397 (JP, A) JP-A 53- 11131 (JP, A) JP 63-78741 (JP, A) JP 61-87894 (JP, A) JP 53-18436 (JP, A) JP 2-70073 (JP, A) Japanese Patent Publication Shou 45-12202 (JP, B1)

Claims (7)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】チタンまたはチタン合金の表面に、下記の
処理を記載の順に施すことを特徴とする、チタン又はチ
タン合金に耐熱耐摩耗性、耐摺動性に優れた皮膜を形成
させる方法。 酸洗、銅またはニッケルのストライクメッキ処理、ニッ
ケル電気メッキまたはニッケル・リン電気メッキ皮膜の
形成処理、真空度が10-1〜10-5torrの範囲において少な
くとも450℃で1時間以上加熱する真空加熱処理、表面
活性化処理、マトリックスがニッケル・リン合金または
コバルトでマトリックス中にSiC.Si3N4.Al2O3.WC.ZrB2.
ダイヤモンド.CrBから選ばれる1種または2種以上の微
粉を分散させた耐熱耐摩耗皮膜の形成処理、Rz:1.0〜1
0.0μmの表面粗さとする粗面化処理、MoS2.グラファイ
ト.ボロンナイトライド.フッ素樹脂から選ばれる1種
または2種以上を含有する固体潤滑皮膜の形成焼付処
理。
1. A method for forming a film having excellent heat resistance, wear resistance and sliding resistance on titanium or a titanium alloy, which comprises subjecting the surface of titanium or a titanium alloy to the following treatments in the order given. Pickling, strike plating of copper or nickel, nickel electroplating or nickel-phosphorus electroplating film formation, vacuum heating to heat at least 450 ° C for 1 hour or more in a vacuum range of 10 -1 to 10 -5 torr Treatment, surface activation treatment, the matrix is nickel-phosphorus alloy or cobalt and SiC.Si 3 N 4 .Al 2 O 3 .WC.ZrB 2 ..
Diamond.CrB, one or more kinds of fine powder dispersed, heat-resistant and abrasion-resistant film forming treatment, Rz: 1.0-1
Roughening treatment with a surface roughness of 0.0 μm, MoS 2. Graphite. Boron night ride. Forming and baking treatment of a solid lubricating coating containing one or more selected from fluororesins.
【請求項2】銅またはニッケルのストライクメッキが、
厚さが1〜5μmのストライクメッキである、請求項
(1)に記載のチタン又はチタン合金に耐熱耐摩耗性、
耐摺動性に優れた皮膜を形成させる方法。
2. Copper or nickel strike plating,
Strike plating having a thickness of 1 to 5 μm, wherein the titanium or titanium alloy according to claim (1) has heat and wear resistance,
A method of forming a film with excellent sliding resistance.
【請求項3】ニッケル電気メッキまたはニッケル・リン
電気メッキ皮膜が、厚さが5〜20μmの電気メッキ皮膜
である、請求項(1)に記載のチタン又はチタン合金に
耐熱耐摩耗性、耐摺動性に優れた皮膜を形成させる方
法。
3. The titanium or titanium alloy according to claim 1, wherein the nickel electroplating or nickel-phosphorus electroplating coating is an electroplating coating having a thickness of 5 to 20 μm. A method of forming a film with excellent mobility.
【請求項4】表面活性化処理が、減圧下で放冷しその
後、3〜10%弗化水素酸と50〜70%の硝酸とを含有する
水溶液で2〜5秒間処理する、表面活性化処理である、
請求項(1)に記載のチタン又はチタン合金に耐熱耐摩
耗性、耐摺動性に優れた皮膜を形成させる方法。
4. The surface activation treatment comprises leaving to cool under reduced pressure and then treating with an aqueous solution containing 3 to 10% hydrofluoric acid and 50 to 70% nitric acid for 2 to 5 seconds. Processing,
A method of forming a film having excellent heat resistance and wear resistance and sliding resistance on the titanium or titanium alloy according to claim (1).
【請求項5】耐熱耐摩耗皮膜の形成処理で用いる微粉
が、平均粒径が0.1〜10.0μmの微粉であり、耐熱耐摩
耗皮膜が厚さが5μm〜50μmの耐熱耐摩耗皮膜であ
る、請求項(1)に記載のチタン又はチタン合金に耐熱
耐摩耗性、耐摺動性に優れた皮膜を形成させる方法
5. The fine powder used for forming the heat and wear resistant film is a fine powder having an average particle size of 0.1 to 10.0 μm, and the heat and wear resistant film is a heat resistant and wear resistant film having a thickness of 5 μm to 50 μm. Method for forming a film having excellent heat resistance and wear resistance and sliding resistance on titanium or titanium alloy according to item (1)
【請求項6】粗面化処理が、120番〜270番のグリッドの
アルミナ粒子を、乾式法あるいは湿式法で投射する粗面
化処理である、請求項(1)に記載のチタン又はチタン
合金に耐熱耐摩耗性、耐摺動性に優れた皮膜を形成させ
る方法。
6. The titanium or titanium alloy according to claim 1, wherein the surface-roughening treatment is a surface-roughening treatment in which alumina particles of a 120-270 grid are projected by a dry method or a wet method. A method of forming a film with excellent heat resistance, wear resistance, and sliding resistance.
【請求項7】固体潤滑皮膜が、厚さ5〜30μmの固体潤
滑皮膜である、請求項(1)に記載のチタン又はチタン
合金に耐熱耐摩耗性、耐摺動性に優れた皮膜を形成させ
る方法。
7. The titanium or titanium alloy according to claim 1, wherein the solid lubricating coating is a solid lubricating coating having a thickness of 5 to 30 μm, and which has excellent heat and wear resistance and sliding resistance. How to make.
JP2129268A 1990-02-09 1990-05-21 Method of forming a film with excellent heat and wear resistance and sliding resistance on titanium or titanium alloy Expired - Lifetime JP2690598B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2129268A JP2690598B2 (en) 1990-05-21 1990-05-21 Method of forming a film with excellent heat and wear resistance and sliding resistance on titanium or titanium alloy
CA002035970A CA2035970C (en) 1990-02-09 1991-02-07 Process for surface treating titanium-containing metallic material
EP91301020A EP0441636B1 (en) 1990-02-09 1991-02-07 Process for surface treating titanium-containing metallic material
DE69102553T DE69102553T2 (en) 1990-02-09 1991-02-07 Process for the surface treatment of titanium-containing metal objects.
US07/653,087 US5116430A (en) 1990-02-09 1991-02-08 Process for surface treatment titanium-containing metallic material

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Application Number Priority Date Filing Date Title
JP2129268A JP2690598B2 (en) 1990-05-21 1990-05-21 Method of forming a film with excellent heat and wear resistance and sliding resistance on titanium or titanium alloy

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JP2690598B2 true JP2690598B2 (en) 1997-12-10

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KR100391307B1 (en) 2001-06-04 2003-07-16 한라공조주식회사 Method for preparing a solid film lubricant
JP4877963B2 (en) * 2006-10-26 2012-02-15 三菱鉛筆株式会社 Composite material
US20100089134A1 (en) 2007-02-14 2010-04-15 Agilent Technologies, Inc. Hplc pumping apparatus with silicon carbide piston and/or working chamber
JP4822355B2 (en) * 2007-03-28 2011-11-24 株式会社パイロットコーポレーション Writing instrument grip
JP4822356B2 (en) * 2007-03-28 2011-11-24 株式会社パイロットコーポレーション Writing instrument grip
RU2502828C1 (en) * 2012-06-18 2013-12-27 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Национальный исследовательский Томский государственный университет" Application of antifriction wear-proof coat on titanium, alloys
JP6209418B2 (en) * 2013-10-02 2017-10-04 株式会社シマノ Sliding member, bicycle component using sliding member, and fishing tackle component using sliding member
JP6278652B2 (en) * 2013-10-02 2018-02-14 株式会社シマノ Sliding member, bicycle component using sliding member, fishing tackle component using sliding member, and manufacturing method of sliding member
KR20150039548A (en) 2013-10-02 2015-04-10 가부시키가이샤 시마노 Slide member, bicycle component using slide member, fishing tackle component using slide member, and method of manufacturing slide member

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DE3716937C1 (en) * 1987-05-20 1987-11-26 Mtu Muenchen Gmbh Process for the production of wear protection layers on surfaces of components made of titanium or titanium-based alloys
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