JP2593381B2 - High concentration ozone production equipment - Google Patents
High concentration ozone production equipmentInfo
- Publication number
- JP2593381B2 JP2593381B2 JP3320422A JP32042291A JP2593381B2 JP 2593381 B2 JP2593381 B2 JP 2593381B2 JP 3320422 A JP3320422 A JP 3320422A JP 32042291 A JP32042291 A JP 32042291A JP 2593381 B2 JP2593381 B2 JP 2593381B2
- Authority
- JP
- Japan
- Prior art keywords
- ozone
- gas
- liquefaction container
- liquid
- liquid level
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/06—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by partial condensation
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/10—Preparation of ozone
- C01B13/11—Preparation of ozone by electric discharge
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2215/00—Processes characterised by the type or other details of the product stream
- F25J2215/50—Oxygen or special cases, e.g. isotope-mixtures or low purity O2
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Separation By Low-Temperature Treatments (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明はオゾン製造装置に関し、
特に、濃縮された高濃度オゾンを効率的に製造し得るオ
ゾン製造装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozone producing apparatus,
In particular, the present invention relates to an ozone producing apparatus capable of efficiently producing concentrated high-concentration ozone.
【０００２】[0002]
【従来の技術】図２は、現在一般に使用されている無声
放電式のオゾン発生器を概略的に図解している。このオ
ゾン発生器は、一対の電極２０と、それらの電極の１つ
に取付けられた誘電体２１と、高電圧交流発生部２２と
から構成されている。このように構成されているオゾン
発生器において、一対の電極２０の間に交流の高電圧を
印加しながら、空気や酸素ガスのような酸素を含む原料
ガス２３を通過させれば、オゾンを含むガス２４が生成
する。2. Description of the Related Art FIG. 2 schematically illustrates a silent discharge type ozone generator currently used in general. This ozone generator comprises a pair of electrodes 20, a dielectric 21 attached to one of the electrodes, and a high-voltage AC generator 22. In the ozone generator configured as described above, if the source gas 23 containing oxygen such as air or oxygen gas is passed while applying a high alternating voltage between the pair of electrodes 20, the ozone generator contains ozone. Gas 24 is generated.
【０００３】[0003]
【発明が解決しようとする課題】上述のような無声放電
式のオゾン発生器では、オゾンの発生効率は最大でも約
１０％ぐらいであり、残留ガスとして多くの酸素や窒素
が含まれている。ところが、半導体装置の製造などの分
野においては、さらに高濃度のオゾンガスの供給が望ま
れている。In the silent discharge type ozone generator as described above, the efficiency of ozone generation is at most about 10%, and a large amount of oxygen and nitrogen are contained as residual gas. However, in fields such as the manufacture of semiconductor devices, supply of ozone gas with a higher concentration is desired.
【０００４】また、無声放電式のオゾン発生器では、オ
ゾンの発生効率がそのオゾン発生器内の放電部分の温度
に影響され、低温におけるほうがオゾン発生効率が高
い。したがって、このオゾン発生器を断続的に運転すれ
ば、放電部分の温度も断続的に変化するので、オゾン発
生効率の安定化のためにはオゾン発生器を連続的に運転
したほうがよい。In a silent discharge type ozone generator, the ozone generation efficiency is affected by the temperature of the discharge portion in the ozone generator, and the ozone generation efficiency is higher at low temperatures. Therefore, if the ozone generator is operated intermittently, the temperature of the discharge part also changes intermittently. Therefore, it is better to operate the ozone generator continuously to stabilize the ozone generation efficiency.
【０００５】以上のような先行技術における課題に鑑
み、本発明の目的は、オゾン発生器を安定した条件下で
効率的に連続運転し得る高濃度オゾン製造装置を提供す
ることである。[0005] In view of the above problems in the prior art, an object of the present invention is to provide a high-concentration ozone producing apparatus capable of efficiently and continuously operating an ozone generator under stable conditions.
【０００６】[0006]
【課題を解決するための手段】本発明による高濃度オゾ
ン製造装置は、酸素を含む原料ガスからオゾンを含む生
成ガスを生じるオゾン発生器と、その生成ガス中のオゾ
ンのみを液化し得る温度範囲内に維持されたオゾン液化
容器とを備え、そのオゾン液化容器は液化されたオゾン
以外のガス成分を外部に放出するガス放出手段を含んで
おり、これによってオゾン濃度が高められ、さらに、オ
ゾン発生器とオゾン液化容器との間を接続するガス配管
上に設けられた自動弁と、オゾン液化容器中の液体オゾ
ンの液面レベルを検知するための液面レベル検知器と、
液面レベルが第１の高さ以上になったときにガス配管を
閉鎖しかつ生成ガスを外部に放出するとともに、液面レ
ベルが第１の高さより低い第２の高さ以下になったとき
にガス配管を開通させかつ生成ガスの外部への放出を停
止するように自動弁を制御する制御装置を備え、これに
よって、オゾン液化容器内の液体オゾンの液面レベルの
如何にかかわらず、オゾン発生器が安定した条件下で効
率的に連続運転され得ることを特徴としている。SUMMARY OF THE INVENTION A high-concentration ozone producing apparatus according to the present invention comprises an ozone generator for producing a product gas containing ozone from a source gas containing oxygen, and a temperature range in which only ozone in the product gas can be liquefied. An ozone liquefaction container maintained inside the ozone liquefaction container, the ozone liquefaction container including a gas releasing means for releasing a gas component other than the liquefied ozone to the outside, thereby increasing the ozone concentration and further generating ozone. An automatic valve provided on a gas pipe connecting between the container and the ozone liquefaction container, and a liquid level detector for detecting the liquid level of liquid ozone in the ozone liquefaction container,
When the liquid level becomes higher than the first height, the gas pipe is closed and the generated gas is discharged to the outside, and when the liquid level becomes lower than the second height lower than the first height. A control device for controlling an automatic valve so as to open the gas pipe and stop the release of the generated gas to the outside, and thereby, regardless of the liquid level of the liquid ozone in the ozone liquefaction container, It is characterized in that the generator can be continuously operated efficiently under stable conditions.
【０００７】[0007]
【作用】本発明による高濃度オゾン製造装置において
は、オゾン発生器からのオゾンを含む生成ガスのうちオ
ゾンのみがオゾン液化容器内で液化され、オゾン以外の
残留ガス成分がガス放出手段によってオゾン液化容器外
へ放出され、また、オゾン発生器とオゾン液化容器との
間のガス配管上に設けられた自動弁を制御装置で制御す
ることによって、オゾン液化容器内の液体オゾンの液面
レベル如何にかかわらずオゾン発生器を安定した条件下
で効率的に連続運転することが可能である。In the high-concentration ozone producing apparatus according to the present invention, only ozone of the product gas containing ozone from the ozone generator is liquefied in the ozone liquefaction container, and residual gas components other than ozone are liquefied by the gas releasing means. By controlling the automatic valve provided on the gas pipe between the ozone generator and the ozone liquefaction container by the controller, the liquid ozone level in the ozone liquefaction container can be controlled. Regardless, it is possible to efficiently and continuously operate the ozone generator under stable conditions.
【０００８】[0008]
【実施例】図１は、本発明の一実施例による高濃度オゾ
ン製造装置を概略的に図解している。この図において、
無声放電式のオゾン発生器１には、空気や酸素ガスのよ
うな酸素を含む原料ガスが原料ガス導入管２を介して供
給される。この原料ガスの供給は、ボンベや工場配管の
ガス圧力を利用して行なわれ得る。また、オゾン発生器
１は、図２に示されたものと同様に構成され得る。FIG. 1 schematically illustrates an apparatus for producing high-concentration ozone according to an embodiment of the present invention. In this figure,
A source gas containing oxygen, such as air or oxygen gas, is supplied to a silent discharge type ozone generator 1 through a source gas introduction pipe 2. The supply of the raw material gas can be performed using the gas pressure of a cylinder or a factory pipe. Further, the ozone generator 1 can be configured in the same manner as that shown in FIG.
【０００９】オゾン発生器１によって生成された約１０
％未満のオゾンを含有するガスは、オゾン含有ガス供給
管３によってオゾン液化容器５内に送られる。このと
き、オゾン含有ガス供給管３上の手動弁１７ａと自動弁
１１ａが開放されており、もう１つの自動弁１１ｂが閉
じられている。[0009] About 10 generated by the ozone generator 1
% Ozone-containing gas is sent into the ozone liquefaction container 5 by the ozone-containing gas supply pipe 3. At this time, the manual valve 17a and the automatic valve 11a on the ozone-containing gas supply pipe 3 are open, and the other automatic valve 11b is closed.
【００１０】オゾン液化容器５は、液体窒素供給管４に
よって、オゾンのみが液化し得る温度に冷却されて保持
されている。すなわち、制御装置１０は、温度計１３に
よってオゾン液化容器５内の温度を検知し、液体窒素供
給管４に供給される液体窒素量を自動弁１４で制御する
ことによって、液化容器５内を一定の低温に保持する。The ozone liquefaction container 5 is cooled and held by the liquid nitrogen supply pipe 4 at a temperature at which only ozone can be liquefied. That is, the control device 10 detects the temperature in the ozone liquefaction container 5 with the thermometer 13 and controls the amount of liquid nitrogen supplied to the liquid nitrogen supply pipe 4 with the automatic valve 14 to keep the inside of the liquefaction container 5 constant. Keep at low temperature.
【００１１】たとえば、原料ガスとして空気を用いた場
合、オゾン発生器１によって生成されたオゾン含有ガス
には、多くの窒素ガスと酸素ガスが残留している。窒素
は、１気圧において−１９５．８２℃の沸点と−２０
９．８６℃の融点を有している。また、酸素は、１気圧
において−１８２．９７℃の沸点と−２１８．９℃の融
点を有している。他方、オゾンは、１気圧において−１
１２℃の沸点と−１９３℃の融点を有している。したが
って、オゾン液化容器５を−１１２℃から−１８２．９
７℃の間の温度に保持しておけば、オゾンのみが液化さ
れ、窒素と酸素はガスの状態に止まっている。For example, when air is used as a source gas, a large amount of nitrogen gas and oxygen gas remain in the ozone-containing gas generated by the ozone generator 1. Nitrogen has a boiling point of -195.82 [deg.] C at 1 atm and a boiling point of -20.
It has a melting point of 9.86 ° C. Oxygen has a boiling point of -182.97 ° C and a melting point of -218.9 ° C at 1 atm. On the other hand, ozone is -1 at 1 atm.
It has a boiling point of 12 ° C and a melting point of -193 ° C. Therefore, the ozone liquefaction container 5 was cooled from -112 ° C to -182.9.
If the temperature is kept between 7 ° C., only ozone is liquefied, and nitrogen and oxygen remain in a gaseous state.
【００１２】これらの窒素ガスと酸素ガスをガス放出管
１０ａによってオゾン液化容器５外に放出してやれば、
液化容器５内には液体オゾンのみが蓄積されることにな
る。すなわち、ガス放出管１０ａ上の手動弁１７ｂは、
このとき開放されている。また、ガス放出管１０ａ上に
はフィルタ２０が設けられており、外部からオゾン液化
容器５内に汚染物質が侵入することを防止している。さ
らに、オゾン液化容器５には、万一のときのために、安
全弁１９ａも設けられている。If these nitrogen gas and oxygen gas are discharged out of the ozone liquefaction container 5 by the gas discharge pipe 10a,
In the liquefaction container 5, only liquid ozone is accumulated. That is, the manual valve 17b on the gas discharge pipe 10a is
It is open at this time. A filter 20 is provided on the gas discharge tube 10a to prevent contaminants from entering the ozone liquefaction container 5 from outside. Further, a safety valve 19a is provided in the ozone liquefaction container 5 for an emergency.
【００１３】液化容器５内に蓄積された液体オゾンは、
低温液体輸送ポンプ６によって、高濃度オゾン輸送管５
ａを介して高濃度オゾンガスタンク８に向けて送られ
る。液体輸送ポンプ６によって送出された液体オゾン
は、ヒータ７によって加熱され、輸送管５ａ内で再度ガ
ス化される。そして、このガス化された高濃度オゾン
は、輸送管５ａ内のオゾンガス圧とガスタンク８内のオ
ゾンガス圧との圧力差によってガスタンク８内に送られ
て蓄えられる。即ち、輸送管５ａ内のオゾンガス圧の方
がガスタンク８内の圧力より高い。このとき、輸送管５
ａ内とガスタンク８内のオゾンガス圧はそれぞれ圧力セ
ンサ１５と１６によって検知され、オゾンガスはレギュ
レータＲによって減圧されてガスタンク８内に送られ
る。なお、輸送管５ａ内のオゾンガス圧が低下した場合
のガスタンク８から輸送管５ａ内へのオゾンガスの逆流
を防止するために、逆止弁１８が設けられている。ま
た、ガスタンク８には、万一のときのために安全弁１９
ｂも設けられている。The liquid ozone accumulated in the liquefaction container 5 is
The high-concentration ozone transport pipe 5 is moved by the low-temperature liquid transport pump 6.
The gas is sent to the high-concentration ozone gas tank 8 through a. The liquid ozone sent out by the liquid transport pump 6 is heated by the heater 7 and gasified again in the transport pipe 5a. Then, the gasified high-concentration ozone is sent to and stored in the gas tank 8 by a pressure difference between the ozone gas pressure in the transport pipe 5a and the ozone gas pressure in the gas tank 8. That is, the ozone gas pressure in the transport pipe 5a is higher than the pressure in the gas tank 8. At this time, the transport pipe 5
The pressures of the ozone gas in a and the gas tank 8 are detected by pressure sensors 15 and 16, respectively, and the pressure of the ozone gas is reduced by the regulator R and sent into the gas tank 8. A check valve 18 is provided to prevent the ozone gas from flowing back from the gas tank 8 into the transport pipe 5a when the ozone gas pressure in the transport pipe 5a decreases. The gas tank 8 has a safety valve 19 for emergency use.
b is also provided.
【００１４】このようにガスタンク８内に蓄積された高
濃度オゾンガスは、手動弁１７ｃとレギュレータＲを介
して高濃度オゾンガス供給管９によって半導体装置の製
造工程などに供給される。The high-concentration ozone gas thus accumulated in the gas tank 8 is supplied to the semiconductor device manufacturing process and the like through the high-concentration ozone gas supply pipe 9 via the manual valve 17c and the regulator R.
【００１５】ところで、前述したように、無声放電式オ
ゾン発生器１は、連続的に運転することが望ましい。し
かし、連続運転されるオゾン発生器１からのオゾンを含
む生成ガスをオゾン液化容器５内へ絶えず送込んでいけ
ば、液化容器５から液体オゾンが溢れるおそれがある。
他方、オゾンガスを低温にして液化させるためには、あ
る程度の時間が必要であるので、液化容器５内には常に
ある程度の液体オゾンが残っていることが望ましい。Incidentally, as described above, it is desirable that the silent discharge ozone generator 1 be operated continuously. However, if the generated gas containing ozone from the continuously operated ozone generator 1 is constantly fed into the ozone liquefaction container 5, the liquid ozone may overflow from the liquefaction container 5.
On the other hand, a certain amount of time is required to liquefy the ozone gas at a low temperature, so that it is desirable that a certain amount of liquid ozone always remain in the liquefaction container 5.
【００１６】図１の高濃度オゾン製造装置は、オゾン発
生器１の連続運転を可能にする制御系をも備えている。
すなわち、液化容器５には液化オゾンの液面レベルを検
知するための液面レベルセンサ１２が設けられており、
制御装置１０はこのレベルセンサによって液化容器５中
の液体オゾンの液面レベルを検知する。そして、液体オ
ゾンの液面レベルが液化容器５内の最上部に達したこと
を検知したとき、制御装置１０はオゾン含有ガス供給管
３上の自動弁１１ａを閉じてもう１つの自動弁１１ｂを
開放する。これによって、オゾン含有ガスは自動弁１１
ｂを介して外部に放出され、液化容器５内への供給が停
止される。他方、液体オゾンの液面レベルが液化容器５
の中央の高さより低下したことを検知したとき、制御装
置１０は自動弁１１ａを開放してもう１つの自動弁１１
ｂを閉鎖する。これによって、液化容器５内へのオゾン
含有ガスの供給が再開される。すなわち、液化容器５内
の液体オゾンの液面レベルの如何にかかわらず、オゾン
発生器１を安定した条件で連続的に運転することが可能
になる。The high-concentration ozone producing apparatus shown in FIG. 1 is also provided with a control system which enables continuous operation of the ozone generator 1.
That is, the liquefaction container 5 is provided with a liquid level sensor 12 for detecting the liquid level of liquefied ozone,
The control device 10 detects the liquid level of the liquid ozone in the liquefaction container 5 using this level sensor. Then, when detecting that the liquid level of the liquid ozone has reached the uppermost part in the liquefaction container 5, the control device 10 closes the automatic valve 11a on the ozone-containing gas supply pipe 3 and sets another automatic valve 11b. Open. Thereby, the ozone-containing gas is supplied to the automatic valve 11
The liquid is discharged to the outside via b, and the supply into the liquefaction container 5 is stopped. On the other hand, when the liquid level of the liquid ozone is
When detecting that the height has dropped below the center height of the automatic valve 11a, the control device 10 opens the automatic valve 11a and opens another automatic valve 11a.
b is closed. Thereby, the supply of the ozone-containing gas into the liquefaction container 5 is restarted. That is, regardless of the liquid level of the liquid ozone in the liquefaction container 5, the ozone generator 1 can be continuously operated under stable conditions.
【００１７】なお、上述の実施例ではオゾン発生器１と
して無声放電式オゾン発生器を用い得ることが述べられ
たが、他の方式のオゾン発生器をも用い得ることはいう
までもない。In the above-described embodiment, the silent discharge type ozone generator can be used as the ozone generator 1, but it goes without saying that other types of ozone generators can be used.
【００１８】[0018]
【発明の効果】以上のように、本発明によれば、高濃度
のオゾンを製造することができかつオゾン発生器を安定
した条件下で連続的に運転し得る高濃度オゾン製造装置
を提供することができる。As described above, according to the present invention, there is provided a high-concentration ozone producing apparatus which can produce high-concentration ozone and can continuously operate an ozone generator under stable conditions. be able to.
【図１】本発明の一実施例による高濃度オゾン製造装置
を概略的に示す図である。FIG. 1 is a view schematically showing an apparatus for producing high-concentration ozone according to an embodiment of the present invention.
【図２】従来の無声放電式オゾン発生器の構成を概略的
に示す図である。FIG. 2 is a diagram schematically showing a configuration of a conventional silent discharge ozone generator.
１ 無声放電式オゾン発生器 ２ 原料ガス導入管 ３ オゾン含有ガス供給管 ４ 液体窒素供給管 ５ オゾン液化容器 ６ 低温液体輸送ポンプ ７ ヒータ ８ 高濃度オゾンガスタンク ９ 高濃度オゾンガス供給管 １０ 制御装置 １０ａ フィルタ １１ａ，１１ｂ 自動弁 １２ 液面レベルセンサ １３ 温度計 １４ 自動弁 １５，１６ 圧力センサ １７ａ，１７ｂ，１７ｃ 手動弁 １８ 逆止弁 １９ａ，１９ｂ 安全弁 Ｒ レギュレータ ２０ １対の電極 ２１ 誘電体 ２２ 高電圧交流発生部 ２３ 酸素を含む原料ガス ２４ オゾンを含む生成ガス DESCRIPTION OF SYMBOLS 1 Silent discharge type ozone generator 2 Source gas introduction pipe 3 Ozone containing gas supply pipe 4 Liquid nitrogen supply pipe 5 Ozone liquefaction container 6 Low temperature liquid transport pump 7 Heater 8 High concentration ozone gas tank 9 High concentration ozone gas supply pipe 10 Control device 10a Filter 11a, 11b Automatic valve 12 Liquid level sensor 13 Thermometer 14 Automatic valve 15, 16 Pressure sensor 17a, 17b, 17c Manual valve 18 Check valve 19a, 19b Safety valve R Regulator 20 One pair of electrodes 21 Dielectric 22 High voltage AC Generator 23 Source gas containing oxygen 24 Product gas containing ozone
Claims (1)
成ガスを生じるオゾン発生器と、 前記オゾンを含む生成ガス中のオゾンのみを液化し得る
温度範囲内に維持されたオゾン液化容器とを備え、前記
オゾン液化容器は液化されたオゾン以外のガス成分を外
部に放出するガス放出手段を含んでおり、これによって
オゾン濃度が高められ、 前記オゾン発生器と前記オゾン液化容器との間を接続す
るガス配管上に設けられた自動弁と、 前記オゾン液化容器中の液体オゾンの液面レベルを検知
するための液面レベル検知器と、 前記液面レベルが第１の高さ以上になったときに前記ガ
ス配管を閉鎖しかつ前記生成ガスを外部に放出するとと
もに、前記液面レベルが前記第１の高さより低い第２の
高さ以下になったときに前記ガス配管を開通させかつ前
記生成ガスの外部への放出を停止するように前記自動弁
を制御する制御装置をさらに備え、 これによって、前記オゾン液化容器内の液体オゾンの液
面レベルの如何にかかわらず、前記オゾン発生器が安定
した条件下で効率的に連続運転され得ることを特徴とす
る高濃度オゾン製造装置。1. An ozone generator for generating a product gas containing ozone from a source gas containing oxygen, and an ozone liquefaction container maintained in a temperature range capable of liquefying only ozone in the product gas containing ozone. The ozone liquefaction container includes gas releasing means for releasing a gas component other than liquefied ozone to the outside, thereby increasing the ozone concentration, and connecting the ozone generator and the ozone liquefaction container. An automatic valve provided on a gas pipe, a liquid level detector for detecting a liquid level of liquid ozone in the ozone liquefaction container, and when the liquid level becomes equal to or higher than a first height Closing the gas pipe and discharging the generated gas to the outside, and opening the gas pipe when the liquid level becomes equal to or lower than a second height lower than the first height, and The ozone generator further comprises a control device for controlling the automatic valve so as to stop the release of the generated gas to the outside, regardless of the liquid ozone level in the ozone liquefaction container. High-concentration ozone production apparatus characterized in that the apparatus can be continuously operated efficiently under stable conditions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3320422A JP2593381B2 (en) | 1991-12-04 | 1991-12-04 | High concentration ozone production equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3320422A JP2593381B2 (en) | 1991-12-04 | 1991-12-04 | High concentration ozone production equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05155607A JPH05155607A (en) | 1993-06-22 |
| JP2593381B2 true JP2593381B2 (en) | 1997-03-26 |
Family
ID=18121284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3320422A Expired - Lifetime JP2593381B2 (en) | 1991-12-04 | 1991-12-04 | High concentration ozone production equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2593381B2 (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4653023B2 (en) * | 2005-12-27 | 2011-03-16 | 住友重機械工業株式会社 | Ozone concentrator |
| JP5242616B2 (en) * | 2005-12-27 | 2013-07-24 | 住友重機械工業株式会社 | Operation method of ozone concentrator |
| JP4653024B2 (en) * | 2006-06-27 | 2011-03-16 | 住友重機械工業株式会社 | Ozone concentrator and operating method of ozone concentrator |
| WO2008004278A1 (en) * | 2006-07-04 | 2008-01-10 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Apparatus for concentrating/diluting specific gas and method of concentrating/diluting specific gas |
| JP5481782B2 (en) * | 2007-12-10 | 2014-04-23 | 株式会社明電舎 | Ozone supply device |
| JP2009001490A (en) * | 2008-09-22 | 2009-01-08 | Meidensha Corp | Liquid ozone-forming apparatus |
| JP2011068560A (en) * | 2010-10-29 | 2011-04-07 | Sumitomo Heavy Ind Ltd | Ozone concentrating apparatus and method for operating the same |
| JP2014015375A (en) * | 2012-07-11 | 2014-01-30 | Ihi Shibaura Machinery Corp | Ozonizer and ozone generating method |
-
1991
- 1991-12-04 JP JP3320422A patent/JP2593381B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05155607A (en) | 1993-06-22 |
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