JP2609688B2 - Clean room - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean room, and more particularly to a clean room in which clean air can normally flow down in the room.

(Prior art)

In the technical field of large-scale integrated circuits or new functional elements in semiconductor manufacturing, advanced clean room cleaning is required. Generally, in a clean room, clean air is blown into the clean room through a plurality of HEPA (high performance) filters mounted on the ceiling surface. The air in the room is sucked in from the floor having the ventilation structure and is sent to the underfloor chamber. As a result, the blown clean air flows down in the room. The air in the underfloor chamber is sent to the ceiling chamber by the circulation fan, and the air in the ceiling chamber is blown into the room again through the HEPA filter on the ceiling surface.

Further, in a large space clean room, in order to maintain downflow, the suction resistance of the floor surface is adjusted in order from the portion near the suction port in the underfloor chamber by sequentially reducing the resistance.

When the indoor layout is changed, the floor resistance is subdivided and adjusted to maintain the required cleanliness and downflow.

[Problems to be solved by the invention]

By the way, in an air circulation type clean room,
A plurality of circulation fans or air supply fans are provided, and air is supplied to the ceiling chamber from a plurality of outlets. However, the air pressure from each circulation fan or air supply fan does not necessarily match, the air pressures from the air outlets of the respective air communicated with the ceiling chamber differ, and the air pressure in the ceiling chamber becomes uneven, resulting in a clean Air is blown out unevenly in the room, and there is a problem that normal downflow cannot be maintained. Further, the air pressure is high in the ceiling chamber in the vicinity of the outlet from the circulation fan or the air supply fan, and the air pressure decreases as the distance from the outlet increases, so that the air pressure in the ceiling chamber becomes uneven.

Also, in the manufacture of large-scale integrated circuits such as semiconductors or new functional elements, the layout in the room is frequently performed because the research and development are in progress. However, in the conventional clean room, there is a problem that it is not possible to blow out the clean air or stop the blowout by selecting an arbitrary area on the ceiling surface according to the layout.

Further, in the conventional clean room, since the suction port of the underfloor chamber is unevenly arranged, the air flows obliquely to the place where the suction port is concentrated, and there is a problem that affects the downward flow of clean air in the room. is there.

For this reason, the floor opening ratio must be changed in each part, which makes it difficult to cope with a layout change.

In a large space clean room, a combination of different cleanliness areas is often required, in which case interference occurs between the different cleanliness areas, and the required cleanliness and normal downflow cannot be maintained.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a clean room in which clean air can be normally downflowed indoors.

[Means for solving the problem]

In order to achieve the above-mentioned object, the present invention has a ceiling chamber formed in an upper part of a room and an underfloor chamber formed in a lower part, and air is supplied to the ceiling chamber by a plurality of air supply devices, and the air is supplied to the ceiling chamber. In a clean room in which clean air is blown into the room as clean air through a filter provided on the ceiling surface and the blown air is sucked into the underfloor chamber, the air from the plurality of air supply units is provided adjacent to the ceiling chamber and joins the air from the plurality of air supply devices. A buffer chamber provided on the outlet side of the buffer chamber, the air supply adjusting means being capable of adjusting an air supply amount according to each area of the ceiling chamber; and a floor suction chamber provided in the underfloor chamber. A filter for forming a constant resistance of the surface, and resistance adjusting equipment comprising an opening adjusting means for adjusting the opening of the floor suction surface to form a variable resistance of the floor suction surface. Characterized in that was.

[Action]

According to the clean room of the present invention, the buffer chamber is provided above the passage or the spare room adjacent to the clean room, and the air from the air supply device is once sent into the buffer chamber, and then is sent into the ceiling chamber. . Therefore, the air pressure in the ceiling chamber becomes uniform, clean air is blown out uniformly from the entire ceiling surface, and normal downflow is performed indoors. Also, noise that enters the clean room is reduced.

In addition, the resistance adjustment equipment at the floor suction surface secures a constant air passage resistance (about 2.0 mmAg to 3.0 mmAg for class 1) (The floor resistance is gradually reduced from the order closer to the underfloor suction port. You don't have to go.) Therefore, the downflow of the air blown into the room is maintained by the floor suction surface set to the same air passage resistance value for each required cleanliness.

In addition, the filter of the ceiling chamber can be easily and arbitrarily installed and relocated to the HEPA filter, the sealing panel, the lighting and other equipment mounting panel according to the required cleanliness in the frame arranged in a grid pattern. . In addition, even in the rearrangement work, the required cleanliness and downflow state can be maintained without stopping the air blowing operation in the clean room.

If different cleanliness is mixed in the same room, to maintain the cleanliness, install a filter or sealing panel according to the required clean air volume and adjust the resistance of the air suction on the opposite floor suction surface. Adjusted by equipment to maintain normal downflow and prevent buffering between cleanliness areas.

〔Example〕

Hereinafter, preferred embodiments of a clean room according to the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a schematic explanatory view of a clean room according to the present invention. As shown in FIG. 1, the clean room 10 is composed of a ceiling chamber 12, a room 14, and an underfloor chamber 16.
The air in the ceiling chamber 12 is blown as clean air into the room 14 through the HEPA filters 18, 18 ... As shown in FIG. The HEPA filter 18 does not leak due to the frame and the airtight holding material arranged in a lattice, and can be arranged arbitrarily according to the required cleanliness.
The lighting and other equipment mounting panel is also airtightly mounted, and piping, partition walls, and the like under the frame are provided.

Clean air downflows and breathable grating floor
Underfloor chamber through 20 and air volume control filters 22, 22 ...
Sent to 16. Further, slide shutters 23, 23 ... Are attached to the lower surface of the air volume adjusting filter 22. The air volume adjusting filter 22 serves as a constant resistance of the floor suction surface, and the slide shutter 23 on the lower surface serves to variably adjust the floor suction surface resistance according to the required cleanliness.

These floor suction surface resistances have the same resistance value when the required cleanliness is the same throughout the room, that is, the opening of the slide shutter 23 is constant, and the floor suction surface opening ratio is sequentially adjusted according to the distance from the floor suction port 25. Filter 22 with constant resistance without changing
Thus, a normal downflow can be maintained.

In the same room, when different classes of cleanliness are required, the slide shutter 23 at a predetermined position is adjusted to a predetermined floor surface opening ratio for each cleanliness, and the floor suction surface passage resistance of each region of the room is reduced. Normal downflow is maintained in each area so as to be constant.

The air in the underfloor chamber 16 is sent through a suction port 25 to a below-passage chamber 26 formed below the adjacent observation passage 24. The underfloor chamber 16 has a space and structure in which necessary utilities such as pipes, ducts, and electric wires can be installed, and serves as both an air chamber and a utility equipment chamber.

The air in the lower chamber 26 is supplied to a plurality of circulation fans 28, 28 ...
The air from the circulation fans 28, 28,... Is blown into the buffer chamber 30 formed above the tour passage 24. The air in the buffer chamber 30 is sent to the adjacent ceiling chamber 12. Thereby, the air is circulated. In addition, part of the air in the underfloor chamber 26 is sent to the air conditioner 32,
After being air-conditioned by 32, it is returned to the circulation fan 28 again.

FIG. 3 shows a partition wall 34 between the ceiling chamber 12 and the buffer chamber 30.
FIG. As shown in FIG. 3, the partition wall 34 is formed with three air outlets 36, 38, and 40 at an upper portion, a central portion, and a lower portion. Two rotary dampers 42, 42 are attached to each of the outlets 36, 38, 40, and the two rotary dampers 42, 42 are interlocked with each other by a link member 44. The dampers 42, 42 of the upper outlet 36 are maintained substantially horizontal, and are arranged such that the air from the buffer chamber 30 is blown out without weakening the wind force. Also, the damper 4 of the outlet 38 in the center
2 and 42 are slightly inclined so that blown air receives resistance. The dampers 42, 42 of the lower outlet 40 are further inclined so that the blown air receives resistance and the ceiling chamber
The air volume is reduced within 12.

In such a structure, when the air from the buffer chamber 30 is blown out, the air passing through the upper outlet 36 is blown as deep as possible into the ceiling chamber 12, and the air from the lower outlet 40 is weakened in wind force. It is blown out in the vicinity of the partition wall. For this reason, the airflow distribution in the ceiling chamber 12 becomes uniform, and the blowing of the clean air from the HEPA filters 18, 18, ... is uniformly blown over the entire ceiling surface.

Further, as shown in FIG. 4, a blower fan 45 may be provided at the upper outlet 36 to force the air to be blown deep into the ceiling chamber 12.

According to the clean room according to the present invention configured as described above, since the buffer chamber 30 is formed above the tour passage 24, even when the air pressure blown out from the plurality of circulation fans 28, 28 is different, the buffer chamber 30 is formed. After the air pressure is adjusted, the ceiling chamber passes through each outlet 36, 38, 40.
Sent to 12. Therefore, in the ceiling chamber 12, the air pressure is evenly distributed without being affected by the plurality of circulation fans 28, 28 ..., and uniform clean air can be blown out from the HEPA filters 18, 18 ... on the entire ceiling surface. A normal (substantially vertical) downflow can be maintained in the room 14. Further, the buffer chamber 30 absorbs noise of the circulation fans 28, 28 ...

In the above embodiment, in order to prevent drift of the room 14 due to the suction port 25 of the underfloor chamber 16, the air volume control filter 22
Also, the slide shutter 23 was arranged on the grating floor 20.
However, as shown in FIG.
If there are obstacles such as 48, piping 50, wiring tray 52,
Since the air in the underfloor chamber 16 that is away from the suction port 25 cannot be sufficiently sucked, a drift in the room 14 is likely to occur. Therefore, a blower 54 may be arranged in the underfloor chamber 16 as shown in FIG. The blower 54 is composed of a fan and a blower tube, and can be arranged at a predetermined position in the underfloor chamber 16 to forcibly suck the flow of air in the underfloor chamber 16. Therefore, it is possible to forcibly suck the air at a location away from the suction port 25 and supply the air to the suction port 25 to prevent the drift in the room 14.

In addition, in the above embodiment, the air blower shown in FIG.
Instead of 54, the underfloor chamber 16 may be provided with a suction device 56 as shown in FIG. The suction device 56 shown in FIG. 6 has a built-in suction fan 58, and comprises a plurality of flexible tubes 60, 60 ... And a suction port 62 provided at the tip of each flexible tube 60. The suction port 62 is connected to a portion where the slide shutter 23 is opened, and performs forced suction of clean air. As a result, the clean air in the room 14 flows down substantially vertically.

FIG. 7 is an explanatory view of a main part of a second embodiment of the clean room according to the present invention. The grating floor 20 of the clean room 68 shown in FIG. 7 has the same structure as the clean room 10 shown in FIG. 1, and the same members or structures as those of the clean room 10 shown in FIG. Description is omitted.

As shown in FIG. 7, vertically movable partition plates 70, 70 ... Are provided in the ceiling chamber 12, and the partition plate 70 is suspended by wires 72. The wire 72 is wound or unwound by a winding device 74, and the partition plate 70 is moved up and down by this winding and unwinding to partition between the sections 12A, 12B... As shown in FIG. . The partition plates 70, 70 ... Are adjusted by opening and closing to open the air from the buffer chamber 30 to predetermined areas 12A, 12B.
... or the flow is not flown to the partition (in Fig. 8, the partition shown by the broken line shows the partition plate 70 opened, and the partition shown by the solid line has the partition plate 70 closed. It shows the state.)

As shown in FIG. 9, the lower end portion of the partition plate 70 is a fixed plate.
The lower end of the fixed plate 76 is immersed in the seal liquid 78 in sliding contact with the fixed plate 76. A container for the sealing liquid 78 is formed on a frame 80 supporting the HEPA filter 18, and a fluorescent lamp 82 is attached to the room 14 side. This allows each area of the ceiling chamber 12 to
12A and 12B can be completely shut off. In place of the HEPA filter 18, a closing plate 84 is provided at a predetermined position on the ceiling surface.
Can be arranged, and a portion where the clean air does not blow can be locally formed on a part of the ceiling surface. HEPA filter
A part of the periphery of the support member 86 and the closing plate 84 is immersed in the sealing liquid 78, and a sufficient seal is provided.

According to the clean room of the present invention configured as described above, the opening and closing of the partition plates 70, 70,.
Air is sent from the buffer chamber 30 to predetermined areas 12A, 12B,..., While air blowing is stopped in certain areas 12E, 12H. Therefore, in the room 14, the position of the blowout area on the ceiling surface can be freely changed according to the layout of the devices and the like. Further, since the underfloor chamber 16 is provided with the slide shutter 23 or the air volume control filter 22 similarly to the clean room 10 shown in the first embodiment, the underfloor chamber 16 faces the area of the ceiling surface where the blowing of the clean air is stopped. Position shutter
23 can be closed to localize the downflow precisely.

In the case where the ceiling chamber 12 is completely partitioned by the partition plates 70, 70, as shown in FIG. 8, as in the areas 12E, 12H, maintenance and inspection in the areas 12E, 12H (replacement of HEPA filters, etc.) Can be done easily. On the other hand, by increasing the flow rate of air as in the area 12B, it is possible to remove heat from the machines and the like arranged in the room 14.

Even in the clean room of the second embodiment, the forced air blower 54 or the suction device 56 shown in FIG. 5 or 6 may be provided in the underfloor chamber 16.

FIG. 10 is an explanatory diagram showing a maintenance / inspection trolley of a clean room. As shown in Fig. 10, maintenance and
The inspection cart 90 moves on the grating floor surface 20 of the clean room, and the work table 96 is provided via the legs 94 with the casters 92. The worktable 96 includes a breathable panel 98, an air volume adjustment shutter 100, and a HEPA filter 102. Worktable 96
The upper air is released below the workbench 96 after being cleaned through the breathable panel 98 and the HEPA filter 102.

On the work table 96, extendable columns 104, 104... Are erected, and a mounting frame 106 is provided on the upper ends of the columns 104, 104. The mounting frame 106 is formed in substantially the same shape as the peripheral edge of the worktable 96, and an air-expandable seal tube 108 is mounted on the mounting frame 106. Air injection of this seal tube 108 is done by the operator 1
10 do by operating the air pump. In addition, a cylindrical non-breathing bellows membrane 114 is provided between the workbench 96 and the mounting frame 106.
The lower end of the bellows membrane 114 is attached to the periphery of the worktable 96, and the upper end is attached to the lower surface of the attachment frame 106.

According to the maintenance / inspection trolley of the clean room configured as described above, the maintenance / inspection trolley 90 is moved below the HEPA filter 18 on the ceiling surface to be maintained / inspected. After the movement, the casters 92 are locked immovably, and the worker 110 gets on the work table 96. Next, the worker 110 extends the support column 104, and
The seal tube 108 of FIG. 6 is brought into contact with the mounting frame 80 on the ceiling surface. Air is injected into the seal tube 108 by an air pump to seal between the mounting frame 106 and the frame 80. As a result, the work area C on the workbench 96 is partitioned from the clean room 14 by the air-impermeable bellows membrane 114.

In this state, the worker 110 replaces the sealing agent 78 in the mounting frame 80 of the HEPA filter 18 or replaces the HEPA filter 18. To replace the HEPA filter 18, lift the old HEPA filter 18, remove it, tilt it down, pull it out,
Attach the filter 18N in the reverse order. Further, when the HEPA filter 18 is replaced, uncleaned air in the ceiling chamber 12 is blown out. The blown air is discharged into the clean room 14 through the breathable panel 98 of the operation 96, the opening of the shutter 100, and the HEPA filter 102. Therefore, during the replacement work, the contaminated air in the ceiling chamber 12 or the like does not flow out into the clean room 14 that has been made highly clean over a long period of time, so that the clean room 14 is always maintained at high cleanliness.

After replacing the HEPA filter 18, the area C above the workbench 96
Then, clean air is blown out for a certain period of time through the newly replaced HEPA filter 18 on the ceiling surface until the air becomes clean. Then, when the work table 96 is cleaned, the shutter 100 is closed, the columns 104, 104 are contracted, and the operation is completed.

Further, the fluorescent lamp 82 is disposed on the upper surface of the frame 80,
Adjacent to the container of sealant 78. Therefore, the sealant 78
For example, a substance which is solid at low or normal temperature and becomes liquid when heated such as a fluorescent lamp 82 may be used.

〔The invention's effect〕

As described above, according to the clean room of the present invention, the air pressure from the air supply device is adjusted in the upper buffer chamber such as the auxiliary chamber or the passage to supply the air to the ceiling chamber. The blown clean air has a normal downflow in the room.

[Brief description of the drawings]

FIG. 1 is a schematic explanatory view of a clean room according to the present invention, FIG. 2 is an explanatory view of a clean room according to the present invention, and FIG. 3 is a sectional view of a partition wall between a ceiling chamber and a buffer chamber of the clean room according to the present invention. Fig. 4 is a cross-sectional view when a blower fan is provided on a partition wall, Fig. 5 is an explanatory view when a blower is provided in a below-floor chamber of the clean room according to the present invention, and Fig. 6 is a clean room according to the present invention. FIG. 7 is a side view of a suction device provided in the underfloor chamber of FIG. 7, FIG. 7 is an explanatory view of a second embodiment of the clean room according to the present invention, and FIG.
FIG. 9 is a plan view of the ceiling chamber of the clean room shown in FIG. 9, FIG. 9 is a cross-sectional view of a main part of a mounting portion of a partition plate of the clean room according to the present invention, and FIG. 10, 68 …… Clean room, 12 …… Ceiling chamber, 14…
… In the room, 16 …… Underfloor chamber, 18 …… HEPA filter, 20 …… Grating floor, 24 …… Visit aisle, 25 …… Suction port, 26 …… Under aisle chamber, 28 …… Circulating fan, 30…
... buffer chamber, 34 ... partition wall, 36, 38, 40 ... outlet, 70 ... partition plate.

Front page continuation (72) Hideyuki Yamashita Inventor Hideyuki Yamada 1-1-14 Kanda, Chiyoda-ku, Tokyo Hitachi Plant Construction Co., Ltd. (72) Haruji Matsuda 1-14-1 Uchikanda, Chiyoda-ku, Tokyo Hitachi In Plant Construction Co., Ltd. (72) Inventor Akio Ishida 1-6, Uchisaiwaicho, Chiyoda-ku, Tokyo Nippon Telegraph and Telephone Corporation (72) Inventor Takayuki Sobe, 1-1-6 Uchisaiwaicho, Chiyoda-ku, Tokyo Japan Telegraph and Telephone Co., Ltd. (56) Bibliography Sho 62-130331 (JP, U)

Claims (1)

(57) [Claims] 1. A ceiling chamber is formed above a room and a below-floor chamber is formed below the room. Air is supplied to the ceiling chamber by a plurality of air supply devices, and a filter provided with the air on a ceiling surface is provided. A buffer chamber provided adjacent to the ceiling chamber and in which air from the plurality of air supply devices joins, in a clean room in which the air blows out as clean air into the room and sucks the blown air into the underfloor chamber; An air supply adjusting means provided on the outlet side of the chamber and capable of adjusting the air supply amount according to each area of the ceiling chamber; and provided in the underfloor chamber to form a constant resistance of the floor suction surface in the room. A filter and resistance adjusting equipment comprising an opening adjusting means for adjusting the opening of the floor suction surface to form a variable resistance of the floor suction surface. Lean room.