JP2582866B2 - Supply / exhaust method of clean room for factories using hazardous chemicals - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for supplying and exhausting a clean room used in factories or the like that use hazardous chemicals.

[Conventional technology]

Conventionally, as a clean room of this kind, for example,
The one shown in the figure was known.

In the drawing, reference numeral 1 denotes a work space in which work devices 2 are arranged at predetermined intervals. The work equipment 2 includes a damper 4
The exhaust duct 3 provided with is provided. The damper 4 is opened according to the operating condition of the work equipment 2 and exhausts the circulating air in the work space 1 by an exhaust fan 5 installed outside. Reference numeral 6 denotes a ceiling space located above the work space 1 and is partitioned by a filter ceiling 7.
This filter ceiling 7 is for blowing out circulating air in the ceiling space 6 to the working space 1 as described later.
The present invention is not limited to this, and the upper part of the work space 1 may be partitioned by a ceiling, and an outlet may be provided on the ceiling. The ceiling space 6 is formed so as to contain the circulating air and blow out the circulating air to the working space 1 via a filter ceiling 7 provided on the working space 1 side. Reference numeral 8 denotes an underfloor space formed below the work space 1 and is separated by a floor plate 9. The floor plate 9 is formed of a perforated plate or the like through which the circulating air blown into the work space 1 can pass. Reference numeral 10 denotes a circulating air duct connecting the ceiling space 6 and the underfloor space 8, and the air in the underfloor space 8 is supplied to the ceiling space 6 by the circulating fan 11 to circulate the air. If there is a corridor or a maintenance zone that can communicate the ceiling space 6 and the underfloor space 8, these circulating air ducts 10 may be used instead, but in this example, for the sake of explanation, The circulating air duct 10 will be described. Reference numeral 12 denotes a duct for introducing outside air attached to the underfloor space 8, which controls a temperature and a humidity on the way and a regulator 13 such as a filter for filtering the outside air.
Is provided. The outside air introduction duct 12 introduces outside air suitable for the operation of the clean room to maintain the room pressure. In addition, the outside air introduction duct 12 is provided under the floor space 8.
Not limited to, it may be attached to the circulating air duct 10, or if a corridor or maintenance zone is used instead of the circulating air duct 10, it may be attached to these, but in this example For the sake of explanation,
The case where the device is mounted in the underfloor space 8 will be described.

According to the clean room thus configured, air maintained at a predetermined temperature, humidity, and the like is sent to the ceiling space 6 by the circulation fan 11, and in the ceiling space 6, the work space 1 is passed through the filter ceiling 7. And flows into the underfloor space 8 by touching the work equipment 2 disposed in the work space 1. The air contained in the underfloor space 8 is sent again to the ceiling space 6 by the circulation fan 11 via the circulation air duct 10. The circulation varies depending on the application, but is usually 100 to 400 times / hour. Then, after the outside air is introduced from the outside air introduction duct 12, the outside air is supplied to the underfloor space 8 at a predetermined temperature and humidity.

In the above-mentioned clean room, the work equipment 2 causes an accident, and dangerous gas such as toxic gas or flammable gas comes out,
Or, when a suffocating gas such as nitrogen gas is emitted, a method of stopping all the fans 5, 11, and 15 is general.

Therefore, in order to urgently exhaust the above-mentioned gas, for example, as shown in FIG.
A method has been proposed in which a large amount of air is discharged to the outside by a fan 15 through an exhaust duct 16 by an emergency exhaust, or a method in which the accident area and a window connected to the outside are connected by a flexible bellows and exhausted. I have.

[Problems to be solved by the invention]

However, in the former, since the exhaust port 14 is fixed, responsiveness to an accident at a location away from the exhaust port is difficult. In the latter case, since the bellows is manually operated, it takes time and effort and is not suitable for this type of exhaust which requires urgency. However, because gas has a bad effect on the human body,
Special equipment was required for exhaust treatment. Further, since all of them only perform emergency exhaust from the accident site, it has been difficult to actively prevent gas diffusion. Furthermore, in such an emergency exhaust system, since air corresponding to the amount of exhausted air only flows naturally from the surroundings, air that only dilutes the concentration of the hazardous gas or choking gas to a certain concentration is used. It was difficult to secure the quantity.

The present invention has been made to solve such a conventional problem, and an object of the present invention is to use a dangerous chemical which can positively suppress the diffusion of gas from a gas leakage area and can surely perform emergency exhaust. An object of the present invention is to provide a method of supplying and exhausting a clean room for a factory or the like.

[Means for solving the problem]

The supply / exhaust method of a clean room for hazardous chemical use factories or the like according to the present invention is such that the upper part of the work space is a filter ceiling or a ceiling with an outlet, so that air can be blown out from the ceiling into the work space, and the work space is placed under the floor of the work space. In a clean room where a space for accommodating the blown air is formed and a circulation fan is provided so that the air accommodated under the floor can be returned to the ceiling again and circulated, each working space unit or each fixed size module A plurality of ceiling spaces and underfloor spaces are formed by correspondingly partitioning the inside of the ceiling and the inside of the underfloor, and the respective ceiling spaces and underfloor spaces are individually communicated with each other through air flow passages equipped with circulation fans. Then, an outside air introduction path is communicated with each ceiling space or underfloor space so that outside air can be introduced into each ceiling space, and a damper for adjusting an outside air introduction amount is provided in this outside air introduction path, and each outside air amount is normally set. By squeezing the adjustment damper to supply an external air volume that is commensurate with the operation of the clean room, and for circulating air provided in the corresponding ceiling space when toxic or combustible gas leaks from production equipment At the same time as stopping the fan, stopping the outside air amount adjustment damper provided in the outside air introduction duct, stopping the air supply from the ceiling space, opening the outside air amount adjustment damper connected to the surrounding ceiling and opening the surrounding area To increase the amount of outside air supplied from the fuel cell, and to open a discharge damper below the floor in the leakage area to discharge toxic gas or flammable gas.

In addition, the method of supplying and exhausting a clean room for a factory using hazardous chemicals according to the present invention is characterized in that the upper part of the work space is a filter ceiling or a ceiling with an outlet so that air can be blown out from the ceiling into the work space, In a clean room where a space for accommodating the air blown under the floor is formed and a circulation fan is provided so that the air housed under the floor can be returned to the ceiling and circulated, the air can be circulated for each work space unit or in a fixed size. A plurality of ceiling spaces and under-floor spaces are formed by correspondingly dividing the inside of the ceiling and the inside of the under-floor for each module, and each corresponding ceiling space and under-floor space is separated through an air flow passage equipped with a circulation fan. Separately, an outside air introduction path is connected to each ceiling space or underfloor space so that outside air can be introduced into each ceiling space, and a damper for adjusting the amount of outside air introduced is provided in this outside air introduction path. By squeezing the volume adjustment damper to supply an external air volume that is commensurate with the operation of the clean room, when the asphyxiating gas leaks from the production equipment, the external air in the airflow passage communicating with the corresponding ceiling space and the surrounding ceiling space The amount adjustment outside damper is opened to increase the outside air supply amount, and the exhaust damper below the floor in the leakage area is opened to exhaust air.

(Operation)

In the method for supplying and exhausting a clean room for a factory using hazardous chemicals according to the present invention, under normal conditions, the outside air amount adjustment damper provided in the outside air introduction passage is squeezed to supply an outside air amount sufficient for the operation of the clean room. Control room pressure. And when toxic gas or flammable gas leaks from production equipment,
Stop the supply of outside air from the corresponding ceiling space, stop the circulation fan, open the exhaust damper under the floor of the accident area, open the damper for adjusting the outside air connected to the ceiling around the accident area, and open the accident area. By increasing the amount of outside air supplied to the surroundings, the surroundings of the accident area can be positively pressurized, and toxic gas or flammable gas can be exhausted from the accident area and exhausted to the outside via an exhaust damper.

Further, in the method for supplying and exhausting a clean room for a factory using hazardous chemicals according to the present invention, normally, the damper for adjusting the amount of outside air provided in the outside air duct is squeezed to supply an outside air amount sufficient for the operation of the clean room. To control the room pressure. Then, when asphyxiating gas leaks from the production equipment, the outside air volume adjustment damper connected to the corresponding ceiling space and the surrounding ceiling is opened to increase the outside air supply amount, and the outside air supply amount from the corresponding ceiling space And the exhaust damper below the floor in the accident area is opened to forcibly exhaust the asphyxiating gas from the accident area.

〔Example〕

 Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIGS. 1 and 2 show a clean room for a factory using hazardous chemicals according to one embodiment of the present invention. In the drawings, reference numeral 21 denotes a work space.

In the work space 21, industrial equipments 22 are arranged at predetermined intervals (in this example, one is described for convenience).
The production device 22 is provided with an exhaust duct 36 so that exhaust can be performed by an exhaust fan 37 installed outside. The exhaust duct 36 is provided with a damper 46.

Above the work space 21, a filter ceiling 23 is provided,
A ceiling-side space 24 separated from the work space 21 is formed.
The space 24 on the ceiling side is separated by a partition plate 25 at intervals according to the arrangement space of the production equipments 22 or at fixed module intervals, thereby forming a ceiling space 26 separately.

Each of these ceiling spaces 26 has a circulating air duct 28
Is attached through an inlet 27. Each circulation air duct 28 is provided with a circulation fan 29.

Below the work space 21, there is provided a floor 30 having a number of ventilation holes 31 formed therein, and a space 32 below the floor separated from the work space 21.
Is formed. The space 32 below the floor is used for each production equipment 22.
The underfloor space 33 is separately formed by partitioning the partition plate 34 at an interval according to the arrangement space of the above or at a constant module interval.

Each of these underfloor spaces 33 has a separate circulating air duct 28.
Is attached through an inlet 35. Therefore, each underfloor space 33 is connected to each ceiling space via each circulating air duct 28.
The circulating air is supplied to each ceiling space 26 by a circulation fan 29.

In each underfloor space 33, an outside air introduction duct 39 is separately mounted via an inflow port. This outside air introduction duct 39 controls the temperature and humidity on the way,
An adjuster 40 such as a filter for filtering outside air and a damper 41 are provided. This outside air introduction duct 39 is normally
Introducing outside air suitable for the operation of the clean room to maintain room pressure.

In each underfloor space 33, an exhaust duct 43 is separately attached via an inflow port. This exhaust duct 43
Is equipped with an emergency exhaust fan 44 and
Is forced to exhaust air from the underfloor space 33 when an accident occurs. Therefore, the damper 45 provided in the exhaust duct 43 is normally closed by a command from a controller or the like,
It is designed to be opened in the event of an accident.

 Next, the operation of the present embodiment thus configured will be described.

The supply / exhaust method of the clean room for use with the hazardous chemicals factory according to the present embodiment is such that, in a normal state, the outside air amount adjustment damper 41 provided in the outside air introduction duct 39 is squeezed to introduce outside air suitable for the operation of the clean room. I have.

Then, when the production equipment 22 causes an accident and gas leaks, emergency exhaust is performed as follows.

First, a case where a toxic or combustible gas leaks from the production equipment 22 will be described with reference to FIG.

The circulation fan 29 communicating with the ceiling space 26 directly above the production equipment 22 is stopped, the supply of circulating air from the ceiling space 26 is stopped, and the outside air amount adjustment damper 41 provided in the outside air introduction duct 39 is provided. Is closed, the supply of outside air to the underfloor space 33 below the production equipment 22 is stopped, the exhaust damper 45 located below the production equipment 22 is opened, the exhaust duct 37 is driven, and the exhaust duct 43 Is opened, and the emergency exhaust fan 44 is driven. At the same time, the outside air amount adjustment dampers 41 of the outside air introduction ducts 39 connected to the underfloor space 33 of the adjacent block of the production equipment 22 are opened, and this outside air is passed through each circulation air duct.
As shown by arrows, the outside air supply to the surroundings of the production equipment 22 is increased to positively pressurize the area around the accident area, and toxic gas or flammable gas is supplied to the ceiling space 26 through the area 28. From the underfloor space 33, and the air is exhausted from the underfloor space 33 to the outside via an exhaust duct 43.

In this case, the outside air is supplied by opening the outside air amount adjustment damper 41 of the outside air introduction duct 39 at a full opening or an opening close to the opening so that the operation of the other production equipment 22 is not reduced. I do.

In this way, the leakage area in which the production equipment 22 in which the accident occurred is installed is supplied with a large amount of outside air from the surrounding ceiling space 26 to pressurize the surrounding area, and the diffusion of gas is positively performed. Prevents and actively vents gas under the floor
While being pushed out to 33, it can be discharged to the outside through the exhaust duct 43.

Next, a case where asphyxiating gas such as nitrogen gas has leaked from the production equipment 22 will be described with reference to FIG.

Fully open the outside air amount adjustment damper 41 provided in the outside air introduction duct 39 communicating with the underfloor space 33 directly below the production equipment 22 to increase the supply of outside air to the underfloor space 33 directly below the production equipment 22, Open the exhaust damper 45 located directly below 22 and
By driving the exhaust duct 37, and opening the damper 45 of the exhaust duct 43 and driving the emergency exhaust fan 44, the asphyxiating gas is pushed out of the accident area into the underfloor space 33, and from the underfloor space 33 The air is exhausted to the outside via the exhaust duct 43.

In this case, the outside air is supplied by opening the outside air amount adjustment damper 41 of the outside air introduction duct 39 at a full opening or an opening close to the opening so that the operation of the other production equipment 22 is not reduced. I do.

As described above, the leakage area in which the production equipment 22 in which the accident has occurred is installed can actively push out the asphyxiating gas to the underfloor space 33 and discharge it to the outside via the exhaust duct 43.

In the above embodiment, the case where the filter ceiling 23 is used has been described, but a ceiling provided with an air outlet may be provided instead of the filter ceiling 23. In this case, each ceiling space
An outlet will be installed every 26.

When the amount of gas leakage is small, the emergency exhaust fan 44
Instead, the exhaust duct 36 communicating with the production equipment 22 may be used, and the exhaust fan 37 may be used to exhaust air. Conversely, when the supply amount of outside air is insufficient, a booster fan may be provided in the outside air introduction duct 39 to increase the wind power.

Furthermore, although the case where the outside air introduction duct 39 is communicated with the underfloor space 33 has been described, it may be provided in each ceiling space 26.

Furthermore, in the above embodiment, the case where the ceiling space 26 and the underfloor space 33 are separately connected via the circulating air duct 28 has been described, but without using the circulating air duct 28, each ceiling space 26 The underfloor space 33 may be connected using a space such as a corridor or a maintenance zone.

〔The invention's effect〕

As described above, according to the method for supplying / exhausting a clean room for a factory using hazardous chemicals according to the first aspect of the present invention, when toxic gas or flammable gas leaks from production equipment, air circulation connected to the corresponding ceiling. While stopping the circulation fan provided in the path, stopping the outside air amount adjustment damper provided in the outside air introduction path, stopping the air supply from the ceiling space, and connecting the outside air amount adjustment damper to the surrounding ceiling. The leak area is in a negative pressure state, and the surrounding air is positively discharged through the exhaust damper below the floor of the leak area and diffused to the surrounding area due to the surrounding outside air blowing out. do not do. As a result, there is no problem that the cleanness is not reduced and other production equipment is stopped.

Further, according to the method for supplying and exhausting clean rooms for factories using hazardous chemicals according to the second aspect of the present invention, when asphyxiating gas leaks from production equipment, the outside air connected to the corresponding ceiling space and the surrounding ceiling. Since the amount of outside air is increased by opening the damper for adjusting the amount of air, the asphyxiating gas is smoothly discharged through the exhaust damper under the floor, and does not diffuse to the surroundings. As a result, there is no problem that the cleanness is not reduced and other production equipment is stopped.

[Brief description of the drawings]

FIG. 1 is an enlarged sectional view of a main part showing a clean room for a factory using dangerous chemicals or the like according to an embodiment of the present invention from the front side. FIG. 2 is an enlarged sectional view of a main part showing a clean room for factories using dangerous chemicals or the like according to an embodiment of the present invention from the side. FIG. 3 is an explanatory diagram viewed from the front side showing a state in which the air supply / exhaust method for a clean room for factories using hazardous chemicals according to the embodiment of the present invention is operated at the time of leakage of toxic or flammable gas. FIG. 4 is an explanatory diagram viewed from the front side showing a state in which the air supply / exhaust method of the clean room for a factory using hazardous chemicals according to the embodiment of the present invention is operating when the asphyxiating gas leaks. FIG. 5 is an explanatory view seen from a front view showing a conventional air supply / exhaust method in a factory using hazardous chemicals. [Description of Signs of Main Parts] 21… Work space 22… Production equipment 23… Filter ceiling 25… Partition plate 26… Ceiling space 28… Circulation air duct 29… Circulation fan 30… Floor 33 ... Underfloor space 36, 43 ... Exhaust duct 37 ... Exhaust fan 39 ... External air introduction duct 40 ... Adjuster 41 ... External air volume adjustment fan 44 ... Emergency exhaust fan 46 ... …damper.

 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Yasuhiro Shiratori 8-21-1, Ginza, Chuo-ku, Tokyo Inside Takenaka Corporation Tokyo Main Store (56) References JP-A-63-46327 (JP, A) JP-A-61-91434 (JP, A) JP-A-60-218547 (JP, A) JP-A-61-111518 (JP, U)

Claims (2)

(57) [Claims] An upper part of the working space is a filter ceiling or a ceiling with an outlet, so that air can be blown out of the ceiling into the working space, and a space for accommodating the blown air under the floor of the working space is formed. In a clean room equipped with a circulation fan so that the air stored under the floor can be returned to the ceiling and circulated again, the inside of the ceiling and the inside of the floor can be partitioned corresponding to each work space unit or module of a certain size. A plurality of ceiling spaces and under-floor spaces are formed, and the corresponding ceiling spaces and under-floor spaces are individually communicated with each other through air flow passages provided with circulation fans, so that outside air can be introduced into each ceiling space. In each of the ceiling space or underfloor space communicates an outside air introduction path, and in this outside air introduction path, an outside air introduction amount adjustment damper is provided,
Under normal conditions, each external air volume adjustment damper is squeezed to supply an external air volume sufficient for the operation of the clean room, and an air flow passage communicating with the corresponding ceiling space when toxic or flammable gas leaks from production equipment. The air circulation adjustment damper provided in the outside air introduction duct is stopped, the air supply from the ceiling space is stopped, and the outside air adjustment damper connected to the surrounding ceiling is stopped. Opening and exhausting the outside air from the surrounding area, and opening an exhaust damper below the floor in the leakage area to exhaust toxic gas or flammable gas. . 2. A filter ceiling or a ceiling with an outlet is provided above the work space so that air can be blown out from the ceiling into the work space, and a space for accommodating the blown air under the floor of the work space is formed. In a clean room equipped with a circulation fan so that the air stored under the floor can be returned to the ceiling and circulated again, the inside of the ceiling and the inside of the floor can be partitioned corresponding to each work space unit or module of a certain size. A plurality of ceiling spaces and under-floor spaces are formed, and the corresponding ceiling spaces and under-floor spaces are individually communicated with each other through air flow passages provided with circulation fans, so that outside air can be introduced into each ceiling space. In each of the ceiling space or underfloor space communicates an outside air introduction path, and in this outside air introduction path, an outside air introduction amount adjustment damper is provided,
Under normal conditions, squeeze each external air volume adjustment damper to supply an external air volume that is commensurate with the operation of the clean room, and when asphyxiating gas leaks from production equipment, air that communicates with the corresponding ceiling space and the surrounding ceiling space A method of supplying and exhausting a clean room for a factory using hazardous chemicals, characterized by opening a damper for adjusting the amount of outside air in a flow passage to increase the amount of outside air supplied, and opening and exhausting an exhaust damper below the floor in a leakage area.