JP2597763B2 - Work appearance inspection device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a disk- shaped substrate such as an aluminum (including its alloy) magnetic disk substrate.
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work appearance inspection device for inspecting the presence or absence of surface defects of a work.

[0002]

2. Description of the Related Art A work such as an aluminum magnetic disk substrate or the like is required to have a high level of surface accuracy such as a mirror surface or a state close to the mirror surface in terms of quality. Required. For this reason,
In the manufacturing process of aluminum magnetic disk substrates, which are generally manufactured through various processes such as precision cutting, polishing, washing and drying, visual inspection is conducted to check for surface defects after completion of a predetermined process or after completion of all processes. Is being done.

Conventionally, such a visual inspection process has been performed in the following procedure. That is, after the workpiece put into the case from the previous process and sent is chucked in the holding unit of the visual inspection machine, the workpiece is rotated to perform a visual inspection of one side, and then the workpiece is turned over and the visual inspection of the other side is performed. When the inspection is completed, the work is removed, and the next work is mounted on the holding portion to perform the inspection. Thereafter, this operation is repeated one by one.

[0004]

However, in the above-described method, it takes a long time to attach and detach the work, and it is not possible to perform the appearance inspection of the next work until the inspection process of one work is completed. Therefore, there is a drawback that the number of workpiece inspection processes per unit time is small and the inspection efficiency is low.

The present invention solves such a drawback and provides a disk-shaped substrate.
An object of the present invention is to improve the efficiency of appearance inspection of a work made of a plate .

[0006]

In order to achieve the above-mentioned object, the present invention is directed to a disk-shaped
Workpiece holding portion for detachably holding a plurality of workpieces consisting of a plate (A) is in the plane (2) turntable (1) with the periphery of the rotating shaft, rotation, while being stopped freely arranged, the turn At least workpiece receiving stage rotation around the table (1) (I), of the workpiece one side the
1 Visual inspection stage (II), reversal stage (III),
Each stage of a second visual inspection stage (IV) and an unloading stage (V) on the other side of the workpiece is set, and the workpiece (A) held by the workpiece holding unit (2) at the workpiece receiving stage (I). ) Is transferred to the work take-out stage (V) around each stage by intermittent rotation feed of the turntable (1), and one surface is inspected by the first visual inspection stage (II). ,
(III), the second appearance inspection stage
Another object of the present invention is to provide a work appearance inspection apparatus characterized in that the other side is inspected in (IV) .

[0007]

In FIG. 2, the work (A) conveyed to the work receiving stage (I) by the conveyance device (3) from the previous process is transferred to the holding section (2) on the turntable (1) and is chucked. Attached to the part (2a). Next, the turntable (1) is stopped by 1/5 rotation in the counterclockwise direction.
Thereby, the work (A) in the receiving stage (I) is transferred to the first visual inspection stage (II). In the first visual inspection stage (II), a single-sided surface inspection is performed on the transferred work (A). During this time, in the receiving stage (I), the next work is transferred from the previous process by the transfer device (3), and is mounted on the holding unit (2) of the next stage waiting on the receiving stage (I). After the appearance inspection is completed, the turntable (1) further rotates by ５, the work (A) next to the receiving stage (I) is transferred to the first appearance inspection stage (II), and the appearance inspection is performed. In this way, the workpieces are successively transferred to the first visual inspection stage (II) by the intermittent rotation feed of the turntable (1) and subjected to visual inspection.
The work (A) whose appearance has been inspected is placed on the reversal stage (III
), Is sent to the work take-out stage (V) around the second visual inspection stage (IV), is taken out by the transfer device (7) in a standby state, and sent to the next process.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on an embodiment applied to an apparatus for inspecting the appearance of an aluminum magnetic disk substrate (A) as a work as shown in FIG.

FIG. 1 shows a vertical appearance inspection apparatus.
In this appearance inspection apparatus, (1) is a disk-shaped vertical turntable arranged with the rotation axis directed in the front-rear horizontal direction. The front of the turntable (1) has a circumferential 5
Five work holding parts (2) are provided at equally divided positions. Each work holding part (2) has a chuck part (2a) having a forwardly protruding shape that can be enlarged and reduced in diameter, and the diameter is increased while the chuck part (2a) is passed through a shaft hole of the substrate (A). By doing
While the substrate (A) is chucked from the inner periphery, the chuck of the substrate (A) can be released by reducing the diameter of the chuck portion. Each of the chuck portions (2a) can rotate around its own axis, and the substrate (A) chucked by this rotation is rotated as necessary.

[0010] 5 equal parts position about the rotation of the turntable (1) with a work receiving stage in order from the upper left to the counterclockwise direction (I), the first appearance inspection stage (II), inverting stage (III), the Five stages are set: 2 visual inspection stage (IV) and work take-out stage (V). Then, the turntable (1), together with made rotatable stop freely controlled in a vertical plane by an unillustrated driving device, repeatedly stopping and rotary feed every 1/5 rotation in the counterclockwise direction, the workpiece holding portion The substrate (A) mounted in (2) is transported around each stage.

The above stages will be described as follows. That is, the work receiving stage (I)
This stage mounts the magnetic disk substrate (A) transported from the previous step by the transport device (3) to the holding section (2). The mounting of the disk substrate (A) from the transfer device (3) to the holding section (2) is performed via an outer peripheral chuck type chucker provided in the transfer device.

The first visual inspection stage (II) is to inspect one surface of the magnetic disk substrate (A) for surface defects such as surface flaws and pinholes. 4) is installed. The configuration of the appearance inspection device (4) is not particularly limited, but in this embodiment, as shown in FIG. 3, a light source (41) for intermittently irradiating light to the surface of the magnetic disk substrate; An imaging device (42) such as a CCD camera that receives reflected light from the magnetic disk substrate in synchronization with the irradiation light; and a surface that electrically detects the presence or absence of a surface defect from the density of an image captured by the imaging device. The one provided with the defect detection device (43) is used. Then, by rotating the magnetic disk substrate by rotationally driving the chuck portion (2a) and, if necessary, moving the light source and the imaging device in the radial direction, an external appearance inspection of one entire surface of the magnetic disk substrate (A) is performed. ing.

The reversing stage (III) is for reversing the magnetic disk substrate (A) upside down and reattaching it to the work holding part (2), and is provided with a reversing device (5) for this purpose. The reversing device (5) has an arm portion for chucking the outer periphery of the substrate (A), and the arm portion chucks the outer peripheral portion of the substrate (A) transferred to the reversing stage (III) and laterally chucks the outer portion. , The substrate (A) is once removed from the chuck portion (2a), and then the arm portion is rotated by 180 degrees to turn the substrate (A) upside down and again the chuck portion (2a) of the work holding portion (2). The operation of attaching to is performed.

The second visual inspection stage (IV) comprises a magnetic disk substrate (A) inverted by an inversion stage (III).
A visual inspection device (6) is installed on the other surface side, similar to the first visual inspection stage (II).

The work take-out stage (V) takes out the magnetic disk substrate (A), which has been transferred to the stage after the appearance inspection, from the work holding section (2), and transfers the taken-out magnetic disk substrate to a transfer device (V). 7) is carried to the next step. The removal of the magnetic disk substrate (A) is also performed via a chuck (not shown) provided in the transfer device (7).

Next, the operation of the appearance inspection apparatus shown in FIG. 1 will be described with reference to FIG. 2 together with its control method.

The magnetic disk substrate (A) transferred to the work receiving stage (I) by the transfer device (3) from the preceding process, for example, the washing and drying process, is transferred from the chucker of the transfer device (3) onto the turntable (1). The workpiece is transferred to the work holding section (2) and mounted on the chuck section (2a).

Next, the conveying device (3) whereas moves before step side in order to convey the next magnetic disk substrate, the turntable (1) is stopped by 1/5 rotation in the counterclockwise direction. By the rotation feed of the turntable (1), each work holding part (2) located on the previous stage moves to the next stage. That is, the holding unit (2) on which the magnetic disk substrate (A) is mounted on the receiving stage (I) shifts to the first appearance inspection stage (II), and the holding unit (2) located on the unloading stage (V). ) Goes to the receiving stage (I) and stops there.

In the first visual inspection stage (II), the transferred magnetic disk substrate (A) is subjected to a surface inspection on one side, and the presence or absence and the number of surface defects such as scratches and pinholes are determined. During this time, in the receiving stage (I), the next magnetic disk substrate is transferred from the previous process by the transfer device (3), and is mounted on the next-stage holding unit (2) waiting on the receiving stage (I).

After the above-mentioned appearance inspection is completed, the turntable (1) further rotates by １ ／. Thereby, the magnetic disk substrate (A) of the first visual inspection stage (II) is transferred to the reversing stage (III), and the magnetic disk substrate (A) of the receiving stage (I) is transferred to the first visual inspection stage (II). The work holder (2) located at the take-out stage (V) shifts to the receiving stage (I). Inversion stage (III
) Is transferred to the reversing device (5).
After being removed from the chuck portion (2a) once and turned upside down, it is mounted again on the work holding portion (2). During this time,
In the first appearance inspection stage (II), the appearance inspection of the second magnetic disk substrate is performed, and in the receiving stage (I), the third magnetic disk substrate is mounted.

After the reversing step at the reversing stage (III), the turntable (1) is further rotated by １ ／, and each magnetic disk substrate (A) is transferred to the next stage, and the take-out stage ( The work holder (2) located at V) moves to the receiving stage (I). The magnetic disk substrate (A) transferred from the reversing stage (III) to the second visual inspection stage (IV) is then subjected to visual inspection on the other side by a visual inspection device (4) to check for surface defects. And the number are determined. In the meantime, in the reversing stage (III), the first visual inspection stage (II), and the receiving stage (I), the reversing operation, the one-side visual inspection, and the receiving operation of the magnetic disk substrate are performed, respectively.

After the completion of the appearance inspection in the second appearance inspection stage (IV), the turntable (1) further rotates １ ／,
Each magnetic disk substrate is transferred to the next stage.
The magnetic disk substrate transferred to the take-out stage (V)
It is taken out from the work holding part (2) by the chucker of the transfer device (7). During this time, in the second visual inspection stage (IV), the reversing stage (III), the first visual inspection stage (II), and the receiving stage (I), the other surface visual inspection, the reversing operation, and the one-side visual inspection of the magnetic disk substrate are respectively performed. , A receiving operation is performed.

After the removal of the magnetic disk substrate (A) from the take-out stage (V), the turntable (1) further rotates １ ／, and each magnetic disk substrate is transferred to the next stage. The work holding unit (2) in the empty state of the unloading stage (V) shifts to the receiving stage (I), and the same operation is repeated thereafter.

Thus, 1/1 of the turntable (1)
Since the magnetic disk substrates are transferred while sequentially moving around each stage by feeding and stopping by five rotations, a large number of magnetic disk substrates can be successively and automatically subjected to the appearance inspection one after another. In addition, extraction stage (V)
The magnetic disk substrate (A) taken out in (1) is sent to, for example, a pass / fail selection step by the transfer device (3),
Based on the results of the appearance inspection at the second appearance inspection stages (II) and (IV), the products are sorted into non-defective products, defective products, and reworked products.

The appearance inspection apparatus according to the illustrated embodiment is
Although this is shown as a vertical type in which the turntable (1) is arranged vertically and rotates in a vertical plane, it is configured as a horizontal type in which the turntable (1) is arranged horizontally and rotates in a horizontal plane. Alternatively, the turntable may be arranged to be inclined at an arbitrary angle.
Thus, when the apparatus is configured as a vertical type, dust and dirt hardly adhere to the surface of the magnetic disk substrate (A) on the turntable (1), and if it does, it is easy to drop. There is an advantage that a highly accurate inspection result can be obtained. In addition, there is an advantage that the floor area required for installing the apparatus can be reduced, and the installation space can be effectively used. On the other hand, when the apparatus is configured as a horizontal type, the horizontal plane of the magnetic disk substrate (A) can be easily obtained by the stabilizing action of the weight of the magnetic disk substrate (A) when the substrate (A) is mounted and held on the work holding unit (2). The occurrence of blurring when rotated can be prevented, and the distance between the light source (41) or the imaging device (42) and the substrate (A) in the visual inspection device (4) (6) can be kept constant at all times. There is an advantage that a high appearance inspection result can be obtained.

[0026]

According to the present invention, a disk-shaped substrate is
At least workpiece workpiece holding portion for removably holding removably in Ranaru a plurality of work plane (2) turntable having around the rotating shaft, rotates together with the stop freely arranged, around the rotation of the turntable Receiving stage, first surface inspection stage on one side of work , reversing stage
Stage, a second appearance inspection stage on the other side of the work, and an unloading stage are set, and the work held by the work holding unit at the work receiving stage is rotated by an intermittent rotary feed of a turntable. In the process of being transferred to the work take-out stage around the stage, one surface is inspected by the first visual inspection stage ,
The second appearance inspection stage is inverted by the inversion stage.
And the other side is inspected for appearance. Therefore, a large number of workpieces can be inspected continuously one after another without waiting for the end of the inspection step of one work. the compared with the case of performing the visual inspection of the work, the number of work that can be visual inspection can be increased to rated stage per unit time, it can work to significantly improve the appearance inspection efficiency. Moreover, the magnetic disk base
First appearance inspection for a work made of a disc-shaped substrate such as a plate
One side is visually inspected on the stage,
And the other side is visually inspected at the second visual inspection stage.
The receiving stage from the receiving stage.
Both sides of the work will be inspected before
Therefore, the efficiency of appearance inspection can be further improved.

[Brief description of the drawings]

FIG. 1 is a front view of a visual inspection apparatus according to an embodiment of the present invention.

FIG. 2 is a front view of a state in which a work appearance inspection is actually performed.

FIG. 3 is a schematic configuration diagram of a visual inspection device.

FIG. 4 is a perspective view showing an aluminum magnetic disk substrate as a work used in the example.

[Explanation of symbols]

A ... aluminum magnetic disk substrate (workpiece) 1 ... turntable 2 ... workpiece holder I ... receiving stage of the work II, IV ... appearance inspection stage V ... workpiece takeout stage

Claims (1)

(57) [Claims] 1. A plurality of works (A) comprising a disc-shaped substrate
Turntable (1) having a work holding portion (2) for detachably holding in a plane around a rotation axis
Are arranged so as to be able to rotate and stop freely, and at least around a rotation of the turntable (1), at least a work receiving stage (I) and a first visual inspection stage (I) on one side of the work.
I), reversal stage (III), the other side of the work
2. Each stage of the visual inspection stage (IV) and the take-out stage (V) is set, and the work (A) held in the work holding section (2) in the work receiving stage (I) is turned on the turntable (1). intermittent by rotary feed in the process of being transferred to the workpiece take-out stage around each stage (V), pieces in the first appearance inspection stage (II) of
The surface is inspected for appearance, and the surface is inverted at the inversion stage (III).
And a second surface inspection stage (IV) wherein the other surface is externally inspected.