JP2664508B2 - Method for producing lithium niobate single crystal - Google Patents
Method for producing lithium niobate single crystalInfo
- Publication number
- JP2664508B2 JP2664508B2 JP2013702A JP1370290A JP2664508B2 JP 2664508 B2 JP2664508 B2 JP 2664508B2 JP 2013702 A JP2013702 A JP 2013702A JP 1370290 A JP1370290 A JP 1370290A JP 2664508 B2 JP2664508 B2 JP 2664508B2
- Authority
- JP
- Japan
- Prior art keywords
- lithium niobate
- single crystal
- boule
- niobate single
- producing lithium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 [産業上の利用分野] 本発明は弾性表面波フィルターに用いるニオブ酸リチ
ウム単結晶の改良された製造方法に関する。The present invention relates to an improved method for producing a lithium niobate single crystal used for a surface acoustic wave filter.
[従来の技術] 弾性表面波フィルター用としてニオブ酸リチウムの大
型単結晶が使用されている。ニオブ酸リチウム単結晶は
通常、炭酸リチウムと五酸化ニオビウムとをコングルエ
ント組成比に混合し、高温焼成して得られたニオブ酸リ
チウムを原料とする。この原料を高周波誘導加熱炉内で
白金ルツボ中で溶融し、引き上げて大型結晶(ブールと
称す)となす。これを一亘冷却した後、別の抵抗加熱炉
で1000℃以上に数10時間、保持し、アニーリングを行
い、更に単一分域化処理を行う。単一分域化処理として
は、ブールをニオブ酸リチウムの焼結したセラミック板
を電極としてリード線を配し、抵抗加熱炉にてキュリー
温度以上に加熱しながら直流電圧を印加してその後冷却
しキュリー温度を通過させ分極化させるのである。[Prior Art] Large single crystals of lithium niobate are used for surface acoustic wave filters. The lithium niobate single crystal is usually made of lithium niobate obtained by mixing lithium carbonate and niobium pentoxide in a congruent composition ratio and firing at a high temperature. This raw material is melted in a platinum crucible in a high-frequency induction heating furnace and pulled up to form a large crystal (referred to as a boule). After cooling the whole, it is kept in another resistance heating furnace at 1000 ° C. or higher for several tens of hours, annealed, and further subjected to a single domaining treatment. As a single-domain treatment, a boule is placed on a lead plate using a lithium niobate sintered ceramic plate as an electrode, and a DC voltage is applied while heating above the Curie temperature in a resistance heating furnace, followed by cooling. It passes through the Curie temperature and is polarized.
しかし、上記したように、ブールをアニーリングし、
更に単一分域化処理を行うと、アニーリング時ではブー
ルを乗せるニオブ酸リチウムのセラミック板との界面
で、単一分域化処理ではブールのへき開面でそれぞれク
ラックが生じやすく、品質においても生産性においても
極めて不都合であるという問題があった。However, as mentioned above, annealing the Boolean,
In addition, when single-domain processing is performed, cracks are likely to occur at the interface with the lithium niobate ceramic plate on which the boule is placed during annealing, and in the single-domain processing, the cleavage surface of the boule is likely to produce cracks. There was a problem that the sex was extremely inconvenient.
[発明が解決しようとする課題] 本発明の目的は上記の問題点を解消し、ブールのアニ
ーリング時および単一分域化処理時でのクラックの発生
を防止することができるニオブ酸リチウム単結晶の製造
方法を提供することにある。[Problems to be Solved by the Invention] An object of the present invention is to solve the above-mentioned problems and to prevent the occurrence of cracks at the time of annealing of a boule and at the time of a single domaining process, and a single crystal of lithium niobate. It is to provide a manufacturing method of.
[課題を解決するための手段] 本発明は上記目的を達成するために、引上げ法で得ら
れたニオブ酸リチウム単結晶(ブール)をニオブ酸リチ
ウム単結晶粉砕品が敷き詰められた皿の上に設置し該ブ
ールを単一分域化処理ならびにアニーリングを行う点に
特徴がある。[Means for Solving the Problems] In order to achieve the above object, the present invention provides a method in which a lithium niobate single crystal (a boule) obtained by a pulling method is placed on a plate on which lithium lithium niobate single crystal ground products are spread. It is characterized in that it is installed and the boule is subjected to a single domaining process and annealing.
[作用] 本発明方法で用いることのできるニオブ酸リチウム単
結晶粉砕品は、単結晶であればそれの製法はどのような
ものでもよいが、質的に該ブールと同等のものが好まし
い。従って引上げ法で得られたものが好ましく、不良品
や切断後の残品でも差し支えない。粉砕方法としては該
単結晶をスライサー等で0.5〜1mmの厚さのウェハー状と
したものを、水洗及び有機溶媒等で洗浄したのち、乳
鉢、ボールミル等により5mm以下、望ましくは3〜5mm四
方の粒状物となせば好適である。[Action] The lithium niobate single crystal pulverized product that can be used in the method of the present invention may be of any production method as long as it is a single crystal, but is preferably qualitatively equivalent to the boule. Therefore, a product obtained by the pulling method is preferable, and a defective product or a residual product after cutting may be used. As a pulverizing method, the single crystal is made into a wafer having a thickness of 0.5 to 1 mm with a slicer or the like, washed with water, an organic solvent, or the like, and then mortar, a ball mill, or the like, 5 mm or less, preferably 3 to 5 mm square. It is preferred that the material be granular.
該粉砕品の大きさは必ずしも同等にする必要はなく、
3〜5mmが望ましく、形状はどのようなものでも差し支
えないが、ペレット状が望ましい。該皿としては高温と
酸化に耐えられる材質が良く、特に白金が好適である。
該皿の上に該粉砕品を敷き詰めるに当り、最密充填し、
間隙なく詰めることが重要である。該粉砕品の敷き詰め
た厚さは1cm以下が望ましく、その幅はこの上に設置す
るブールの底面よりも大であればよい。該皿上の該粉砕
品を敷き詰めた上にブールを設置するに当り、該ブール
を垂直に立てればよく、アニーリングにおいては、この
ままの状態で炉中にて処理すればよい。また、ブールの
上部と該皿下部にリード線を付け電流を流すことにより
電気炉中で加熱し単一分域化処理をすることができる。The size of the pulverized product does not necessarily need to be equal,
3 to 5 mm is desirable, and any shape may be used, but a pellet is desirable. The dish is preferably made of a material that can withstand high temperatures and oxidation, and platinum is particularly preferred.
Upon spreading the crushed product on the dish,
It is important to pack without gaps. The spread thickness of the crushed product is desirably 1 cm or less, and the width thereof may be larger than the bottom surface of the boule provided thereon. In order to set the boule on the dish on which the crushed products are spread, the boule may be set upright, and annealing may be performed in a furnace as it is. In addition, by applying a lead wire to the upper part of the boule and the lower part of the dish and applying a current, the boule can be heated in an electric furnace to perform a single domaining process.
[実施例−1] 引き上げ法で得られたニオブ酸リチウム単結晶を内周
刃型スライサーで0.5mm〜1mmの厚さのウェハーに切断
し、表面汚れを水およびエタノールで洗浄したのち、ア
ルミナ乳鉢で3mm〜5mm四方のペレット状とした。次に白
金板で10cm×10cmの皿を作成し、この中にペレットを1c
mの厚さに敷き詰めた。この皿を耐火レンガに載せ、リ
ード線を皿と耐火レンガの間にはさんで配線した。ペレ
ットの上に80mmφ×150mmのブールを垂直に立て、ブー
ルの上部にセラミック板をのせ、リード線が付いた白金
板を、このセラミック板の上にのせた。こうして電気炉
内へ設置し電流を流しながら1190℃で1時間保持したの
ち冷却しキュリー温度を通過させて単一分域化処理を行
った。この結果、クラックの発生は全く認められなかっ
た。[Example-1] A lithium niobate single crystal obtained by the pulling method was cut into wafers having a thickness of 0.5 mm to 1 mm with an inner peripheral slicer, and surface dirt was washed with water and ethanol, and then an alumina mortar. To form pellets of 3 mm to 5 mm square. Next, make a 10 cm × 10 cm dish with a platinum plate, and place the pellet in this
m m. The dish was placed on a firebrick and the leads were wired between the dish and the firebrick. An 80 mm φ × 150 mm boule was set upright on the pellet, a ceramic plate was placed on top of the boule, and a platinum plate with lead wires was placed on this ceramic plate. Thus, it was placed in an electric furnace and maintained at 1190 ° C. for 1 hour while passing a current, then cooled and passed through the Curie temperature to perform a single domaining treatment. As a result, no crack was observed.
[実施例−2] リード線を配線しない以外は実施例−1と全く同様の
白金皿、ペレット、ブールからなるサンプルを抵抗加熱
炉で約1200℃、2日間のアニールを行った。[Example 2] A sample consisting of a platinum dish, pellets, and a boule exactly as in Example 1 except that no lead wire was wired was annealed at about 1200 ° C for 2 days in a resistance heating furnace.
この結果、クラックの発生は全く認められなかった。 As a result, no crack was observed.
[発明の効果] 本発明方法を行うことにより、引き上げ法で得られた
ブールをクラック発生を起すことなくアニールおよび単
一分域化処理を行うことができる。[Effects of the Invention] By performing the method of the present invention, annealing and single-domain processing can be performed on the boule obtained by the pulling method without generating cracks.
Claims (1)
晶を3〜5mm四方のニオブ酸リチウム単結晶粉砕品が敷
き詰められた皿の上に設置し該ニオブ酸リチウム単結晶
の単一分域化処理ならびにアニーリングを行うことを特
徴とするニオブ酸リチウム単結晶の製造方法。1. A lithium niobate single crystal obtained by the pulling method is placed on a plate on which a lithium niobate single crystal ground product of 3 to 5 mm square is spread and a single domain of the lithium niobate single crystal is placed. A method for producing a lithium niobate single crystal, which comprises performing a crystallization treatment and an annealing.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013702A JP2664508B2 (en) | 1990-01-25 | 1990-01-25 | Method for producing lithium niobate single crystal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013702A JP2664508B2 (en) | 1990-01-25 | 1990-01-25 | Method for producing lithium niobate single crystal |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03218996A JPH03218996A (en) | 1991-09-26 |
JP2664508B2 true JP2664508B2 (en) | 1997-10-15 |
Family
ID=11840539
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013702A Expired - Lifetime JP2664508B2 (en) | 1990-01-25 | 1990-01-25 | Method for producing lithium niobate single crystal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2664508B2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06258539A (en) * | 1993-03-09 | 1994-09-16 | Mitsui Mining & Smelting Co Ltd | Lithium niobate crystal wafer and its production and evaluating method |
JP3938147B2 (en) * | 2003-04-08 | 2007-06-27 | 住友金属鉱山株式会社 | Lithium tantalate substrate and manufacturing method thereof |
CN116200828B (en) * | 2023-05-06 | 2023-07-07 | 天通控股股份有限公司 | Preparation method of large-size lithium niobate crystal |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59227799A (en) * | 1983-06-07 | 1984-12-21 | Fujitsu Ltd | Method for annealing oxide single crystal |
-
1990
- 1990-01-25 JP JP2013702A patent/JP2664508B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH03218996A (en) | 1991-09-26 |
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