JP2652614B2 - Gas recovery device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gas recovery apparatus used in various industries dealing with various solvents, gases and the like. More specifically, the present invention relates to a gas recovery device for recovering a relatively rare gas mixed with air.

[0002]

2. Description of the Related Art Conventionally, the following problems always occur in various industries dealing with the above-mentioned various solvents and gases. For example, in an electronic component manufacturing factory, a cleaning device is used for cleaning manufactured electronic components. Although this is publicly known and not shown, it is usually carried out by immersion in a liquid tank containing a liquid such as Freon R-113. In this case, the gas or mist of the Freon R-113 is discharged from the cleaning device from the inlet and the outlet of the work. In the present invention, mist is also included in the gas. For this reason, the gas of R113 exists in the room where the above-mentioned cleaning device is placed, the floor, or the factory in a state where it is mixed with air.

[0003] The diffusion of chlorofluorocarbon gas in a factory or the like by such a cleaning apparatus using chlorofluorocarbon R-113 is an example, and many factories use the above-mentioned fluorocarbons, halogenated hydrocarbons, general organic solvents and the like to produce such fluorocarbons. Inside diffusion is taking place. This leads to a deteriorating environment in the factory.

[0004] In this case, the gas diffused in the factory or the like is usually released to the outside through windows or the like, which also causes pollution. In this case, in order to solve the problem, the gas is usually collected by a gas adsorption device using activated carbon. Since this is publicly known, its illustration is omitted, but in that case, the following problem occurs. That is, activated carbon deteriorates with use.

[0005] For example, in the cleaning of electronic parts with the Freon R-113 solution, the Freon R-113 solution contains alcohol, a surfactant, and the like, and contains sebum, resin and the like by washing. It deteriorates during these adsorption and desorption. And degraded activated carbon must be replaced. Moreover, in this case, the adsorption device using activated carbon, which is usually used for purifying air in one factory, becomes a large adsorption device for handling a large amount of air, and uses a large amount of activated carbon. There must be. In addition, desorption of activated carbon having adsorbed gas requires a boiler because steam is used, and also requires a rise time until steam is generated from the boiler, which is not efficient. Also, handling and management of the boiler is troublesome.

[0006] In addition, the adsorption apparatus using activated carbon is inefficient because the operation is batch type and continuous operation cannot be performed. Next, as another gas recovery method, there is a liquefaction recovery method by cooling the gas. As described above, a relatively large amount of a relatively large amount of gas (for example, a gas of 100 to 1000 PPM and a gas of 100 m ³⁾ . If) is liquefied and recovered, most of the power used is consumed for cooling the air, and the amount of power consumed is large, but the recovered amount is insignificant, and the efficiency is extremely poor. This is not practical.

[0007]

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned various problems, and an object of the present invention is to provide a relatively small apparatus without requiring a large apparatus such as the above-mentioned activated carbon adsorption apparatus. In addition, there is no need for maintenance such as replacement of activated carbon due to the use of activated carbon, and continuous work can be performed without using a batch system.There is no need for management due to use of a boiler, etc., and work such as when steam is generated. It is an object of the present invention to provide a gas recovery apparatus which eliminates wasting of the rise time and has a much higher ratio of power consumption to recovery amount, that is, efficiency, than the conventional liquefaction and recovery apparatus.

[0008]

In order to achieve the above object, the present invention will be described. The present invention relates to a gas condenser 3 in which a refrigerant passage 1 and a gas passage 2 are formed adjacent to each other; A centrifugal separator 6 comprising a rotatable, closed vertical cylinder 5 connected to a drive unit 4 and mounted on the apparatus 3 and upstream of the gas flow direction in the gas condensing apparatus 3. Apparatus 7; gas inlet 9 formed in lower part 8 of vertical cylinder 5; upper part 10 of vertical cylinder 5 at different positions 12 different in size in the radial direction from rotation axis 11 of vertical cylinder 5 , 13 formed on the upper part 10 of the vertical cylinder 5 and between the two ports 14, 15 fixed to the base 6. lid 17 having a cut-off portion 16 which, prior to And communicates with the exhaust port 15, the stiffness
A larger diameter than the exhaust port 15 provided in the mold cylinder 5,
And an umbrella-shaped inner hood having an interval with the rigid cylinder 5.
De 53; formed in the lid 17, the outlet 14 and exhaust port 15 discharging section 18 and an exhaust unit 19 communicating respectively; the condenser was allowed communicated 20 to the outlet portion 18 3, the gas A gas recovery device comprising an upstream end 21 of a passage 2. Inside the rigid cylinder 5
An attachment portion for detachably attaching the hood 53 is formed.
The inner hood 53 comprises a plurality of types having different diameters.
The gas recovery device.

The gas inlet 9 is provided with a rotary shaft 1 provided coaxially with the hollow, vertical cylinder 5 having a gas supply passage 23.
1 is a gas recovery device in communication with the gas recovery device;

The gas condensing device 3 has a gas compression device 24 upstream of the gas flow direction in the gas condensing device 3 and between the gas condensing device 3 and the centrifugal separator 7. It is a gas supply device.

The gas condensing device 3 is a cryogenic cooling system comprising a refrigerant passage 28 and a gas passage 29 which are connected to a refrigerator 27 via a recovered liquid tank 26 downstream of the gas condensing device 3 in the gas flow direction. The gas recovery device communicated with the condenser 32.

The gas condenser 3 has a strong condenser 31 downstream of the gas flow in the gas condenser 3 and connected to an ejector 30 which is operated by the refrigerant of the gas condenser 3. The gas recovery device.

The refrigerant passage 1 of the gas condenser 3 is
The gas recovery device is connected to a cylinder 33 containing liquid nitrogen.

[0014]

The gas to be recovered is assumed to be, for convenience of explanation, the gas of Freon R-113 leaking into the factory from the inlet and outlet of the work of the washing machine using Freon R-113, for example. This gas is generally provided with a duct on a roof for recovery and discharged outside by a pump. In the present invention, by way of example, Freon R-
The mixed air 113 is supplied to the centrifugal separator 7 and into the vertical cylinder 5 from the gas supply passage 23 of the rotating shaft 11. The vertical cylinder 5 is rotated at a high speed by the driving device 4. For this reason, the air receives a centrifugal force in the vertical cylinder 5, and Freon R-113 which is heavier than air.
Is away from the rotation shaft 11 and the air is located inside the Freon R-113. And in this case, an umbrella-shaped inner hood 5
3 effectively guides air, and CFC R-113
Separated from The inner hood 53 has a different diameter.
And Mochiiruko plurality of types in accordance with the specific gravity of the gas separating that
Effectively separates air from gas
be able to. Thus the gas and air of Freon R-113
Is each Re their Re is discharged from the discharge port 14 and the exhaust port 15. Then, the air is discharged out of the centrifugal separator 7 while the Freon R-113 gas is advanced through the gas passage 2 of the condenser 3 while being condensed there by adjoining the passage 1 through which the refrigerant passes. Liquefied, dropped and collected. In this case, instead of cooling the air containing the thin gas as in the conventional case, the mixed gas containing much more gas is cooled, so that the ratio between the power consumption and the gas recovery amount, that is, the efficiency is excellent. A gas recovery device can be provided.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In FIG. 1, reference numeral 1 denotes a refrigerant passage, in which water flows as shown by an arrow A1 as an example of the refrigerant. Reference numeral 2 denotes a gas passage, and both 1 and 2 are formed in phosphorous contact with each other. Reference numeral 3 denotes a condensing device formed as described above.

Next, 7 is a centrifugal separator, and its base 6
, A closed vertical cylinder 5 is rotatably provided. 4
Is a drive device, which uses a motor, which is connected to the vertical cylinder 5 by a belt 36. Reference numeral 9 denotes a gas inlet formed in the lower portion 8 of the vertical cylinder 5. A gas outlet 14 and a gas outlet 15 are formed in the upper portion 10 of the vertical cylinder 5 at different positions 12 and 13 in the radial direction from the rotation shaft 11 of the cylinder 5 respectively.

Reference numeral 17 denotes a cover fixed to the base 6 and provided on the upper part 10 of the vertical cylinder 5 and having a blocking part 16 for blocking between the ports 14 and 15. And has two circular grooves 37, 38 communicating with the ports 14, 15, respectively. The groove 37 has an exhaust port 14 communicating therewith, and the groove 38 has an exhaust port 1 communicating therewith.
Five. The discharge unit 18 is connected to the upstream end 21 of the gas passage 2 of the condenser 3 by the communication unit 20.
Has been communicated to. Next, in FIG. 1, reference numeral 39 denotes an electronic component cleaning apparatus shown as an example of a source of the gas to be recovered and as an example, 40 is a cleaning tank, 41 is a rinsing tank,
Reference numeral 42 denotes a holding member provided on the rotating chain 43.
It is formed so as to rotate in 43 directions. Reference numeral 44 denotes a work. 45 is a housing, 46 and 47 are an inlet and an outlet. 48 is a hood, 49 is a gas supply port, 50
Denotes a suction fan, and 51 denotes a communication path. Reference numeral 52 denotes a factory building.

Reference numeral 53 denotes an inner hood, and reference numeral 54 denotes a bearing.
Next, in FIG. 1, the condenser 3 is connected to a cryogenic condenser 32 via a recovery liquid tank 26. 27 is a refrigerator. Gas generated from the inlet 46, the outlet 47, etc. of the work 44 of the cleaning device 39, for example, Freon R-11
3 is sucked from the hood 48 by the fan 50, enters the centrifugal separator 7, and the fluorocarbon R-113, which is heavier than air, in the rotating vertical cylinder 5 collects outward in the radial direction. In this case, for example, the fluorocarbon R-113 is The initial concentration rises more than a hundred-fold. Then, it enters the compression device 24 through the discharge port 14 and is compressed, and then enters the condenser 3, where it is cooled by water and condensed to become a liquid, for example, and is collected in the collection liquid tank 26. Then, the gas that could not be liquefied enters the cryogenic condenser 32 as it is, is cooled almost completely by the cool air of the refrigerator 27, and is liquefied and collected. As described above, the gas mixed with the air is separated by the centrifugal separator 7, and the condenser 3 only needs to cool and liquefy the high-concentration Freon R-113 gas. To liquefy and collect Freon R-113 gas. Further, a cryogenic condenser 32 connected to the refrigerator 27 is provided at the subsequent stage of the condenser 3, and the gas whose concentration has been increased by the centrifugal separator 7 is cooled down to a plurality of stages by lowering the temperature of the refrigerant in order, which is more effective. It can be liquefied and recovered. In addition, by rotating the vertical cylinder 5, the influence of gravity can be made uniform, and gas separation can be improved. As described above, a gas supply port 49 and a coagulation device 3 are formed at a position in the centrifugal separator 7 at a position radially distant from the rotation shaft 11 of the vertical cylinder 5 with respect to the gas generation location. By communicating through the, the ratio between the amount of power recovered by the condenser 3 and the power consumption, that is, the efficiency, can be increased. The condenser 3 is provided with a compression device 24 upstream of the vertical cylinder 5 of the centrifugal separator 7 and a discharge port 14 at a position radially distant from the rotation axis of the vertical cylinder 5. The gas can be liquefied and recovered with less power consumption for cooling.

Next, in FIG. 2, the same reference numerals as those in FIG. 1 have the same names and have the same functions. In the same figure, in the gas passage 23 of the centrifugal separator 7,
A communication passage 51 communicating with the gas supply port 49 shown in FIG. 1 is connected. In FIG. 2, 56 indicates a refrigeration apparatus,
57 is a compressor, 58 is a condenser, 59 and 60 are expansion valves or capillaries. Reference numeral 30 denotes an ejector device, and 31 denotes a strong condenser.

As an example, the Freon gas is compressed by the operation of the compressor 57, condensed in the condenser 58, expanded in the expansion valve or the capillary tube 59, and passed while cooling the refrigerant passage 1. The temperature in this case is, for example, -30 ° C. Next, the ejector 30 is reached.
0, and in the strong condensing apparatus 31, the cooling is further performed by the negative pressure generated therein.
0 ° C to -80 ° C. Therefore, Freon R-113 produced from the centrifugal separator 7 can be effectively liquefied and recovered.

The use of the ejector 30 makes it possible to obtain a temperature close to a very low temperature with a simple device, so that the gas can be efficiently liquefied and collected in combination with the centrifugal separator 7. Next, FIG. 3 shows a still further embodiment of the present invention, in which a communication passage 51 communicates with a gas supply port 49 shown in FIG. Reference numeral 33 denotes a cylinder containing liquid nitrogen 62, which is supplied to a cooling chamber 63.
The same chamber 63 is provided with a cooling interval 66 of a tank 65 from an upper portion 64 thereof.
Is communicated to. 2 is a discharge unit 1 of the centrifugal separator 7
8 is a gas passage communicating with 8, and its end 68 is opened into a collection tank 69. The collection tank 69 communicates with the inner tank 71 of the tank 70.

In the figure, reference numeral 72 denotes a pump, which sends gas in the direction of arrow A72. Cooling room 6
When liquid nitrogen 62 is supplied to cylinder 3 from cylinder 33, cooling chamber 6
The gas is vaporized in 3 and becomes N ₂ gas, which rises and cools the gas passage 2. Usually, liquid nitrogen is -197 ° C and Freon R-
113 and the like are liquefied well, accumulate in the recovery tank 69, and are stored in the inner tank 71 of the tank 70. The air mixed with the Freon R-113 gas is discharged from the opening 74 to the atmosphere through the cooling interval 66 of the tank 70.

In this apparatus, the refrigerant passage 1 made of liquid nitrogen is provided adjacent to the gas passage 2 communicating with the discharge port 14 of the rotating vertical cylinder 5 of the centrifugal separator 7 formed as described above. Thus, the gas can be efficiently liquefied and recovered. The centrifugal separator 7 is used in multiple stages, in series or in parallel, or in a combination of in series and parallel depending on the amount and concentration of the gas to be recovered. By doing so, a large amount or high concentration of gas can be efficiently collected. Next, as the inner hood 53 of the centrifugal separator 7, a plurality of types having different diameters, for example, four types are formed, each of which is detachably formed on the centrifuge 7 by a bolt and nut. The inner hood 53 is formed by the specific gravity of the recovered gas.
Can be efficiently separated and collected. Further, the gas condensing device 3 in which the downstream of the gas passage 2 is communicated with the gas passage 23 of the centrifugal separator 7 can repeat the gas that could not be condensed and liquefy it by the aggregating device 3. The liquefied gas that has been easily liquefied can be easily liquefied.

[0024]

As described above, according to the present invention, when liquefied and recovered a relatively thin gas mixed with air, the power consumption for cooling can be made much smaller than before, and the efficiency can be reduced. Can be collected well.

In addition, a relatively small apparatus can be obtained without requiring a large apparatus as in the conventional activated carbon adsorption apparatus. Further, there is no need for maintenance such as replacement of activated carbon due to the use of activated carbon, and the operation can be performed continuously instead of in a batch format. In addition, it is possible to avoid wasting time in the start-up of the operation such as in a boiler that generates desorption steam when using activated carbon. Also, relatively pure liquefied gas can be recovered. The exhaust port is provided in the rigid cylinder 5.
15 and has a larger diameter than the exhaust port 15 and
Umbrella-shaped inner hood 53 with a space between the stationary cylinder 5
, The rotation axis 11 in the rigid cylinder 5
The air positioned at
Gas that is located away from the rotating shaft 11
Can be effectively separated. Also the inner hood 5
3 is to select multiple types with different diameters according to the specific gravity of the gas.
Air and gas separation.
Can be effective.

[Brief description of the drawings]

FIG. 1 is a view showing an embodiment of the present invention and schematically showing a gas recovery apparatus.

FIG. 2 is a diagram showing another embodiment of the present invention and corresponding to FIG. 1;

FIG. 3 is a view showing still another embodiment of the present invention and corresponding to FIG. 1;

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Refrigerant passage 2 Gas passage 3 Gas condensing device 4 Drive device 5 Vertical cylinder 6 Substrate 7 Centrifugal separator 8 Lower part 9 Gas inlet 10 Upper part 11 Rotation axis 12 Position 13 Position 14 Outlet 15 Exhaust port 16 Shut-off part 17 Lid 18 Discharge part 19 Exhaust part 20 Exhaust part 20 Communication part 21 Upstream end part 24 Compressor 26 Recovered liquid tank 27 Refrigerator 28 Refrigerant passage 29 Gas passage 30 Ejector device 31 Strong condenser 32 Cryogenic condenser 33 Hood in cylinder 53

Claims (8)

(57) [Claims] 1. A gas condensing device 3 in which a refrigerant passage 1 and a gas passage 2 are formed adjacent to each other; upstream of the gas condensing device 3 and in the gas flow direction in the gas condensing device 3. A centrifugal separator 7 composed of a base 6 having a rotatable closed vertical cylinder 5 connected to a driving device 4 provided for the drive; a gas inlet formed in the lower part 8 of the vertical cylinder 5 9: Gas outlets 1 formed at different positions 12 and 13 in the upper part 10 of the vertical cylinder 5 from the rotation axis 11 of the vertical cylinder 5 in the radial direction, respectively.
4 and exhaust port 15; on the upper part 10 of the vertical cylinder 5,
And the two ports 14, 1 fixedly provided on the base body 6.
The lid 17 has a cut-off portion 16 to shut off between 5; the
It is provided in the rigid cylinder 5 so as to communicate with the exhaust port 15.
A diameter larger than the exhaust port 15 and the rigid cylinder 5
An umbrella-shaped inner hood 53 having an interval therebetween ; a discharge portion 18 and a discharge portion 19 formed on the lid 17 and communicating with the discharge port 14 and the discharge port 15, respectively; A gas recovery device comprising an upstream end 21 of the gas passage 2 of the condenser 3. 2. An inner hood 53 is attached to and detached from the rigid cylinder 5.
An attachment portion for attachment is formed, and the inner hood 53 is provided.
2. The gas recovery device according to claim 1, wherein the gas recovery device comprises a plurality of types having different diameters . 3. A gas inlet 9, a hollow having a supply passage 23 of the gas, the rotary shaft 1 which is provided on the vertical cylinder 5 coaxially
The gas recovery device according to claim 1 , wherein the gas recovery device is connected to the first device. 4. The gas condensing device 3 is a gas condensing device.
Upstream of the gas flow direction at 3 and the centrifugation
It is characterized in that it has a gas compression device 24 between it and the device 7.
The gas recovery device according to claim 1, 2 or 3, wherein 5. The gas condensing device 3 is a gas condensing device.
3 in the downstream of the gas flow direction via the collection liquid tank 26.
Refrigerant passage 28 and gas passage communicated with refrigerator 27
The gas recovery apparatus according to claim 1, 2, 3, or 4, which is communicated with a cryogenic condenser (32 ). 6. The gas condensing device 3 is a gas condensing device.
Downstream of the gas flow at 3, the refrigerant of the gas condenser 3
Communication with the ejector device 30 operated by the
4. The gas recovery device according to claim 1 , further comprising a strong condensing device. 7. The refrigerant passage 1 of the gas condensing device 3 is:
4. The gas recovery device according to claim 1, wherein the gas recovery device is connected to a cylinder 33 containing liquid nitrogen . 8. A gas condensing device 3 downstream of a gas passage 2.
Is a passage communicating with the gas supply passage 23 of the centrifugal separator 7.
9. The method of claim 1, 2, 3, 4, 5, 6, or 7 having a path 22.
Gas recovery device.