JP2682445B2 - Narrowband excimer laser device - Google Patents
Narrowband excimer laser deviceInfo
- Publication number
- JP2682445B2 JP2682445B2 JP6123417A JP12341794A JP2682445B2 JP 2682445 B2 JP2682445 B2 JP 2682445B2 JP 6123417 A JP6123417 A JP 6123417A JP 12341794 A JP12341794 A JP 12341794A JP 2682445 B2 JP2682445 B2 JP 2682445B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- tube
- narrow band
- laser light
- total reflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Description
【０００１】[0001]
【産業上の利用分野】本発明は、狭帯域化エキシマレー
ザ装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a narrow band excimer laser device.
【０００２】[0002]
【従来の技術】従来の狭帯域化エキシマレーザ装置につ
いては、例えば、特開昭６４−２２０７８号公報に記載
されている。ここに記載されている従来のエキシマレー
ザ装置を図３に示す。2. Description of the Related Art A conventional narrow band excimer laser device is described in, for example, Japanese Patent Laid-Open No. 64-22078. The conventional excimer laser device described here is shown in FIG.
【０００３】この狭帯域化エキシマレーザ装置は、レー
ザ光が励起される媒質ガスを封入したレーザ管１１、狭
帯域化素子としてのエタロン１２、レーザ光取出し窓を
兼用し振動吸収用チューブ１６を介してレーザ管１１に
装着された出力鏡１３、全反射鏡１４、エタロン１２側
のレーザ光取出し窓１５と、エタロン１２、出力鏡１
３、全反射鏡１４を固定したインバーロッド１７を有し
ており、図示の如く配置している。In this narrow band excimer laser device, a laser tube 11 in which a medium gas for exciting laser light is enclosed, an etalon 12 as a narrow band element, and a vibration absorbing tube 16 which also serves as a laser light extraction window. Output mirror 13 mounted on the laser tube 11, total reflection mirror 14, laser light extraction window 15 on the etalon 12 side, etalon 12, output mirror 1
3. It has an invar rod 17 to which the total reflection mirror 14 is fixed, and is arranged as shown in the figure.
【０００４】この狭帯域化エキシマレーザ装置において
は、レーザ媒質ガス中で励起されたレーザ光が、光学窓
１５を通過し、エタロン１２で狭帯域化され、全反射鏡
１４により折り返され、再びエタロン１２、光学窓１
５、レーザ媒質ガスを通過し、出力鏡１３より出射す
る。ここで出力鏡１３は部分反射鏡であるため、出射し
ないレーザ光成分は折り返され、再びレーザ媒質ガス内
に入射し、レーザ共振作用を繰り返す。In this narrow band excimer laser device, the laser light excited in the laser medium gas passes through the optical window 15, is narrowed in band by the etalon 12, is reflected by the total reflection mirror 14, and is again etalon. 12, optical window 1
5. It passes through the laser medium gas and is emitted from the output mirror 13. Here, since the output mirror 13 is a partial reflecting mirror, the laser light component that does not exit is folded back and enters the laser medium gas again to repeat the laser resonance action.
【０００５】[0005]
【発明が解決しようとする課題】ところで、従来の狭帯
域化エキシマレーザ装置では、レーザ管とインバーロッ
ドの固定方法が明記されておらず、これらを単に同一架
台に固定すると、レーザ管内のガス循環ファン等による
振動を光学素子に伝えてしまい、レーザ出力光の波長ず
れや光軸変動が生じるという問題点があった。By the way, in the conventional narrow-band excimer laser device, the method of fixing the laser tube and the invar rod is not specified, and if these are simply fixed to the same frame, the gas circulation in the laser tube will be improved. There is a problem that vibration due to a fan or the like is transmitted to the optical element, which causes a wavelength shift of the laser output light and an optical axis fluctuation.
【０００６】また、レーザ管をゴム等のフレキシビリテ
ィーを有する防震材を介して架台に固定した場合、出力
鏡とレーザ管をつないだチューブがレーザガス圧力変化
により伸長あるいは収縮して、光軸ずれが生じるという
問題点もあった。Further, when the laser tube is fixed to the frame through a flexible anti-vibration material such as rubber, the tube connecting the output mirror and the laser tube expands or contracts due to the laser gas pressure change, and the optical axis shifts. There was also a problem that was caused.
【０００７】第１の発明の目的は、レーザ管及び光学架
台を、光学架台にレーザ管の振動を伝えない様に固定す
ることによって、波長ずれ、光軸変動のない狭帯域化エ
キシマレーザ装置を提供することにある。An object of the first invention is to fix a laser tube and an optical mount so as not to transmit the vibration of the laser tube to the optical mount, thereby providing a narrow band excimer laser device free from wavelength deviation and optical axis fluctuation. To provide.
【０００８】第２の発明の目的は、レーザ管及び光学架
台を、光学架台にレーザ管の振動を伝えないと同時に、
ガス圧力変化によっても位置関係が変動しない様に固定
することによって、波長ずれ、光軸変動のない狭帯域化
エキシマレーザ装置を提供することにある。An object of the second invention is to prevent the laser tube and the optical mount from being transmitted to the optical mount by the vibration of the laser tube.
An object of the present invention is to provide a narrow band excimer laser device in which there is no wavelength shift and optical axis fluctuation by fixing the positional relationship so that it does not change even when the gas pressure changes.
【０００９】[0009]
【課題を解決するための手段】第の１発明による狭帯域
化エキシマレーザ装置は、出力鏡が防震用チューブを介
してレーザ管に装着されレーザ光取出し窓を兼用すると
同時に、前記出力鏡は波長分散素子や全反射鏡等の共振
器構成光学素子と同一の光学架台に固定しており、前記
レーザ管あるいは前記光学架台の少なくともどちらか一
方が防震機構を有した支持器具を介して装置全体を支持
する基盤台に固定されていることを特徴とする。In the narrow band excimer laser device according to the first aspect of the present invention, the output mirror is mounted on the laser tube through a seismic protection tube and also serves as a laser beam extraction window, and at the same time, the output mirror has a wavelength. It is fixed to the same optical mount as the resonator-constituting optical element such as a dispersive element or a total reflection mirror, and at least one of the laser tube and the optical mount is attached to the entire device through a supporting device having a seismic isolation mechanism. It is characterized by being fixed to a supporting base.
【００１０】第２の発明による狭帯域化エキシマレーザ
装置は、出力鏡及び波長分散素子側のレーザ光取出し窓
が防震用チューブを介してレーザ管に装着されており、
前記出力鏡及び前記取出し窓は波長分散素子や全反射鏡
等の共振器構成光学素子と同一の光学架台に固定され、
前記レーザ管あるいは前記光学架台の少なくともどちら
か一方が防震機構を有した支持器具を介して装置全体を
支持する基盤台に固定されていることを特徴とする。In the narrow band excimer laser device according to the second aspect of the invention, the output mirror and the laser beam extraction window on the side of the wavelength dispersion element are attached to the laser tube through a vibration-proof tube,
The output mirror and the extraction window are fixed to the same optical mount as the resonator-constituting optical element such as a wavelength dispersion element or a total reflection mirror,
At least one of the laser tube and the optical mount is fixed to a base that supports the entire apparatus through a support device having a seismic protection mechanism.
【００１１】更に、前記支持器具は、前記防震用チュー
ブがレーザガス圧力により破壊するほど伸長あるいは収
縮しない強度をもつ材質か構造である。Further, the supporting device is made of a material or structure having a strength that does not extend or contract so that the seismic isolation tube is destroyed by laser gas pressure.
【００１２】[0012]
【作用】第１の発明による狭帯域化エキシマレーザ装置
においては、出力鏡、波長分散素子及び全反射鏡の共振
器構成光学素子が同一の光学架台に固定されており、ま
た、光学架台とレーザ管は、防震用チューブ及びこの防
震用チューブがレーザガス圧力により破壊するほど伸長
あるいは収縮しない強度をもつ材質か構造である防震機
構を有した支持器具を介して接続している。このため、
光学架台にレーザ管の振動が伝わらないので、ガス循環
ファン等による振動により、波長ずれ、光軸変動が生じ
ない。In the narrow-band excimer laser device according to the first aspect of the invention, the output mirror, the wavelength dispersion element, and the resonator-constituting optical elements of the total reflection mirror are fixed to the same optical mount, and the optical mount and the laser are fixed. The pipes are connected to each other through a seismic isolation tube and a support device having an seismic isolation mechanism that is a material or structure having a strength that does not expand or contract so that the seismic isolation tube is destroyed by laser gas pressure. For this reason,
Since the vibration of the laser tube is not transmitted to the optical mount, the wavelength shift and the optical axis fluctuation do not occur due to the vibration by the gas circulation fan or the like.
【００１３】第２の発明による狭帯域化エキシマレーザ
装置においては、同一光軸上にある出力鏡と波長分散素
子側のレーザ光取出し窓が共に防震用のチューブを介し
てレーザ管に装着され、出力鏡、レーザ光取出し窓、波
長分散素子及び全反射鏡の共振器構成光学素子が同一の
光学架台に固定されており、この光学架台とレーザ管
は、防震用チューブ及び防震機構を有した支持器具を介
して接続している。このため、光学架台にレーザ管の振
動が伝わらない。また、ガス圧力が変化した場合、同一
光軸上にある出力鏡とレーザ光取出し窓に接続した防震
用チューブに圧力が光軸上において対称方向にかかって
打ち消し合うので、レーザ管と光学素子との位置関係は
変化しない。従って、ガス循環ファン等による振動及び
ガス圧力変化により、波長ずれ、光軸変動が生じない。In the narrow band excimer laser device according to the second aspect of the present invention, the output mirror on the same optical axis and the laser light extraction window on the wavelength dispersion element side are both mounted on the laser tube through a seismic tube. The output mirror, the laser beam extraction window, the wavelength dispersion element, and the resonator-constituting optical element of the total reflection mirror are fixed to the same optical mount.The optical mount and the laser tube are supported with a seismic isolation tube and seismic isolation mechanism. Connected via a device. Therefore, the vibration of the laser tube is not transmitted to the optical mount. Also, when the gas pressure changes, the pressure is applied symmetrically on the optical axis to the output mirror and the seismic protection tube connected to the laser beam extraction window on the optical axis to cancel each other out. The positional relationship of does not change. Therefore, the wavelength shift and the optical axis fluctuation do not occur due to the vibration and the gas pressure change due to the gas circulation fan and the like.
【００１４】[0014]
【実施例】本発明の実施例を図面を用いて説明する。Embodiments of the present invention will be described with reference to the drawings.
【００１５】図１は、第１の発明及び第３の発明の狭帯
域化エキシマレーザ装置の一実施例を説明するための図
である。FIG. 1 is a diagram for explaining one embodiment of a narrow band excimer laser device of the first and third inventions.
【００１６】図１に示した狭帯域化エキシマレーザ装置
は、レーザ光が励起される媒質ガスを封入したレーザ管
１１、波長分散素子１８、レーザ光取出し窓を兼用し振
動吸収用チューブ１６を介してレーザ管１１に装着され
た出力鏡１３、全反射鏡１４、波長分散素子１８側のレ
ーザ光取出し窓１５と、波長分散素子１８、出力鏡１
３、全反射鏡１４を固定した光学架台１９、防震機構を
有した支持器具２０及び基盤台２１を有しており、図示
の如く配置している。The narrow band excimer laser device shown in FIG. 1 has a laser tube 11 in which a medium gas for exciting laser light is sealed, a wavelength dispersion element 18, and a vibration absorption tube 16 which also serves as a laser light extraction window. Output mirror 13 mounted on the laser tube 11, total reflection mirror 14, laser beam extraction window 15 on the side of the wavelength dispersion element 18, wavelength dispersion element 18, output mirror 1
3, an optical mount 19 to which the total reflection mirror 14 is fixed, a support fixture 20 having a seismic isolation mechanism, and a base 21 are provided and arranged as shown.
【００１７】第１の発明による狭帯域化エキシマレーザ
装置においては、ガス循環ファン等による振動発生源を
有するレーザ管１１と共振器を構成する光学素子１３、
１４、１８を固定した光学架台１９とが、振動吸収用チ
ューブ１６及び防震機構を有した支持器具２０を介して
接続しているため、振動によるレーザ出力光の波長ず
れ、光軸変動が生じない。また、支持器具２０は、防震
用チューブがレーザガス圧力により破壊するほど伸長あ
るいは収縮しない程度の形状保持強度をもつ材質か構造
であるため、振動吸収用チューブ１６が破壊される危険
性もない。In the narrow band excimer laser device according to the first aspect of the present invention, a laser tube 11 having a vibration source such as a gas circulation fan and an optical element 13 forming a resonator,
Since the optical mount 19 to which 14 and 18 are fixed is connected via the vibration absorbing tube 16 and the supporting device 20 having the vibration-proof mechanism, the wavelength deviation of the laser output light and the optical axis fluctuation due to the vibration do not occur. . Further, since the supporting device 20 is made of a material or structure having a shape-retaining strength that does not expand or contract so much that the earthquake-proof tube is destroyed by the laser gas pressure, there is no risk of the vibration-absorbing tube 16 being destroyed.
【００１８】図２は、第２の発明及び第３の発明の狭帯
域化エキシマレーザ装置の一実施例を説明するための図
である。FIG. 2 is a diagram for explaining one embodiment of a narrow band excimer laser device of the second invention and the third invention.
【００１９】図２に示した狭帯域化エキシマレーザ装置
は、レーザ光が励起される媒質ガスを封入したレーザ管
１１、波長分散素子１８、振動吸収用チューブ１６を介
してレーザ管１１に装着された出力鏡１３及びレーザ光
取出し窓１５、全反射鏡１４と、波長分散素子１８、出
力鏡１３、全反射鏡１４、レーザ光取出し窓１５を固定
した光学架台１９、防震機構を有した支持器具２０及び
基盤台２１を有しており、図示の如く配置している。The narrow band excimer laser device shown in FIG. 2 is mounted on the laser tube 11 via a laser tube 11 in which a medium gas for exciting laser light is sealed, a wavelength dispersion element 18, and a vibration absorbing tube 16. Output mirror 13, laser light extraction window 15, total reflection mirror 14, wavelength dispersive element 18, output mirror 13, total reflection mirror 14, optical mount 19 to which laser light extraction window 15 is fixed, and a support device having an earthquake-proof mechanism It has 20 and a base 21, and is arranged as shown.
【００２０】第２の発明による狭帯域化エキシマレーザ
装置においては、ガス循環ファン等による振動発生源を
有するレーザ管１１と共振器を構成する光学素子１３、
１４、１５、１８を固定した光学架台１９とが、振動吸
収用チューブ１６及び防震機構を有した支持器具２０を
介して接続しているため、振動によるレーザ出力光の波
長ずれ、光軸変動が生じない。また、レーザ管１１内の
ガス圧力が変化した場合、同一光軸上にある出力鏡１３
とレーザ光取出し窓１５に接続した振動吸収用チューブ
１６に圧力が対称方向にかかって打ち消し合うので、レ
ーザ管１１と各光学素子との位置関係は変化しない。従
ってガス圧力変化によっても、レーザ出力光の波長ず
れ、光軸変動が生じない。In the narrow band excimer laser device according to the second aspect of the present invention, the laser tube 11 having a vibration generating source such as a gas circulation fan and the optical element 13 constituting the resonator,
Since the optical mount 19 to which 14, 15, and 18 are fixed is connected via the vibration absorbing tube 16 and the supporting device 20 having the vibration-proof mechanism, the wavelength shift of the laser output light and the optical axis fluctuation due to the vibration are caused. Does not happen. Further, when the gas pressure in the laser tube 11 changes, the output mirror 13 located on the same optical axis
Since pressure is applied to the vibration absorbing tube 16 connected to the laser light extraction window 15 in a symmetrical direction to cancel each other out, the positional relationship between the laser tube 11 and each optical element does not change. Therefore, even if the gas pressure changes, the wavelength deviation of the laser output light and the optical axis fluctuation do not occur.
【００２１】[0021]
【発明の効果】以上述べたように、本発明によれば、ガ
ス循環ファン等レーザ管の振動やレーザ管内ガス圧力変
化による、レーザ出力光の波長ずれ、光軸変動が生じな
い狭帯域化エキシマレーザ装置を提供できる。As described above, according to the present invention, the wavelength narrowing excimer in which the wavelength deviation of the laser output light and the optical axis fluctuation do not occur due to the vibration of the laser tube such as the gas circulation fan and the gas pressure change in the laser tube. A laser device can be provided.
【図１】第１の発明の狭帯域化エキシマレーザ装置の一
実施例を示す図。FIG. 1 is a diagram showing an embodiment of a narrow band excimer laser device of the first invention.
【図２】第２の発明の狭帯域化エキシマレーザ装置の一
実施例を示す図。FIG. 2 is a diagram showing an embodiment of a narrow band excimer laser device of the second invention.
【図３】従来の狭帯域化エキシマレーザ装置を示す図。FIG. 3 is a diagram showing a conventional narrow band excimer laser device.
１１ レーザ管 １２ エタロン １３ 出力鏡 １４ 全反射鏡 １５ レーザ光取出し窓 １６ 振動吸収用チューブ １７ インバーロッド １８ 波長分散素子 １９ 光学架台 ２０ 防震機構を有した支持器具 ２１ 基盤台 11 Laser Tube 12 Etalon 13 Output Mirror 14 Total Reflection Mirror 15 Laser Light Extraction Window 16 Vibration Absorption Tube 17 Invar Rod 18 Wavelength Dispersion Element 19 Optical Mount 20 Support Equipment with Seismic Protection Mechanism 21 Platform Stand
Claims (2)
れたレーザ管と、 このレーザ管の一端に防震用チューブを介して装着され
た出力鏡と、 このレーザ管の他端に設けられたレーザ光取出し窓と、 このレーザ光取出し窓から取り出されたレーザ光を前記
レーザ管に折り返す全反射鏡と、 この全反射鏡と前記レーザ光取出し窓との間に配置され
た 波長分散素子と を備えた狭帯域化エキシマレーザ装置において、 前記出力鏡と前記全反射鏡および前記波長分散素子とを
固定する光学架台と、 この光学架台と前記レーザ管とを支持する基盤台と を備
え、 前記レーザ管と前記光学架台との少なくとも一方が、そ
の間で振動が伝わることがなく、かつ前記防震用チュー
ブが前記レーザ管内の媒質ガスの圧力により伸長あるい
は収縮しない程度の強度の防震機構を有した支持器具を
介して前記基盤台に固定されたことを特徴とする狭帯域
化エキシマレーザ装置。(1)The medium gas in which the laser light is excited is filled.
Laser tube, It is attached to one end of this laser tube through a seismic tube
Output mirror, A laser light extraction window provided at the other end of the laser tube, The laser light extracted from this laser light extraction window is
A total reflection mirror that folds back to the laser tube, It is arranged between this total reflection mirror and the laser light extraction window.
Was Wavelength dispersive elementWhen A narrow band excimer laser device including:And the total reflection mirror and the wavelength dispersion element
FixOptical mountWhen, A base for supporting the optical mount and the laser tube, Be prepared
e, The laser tubeWhenThe optical mountWhenAt leastMoichiBetter, That
Vibration is not transmitted between the
The gas is expanded by the pressure of the medium gas in the laser tube.
Is not strong enough to shrinkSupport equipment with earthquake-proof mechanism
ThroughSaidFixed to baseWas doneNarrow band characterized by
Excimer laser device.
し窓とが防震用チューブを介して接続され、前記レーザ光取出し窓が前記光学架台に固定された 請求
項１記載の 狭帯域化エキシマレーザ装置。2. The other end of the laser tube and the laser light extraction
Claims and to the window is connected through a BoShinyo tube, the laser beam outlet window is fixed to the optical frame
Item 1. A narrow band excimer laser device according to item 1 .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6123417A JP2682445B2 (en) | 1994-06-06 | 1994-06-06 | Narrowband excimer laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6123417A JP2682445B2 (en) | 1994-06-06 | 1994-06-06 | Narrowband excimer laser device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH07335964A JPH07335964A (en) | 1995-12-22 |
| JP2682445B2 true JP2682445B2 (en) | 1997-11-26 |
Family
ID=14860047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6123417A Expired - Lifetime JP2682445B2 (en) | 1994-06-06 | 1994-06-06 | Narrowband excimer laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2682445B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2836566B2 (en) * | 1995-12-08 | 1998-12-14 | 日本電気株式会社 | Wavelength stabilized narrow band excimer laser device |
| US6650666B2 (en) * | 2000-02-09 | 2003-11-18 | Cymer, Inc. | Laser wavelength control unit with piezoelectric driver |
| JP7095786B2 (en) * | 2020-09-29 | 2022-07-05 | ウシオ電機株式会社 | Inactivating device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6422078A (en) * | 1987-07-17 | 1989-01-25 | Komatsu Mfg Co Ltd | Multi-mode narrow band oscillation excimer laser |
| JPH03274780A (en) * | 1990-03-23 | 1991-12-05 | Komatsu Ltd | Gas laser device |
-
1994
- 1994-06-06 JP JP6123417A patent/JP2682445B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07335964A (en) | 1995-12-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19970708 |