JP2637096B2 - Air magnetic bearing type optical deflector - Google Patents

Air magnetic bearing type optical deflector

Info

Publication number
JP2637096B2
JP2637096B2 JP62092048A JP9204887A JP2637096B2 JP 2637096 B2 JP2637096 B2 JP 2637096B2 JP 62092048 A JP62092048 A JP 62092048A JP 9204887 A JP9204887 A JP 9204887A JP 2637096 B2 JP2637096 B2 JP 2637096B2
Authority
JP
Japan
Prior art keywords
magnet
rotating shaft
magnetic bearing
air
optical deflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62092048A
Other languages
Japanese (ja)
Other versions
JPS63259510A (en
Inventor
光夫 鈴木
広喜 田島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tohoku Ricoh Co Ltd
Ricoh Co Ltd
Original Assignee
Tohoku Ricoh Co Ltd
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tohoku Ricoh Co Ltd, Ricoh Co Ltd filed Critical Tohoku Ricoh Co Ltd
Priority to JP62092048A priority Critical patent/JP2637096B2/en
Publication of JPS63259510A publication Critical patent/JPS63259510A/en
Application granted granted Critical
Publication of JP2637096B2 publication Critical patent/JP2637096B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/12Scanning systems using multifaceted mirrors
    • G02B26/121Mechanical drive devices for polygonal mirrors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/04Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406Magnetic bearings
    • F16C32/0408Passive magnetic bearings
    • F16C32/0423Passive magnetic bearings with permanent magnets on both parts repelling each other
    • F16C32/0427Passive magnetic bearings with permanent magnets on both parts repelling each other for axial load mainly
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C17/00Sliding-contact bearings for exclusively rotary movement
    • F16C17/02Sliding-contact bearings for exclusively rotary movement for radial load only
    • F16C17/026Sliding-contact bearings for exclusively rotary movement for radial load only with helical grooves in the bearing surface to generate hydrodynamic pressure, e.g. herringbone grooves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/04Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0402Bearings not otherwise provided for using magnetic or electric supporting means combined with other supporting means, e.g. hybrid bearings with both magnetic and fluid supporting means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Sliding-Contact Bearings (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)

Description

【発明の詳細な説明】 (技術分野) 本発明は永久磁石反発式の空気磁気軸受型光偏向器に
関する。
Description: TECHNICAL FIELD The present invention relates to a permanent magnet repulsion type air magnetic bearing type optical deflector.

この種光偏向器はレーザプリンタ、デジタル複写機等
のレーザ光書き込み系に利用される。
This type of optical deflector is used for a laser beam writing system such as a laser printer and a digital copying machine.

(従来技術) 第2図に従来例に係る空気磁気軸受型の光偏向機の構
成を示す。
(Prior Art) FIG. 2 shows a configuration of an air magnetic bearing type optical deflector according to a conventional example.

図において、中空回転体1は、中央部にミラー3が、
下部には駆動源となる面対向型のモータのロータマグネ
ツト組立体4,7,8が、上部には磁気軸受を構成するマグ
ネツト9が装着されて構成してある。
In the figure, the hollow rotator 1 has a mirror 3 at the center,
A rotor magnet assembly 4, 7, 8 of a surface-facing type motor serving as a drive source is mounted on a lower portion, and a magnet 9 constituting a magnetic bearing is mounted on an upper portion.

一方固定軸11は、上部に磁気軸受用マグネツト10が装
着されてる。またこの固定軸11の表面には動圧空気軸受
のためのヘリングボーン溝11a,11bを2対有している。
そして固定軸11の下端部はハウジング12に圧入固着ある
いは焼きバメなどの方法で堅固に固定されている。
On the other hand, the fixed shaft 11 has a magnetic bearing magnet 10 mounted on an upper portion thereof. The surface of the fixed shaft 11 has two pairs of herringbone grooves 11a and 11b for a dynamic pressure air bearing.
The lower end of the fixed shaft 11 is firmly fixed to the housing 12 by a method such as press fitting or shrink fitting.

スラスト磁気軸受は回転軸上端部及び固定軸11上端
部、及びケース13の上端部にその機能を有している。磁
気軸受は共に永久磁石で構成され、磁極は互いに向かい
合う面を同極とし、マグネツト9は上下から反発させら
れ、回転体1を浮上させている。また、マグネツトホル
ダー14はネジ部14aを有し、このネジ部の回転により、
ホルダー14内に収容されているマグネツト15が上下し、
マグネツト9との距離を変化させることによつて、マグ
ネツト9を取り付けた回転体1の浮上量を調整すること
が出来る。
The thrust magnetic bearing has its function at the upper end of the rotating shaft, the upper end of the fixed shaft 11, and the upper end of the case 13. The magnetic bearings are both constituted by permanent magnets, and the magnetic poles have the same surface facing each other, and the magnet 9 is repelled from above and below to float the rotating body 1. Further, the magnet holder 14 has a screw portion 14a, and by rotation of this screw portion,
The magnet 15 housed in the holder 14 moves up and down,
By changing the distance from the magnet 9, the floating amount of the rotating body 1 to which the magnet 9 is attached can be adjusted.

マグネツト9,10,15はそれぞれホルダー14,16,17に収
納されている。
The magnets 9, 10, and 15 are stored in holders 14, 16, and 17, respectively.

以上の様な構成とした場合、モータ部が面対向型であ
る為、ロータマグネツト4はどうしても径が大きくなつ
てしまい、高速回転させた場合、遠心力の影響によりロ
ータマグネツト4が破壊する恐れが多分にある。
In the above configuration, since the motor portion is of a surface facing type, the diameter of the rotor magnet 4 is inevitably increased, and when the rotor is rotated at high speed, the rotor magnet 4 is broken by the influence of centrifugal force. There is probably fear.

さらにモータ部の励磁切換によるスラスト方向の振動
を生じてしまい、スラスト磁気軸受の外乱となつてしま
う欠点もあつた。
Further, there is a disadvantage that vibration in the thrust direction is generated due to the excitation switching of the motor unit, which causes disturbance of the thrust magnetic bearing.

一方、モータ方式が上述の様な面対向型でなくインナ
ーロータ型のものも公知である。
On the other hand, an inner rotor type motor instead of the above-described surface facing type is also known.

しかしながら、従来のインナーロータ型のものは、中
空回転体の上端部に樹脂製で中央に空気の流通路を有す
るスラスト止めを設けた構成を採用している(例えば特
開昭59−49516号)。
However, the conventional inner rotor type employs a configuration in which a thrust stopper having a resin and having an air flow passage in the center is provided at the upper end of a hollow rotating body (for example, Japanese Patent Laid-Open No. 59-49516). .

従つてこの様な従来例では上端部(スラスト止め部)
が接触している為、特に超高速回転(3万〜4万rpm)
の場合、起動停止が度重なると摩耗粉を生じ、回転不能
となり易いという不具合がある。
Therefore, in such a conventional example, the upper end (thrust stopper)
, Especially at ultra high speed rotation (30,000 to 40,000 rpm)
In the case of (1), if the start and stop are repeated, abrasion powder is generated, and there is a problem that the rotation becomes impossible.

(目的) 本発明は従来例の上述した欠点を解消し、安定して超
高速回転可能な光偏向器を提供することを目的とする。
(Purpose) It is an object of the present invention to solve the above-mentioned disadvantages of the conventional example and to provide an optical deflector capable of rotating at ultra-high speed stably.

(構成) 本発明はインナーロータ型のモータ方式を前提とし、
従来例の如く、中空回転体に接触するスラスト止めを設
けることなく、中空回転体の上端部のマグネツトを、上
下のマグネツトで隙間をおいて挟み、動圧軸受けを構成
したものである。
(Configuration) The present invention is based on an inner rotor type motor system,
Unlike the conventional example, a dynamic pressure bearing is formed by sandwiching the magnet at the upper end of the hollow rotating body with a gap between upper and lower magnets without providing a thrust stopper that contacts the hollow rotating body.

以下、第1図に基づき本発明の一実施例を説明する。 An embodiment of the present invention will be described below with reference to FIG.

第1図において、回転軸21にスラストマグネツトホル
ダー22とスラストマグネツト23を上部に配し、ミラー2
5、ミラー押さえ24、さらにロータマグネツト26とバラ
ンス修正用リング27を装着し、回転体を構成している。
In FIG. 1, a thrust magnet holder 22 and a thrust magnet 23 are arranged on a rotating shaft 21 at an upper part, and a mirror 2 is provided.
5. The mirror holder 24, the rotor magnet 26 and the balance correction ring 27 are mounted to form a rotating body.

固定軸28は上部にきスラストマグネツトホルダー29と
スラストマグネツト30を配し、台座31に下端部で圧入固
着あるいは焼きバメなどの方法で堅固に固定されてい
る。
The fixed shaft 28 is provided with a thrust magnet holder 29 and a thrust magnet 30 at an upper portion, and is firmly fixed to the pedestal 31 at a lower end by press-fitting or shrink fitting.

28a,28bは固定軸28の外周面に設けた上部、下部ヘリ
ング溝である。
28a and 28b are upper and lower herring grooves provided on the outer peripheral surface of the fixed shaft 28.

上述した様に本発明におけるモータ方式はインナーロ
ータ型である。
As described above, the motor system in the present invention is an inner rotor type.

即ち、ロータマグネツト26とコイル部32で駆動源とな
るモータ部を構成しており、励磁切り換えにより、回転
体(各部材21〜27を組み立てたもの)は回転する。
That is, the rotor unit 26 and the coil unit 32 constitute a motor unit serving as a drive source, and the rotating body (the assembly of the members 21 to 27) is rotated by the excitation switching.

従つて、ロータマグネツト26の径は従来と比較し、格
段に小さくする事が可能となる。さらにモータ部の励磁
切り換えによる振動はラジアル方向となり、実用上外乱
とはならない(軸受剛性はスラスト軸軸受に比ベラジア
ル動圧軸受の方が格段に高いので)。
Therefore, the diameter of the rotor magnet 26 can be significantly reduced as compared with the conventional case. Further, the vibration caused by the switching of the excitation of the motor section is in the radial direction, and is not a disturbance in practical use (because the bearing rigidity is much higher in the case of the thrust shaft bearing than in the case of the veradic dynamic pressure bearing).

尚、33はケース、34はケースに取りつけた上部マグネ
ツト、35はケース上蓋であり、コイル部32の外周部はケ
ース33に取り付けられている。
Reference numeral 33 denotes a case, reference numeral 34 denotes an upper magnet attached to the case, reference numeral 35 denotes a case upper cover, and an outer peripheral portion of the coil portion 32 is attached to the case 33.

(効果) 本発明によれば、回転軸の駆動源を、回転軸の外周面
に取り付けられたロータ磁石と、このロータ磁石と所定
のギャップをおいてケースに取り付けられたコイル部と
で構成しているので、ロータ側のイナーシャが小さくな
り起動時間を短くすることができるとともに、ステータ
部であるコイル部がケースに取り付けられているので、
放熱効果が高く温度上昇を押えることができる。また、
ロータ磁石とコイル部のギャップを小さくできるので、
磁気吸引力が大きくでき、その結果、軸方向における軸
受剛性を高めることができる。
(Effect) According to the present invention, the drive source of the rotating shaft is constituted by the rotor magnet attached to the outer peripheral surface of the rotating shaft, and the coil portion attached to the case with a predetermined gap from the rotor magnet. Since the inertia on the rotor side is reduced and the start-up time can be shortened, the coil part as the stator part is attached to the case,
The heat radiation effect is high and the temperature rise can be suppressed. Also,
Since the gap between the rotor magnet and coil can be reduced,
The magnetic attraction force can be increased, and as a result, the bearing rigidity in the axial direction can be increased.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明の一実施例に係る空気磁気軸受型光偏向
器の縦断面図、第2図は従来例に係る、同縦断面図であ
る。 23,30,34……マグネツト、26,32……インナーロータ型
モータ構成部。
FIG. 1 is a longitudinal sectional view of an air magnetic bearing type optical deflector according to an embodiment of the present invention, and FIG. 2 is a longitudinal sectional view of a conventional example. 23,30,34 ... Magnet, 26,32 ... Inner rotor type motor component.

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭61−259224(JP,A) 実開 昭62−151518(JP,U) 実開 昭63−137560(JP,U) ──────────────────────────────────────────────────続 き Continuation of front page (56) References JP-A-61-259224 (JP, U) JP-A-62-151518 (JP, U) JP-A-63-137560 (JP, U)

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】ミラーを有する鉛直回転軸と、この鉛直回
転軸を支持する回転軸支持手段と上記鉛直回転軸との間
の空気圧を上記回転軸の回転により動的に増加させて、
その動的空気圧で上記回転軸を半径方向に支持する空気
軸受と、上記鉛直回転軸の一端に固定された第1の磁
石、並びにこの第1の磁石の鉛直回転方向の両側に位置
し、上記第1の磁石をはさみ込み、それぞれ上記第1の
磁石と同極性で対向するように設けられた第2及び第3
の固定磁石からなる磁気軸受と、上記鉛直回転軸を回転
駆動する駆動源と、上記鉛直回転軸、上記回転軸支持手
段、上記空気軸受、及び上記磁気軸受を内部に収容する
ケースとを備えた空気磁気軸受型光偏向器において、 上記駆動源が、上記鉛直回転軸の外周面に取り付けられ
たロータ磁石と、このロータ磁石に対して所定のギャッ
プをおいて上記ケースに取り付けられたコイル部とを有
することを特徴とする空気磁気軸受型光偏向器。
1. A vertical rotating shaft having a mirror, and air pressure between a rotating shaft supporting means for supporting the vertical rotating shaft and the vertical rotating shaft is dynamically increased by rotation of the rotating shaft.
An air bearing that radially supports the rotating shaft with the dynamic air pressure, a first magnet fixed to one end of the vertical rotating shaft, and the first magnet is located on both sides of the first magnet in the vertical rotating direction; A second magnet and a third magnet are provided so as to sandwich the first magnet and to be opposed to the first magnet with the same polarity.
A magnetic bearing comprising a fixed magnet, a drive source for rotating and driving the vertical rotating shaft, and a case accommodating the vertical rotating shaft, the rotating shaft support means, the air bearing, and the magnetic bearing therein. In the air magnetic bearing type optical deflector, the driving source includes a rotor magnet attached to an outer peripheral surface of the vertical rotation shaft, and a coil unit attached to the case with a predetermined gap from the rotor magnet. An air magnetic bearing type optical deflector comprising:
JP62092048A 1987-04-16 1987-04-16 Air magnetic bearing type optical deflector Expired - Lifetime JP2637096B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62092048A JP2637096B2 (en) 1987-04-16 1987-04-16 Air magnetic bearing type optical deflector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62092048A JP2637096B2 (en) 1987-04-16 1987-04-16 Air magnetic bearing type optical deflector

Publications (2)

Publication Number Publication Date
JPS63259510A JPS63259510A (en) 1988-10-26
JP2637096B2 true JP2637096B2 (en) 1997-08-06

Family

ID=14043631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62092048A Expired - Lifetime JP2637096B2 (en) 1987-04-16 1987-04-16 Air magnetic bearing type optical deflector

Country Status (1)

Country Link
JP (1) JP2637096B2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02119217U (en) * 1989-02-16 1990-09-26
JPH04307108A (en) * 1991-04-04 1992-10-29 Ebara Corp Hydrodynamic bearing unit
JP2845313B2 (en) * 1994-10-11 1999-01-13 株式会社リコー How to adjust the balance of a hollow rotating body
JP3116932B2 (en) 1998-12-18 2000-12-11 富士ゼロックス株式会社 Optical deflector and optical scanning device
JP4835371B2 (en) * 2005-10-17 2011-12-14 日本電産株式会社 Bearing unit and electric motor provided with the same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03864Y2 (en) * 1987-02-25 1991-01-11

Also Published As

Publication number Publication date
JPS63259510A (en) 1988-10-26

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