JPH01116439A - Inspection device for optical information memory medium - Google Patents

Inspection device for optical information memory medium

Info

Publication number
JPH01116439A
JPH01116439A JP27350087A JP27350087A JPH01116439A JP H01116439 A JPH01116439 A JP H01116439A JP 27350087 A JP27350087 A JP 27350087A JP 27350087 A JP27350087 A JP 27350087A JP H01116439 A JPH01116439 A JP H01116439A
Authority
JP
Japan
Prior art keywords
optical information
inspection
information storage
spindle
storage medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27350087A
Other languages
Japanese (ja)
Inventor
Kouichi Tabe
多部 光一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP27350087A priority Critical patent/JPH01116439A/en
Publication of JPH01116439A publication Critical patent/JPH01116439A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To speed up an inspection process with a reduction in inspection time by performing an inspection sequentially with an inspection head mounting an optical information memory media sequentially on a plurality of spindles to rotate it. CONSTITUTION:At the position of a spindle 2, an optical information memory medium 1 is mounted on the spindle. At the position of a spindle 3, the rotation of the spindle is started. At the position of a spindle 4, an inspection of the optical information memory medium 1 is performed with an inspection head 7. At the position of a spindle 5, the optical information memory medium 1 is removed from the spindle. Such a series of operations is accomplished by the rotation of a turntable 6.

Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) 、本発明は、光学的情報記憶媒体を効率的に検査し得る
光学的情報記憶媒体検査WA@に関する。
DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to an optical information storage medium inspection WA@ that can efficiently inspect an optical information storage medium.

(従来の技術) 光学的情報記憶媒体検査装置は、従来、1本のスピンド
ルを有し、このスピンドルに光学的情報記憶媒体を装着
し、スピンドルを介して光学的情報記憶媒体を回転させ
ながら検査ヘッドによって光学的情報記憶媒体を検査し
ている。なお、この検査内容は、例えば光学的情報記憶
媒体の異物、傷等の欠陥、成膜の透過倦、反射色、ピン
ホール、複屈折、形状寸法等である。
(Prior Art) Conventionally, an optical information storage medium inspection device has one spindle, an optical information storage medium is attached to this spindle, and the optical information storage medium is inspected while rotating through the spindle. An optical information storage medium is inspected by the head. The inspection contents include, for example, defects such as foreign substances and scratches on the optical information storage medium, transmission thickness of film formation, reflected color, pinholes, birefringence, shape and dimensions, and the like.

(発明が解決しようとする問題点) 従来の光学的情報記憶媒体検査装置は、1本のスピンド
ルしか有していないが、この装置を例えば製造検査工程
の中に設置して順次送り込まれてくる光学的情報記憶媒
体を検査する場合には、スピンドルにまず光学的情報記
憶媒体を装着し回転させて検査を行い、検査が完全に終
ってから光学的情報記憶媒体をスピンドルから取り外し
、次の光学的情報記憶媒体を装着するという一連の作業
が必要となり、スピンドルに対する光学的情報記憶媒体
の装着および取り外し動作の間、実質的検査を行うこと
ができないため、全体として検査時間がかかり、製造検
査工程を高速化できず、非経済的であるという問題があ
る。
(Problems to be Solved by the Invention) Conventional optical information storage medium inspection devices have only one spindle, but this device is installed, for example, in a manufacturing inspection process and sent in one after another. When inspecting an optical information storage medium, first attach the optical information storage medium to the spindle and rotate it for inspection. After the inspection is completely completed, remove the optical information storage medium from the spindle and start the next optical information storage medium. This requires a series of operations to install an optical information storage medium, and it is not possible to perform a substantive inspection during the operation of installing and removing an optical information storage medium from the spindle, which increases the overall inspection time and reduces the manufacturing inspection process. The problem is that the speed cannot be increased and it is uneconomical.

本発明は、上記に鑑みてなされたもので、その目的とす
るところは、光学的情報記憶媒体の装着および取り外し
を含む全体としての検査時間を短縮し、検査工程の高速
化を図った光学的情報記憶媒体検査装置を提供すること
にある。
The present invention has been made in view of the above, and its purpose is to shorten the overall inspection time including the installation and removal of optical information storage media, and to speed up the inspection process. An object of the present invention is to provide an information storage medium inspection device.

[発明の構成] (問題点を解決するための手段) 上記目的を達成するため、本発明の光学的情報記憶媒体
検査装置は、光学的情報記憶媒体が装着される複数のス
ピンドルと、前記スピンドルを回転させる回転手段と、
該回転手段による前記スピンドルの回転によって回転す
る光学的情報記憶媒体を検査する検査ヘッドと、前記ス
ピンドルに装着され、前記回転手段によって回転する光
学的情報記憶媒体を順次前記検査ヘッドで検査し得るよ
うに前記スピンドルを前記検査ヘッドに対応する位置に
順次移動させる移動制御手段とを有することを要旨とす
る。
[Structure of the Invention] (Means for Solving the Problems) In order to achieve the above object, an optical information storage medium inspection device of the present invention includes a plurality of spindles on which optical information storage media are mounted, and a plurality of spindles on which optical information storage media are mounted, and a rotation means for rotating the
An inspection head for inspecting an optical information storage medium rotated by rotation of the spindle by the rotation means; and an inspection head for sequentially inspecting the optical information storage medium mounted on the spindle and rotated by the rotation means with the inspection head. and movement control means for sequentially moving the spindle to positions corresponding to the inspection head.

(作用) 本発明の光学的情報記憶媒体検査装置では、複数のスピ
ンドルを設け、このスピンドルに光学的情報記憶媒体を
順次装着し回転させながら、検査ヘッドで順次検査して
いる。
(Function) The optical information storage medium inspection apparatus of the present invention is provided with a plurality of spindles, and the optical information storage media are sequentially mounted on the spindles and rotated, while being sequentially inspected with an inspection head.

(実施例) 以下、図面を用いて本発明の詳細な説明する。(Example) Hereinafter, the present invention will be explained in detail using the drawings.

第1図および第2図はそれぞれ本発明の一実施例に係る
光学的情報記憶媒体検査装置の斜視図および平面図であ
る。両図に示す光学的情報記憶媒体検査装置は、回転テ
ーブル6および該回転テーブル6上に立設された4個の
スピンドル2.3゜4.5を有し、これらのスピンドル
の上に円盤状の光学的情報記憶媒体1がそれぞれ装着さ
れている。また、スピンドル4に装着された光学的情報
記憶媒体1には検査ヘッド7が近接し、光学的情報記憶
媒体1を検査し得るようになっている。
1 and 2 are a perspective view and a plan view, respectively, of an optical information storage medium inspection apparatus according to an embodiment of the present invention. The optical information storage medium inspection apparatus shown in both figures has a rotary table 6 and four spindles 2.3° 4.5 erected on the rotary table 6, and a disk-shaped disk is mounted on these spindles. Optical information storage media 1 are respectively attached. Further, an inspection head 7 approaches the optical information storage medium 1 mounted on the spindle 4, so that the optical information storage medium 1 can be inspected.

各スピンドルは図示しないモータ等により回転するよう
になっていて、各スピンドル上に装着された光学的情報
記憶媒体1はそれぞれスピンドルによって回転させられ
るとともに、またスピンドルが取り付けられている回転
テーブル6はそれ自身図示しないモータ等により第2図
において矢印で示す方向に回転するようになっており、
これにより各スピンドル上の光学的情報記憶媒体1は順
次検査ヘッド7で検査できるようになっている。
Each spindle is rotated by a motor (not shown) or the like, and the optical information storage medium 1 mounted on each spindle is rotated by the spindle, and the rotary table 6 to which the spindle is attached is rotated by the spindle. It is designed to rotate in the direction shown by the arrow in Fig. 2 by a motor (not shown), etc.
This allows the optical information storage medium 1 on each spindle to be sequentially inspected by the inspection head 7.

以上のように構成される光学的情報記憶媒体検査装置を
例えば光学的情報記憶媒体の製造検査工程に配置した場
合には、図においてスピンドル2の位置で光学的情報記
憶媒体1をスピンドルに装着し、スピンドル3の位置で
スピンドルの回転を立上げ、スピンドル4の位置で光学
的情報記憶媒体1の検査を検査ヘッド7で行い、スピン
ドル5の位置で光学的情報記憶媒体1をスピンドルから
取り外すという一連の動作が回転テーブル6の回転によ
って行われる。
When the optical information storage medium inspection apparatus configured as described above is installed, for example, in the manufacturing inspection process of optical information storage media, the optical information storage medium 1 is mounted on the spindle at the position of the spindle 2 in the figure. , the rotation of the spindle is started at the spindle 3 position, the optical information storage medium 1 is inspected by the inspection head 7 at the spindle 4 position, and the optical information storage medium 1 is removed from the spindle at the spindle 5 position. These operations are performed by rotating the rotary table 6.

この結果、検査ヘッド7によって光学的情報記憶媒体1
の検査を行っている間に、スピンドル2の位置でスピン
ドルに光学的情報記憶媒体1を装着することができ、ま
たスピンドル5の位置でスピンドルから光学的情報記憶
媒体1を取り外すことができるとともに、検査ヘッド7
による検査が終了した場合には、光学的情報記憶媒体1
のスピンドルへの装着および取り外しを待つことなく、
単に回転テーブル6を回転させ、スピンドル3の位置に
ある光学的情報記憶媒体1を検査ヘッド7のところに移
動させるだけで直ぐに次の光学的情報記憶媒体を検査す
ることができる。従って、少なくとも光学的情報記憶媒
体の装着および取り外し時間が不要となり、全体として
検査動作を迅速化することができる。
As a result, the optical information storage medium 1 is inspected by the inspection head 7.
During the inspection, the optical information storage medium 1 can be mounted on the spindle at the position of the spindle 2, and the optical information storage medium 1 can be removed from the spindle at the position of the spindle 5, and Inspection head 7
When the inspection is completed, the optical information storage medium 1
without having to wait for it to be installed and removed from the spindle.
By simply rotating the rotary table 6 and moving the optical information storage medium 1 located on the spindle 3 to the inspection head 7, the next optical information storage medium can be immediately inspected. Therefore, at least the time required to attach and detach the optical information storage medium is eliminated, and the overall inspection operation can be speeded up.

第3図および第4図はそれぞれ本発明の他の実施例の斜
視図および平面図である。この実施例の光学的情報記憶
媒体検査装置は、前記第1図および第2図に示す実施例
において検査ヘッドの数を増加し、複数の検査ヘッドで
検査できるようにしたものである。
3 and 4 are a perspective view and a plan view, respectively, of another embodiment of the invention. The optical information storage medium inspection apparatus of this embodiment is different from the embodiments shown in FIGS. 1 and 2 in that the number of inspection heads is increased so that inspection can be performed using a plurality of inspection heads.

すなわち、第3図および第4図では、スピンドル4の位
置の検査ヘッド7以外に、スピンドル3の位置に2つの
検査ヘッド8,9を設け、これによりスピンドル3を2
つの検査ヘッド8.9で同時に検査できるようにしてい
る。そして、この場合、各検査ヘッド7.8.9によっ
て同時に多項目の検査ができるように各検査ヘッドによ
って異なる検査項目を検査し、回転テーブル6の回転に
つれて検査ヘッド9から検査ヘッド8、検査ヘッド7と
順次具なる検査を行うことにより検査ヘッド7の検査が
終了した時にすべての検査が終了するようになっている
。この結果、検査動作が並列化されるため、検査時間そ
のものが短縮化されるようになっている。
That is, in FIGS. 3 and 4, in addition to the inspection head 7 at the spindle 4 position, two inspection heads 8 and 9 are provided at the spindle 3 position, thereby allowing the spindle 3 to
The two inspection heads 8 and 9 can be used for inspection at the same time. In this case, each inspection head inspects different inspection items so that each inspection head 7.8.9 can inspect multiple items at the same time, and as the rotary table 6 rotates, the inspection head 7 and 7, all tests are completed when the test of the test head 7 is completed. As a result, the inspection operations are parallelized, so the inspection time itself is shortened.

なお、第2図お゛よび第4図において、各検査ヘッドの
後部に対応して往復矢印が示されているが、これは光学
的情報記憶媒体を検査する場合には検査ヘッドを光学的
情報記憶媒体に接近させ、検査が終った場合には検査ヘ
ッドを離すように検査ヘッドが光学的情報記ta媒体に
対して接離し得るように構成されていることを示してい
る。
In addition, in FIGS. 2 and 4, reciprocating arrows are shown corresponding to the rear of each inspection head, but this means that when inspecting an optical information storage medium, the inspection head is not connected to the optical information storage medium. This shows that the inspection head is configured to be able to approach and separate from the optical information recording medium so that the inspection head approaches the storage medium and then leaves the inspection head when the inspection is completed.

[発明の効果] 以上説明したように、本発明によれば、複数のスピンド
ルを設け、このスピンドルに光学的情報記憶媒体を順次
装着し回転させながら、検査ヘッドで順次検査している
ので、検査ヘッドで光学的情報記憶媒体を検査している
間に次の光学的情報記憶媒体をスピンドルに装着したり
、また前の光学的情報記憶媒体をスピンドルから取り外
すことができるため、光学的情報記憶媒体の装着および
取り外したために検査動作が停止することがなく、検査
時間を全体として短縮することができ、製造検査工程の
中に配置しても検査工程を高速化できる。また、検査ヘ
ッドを複数設けることにより検査時間そのものを短縮す
ることができるようになっている。
[Effects of the Invention] As explained above, according to the present invention, a plurality of spindles are provided, and optical information storage media are sequentially mounted on the spindles and are sequentially inspected by the inspection head while rotating, so that the inspection can be performed easily. While the optical information storage medium is being inspected by the head, the next optical information storage medium can be loaded onto the spindle, and the previous optical information storage medium can be removed from the spindle. Since the inspection operation does not stop due to attachment and removal of the inspection device, the inspection time can be shortened overall, and the inspection process can be speeded up even if it is placed in the manufacturing inspection process. Furthermore, by providing a plurality of inspection heads, the inspection time itself can be shortened.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図および第2図はそれぞれ本発明の一実施例に係る
光学的情報記憶媒体検査装置の斜視図および平面図、第
3図および第4図は本発明の他の実施例の斜視図および
平面図である。 1・・・光学的情報記憶媒体 2〜5・・・スピンドル 6・・・回転テーブル 7〜9・・・検査ヘッド
1 and 2 are a perspective view and a plan view, respectively, of an optical information storage medium inspection apparatus according to one embodiment of the present invention, and FIGS. 3 and 4 are a perspective view and a plan view of another embodiment of the present invention. FIG. 1... Optical information storage medium 2-5... Spindle 6... Rotary table 7-9... Inspection head

Claims (2)

【特許請求の範囲】[Claims] (1)光学的情報記憶媒体が装着される複数のスピンド
ルと、前記スピンドルを回転させる回転手段と、該回転
手段による前記スピンドルの回転によって回転する光学
的情報記憶媒体を検査する検査ヘッドと、前記スピンド
ルに装着され、前記回転手段によつて回転する光学的情
報記憶媒体を順次前記検査ヘッドで検査し得るように前
記スピンドルを前記検査ヘッドに対応する位置に順次移
動させる移動制御手段とを有することを特徴とする光学
的情報記憶媒体検査装置。
(1) a plurality of spindles on which optical information storage media are mounted; a rotating means for rotating the spindles; an inspection head for inspecting the optical information storage medium rotated by the rotation of the spindles by the rotating means; and a movement control means for sequentially moving the spindle to positions corresponding to the inspection head so that the optical information storage medium mounted on the spindle and rotated by the rotation means can be sequentially inspected by the inspection head. An optical information storage medium inspection device characterized by:
(2)前記検査ヘッドは同時に複数の光学的情報記憶媒
体を検査し得るように複数設けられていることを特徴と
する特許請求の範囲第1項記載の光学的情報記憶媒体検
査装置。
(2) The optical information storage medium inspection apparatus according to claim 1, wherein a plurality of said inspection heads are provided so that a plurality of optical information storage media can be inspected simultaneously.
JP27350087A 1987-10-30 1987-10-30 Inspection device for optical information memory medium Pending JPH01116439A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27350087A JPH01116439A (en) 1987-10-30 1987-10-30 Inspection device for optical information memory medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27350087A JPH01116439A (en) 1987-10-30 1987-10-30 Inspection device for optical information memory medium

Publications (1)

Publication Number Publication Date
JPH01116439A true JPH01116439A (en) 1989-05-09

Family

ID=17528762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27350087A Pending JPH01116439A (en) 1987-10-30 1987-10-30 Inspection device for optical information memory medium

Country Status (1)

Country Link
JP (1) JPH01116439A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04301714A (en) * 1991-03-29 1992-10-26 Showa Alum Corp Work visual inspection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04301714A (en) * 1991-03-29 1992-10-26 Showa Alum Corp Work visual inspection device

Similar Documents

Publication Publication Date Title
JPS63200354A (en) Disk device
JPH01116439A (en) Inspection device for optical information memory medium
JPH0245739A (en) Surface defect inspecting device
US6011618A (en) Method and apparatus of surface inspection of a disk
US5909117A (en) Apparatus and method for inspecting disks
JP3368578B2 (en) Disk inspection device and inspection method
JP2013205340A (en) Disk surface inspection method and device thereof
EP0961928A1 (en) Method of scanning semiconductor wafers to inspect for defects
JPH0642286B2 (en) Inspection method for disk type recording media
JP2597763B2 (en) Work appearance inspection device
JPH0963051A (en) Magnetic disk inspecting method and inspecting device
JP3572761B2 (en) Inspection method for rotating magnetic head
JP3501351B2 (en) Recording medium mounted body
JPH04359109A (en) Device for simultaneously inspecting appearance of both surfaces of work
JPH05325146A (en) Magnetic head tester
JPH0312887A (en) Disk device
JPS617480A (en) Disc type recording medium tester
JPH0536063A (en) Checking device for magnetic disk
JPS6326769Y2 (en)
JPS6243574A (en) Single plate disc tester
JP3137140B2 (en) Magnetic disk inspection system
JPH09274779A (en) Handling mechanism for magnetic disk
JP2000118702A (en) Disc transferring device and disc processing device
JPS6267431A (en) Automatic charging disk type recording medium tester
JPS63162858A (en) Vacuum deposition device