JP2608926B2 - Method for producing Au-Sn brazing filler metal - Google Patents
Method for producing Au-Sn brazing filler metalInfo
- Publication number
- JP2608926B2 JP2608926B2 JP63162637A JP16263788A JP2608926B2 JP 2608926 B2 JP2608926 B2 JP 2608926B2 JP 63162637 A JP63162637 A JP 63162637A JP 16263788 A JP16263788 A JP 16263788A JP 2608926 B2 JP2608926 B2 JP 2608926B2
- Authority
- JP
- Japan
- Prior art keywords
- warm
- brazing material
- wire
- temperature
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- Metal Extraction Processes (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、半導体ICパッケージ、ハーメチックシール
用またはリードピンのろう付け用等に使用される低融点
のAu−Snろう材の製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for producing a low melting point Au—Sn brazing material used for semiconductor IC packages, hermetic sealing, brazing of lead pins, and the like.
従来から低融点貴金属ろうとしてAu−Sn系の共晶型ろ
う材が使われているが、Au−Sn合金は極めて脆いために
圧延、伸線、切断および打抜等の加工ができず、所定の
形状や所定の大きさのろう材を効率的に製造することが
できないという欠点がある。Conventionally, Au-Sn eutectic brazing filler metals have been used as low-melting noble metal brazes.However, since Au-Sn alloys are extremely brittle, processing such as rolling, drawing, cutting and punching cannot be performed. There is a disadvantage that the brazing material having a predetermined shape or a predetermined size cannot be efficiently manufactured.
そこで、これらの欠点を解決するために、溶湯急冷法
によって厚さ10〜30μｍの箔状に加工する方法やショッ
ト法によって粒状にする方法が採用されている。Therefore, in order to solve these drawbacks, a method of processing into a foil shape having a thickness of 10 to 30 μm by a molten metal quenching method or a method of granulating by a shot method has been adopted.
しかし、上記前者の溶湯急冷法によると、箔の厚さに
限られた範囲があり、厚さをコトロールすることが非常
に難しいという問題があり、しかも切断、打抜加工では
割れが生じ易く所望の形状のろう材が得られないという
問題がある。However, according to the former molten metal quenching method, there is a problem that the thickness of the foil has a limited range and it is extremely difficult to control the thickness. However, there is a problem that a brazing material having the following shape cannot be obtained.
また、後者のショット法によると、粒径を一定にそろ
えることが難しく、さらに合金中にガスが多く含まれて
しまって品質の悪いろう材となってしまうという問題が
ある。Further, according to the latter shot method, there is a problem that it is difficult to make the particle diameters uniform, and furthermore, a large amount of gas is contained in the alloy, resulting in a low-quality brazing material.
Au−Sn合金においてSnを６％以上含有するものは加工
性に乏しく線状加工ができないが、Snを12〜37Wt％添加
したAu−Sn合金については、190℃から融点付近の270℃
に加熱すると展延性が生じることを見出すことができ
た。Au-Sn alloys containing 6% or more of Sn are poor in workability and cannot be linearly processed. However, Au-Sn alloys containing 12 to 37 Wt% of Sn can be heated from 190 ° C to 270 ° C near the melting point.
It was found that extensibility occurs when heated to a low temperature.
本発明はこのような温度範囲に温度制御することによ
り、温間押出しおよび温間伸線によって連続した線状の
Au−Snろう材を得ることを可能にし、さらに必要に応じ
て同様の温度制御による温間切断によって、所定質量の
粒状のAu−Snろう材を得ることを可能にした。By controlling the temperature in such a temperature range, the present invention provides a continuous linear shape by warm extrusion and warm drawing.
It has made it possible to obtain an Au-Sn brazing material and, if necessary, to obtain a granular Au-Sn brazing material having a predetermined mass by warm cutting under the same temperature control.
なお、Au−Sn合金は、AuにSnを12〜37wt％添加するこ
とによりろう材としての使用目的に応じてその融点を27
8〜660℃に調整できることもわかった。The Au-Sn alloy has a melting point of 27-27 wt% depending on the use purpose as a brazing material by adding 12-37 wt% of Sn to Au.
It was also found that the temperature could be adjusted to 8 to 660 ° C.
以下に本発明の実施例を説明する。 Hereinafter, embodiments of the present invention will be described.
第１表に示すような組成のAu−Snビレットを作製し、
温度条件を変えて温間押出し装置によって直径2.0mmの
線材の温間押出し加工を行った。An Au-Sn billet having a composition as shown in Table 1 was prepared,
Warm extrusion of a wire rod having a diameter of 2.0 mm was performed using a warm extrusion device while changing the temperature conditions.
上記のAu−Snビレットは、通常の溶解法つまり真空溶
解、雰囲気溶解もしくは大気溶解によって溶解し、ビレ
ット径に合った鋳型に流し込んで製作する。 The above-mentioned Au-Sn billet is produced by dissolving by a usual melting method, that is, vacuum melting, atmospheric melting or atmospheric melting, and pouring into a mold matching the billet diameter.
上記温間押出し加工を行う温間押出し装置の例を第１
図の断面図を溶いて以下に説明する。The first example of the warm extrusion apparatus for performing the above-mentioned warm extrusion processing is shown in FIG.
A description will be given below with reference to cross-sectional views of the drawings.
図において、１はAu−Snビレット、２はコンテナ、３
はステム、４は加熱ヒータ、５はダイス、６は温度制御
用熱電対、７は圧力ブロックであり、Au−Snビレット１
をコンテナ２内に設置し、加熱ヒータ４によって指定温
度に上昇安定させた後、ステム３によって加圧すること
により、ダイス５からAu−Sn線８が得られる。In the figure, 1 is an Au-Sn billet, 2 is a container, 3
Is a stem, 4 is a heater, 5 is a die, 6 is a thermocouple for temperature control, 7 is a pressure block, and an Au-Sn billet 1
Is placed in the container 2, the temperature is raised to a specified temperature by the heater 4, and is stabilized. Then, the pressure is applied by the stem 3, so that the Au-Sn wire 8 is obtained from the die 5.
つぎに、このようにして得られた直径2.0mmのAu−Sn
線８を第２表に示す如く温間伸線装置によって直径0.1m
mまで温間伸線を行った。Next, the thus obtained Au-Sn having a diameter of 2.0 mm was obtained.
Wire 8 was drawn to a diameter of 0.1 m using a warm drawing machine as shown in Table 2.
Warm drawing was performed to m.
この温間伸線を行う温間伸線装置の例を第２図の断面
図を用いて以下に説明する。 An example of the warm drawing apparatus for performing the warm drawing will be described below with reference to the cross-sectional view of FIG.
図において、９は予熱炉、10はダイスホルダー、11は
伸線用ダイス、12は巻き取りドラム、13はAu−Sn線であ
り、上記押出し加工で得たAu−Sn線８を予熱炉９を通し
て予め昇温させ、指定温度に加熱したダイスホルダー10
によって指定温度に保持された伸線用ダイス11に通して
巻き取りドラム12で巻き取ることによってより細いAu−
Sn線13のAu−Snろう材を得ることができる。In the figure, 9 is a preheating furnace, 10 is a die holder, 11 is a drawing die, 12 is a take-up drum, 13 is an Au-Sn wire, and the Au-Sn wire 8 obtained by the above-mentioned extrusion process is used for the preheating furnace 9. Through the die holder 10
By winding through a winding drum 12 through a wire drawing die 11 maintained at a specified temperature, a finer Au-
An Au-Sn brazing material of Sn wire 13 can be obtained.
さらに、必要に応じて上記で得られた直径0.1mmのAu
−Sn線13を第３表に示す如く温間切断装置によって0.5m
mの長さに温間切断を行った。Further, if necessary, Au having a diameter of 0.1 mm obtained above is used.
-Sn wire 13 was cut 0.5m by warm cutting equipment as shown in Table 3.
A warm cut was made to a length of m.
この温間切断を行う温間切断装置の例を第３図の断面
図を用いて以下に説明する。 An example of the warm cutting apparatus for performing the warm cutting will be described below with reference to the cross-sectional view of FIG.
図において、14は雄刃、15は雌刃、16は雌刃加熱ヒー
タ、17は送りロールであり、上記で得たAu−Sn線13を、
雌刃加熱ヒータ16によって指定温度に加熱保持した雌刃
15に通し、0.5mmづつ送りロール17によって送りながら
雄刃14によって切断することにより、所望する一定質量
の粒状のAu−Snろう材を得ることができる。In the figure, 14 is a male blade, 15 is a female blade, 16 is a female blade heater, 17 is a feed roll, the Au-Sn wire 13 obtained above,
Female blade heated to and maintained at the specified temperature by female blade heater 16
15 and cut by the male blade 14 while being fed by the feed roll 17 by 0.5 mm at a time, a granular Au-Sn brazing material having a desired constant mass can be obtained.
ここで、上記のような温間加工の温度範囲を190〜270
℃としたのは、190℃未満の温度ではAu−Sn合金の展延
性が不十分で、押出し、伸線および切断が行えず、ま
た、270℃を越える温度では極めて融点に近くなるため
に結晶粒が粗大化して材料の劣化の問題が生じるためで
ある。Here, the temperature range of the warm working as described above is 190 to 270.
The temperature was set to ℃ because the Au-Sn alloy had insufficient ductility at a temperature lower than 190 ° C and could not be extruded, drawn, or cut. This is because the grains become coarse and a problem of deterioration of the material occurs.
また、Au−Sn合金においてSnを12〜37wt％の範囲とし
たのは、この組成範囲においては上記のような温度コン
トロールによって温間加工が可能となることがわかった
からである。In addition, the reason why Sn is set in the range of 12 to 37 wt% in the Au-Sn alloy is that it was found that warm working was possible by the above-described temperature control in this composition range.
以上説明した本発明によると、Au−Sn合金において、
Snを12〜37wt％の範囲の組成とし、190〜270℃の範囲に
温度制御することによって、任意の線径の伸線および切
断が可能となり、所望の線径のろう材や所望の質量の粒
状ろう材を得ることができる効果を有する。According to the present invention described above, in the Au-Sn alloy,
By making Sn a composition in the range of 12 to 37 wt% and controlling the temperature in the range of 190 to 270 ° C, drawing and cutting of an arbitrary wire diameter becomes possible, and a brazing material of a desired wire diameter and a desired mass of This has the effect that a granular brazing material can be obtained.
第１図は温間押出し装置の実施例を示す断面図、第２図
は温間伸線装置の実施例を示す断面図、第３図は温間切
断装置の実施例を示す断面図である。 １……Au−Snビレット ２……コンテナ ３……ステム ４……加熱ヒータ ５……ダイス ６……温度制御用熱電対 ８……Au−Sn線 ９……予熱炉 11……伸線用ダイス 13……Au−Sn線 14……雄刃 15……雌刃 16……雌刃加熱ヒータFIG. 1 is a cross-sectional view showing an embodiment of a warm extrusion apparatus, FIG. 2 is a cross-sectional view showing an embodiment of a warm drawing apparatus, and FIG. 3 is a cross-sectional view showing an embodiment of a warm cutting apparatus. . 1 Au-Sn billet 2 Container 3 Stem 4 Heater 5 Die 6 Temperature control thermocouple 8 Au-Sn wire 9 Preheating furnace 11 Wire drawing Die 13: Au-Sn wire 14: Male blade 15: Female blade 16: Female blade heater
Claims (2)
てAu−Sn合金とし、温度を190〜270℃の範囲の温度制御
のもとで、温間押出し、温間伸線して連続した線状ろう
材とすることを特徴とするAu−Snろう材の製造方法。1. An Au-Sn alloy is obtained by adding Sn to Au in the range of 12 to 37 Wt% of the total amount, and is subjected to warm extrusion and warm elongation under a temperature control of 190 to 270 ° C. A method for producing an Au-Sn brazing material, comprising forming a continuous linear brazing material by drawing.
てAu−Sn合金とし、温度を190〜270℃の範囲の温度制御
のもとで、温間押出し、温間伸線、温間切断を順次行っ
て所望の質量の粒状ろう材とすることを特徴とするAu−
Snろう材の製造方法。2. An Au-Sn alloy is prepared by adding Sn to Au in the range of 12 to 37 Wt% of the total amount, and is subjected to warm extrusion and warm elongation under a temperature control of 190 to 270 ° C. Wire, a warm cut is sequentially performed to obtain a particulate brazing material having a desired mass,
Manufacturing method of Sn brazing material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63162637A JP2608926B2 (en) | 1988-07-01 | 1988-07-01 | Method for producing Au-Sn brazing filler metal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63162637A JP2608926B2 (en) | 1988-07-01 | 1988-07-01 | Method for producing Au-Sn brazing filler metal |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25603096A Division JPH09122969A (en) | 1996-09-27 | 1996-09-27 | Au-sn brazing filler metal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0215897A JPH0215897A (en) | 1990-01-19 |
| JP2608926B2 true JP2608926B2 (en) | 1997-05-14 |
Family
ID=15758403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63162637A Expired - Lifetime JP2608926B2 (en) | 1988-07-01 | 1988-07-01 | Method for producing Au-Sn brazing filler metal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2608926B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19730118B4 (en) | 1997-07-14 | 2006-01-12 | Infineon Technologies Ag | Method and device for producing a chip-substrate connection |
| CN101811236A (en) * | 2010-02-25 | 2010-08-25 | 东莞市万丰纳米材料有限公司 | Method for manufacturing micro welding rod |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01130898A (en) * | 1987-11-13 | 1989-05-23 | Seiko Instr & Electron Ltd | Brazing filler metal |
-
1988
- 1988-07-01 JP JP63162637A patent/JP2608926B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0215897A (en) | 1990-01-19 |
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