JP2618854B2 - Package method of optical coupling part - Google Patents
Package method of optical coupling partInfo
- Publication number
- JP2618854B2 JP2618854B2 JP60125019A JP12501985A JP2618854B2 JP 2618854 B2 JP2618854 B2 JP 2618854B2 JP 60125019 A JP60125019 A JP 60125019A JP 12501985 A JP12501985 A JP 12501985A JP 2618854 B2 JP2618854 B2 JP 2618854B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- light
- emitting element
- support member
- optical fiber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4236—Fixing or mounting methods of the aligned elements
- G02B6/4237—Welding
Landscapes
- Optical Couplings Of Light Guides (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ この発明は光ファイバと受・発光素子とを結合する光
結合部のパッケージ方法に係り、特に光ファイバと受・
発光素子とを位置ずれなく高効率で結合することができ
る光結合部のパッケージ方法に関する。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of packaging an optical coupling portion for coupling an optical fiber and a light receiving / emitting element, and in particular, to an optical fiber and a light receiving / receiving element.
The present invention relates to a method of packaging an optical coupling portion that can efficiently couple a light emitting element without displacement.
［従来の技術］ 従来、光結合部のパッケージにあっては、光ファイバ
と受・発光素子との位置合わせを調整ねじ等で行なった
後、接着剤・はんだ等を用いて位置固定がなされてい
た。しかし、温度差により、あるいは加熱によって光フ
ァイバと受・発光素子とに位置ずれが生じたり、有害ガ
スが光結合部内に混入して素子寿命が短縮化されるなど
の問題があった。また、抵抗溶接による固定方法では、
溶接時の大電流によって素子がダメージを受けたり、固
定時に10ミクロン程度の位置ずれが発生し光の結合効率
が低下するなどの問題があった。[Prior Art] Conventionally, in a package of an optical coupling portion, after positioning of an optical fiber and a light receiving / emitting element is performed with an adjusting screw or the like, the position is fixed using an adhesive or solder. Was. However, there have been problems such as a positional shift between the optical fiber and the light receiving / emitting element due to a temperature difference or due to heating, and a harmful gas mixed into the optical coupling portion to shorten the element life. Also, in the fixing method by resistance welding,
There were problems such as damage to the element due to the large current during welding, and a displacement of about 10 microns during fixing, which reduced the light coupling efficiency.
これらの問題を解消するために、光結合部をCO2レー
ザーやYAGレーザー等のレーザー溶接により固定する方
法が採用されている（特開昭59−22018号公報）。In order to solve these problems, a method of fixing the optical coupling portion by laser welding such as a CO 2 laser or a YAG laser has been adopted (JP-A-59-22018).
［発明が解決しようとする問題点］ ところで、光ファイバが支持固定された支持部材と受
・発光素子が取り付けられた取付部材とを備える光結合
部は、長期寿命保持のため、完全に気密状態にする必要
があり、支持部材と取付部材との環状の突き合せ部ない
し接合部は全周溶接される。この全周溶接のため、支持
部材と取付部材とは、位置合せをしたのち回転駆動され
るが、回転時に数ミクロンの位置ずれが発生し接合効率
が低下してしまう。また、仮止めの場合にも、１箇所ず
つスポット溶接を行なっているため、溶接時の熱歪が１
箇所に集中し、位置ずれや角度折れが発生し結合効率の
低下につながっていた。[Problems to be Solved by the Invention] By the way, the optical coupling portion including the supporting member to which the optical fiber is supported and fixed and the mounting member to which the light receiving / emitting element is mounted is completely airtight in order to maintain a long life. And the annular butted or joined portion between the support member and the mounting member is welded all around. For this full circumference welding, the support member and the mounting member are rotated after being aligned, but a displacement of several microns occurs during rotation, and the joining efficiency is reduced. Also, in the case of the temporary fixing, since the spot welding is performed one place at a time, the heat distortion at the time of welding is one.
It was concentrated on the part, and the displacement and angle break occurred, leading to a decrease in the coupling efficiency.
特に、レーザーダイオードの発光径は10ミクロン以下
で、またInGaP受光素子の発光径も10ミクロン程度と小
さく、これら受・発光素子に結合される光ファイバも５
〜10ミクロンの小さなコア径のシングルモードファイバ
あるいは偏波面保存ファイバが用いられる。従って、こ
れらの光結合において、２ミクロン程度の軸ずれが生じ
ると、光出力が半減してしまうこととなり、これらの光
結合部の場合、１ミクロン以下の光軸合せ精度が要求さ
れる。In particular, the light emitting diameter of the laser diode is less than 10 microns, the light emitting diameter of the InGaP light receiving element is as small as about 10 microns, and the optical fiber coupled to these light receiving and light emitting elements is 5 μm.
A single mode fiber or a polarization maintaining fiber having a small core diameter of 1010 μm is used. Therefore, if an axis shift of about 2 microns occurs in these optical couplings, the optical output is reduced by half, and in the case of these optical coupling sections, an optical axis alignment accuracy of 1 micron or less is required.
［発明の目的］ この発明は以上の従来技術の問題点を解消すべく創案
されたものであり、この発明の目的は、光ファイバと受
・発光素子とを位置ずれなく高効率で結合することがで
きる光結合部のパッケージ方法を提供することにある。[Object of the Invention] The present invention has been made to solve the above problems of the prior art, and an object of the present invention is to couple an optical fiber and a light receiving / emitting element with high efficiency without displacement. It is an object of the present invention to provide a method of packaging an optical coupling part.
上記目的を達成するために、この発明は、発光素子あ
るいは受光素子に結合される光ファイバが支持固定され
た支持部材と、発光素子あるいは受光素子が取り付けら
れた取付部材とを備えた光結合部において、上記発光素
子の光出力あるいは上記受光素子の受光電流をモニタし
つつ上記支持部材と上記取付部材との位置合わせを行っ
た後、支持部材と取付部材との環状の接合部の外周に、
レーザーからのレーザー光を少なくとも２以上に分岐し
たレーザー光照射用ファイバの出射端を周方向に沿って
等間隔に同心配置させると共に接合部の外周に回転させ
ることにより、分岐された分岐レーザ光をレーザー光照
射用ファイバの出射端から照射して接合部を複数箇所か
ら同時にレーザー溶接するようになしたものである。In order to achieve the above object, the present invention provides an optical coupling section comprising: a support member to which an optical fiber coupled to a light emitting element or a light receiving element is supported and fixed; and a mounting member to which the light emitting element or the light receiving element is attached. In, after monitoring the light output of the light-emitting element or the light-receiving current of the light-receiving element and performing alignment between the support member and the mounting member, on the outer periphery of an annular joint between the support member and the mounting member,
By splitting the laser beam from the laser into at least two or more laser light irradiation fibers, the emission ends of the laser light irradiation fibers are concentrically arranged at equal intervals along the circumferential direction and rotated around the outer periphery of the joining portion, whereby the branched laser light is split. The laser beam is radiated from the emission end of the fiber for laser beam irradiation, and the joints are simultaneously laser-welded from a plurality of locations.
支持部材と取付部材との接合部に同一のレーザーから
分岐された分岐レーザー光が同時に複数箇所に照射され
るため、溶接による熱歪が分散される。また、支持部材
および取付部材は静止状態のままで、レーザー光が回転
照射されるため、回転に伴う振動等によって支持部材と
取付部材とが相対移動することがない。Since the joint portion between the support member and the mounting member is simultaneously irradiated with a plurality of branch laser beams branched from the same laser, thermal distortion due to welding is dispersed. Further, since the laser beam is radiated while the support member and the mounting member remain stationary, the support member and the mounting member do not move relative to each other due to vibration or the like accompanying the rotation.
［実施例］ 以下に、この発明の実施例を添付図面に従って詳述す
る。図面は、この発明のパッケージ方法を実施するため
の装置を示すもので、発光素子と光ファイバとの光結合
部をパッケージする例である。Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The drawing shows an apparatus for carrying out the packaging method of the present invention, and is an example of packaging an optical coupling portion between a light emitting element and an optical fiber.
図面において、１は発光ダイオード，レーザーダイオ
ード等の発光素子であり、発光素子１は円板状の取付部
材２上に絶縁された状態で固定されている。また、発光
素子１にはワイヤボンディングを介してリード３が接続
され、更にリード３には電源装置４が接続されている。
リード３は取付部材２を貫通して設けられており、貫通
部のリード３は絶縁体で気密に被われて固定されてい
る。取付部材３は取付部材押え治具５上に固定される。In the drawings, reference numeral 1 denotes a light-emitting element such as a light-emitting diode or a laser diode, and the light-emitting element 1 is fixed on a disc-shaped mounting member 2 in an insulated state. A lead 3 is connected to the light emitting element 1 via wire bonding, and a power supply device 4 is connected to the lead 3.
The lead 3 is provided so as to penetrate the mounting member 2, and the lead 3 in the penetrating portion is hermetically covered with an insulator and fixed. The mounting member 3 is fixed on a mounting member holding jig 5.
一方、６は発光素子１に結合される光ファイバであ
る。光ファイバ６は有底筒体状の支持部材７の肉厚な底
壁の挿通孔に挿入され、接着剤または半田などにより気
密性を保って固定されている。支持部材７はその先端開
口部側が取付部材２上に被せられるように設けられ、上
方に位置する支持部材７の底壁側は支持部材押え治具８
で保持される。更に、支持部材押え治具８はXYZ微動装
置９に装着されており、XYZ微動装置９の作動により、
支持部材７はX,Y,Zの３方向に移動できるようになって
いる。光ファイバ６のもう一方の端部は光出力をモニタ
する光パワーメータ10のヘッド11に接続されている。On the other hand, 6 is an optical fiber coupled to the light emitting element 1. The optical fiber 6 is inserted into an insertion hole in the thick bottom wall of the bottomed cylindrical support member 7, and is fixed with airtightness by an adhesive or solder. The support member 7 is provided such that the front end opening side is covered on the mounting member 2, and the bottom wall side of the support member 7 located above is provided with a support member holding jig 8.
Is held. Further, the support member holding jig 8 is mounted on the XYZ fine movement device 9, and by the operation of the XYZ fine movement device 9,
The support member 7 can move in three directions of X, Y, and Z. The other end of the optical fiber 6 is connected to a head 11 of an optical power meter 10 for monitoring an optical output.
また、12は取付部材２と支持部材７との突合せ部ない
し接合部13を溶接するためのレーザー光を出射するレー
ザーであり、14…はレーザー12から出射され分岐された
分岐レーザー光を接合部13に導くためのレーザー光照射
用ファイバである。レーザー光照射用ファイバ14…の集
合された入射端には、レーザー12から出射されたレーザ
ー光を分岐して各レーザー光照射用ファイバ14に等分し
て分岐して入射する光ファイバ分岐部15が形成されてい
る。レーザー光照射用ファイバ14…の出射端は接合部13
の周方向に沿って等間隔に配置され且つ接合部13に臨ま
せてそれぞれ設けられている。また、レーザー光照射用
ファイバ14の出射端部は光ファイバ保持具16により保持
されている。光ファイバ保持具16はほぼ円筒状をなし取
付部材２や支持部材７と同心配置に接合部13を包囲する
ように設けられると共に、回転駆動装置17により回転駆
動されるようになっている。なお、18はレーザー12によ
り出射されたレーザー光を光ファイバ分岐部15に入射す
るためのレンズであり、またレーザー光照射用ファイバ
14の出射端には出射光を集光するロッドレンズが設けら
れている。Reference numeral 12 denotes a laser which emits a laser beam for welding a butt portion or a joint portion 13 between the mounting member 2 and the support member 7, and 14 ... joint a branched laser beam emitted from the laser 12 and branched. 13 is a fiber for irradiating a laser beam for guiding to 13. An optical fiber branching section 15 into which the laser light emitted from the laser 12 is branched and equally divided into the respective laser light irradiation fibers 14 to be incident on the gathered incident ends of the laser light irradiation fibers 14. Are formed. The emitting end of the laser light irradiation fibers 14 is a joint 13
Are arranged at regular intervals along the circumferential direction of the connector and are provided so as to face the joint portion 13, respectively. The emitting end of the laser light irradiation fiber 14 is held by an optical fiber holder 16. The optical fiber holder 16 has a substantially cylindrical shape and is provided concentrically with the mounting member 2 and the support member 7 so as to surround the joint 13 and is driven to rotate by a rotation driving device 17. Reference numeral 18 denotes a lens for allowing the laser light emitted by the laser 12 to enter the optical fiber branching section 15, and a laser light irradiation fiber.
At the exit end of 14, a rod lens for condensing the exit light is provided.
次にパッケージ方法をその手順に従って説明する。取
付部材２を取付部材押え治具５で固定し、電源装置４に
より発光素子１に通電し発光素子１を発光させる。発光
素子１からの光は光ファイバ６を介して光パワーメータ
10に入りその光出力がモニタされる。光パワーメータ10
により発光素子１から光出力をモニタしながら、光パワ
ーメータ10の指示が最大となるようにXYZ微動装置９を
操作して支持部材７を移動調整する。これにより発光素
子１と光ファイバ６との位置合せがなされる。このと
き、次のレーザー溶接が容易なように、XYZ微動装置９
のＺ方向の調整は取付部材２と支持部材７とが完全に密
着するように設定する。Next, the packaging method will be described according to the procedure. The mounting member 2 is fixed by the mounting member holding jig 5, and the power is supplied to the light emitting element 1 by the power supply device 4 so that the light emitting element 1 emits light. Light from the light emitting element 1 is transmitted through an optical fiber 6 to an optical power meter.
The light output is monitored at step 10. Optical power meter 10
The XYZ fine movement device 9 is operated to adjust the movement of the support member 7 so that the instruction of the optical power meter 10 is maximized while monitoring the light output from the light emitting element 1 by using. Thus, the light emitting element 1 and the optical fiber 6 are aligned. At this time, the XYZ fine movement device 9 is used to facilitate the next laser welding.
The adjustment in the Z direction is set so that the mounting member 2 and the support member 7 are completely adhered to each other.
位置合せ終了後、レーザー12を発振させる。レーザー
12から出射したレーザービームは光ファイバ分岐部15で
各レーザー光照射用ファイバ14に等分岐されて各出射端
より接合部13に照射される。レーザー光照射用ファイバ
14が４本の場合には、接合部13にその全周を４等分に区
画する箇所に同時に照射される。レーザー光は、まず初
めに数パルスを照射し仮固定を行なう。次いで、回転駆
動装置17により光ファイバ保持具16を回転させながらレ
ーザー照射を行なう。光ファイバ保持具16に保持された
レーザー光照射用ファイバ14の出射端は等間隔を保ちつ
つ接合部13に沿って回転する。これにより、接合部13の
円周溶接が行なわれる。レーザー光照射用ファイバ14が
２本の時には光ファイバ保持具16を180゜回転させ、４
本の時には90゜回転させる。After the alignment is completed, the laser 12 is oscillated. laser
The laser beam emitted from 12 is equally branched to each laser light irradiation fiber 14 at the optical fiber branching section 15 and is irradiated to the joint section 13 from each emission end. Laser irradiation fiber
In the case where there are four, the joint 13 is irradiated at the same time on a portion which divides the entire circumference into four equal parts. First, the laser beam is irradiated with a few pulses to temporarily fix it. Next, laser irradiation is performed while rotating the optical fiber holder 16 by the rotation driving device 17. The emission ends of the laser light irradiation fibers 14 held by the optical fiber holder 16 rotate along the joints 13 while maintaining the same intervals. Thereby, circumferential welding of the joint 13 is performed. When there are two laser light irradiation fibers 14, the optical fiber holder 16 is rotated by 180 ° and
Rotate 90 ° for books.
レーザー溶接法（CO2レーザー,YAGレーザー等）で
は、レーザー出射光を微小スポットに絞ることにより、
接合部13への入熱は微弱であり、発光素子１への熱影響
はない。In the laser welding method (CO 2 laser, YAG laser, etc.), the laser emission light is focused on a minute spot,
The heat input to the junction 13 is weak, and does not affect the light emitting element 1.
なお、上記実施例では、発光素子１と光ファイバ６と
の光接合部の場合について述べたが、受光素子と光ファ
イバとの光接合部のパッケージの場合にも同様に適用で
きる。この場合には、結合用の光ファイバに標準発光光
を入れ、電源装置４の代りに受光素子に電流計を接続す
るようにする。また、上記実施例は、主にマルチモード
光ファイバと発光ダイオードやPINフォトダイオードと
の光結合部に用いられる方法であり、シングルモード光
ファイバとレーザーダイオードとの結合の場合には、受
・発光素子と光ファイバとの間にプリズム，ボールレン
ズ等の光学部品を設けて反射によるノイズを軽減するの
が望ましく、このため、これら光学部品の軸合せ前に予
め光ファイバとともに固定しておくのがよい。In the above embodiment, the case of the optical junction between the light emitting element 1 and the optical fiber 6 has been described. However, the present invention can be similarly applied to the case of the package of the optical junction between the light receiving element and the optical fiber. In this case, the standard emission light is put into the coupling optical fiber, and an ammeter is connected to the light receiving element instead of the power supply device 4. The above embodiment is a method mainly used for an optical coupling portion between a multi-mode optical fiber and a light emitting diode or a PIN photodiode. It is desirable to provide an optical component such as a prism or a ball lens between the element and the optical fiber to reduce noise due to reflection. For this reason, it is necessary to fix the optical component together with the optical fiber before aligning these optical components. Good.
［発明の効果］ 以上要するにこの発明によれば次のような優れた効果
を発揮する。[Effects of the Invention] In summary, according to the present invention, the following excellent effects are exhibited.
（１） 支持部材と取付部材との接合部に同一のレーザ
ーから分岐された分岐レーザー光が同時に複数箇所に照
射されるので、接合部の溶接による熱歪が分散される。
このため、熱歪による光ファイバと受・発光素子との位
置ずれは大幅に軽減されると共に、取付部材と支持部材
とが異種材料（例えば、ステンレス鋼とコバールなど）
であっても、位置ずれはほとんど生じない。(1) Since a branch laser beam branched from the same laser is simultaneously applied to a joint between the support member and the mounting member at a plurality of locations, thermal distortion due to welding of the joint is dispersed.
Therefore, the displacement between the optical fiber and the light receiving / emitting element due to thermal strain is greatly reduced, and the mounting member and the supporting member are made of different materials (for example, stainless steel and Kovar).
However, the displacement hardly occurs.
（２） 支持部材および取付部材は静止状態で、レーザ
ー光が回転照射されるので、支持部材および取付部材を
回転させることにより支持部材と取付部材とが相対移動
して位置ずれが発生することがなくなる。(2) Since the support member and the mounting member are stationary and the laser beam is radiated, the rotation of the support member and the mounting member causes the relative movement between the support member and the mounting member, which may cause displacement. Disappears.
（３） このように、位置ずれが生じないので、光ファ
イバと受・発光素子とを高効率で結合することができ、
本方法はコア径の小さいシングルモード光ファイバと発
光径の小さいレーザーダイオードあるいは受光径の小さ
いInGaP受光素子との光結合部に好適である。(3) As described above, since no displacement occurs, the optical fiber and the light receiving / emitting element can be coupled with high efficiency.
This method is suitable for an optical coupling portion between a single mode optical fiber having a small core diameter and a laser diode having a small light emitting diameter or an InGaP light receiving element having a small light receiving diameter.
（４） 更に、本発明方法は、乾燥窒素等の雰囲気中で
常温にてパッケージを行なうことが可能であり、気密の
よい長寿命の光結合部を製造することができる。(4) Further, according to the method of the present invention, it is possible to carry out packaging at room temperature in an atmosphere of dry nitrogen or the like, and it is possible to manufacture an airtight and long-life optical coupling portion.
図面はこの発明に係るパッケージ方法を実施するための
装置の一例を示す構成図である。 図中、１は発光素子、２は取付部材、３はリード、４は
電源装置、５は取付部材押え治具、６は光ファイバ、７
は支持部材、８は支持部材押え治具、９はXYZ微動装
置、10は光パワーメータ、11はヘッド、12はレーザー、
14はレーザー光照射用ファイバ、15は光ファイバ分岐
部、16は光ファイバ保持具、17は回転駆動装置、18はレ
ンズである。The drawing is a configuration diagram showing one example of an apparatus for performing the packaging method according to the present invention. In the figure, 1 is a light emitting element, 2 is a mounting member, 3 is a lead, 4 is a power supply device, 5 is a mounting member holding jig, 6 is an optical fiber, 7
Is a support member, 8 is a support member holding jig, 9 is an XYZ fine movement device, 10 is an optical power meter, 11 is a head, 12 is a laser,
Reference numeral 14 denotes a laser beam irradiation fiber, 15 denotes an optical fiber branch, 16 denotes an optical fiber holder, 17 denotes a rotation driving device, and 18 denotes a lens.
Claims (1)
ファイバが支持固定された支持部材と、発光素子あるい
は受光素子が取り付けられた取付部材とを備えた光結合
部において、上記発光素子の光出力あるいは上記受光素
子の受光電流をモニタしつつ上記支持部材と上記取付部
材との位置合わせを行った後、支持部材と取付部材との
環状の接合部の外周に、レーザーからのレーザー光を少
なくとも２以上に分岐したレーザー光照射用ファイバの
出射端を周方向に沿って等間隔に同心配置させると共に
接合部の外周に回転させることにより、分岐された分岐
レーザ光をレーザー光照射用ファイバの出射端から照射
して接合部を複数個所から同時にレーザー溶接するよう
にしたことを特徴とする光結合部のパッケージ方法。An optical coupling section comprising a support member to which an optical fiber coupled to a light emitting element or a light receiving element is fixedly supported, and an attaching member to which the light emitting element or the light receiving element is attached, wherein a light of the light emitting element is provided. After adjusting the position of the support member and the mounting member while monitoring the output or the light receiving current of the light receiving element, at least the laser light from the laser is applied to the outer periphery of the annular joint between the support member and the mounting member. The emission ends of the laser light irradiation fibers branched into two or more are concentrically arranged at equal intervals along the circumferential direction and are rotated around the outer periphery of the joining portion, so that the branched laser light is emitted from the laser light irradiation fibers. A method of packaging an optical coupling part, wherein the joint is laser-welded from a plurality of places by irradiating from an end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60125019A JP2618854B2 (en) | 1985-06-11 | 1985-06-11 | Package method of optical coupling part |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60125019A JP2618854B2 (en) | 1985-06-11 | 1985-06-11 | Package method of optical coupling part |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61284709A JPS61284709A (en) | 1986-12-15 |
| JP2618854B2 true JP2618854B2 (en) | 1997-06-11 |
Family
ID=14899844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60125019A Expired - Lifetime JP2618854B2 (en) | 1985-06-11 | 1985-06-11 | Package method of optical coupling part |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2618854B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2525861B2 (en) * | 1988-04-13 | 1996-08-21 | 沖電気工業株式会社 | Optical axis adjustment arm for optical coupler |
| JPH03141308A (en) * | 1989-07-17 | 1991-06-17 | Nippon Telegr & Teleph Corp <Ntt> | Photodetecting module and production thereof |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5922018A (en) * | 1982-07-28 | 1984-02-04 | Hitachi Ltd | Packaging method of light emitting and photodetecting device |
| JPS6044192A (en) * | 1983-08-23 | 1985-03-09 | Univ Nagoya | Device and method for laser working |
-
1985
- 1985-06-11 JP JP60125019A patent/JP2618854B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61284709A (en) | 1986-12-15 |
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