JP3690828B2 - Abrasion-resistant ceramic coating on light metal support surface - Google Patents

Abrasion-resistant ceramic coating on light metal support surface Download PDF

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JP3690828B2
JP3690828B2 JP20547794A JP20547794A JP3690828B2 JP 3690828 B2 JP3690828 B2 JP 3690828B2 JP 20547794 A JP20547794 A JP 20547794A JP 20547794 A JP20547794 A JP 20547794A JP 3690828 B2 JP3690828 B2 JP 3690828B2
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ceramic coating
light metal
metal support
resistant ceramic
aluminum
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JPH0874030A (en
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性 宝 応
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ジューキ株式会社
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications

Description

【0001】
【産業上の利用分野】
本発明は、軽金属支持体表面上のセラミック被膜に関する。より詳細には、本発明は、耐摩耗性や耐久性に優れた軽金属支持体表面上のセラミック被膜に関する。
【0002】
【従来技術】
工業用ミシンの針棒、押え棒、押え抱きのような摺動部品を含む一般機械部品の材料としては、使用状態における機械的性質を優れたものとするために、従来から、種々のものが開発され、実際に使用されている。
【0003】
その一つに、機械構造用炭素鋼、ニッケルクロム鋼、ニッケルクロムモリブデン鋼、クロム鋼、クロムモリブデン鋼などの焼きがよく入り異常組織を生じないハダ焼き鋼を、浸炭焼入した後に焼戻しして内部は靭性のまま保持しつつ表面を硬化したものがある。これは、また、圧縮応力が残留するため疲労強度が向上するので摺動部だけでなく耐疲労性を要求される部分にも活用することができるが、油漏れが生じ易いという欠点があった。また、窒化法も従来は被窒化材が限定されていたが、イオン窒化では、従来の窒化方法では窒化が非常に困難であったNi,Cu,Alの中に窒化物形成元素を添加して非鉄基の合金やCr含有量の高い高合金鋼も窒化が可能となった上に、もともと窒化は焼入による硬化ではないので窒化したものに変形が少ないという利点を有するので、窒化鋼は一般機械部品の材料として最近よく活用されているが、油漏れが生じ易いという浸炭鋼と同様な欠点があった。したがって、例えば、これらの鋼材をミシン部品として使用した場合には、ミシンの本縫い面部などにおいて油漏れを生じ易かった。浸炭鋼や窒化鋼は、鋼に対して表面硬化処理を施したものであるが鋼自体の比重が大きいために機械全体の負荷が減少できず、その結果として、摩擦による発熱など好ましくない現象の発生を有意的に回避することができず、無給油部品とすることはできなかった。
【0004】
軽量化の要請により鋼材に代わってアルミニウム材やアルミニウム合金材のような軽金属材を支持体として使用した上で、必要な耐摩耗性や耐疲労性などを該軽金属材を表面処理することによって付加しようとすることが提案された。その一つが、アルミニウム材又はアルミニウム合金材上に硬質陽極酸化処理を施すものである。かかる場合には、アルミニウムが軽いため摩擦抵抗が小さくなるという利点を有するが、表面に形成された酸化物被膜は高応力負荷の状態で使用されると酸化物層の剥離が発生し易いという欠点を伴っていた。一旦膜が剥離又は摩耗により滅失すると直ちに焼付けが発生するので上記欠点は非常に深刻な問題であった。また、硬質処理により耐疲労性が浸炭鋼や窒化鋼に比べて低く、繰り返し大きな荷重を受ける部分には使用することができない。更に亀裂も生じ易かった。そして、酸化物被膜の硬度もHvで500〜700程度しか得られなかった。
【0005】
【発明が解決しようとする課題】
それ故、本発明の目的は、軽量でしかも優れた耐摩耗性を有する材料を提供することである。
【0006】
本発明の別の目的は、軽量でしかも優れた耐疲労性を有する材料を提供することである。
【0007】
【課題を解決するための手段】
本発明の発明者は鋭意研究の結果、アルミニウムやアルミニウム合金などの軽金属を支持体としその上にセラミック被膜を施すことにより、軽金属の有する比重が小さいという利点とセラミック被膜が有する耐摩耗性を合わせもつ材料の開発に成功した。
【0008】
かかる材料は、本発明は、軽金属支持体表面とセラミック被膜との間にNi−P中間層が挿入されていることを特徴とする軽金属支持体表面上に耐摩耗性セラミック被膜が施されたもの材料である。
【0009】
軽金属とセラミックとでは硬度が非常に異なるので、軽金属支持体上に直接セラミック被膜を施しても小さい剪断応力でセラミック被膜簡単に剥離してしまうが、Ni−P中間層を軽金属支持体表面とセラミック被膜との間に挿入させることによって剥離の問題を解決した。
【0010】
Ni−P中間層は電気めっき又は無電解めっきのいずれで堆積されたものでもよいが、無電解めっきで堆積されたものはピンホールがなくしかも厚さが均一であるため好ましい。なお、無電解めっきで堆積されたニッケルめっき層は非晶質なので400℃以上に加熱して結晶化して安定化させる。支持体としてアルミニウム又はアルミニウム合金を使用するときにはアルミニウムはその表面に再生容易な強い酸化被膜を生成するので、置換めっき、直接めっきなどの特殊な前処理をした上で、Ni−P層をめっきする。
【0011】
セラミック被膜の例としてはCrN膜やTiN膜が含まれるが、特に刃物に対してはCrN膜の方が好ましい。かかるセラミック被膜の堆積にはイオンプレーティングなどのPVDやプラズマCVDなどのCVDからなる気相めっき技術を利用するのが好ましく、特にイオンプレーティングが被膜の密着性の良さ、緻密さ、つき回りのよさから好ましい。
【0012】
軽金属支持体にはアルミニウム、アルミニウム合金、マグネシウム、マグネシウム合金などが含まれるが、加工性の良さからアルミニウム材又はアルミニウム合金が工業用ミシンの押え棒などの部品用材料としては好ましい。
【0013】
Ni−P中間層やセラミック被膜の膜厚は、用途や経済性などによって異なるが、一般にそれぞれ0.5〜50μm、好ましくは10〜20μmである。
【0014】
【作用】
セラミック被膜は軽金属支持体に比べて高温でも硬度が高く耐摩耗性に優れているので、軽金属支持体にセラミック被膜を施すと摩擦係数が小さく保たれると共に耐摩耗性が著しく向上した。故に、無給油摺動部品としても適した部材である。また、支持体に被膜を施した場合にはその密着性が問題となるが、本発明では、支持体、Ni−P中間層及びセラミック被膜の3層構造となったために、表面に向かって硬度が段階的に増大し且つ熱膨張係数が段階的に低くなるためセラミック被膜の剥離が生じにくくなったものと考えられる。また、垂直方向の力に対する耐荷重性も、アルミニウム材又はアルミニウム合金材に硬質陽極酸化処理を施したときに比べて著しく向上したので摺動部品だけでなく耐疲労性が要求される部品にも活用が期待される。更に、アルミニウム材などに硬質陽極酸化処理をしたときに伴われていた亀裂の発生や耐疲労性の低下が軽減された。
【0015】
なお、セラミック被膜として耐熱性、耐腐食性に優れたCrNを使用することにより、焼付け開始時間が大幅に伸びた。
【0016】
【実施例】
本発明の軽金属支持体表面とセラミック被膜との間にNi−P中間層が挿入されていることを特徴とする耐摩耗性セラミック被膜の施された軽金属支持体と従来技術の硬質陽極酸化処理がその上に施されたアルミニウム材との耐摩耗性、摩擦係数を比較するために以下の試験を実施した。
【0017】
図1に示すものは、実施例で使用した試料である。本発明の試料は、アルミニウム材からなる支持体上に20μmの厚さの無電解めっきNi−P中間層を介して20μmの厚さのCrN被膜をイオンプレーティングにより施した。また、比較例の試料は、アルミニウム材からなる支持体上に硬質陽極酸化処理により40μmの厚さの酸化層を施したものを作製した。そして、それぞれの試料を図2に示す試験装置の掴み部の間に試料を入れて、横方向に摺動させ、焼付けが発生して動かなくなるまで摺動させて、耐摩耗性及び耐剥離性を評価した。なお、試験条件は、いずれも無給油4000RPM且つ速度4.6m/sで行った。
【0018】
図3は本発明のCrN被膜を含む試料の実験結果を示したもので、図4は硬質陽極酸化膜を含む試料の実験結果を示したものである。図3と図4との比較から容易にわかるように、硬質陽極酸化被膜を含む試料の焼付け荷重は約2kgfと有意的に低かったにもかかわらず、硬質陽極酸化被膜を含む比較例の試料は試験開始から20分間を経過したところで焼付けが発生した。一方、本発明の試料は荷重が2kgfでは焼付けが20分間経過しても発生せず、その後荷重を6kgf程度まで上げて試験開始から6時間を経過してようやく焼付けが発生した。
【0019】
以上より、酸化被膜の耐摩耗性を考慮すると、比較例の試料は酸化被膜が摩耗による摩滅が進行しないうちに酸化被膜が剥離したものと考えられる。これに対し、本発明の試料は、セラミック被膜及び/又はNi−P中間層の密着性が良好で剥離が抑制され、耐摩耗性が高く且つ摩擦係数が小さく、結果として焼付け開始時間が遅くなりしかも耐焼付け荷重も高くなったものと考えられる。
【0020】
【発明の効果】
本発明の耐摩耗性セラミック被膜を施した軽金属支持体は、耐摩耗性に優れ且つ耐焼付け荷重も大きいことから、摺動部品として無給油や高速度で使用することも可能と考える。また、
また、Ni−P中間層を挿入することによって振動を有意的に吸収できるため、低振動化の面からも用途が期待される。
【図面の簡単な説明】
【図1】 実施例で使用した試料の形状である。
【図2】 実施例で使用した装置の断面図である。
【図3】 本発明の範囲に含まれるCrN被覆Al材の試料の摺動試験下での焼付け時間を示す図である。
【図4】 本発明の範囲に含まれない硬質陽極酸化処理したAl材の試料の摺動試験下での焼付け時間を示す図である。
[0001]
[Industrial application fields]
The present invention relates to a ceramic coating on a light metal support surface. More particularly, the present invention relates to a ceramic coating on the surface of a light metal support excellent in wear resistance and durability.
[0002]
[Prior art]
As materials for general machine parts including sliding parts such as needle bars, presser bars and presser hugs for industrial sewing machines, various materials have been conventionally used in order to have excellent mechanical properties in use. Developed and used in practice.
[0003]
For example, carbon steel for machine structural use, nickel chrome steel, nickel chrome molybdenum steel, chrome steel, chrome molybdenum steel, etc. Some have hardened surfaces while retaining toughness inside. In addition, since the fatigue strength is improved because the compressive stress remains, it can be utilized not only for the sliding portion but also for the portion requiring fatigue resistance, but there is a drawback that oil leakage is likely to occur. . In the nitriding method, the material to be nitrided has been limited in the past, but in ion nitriding, a nitriding element is added to Ni, Cu, and Al, which is very difficult to nitride by the conventional nitriding method. Non-ferrous alloys and high alloy steels with high Cr content can be nitrided, and since nitriding is not hardened by quenching, it has the advantage of being less deformed than nitridated steel. Although it is often used recently as a material for machine parts, it has the same disadvantage as carburized steel that oil leakage is likely to occur. Therefore, for example, when these steel materials are used as sewing machine parts, oil leakage is likely to occur at the main sewing surface of the sewing machine. Carburized steel and nitrided steel are obtained by subjecting steel to surface hardening treatment, but because the specific gravity of the steel itself is large, the load on the entire machine cannot be reduced, resulting in undesirable phenomena such as heat generation due to friction. Occurrence could not be avoided significantly and oilless parts could not be made.
[0004]
By using light metal materials such as aluminum and aluminum alloy materials instead of steel as a support in response to demands for weight reduction, the necessary wear resistance and fatigue resistance are added by surface treatment of the light metal materials. It was proposed to try. One of them is to perform hard anodizing treatment on an aluminum material or an aluminum alloy material. In such a case, since aluminum is light, it has an advantage that the frictional resistance is reduced. However, the oxide film formed on the surface is liable to cause peeling of the oxide layer when used in a state of high stress load. Was accompanied. The above disadvantages were a very serious problem because baking would occur as soon as the film was lost due to peeling or abrasion. In addition, the fatigue resistance is lower than that of carburized steel or nitrided steel due to the hard treatment, and it cannot be used for portions that repeatedly receive large loads. Furthermore, cracks were likely to occur. And the hardness of the oxide film was obtained only about 500-700 in Hv.
[0005]
[Problems to be solved by the invention]
Therefore, an object of the present invention is to provide a material that is lightweight and has excellent wear resistance.
[0006]
Another object of the present invention is to provide a material that is lightweight and has excellent fatigue resistance.
[0007]
[Means for Solving the Problems]
As a result of earnest research, the inventor of the present invention combines the advantage that the specific gravity of the light metal is small and the wear resistance of the ceramic coating by using a light metal such as aluminum or aluminum alloy as a support and applying a ceramic coating thereon. We have succeeded in developing materials.
[0008]
This material is obtained by applying a wear-resistant ceramic coating on the surface of a light metal support, wherein a Ni-P intermediate layer is inserted between the surface of the light metal support and the ceramic coating. Material.
[0009]
Since the hardness of light metal and ceramic is very different, even if the ceramic coating is applied directly on the light metal support, the ceramic coating easily peels off with a small shear stress, but the Ni-P intermediate layer is separated from the surface of the light metal support and the ceramic. The problem of delamination was solved by inserting it between the film.
[0010]
The Ni-P intermediate layer may be deposited by either electroplating or electroless plating, but the one deposited by electroless plating is preferable because it has no pinholes and has a uniform thickness. In addition, since the nickel plating layer deposited by electroless plating is amorphous, it is heated to 400 ° C. or more and crystallized and stabilized. When aluminum or an aluminum alloy is used as a support, aluminum forms a strong oxide film that can be easily regenerated on its surface. Therefore, the Ni-P layer is plated after a special pretreatment such as displacement plating or direct plating. .
[0011]
Examples of the ceramic coating include a CrN film and a TiN film, but a CrN film is more preferable particularly for a blade. For the deposition of such a ceramic coating, it is preferable to use a vapor phase plating technique comprising PVD such as ion plating or CVD such as plasma CVD. In particular, ion plating has good adhesion, denseness, and tangling of the coating. Good because it is good.
[0012]
The light metal support includes aluminum, an aluminum alloy, magnesium, a magnesium alloy, and the like. From the viewpoint of good workability, an aluminum material or an aluminum alloy is preferable as a material for parts such as a presser bar of an industrial sewing machine.
[0013]
The film thickness of the Ni-P intermediate layer and the ceramic coating varies depending on the application and economy, but is generally 0.5 to 50 μm, preferably 10 to 20 μm.
[0014]
[Action]
Since the ceramic coating has higher hardness and excellent wear resistance at high temperatures than the light metal support, applying the ceramic coating to the light metal support keeps the friction coefficient small and significantly improves the wear resistance. Therefore, it is a member suitable as an oil-free sliding part. Further, when the coating is applied to the support, the adhesion becomes a problem. However, in the present invention, since the support, Ni-P intermediate layer, and ceramic coating have a three-layer structure, the hardness toward the surface is increased. It is considered that peeling of the ceramic coating is less likely to occur because of a stepwise increase and a thermal expansion coefficient that decreases stepwise. In addition, the load resistance against vertical force is significantly improved compared to the case where a hard anodizing treatment is applied to an aluminum material or an aluminum alloy material, so that not only sliding parts but also parts requiring fatigue resistance are required. Utilization is expected. Furthermore, the occurrence of cracks and a decrease in fatigue resistance associated with hard anodizing treatment on aluminum materials and the like were reduced.
[0015]
In addition, by using CrN having excellent heat resistance and corrosion resistance as the ceramic coating, the baking start time was greatly extended.
[0016]
【Example】
A light metal support with a wear-resistant ceramic coating, characterized in that a Ni-P intermediate layer is inserted between the surface of the light metal support of the present invention and the ceramic coating, and a hard anodizing treatment of the prior art. In order to compare the wear resistance and the coefficient of friction with the aluminum material applied thereon, the following tests were conducted.
[0017]
The sample shown in FIG. 1 is the sample used in the examples. In the sample of the present invention, a CrN film having a thickness of 20 μm was applied by ion plating on a support made of an aluminum material through an electroless plating Ni—P intermediate layer having a thickness of 20 μm. Moreover, the sample of the comparative example produced what gave the 40-micrometer-thick oxide layer by the hard anodizing process on the support body which consists of aluminum materials. Then, put each sample between the grips of the test apparatus shown in FIG. 2, slide it in the lateral direction, and slide it until seizure occurs and it does not move. Evaluated. The test conditions were all oilless 4000 RPM and a speed of 4.6 m / s.
[0018]
FIG. 3 shows the experimental results of the sample containing the CrN film of the present invention, and FIG. 4 shows the experimental results of the sample containing the hard anodic oxide film. As can be easily seen from the comparison between FIG. 3 and FIG. 4, the sample of the comparative example including the hard anodized film, although the baking load of the sample including the hard anodized film was significantly low, about 2 kgf, Baking occurred 20 minutes after the start of the test. On the other hand, with the sample of the present invention, when the load was 2 kgf, baking did not occur even after 20 minutes had elapsed, and after that, the load was increased to about 6 kgf and finally baking occurred after 6 hours from the start of the test.
[0019]
From the above, considering the wear resistance of the oxide film, it is considered that the oxide film peeled off before the abrasion of the oxide film progressed due to wear. On the other hand, the sample of the present invention has good adhesion of the ceramic coating and / or Ni-P intermediate layer and is prevented from being peeled off, has high wear resistance and low friction coefficient, and as a result, the baking start time is delayed. Moreover, it is considered that the seizure load was also increased.
[0020]
【The invention's effect】
Since the light metal support provided with the wear-resistant ceramic coating of the present invention is excellent in wear resistance and has a large seizure load, it can be used as a sliding part without lubrication or at a high speed. Also,
Further, since the vibration can be significantly absorbed by inserting the Ni-P intermediate layer, the use is expected also from the aspect of low vibration.
[Brief description of the drawings]
FIG. 1 shows the shape of a sample used in Examples.
FIG. 2 is a cross-sectional view of an apparatus used in Examples.
FIG. 3 is a diagram showing a baking time under a sliding test of a sample of CrN-coated Al material included in the scope of the present invention.
FIG. 4 is a diagram showing a baking time under a sliding test of a sample of an anodized Al material not included in the scope of the present invention.

Claims (2)

軽金属支持体表面とセラミック被膜との間にNi−P中間層が挿入されていることを特徴とする軽金属支持体表面上の耐摩耗性セラミック被膜であって、セラミック被膜はCrN膜からなり軽金属支持体はアルミニウム又はアルミニウム合金からなる軽金属支持体表面上の耐摩耗性セラミック被膜。  A wear-resistant ceramic coating on the surface of a light metal support characterized in that a Ni-P intermediate layer is inserted between the surface of the light metal support and the ceramic coating, the ceramic coating comprising a CrN film and comprising a light metal support The body is a wear-resistant ceramic coating on the surface of a light metal support made of aluminum or an aluminum alloy. Ni−P中間層は無電解めっき法で堆積されたものである請求項1に記載の軽金属支持体表面上の耐摩耗性セラミック被膜。  The wear-resistant ceramic coating on the surface of a light metal support according to claim 1, wherein the Ni-P intermediate layer is deposited by an electroless plating method.
JP20547794A 1994-08-30 1994-08-30 Abrasion-resistant ceramic coating on light metal support surface Expired - Fee Related JP3690828B2 (en)

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Application Number Priority Date Filing Date Title
JP20547794A JP3690828B2 (en) 1994-08-30 1994-08-30 Abrasion-resistant ceramic coating on light metal support surface

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JPH0874030A JPH0874030A (en) 1996-03-19
JP3690828B2 true JP3690828B2 (en) 2005-08-31

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JP6551767B2 (en) * 2018-11-19 2019-07-31 三菱重工業株式会社 Laminated member, and impeller, compressor and engine using the same

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