JP2570307B2 - Optical fiber connector - Google Patents

Optical fiber connector

Info

Publication number
JP2570307B2
JP2570307B2 JP62180542A JP18054287A JP2570307B2 JP 2570307 B2 JP2570307 B2 JP 2570307B2 JP 62180542 A JP62180542 A JP 62180542A JP 18054287 A JP18054287 A JP 18054287A JP 2570307 B2 JP2570307 B2 JP 2570307B2
Authority
JP
Japan
Prior art keywords
optical fiber
optical
optical waveguide
holder
fiber connector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62180542A
Other languages
Japanese (ja)
Other versions
JPS6423209A (en
Inventor
實 清野
直之 女鹿田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62180542A priority Critical patent/JP2570307B2/en
Priority to CA000561753A priority patent/CA1309240C/en
Priority to US07/170,320 priority patent/US4948219A/en
Priority to DE8888302387T priority patent/DE3877597T2/en
Priority to EP88302387A priority patent/EP0283301B1/en
Publication of JPS6423209A publication Critical patent/JPS6423209A/en
Application granted granted Critical
Publication of JP2570307B2 publication Critical patent/JP2570307B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4212Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element being a coupling medium interposed therebetween, e.g. epoxy resin, refractive index matching material, index grease, matching liquid or gel
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/30Optical coupling means for use between fibre and thin-film device
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/36Mechanical coupling means
    • G02B6/38Mechanical coupling means having fibre to fibre mating means
    • G02B6/3801Permanent connections, i.e. wherein fibres are kept aligned by mechanical means
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/36Mechanical coupling means
    • G02B6/3628Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/36Mechanical coupling means
    • G02B6/3628Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3692Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier with surface micromachining involving etching, e.g. wet or dry etching steps
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4207Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms with optical elements reducing the sensitivity to optical feedback

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Coupling Of Light Guides (AREA)
  • Optical Couplings Of Light Guides (AREA)

Description

【発明の詳細な説明】 〔概 要〕 光導波路との接続点における伝送特性の向上と接続工
数の削減を図った光ファイバ接続子に関し、 接続損失の低減と光導波路との接続作業の容易化を目的
とし、 少なくとも1個の光ファイバをホルダでアレー状に固
定し、該光ファイバの直角断面方向で上記ホルダを該光
ファイバと共に断面が鏡面状になる如く切断した後、上
記ホルダ断面を選択的にエッチング除去して該光ファイ
バを上記ホルダ断面より突出させ、別に設けてあるガイ
ドの光導波路と位置合わせして接合するように構成す
る。
DETAILED DESCRIPTION OF THE INVENTION [Overview] An optical fiber connector with improved transmission characteristics and reduced connection man-hours at a connection point with an optical waveguide, which reduces connection loss and facilitates connection work with the optical waveguide. At least one optical fiber is fixed in an array with a holder, and the holder is cut along with the optical fiber so as to have a mirror-like cross section in a direction perpendicular to the optical fiber. The optical fiber is made to protrude from the holder cross-section by being etched away, and is positioned and joined to an optical waveguide of a separately provided guide.

〔産業上の利用分野〕[Industrial applications]

本発明は、光通信装置における光導波路と接続する光
ファイバに係り、特に光導波路との接続点における伝送
特性の向上と接続工数の削減を図った光ファイバ接続子
に関する。
The present invention relates to an optical fiber connected to an optical waveguide in an optical communication device, and more particularly to an optical fiber connector for improving transmission characteristics and reducing connection man-hours at a connection point with the optical waveguide.

すなわち光通信における伝送路には、通常高純度の透
明石英よりなる直径が約10μmのコア(芯)の周囲を、
外径が約125μmのコアよりも屈折率の小さいガラスか
らなるクラッド(鞘)で被覆した光ファイバを使用し、
該光ファイバを送受信回路上の光導波路デバイスと接続
して通信系を構成している。
In other words, a transmission line in optical communication usually includes a core made of high-purity transparent quartz and having a diameter of about 10 μm,
Using an optical fiber covered with a cladding (sheath) made of glass with a smaller refractive index than the core with an outer diameter of about 125 μm,
The optical fiber is connected to an optical waveguide device on a transmission / reception circuit to form a communication system.

然し、光ファイバと接続する上記デバイス上の光導波
路径は通常光ファイバのコア径と同程度であり、光ファ
イバと光導波路間の接続点における接続面の僅かな傾き
や位置合わせズレが伝送損失を発生させ、伝送特性の低
下を招いている。
However, the diameter of the optical waveguide on the device connected to the optical fiber is usually about the same as the core diameter of the optical fiber, and slight inclination and misalignment of the connection surface at the connection point between the optical fiber and the optical waveguide cause transmission loss. , Causing a decrease in transmission characteristics.

この場合特に情報量が多くなると必要とする光ファイ
バの個数が増加し、最近では光ファイバをアレイ化して
光導波路デバイスと接続する方法が多く用いられてい
る。
In this case, especially when the amount of information increases, the number of optical fibers required increases, and recently, a method of connecting optical fibers to an optical waveguide device by arraying the optical fibers is often used.

従って本発明は、光ファイバを光導波路と接続する際
に、伝送損失なくまた容易に接続できる光ファイバ接続
子の構造に関するものである。
Accordingly, the present invention relates to a structure of an optical fiber connector that can easily and easily connect an optical fiber to an optical waveguide without transmission loss.

〔従来の技術〕[Conventional technology]

光ファイバを固定するホルダとしては、従来から精度
の良いアレイ化が可能なシリコン(Si)基板が使用され
ている。
As a holder for fixing an optical fiber, a silicon (Si) substrate that can be arrayed with high accuracy has been used.

すなわち一般にSi単結晶は、加熱アルカリのエッチン
グ液を用いてエッチングするとその結晶方位によってエ
ッチング速度が異なるため異方性エッチングとなる。例
えば結晶面方位が(100)、(110)の方向は速くエッチ
ングされるが、結晶面方位が(111)の方向はエッチン
グ速度が極めて遅いため上記エッチング液でエッチング
すると(111)面が残り、表面上に結晶方位に沿った凹
凸ができる。
That is, in general, when an Si single crystal is etched using a heating alkali etchant, the etching rate varies depending on the crystal orientation, so that anisotropic etching is performed. For example, when the crystal plane orientation is (100) or (110), the etching speed is very fast. However, when the crystal plane orientation is (111), the etching rate is extremely low. Irregularities are formed along the crystal orientation on the surface.

従って、特定の結晶面方位を持つSi単結晶ウェハにマ
スクパターニングによって酸化膜を形成し、V溝形成位
置を窓開けした後に上記エッチング液に浸漬してV字型
に異方性エッチングさせ、Si単結晶ウェハ上に複数個の
精密にして微細な平行V溝を備えたシリコン基板を形成
することができる。
Therefore, an oxide film is formed by mask patterning on a Si single crystal wafer having a specific crystal plane orientation, a V-groove forming position is opened in a window, and then immersed in the above-mentioned etching solution to perform V-shaped anisotropic etching. A silicon substrate having a plurality of fine and parallel V-grooves can be formed on a single crystal wafer.

第4図は従来の光ファイバ接続子の断面構造図であ
り、第5図は従来の光ファイバ接続子の形成工程図、第
6図は従来の光ファイバ接続子として光導波路との接続
概念図を示す。
FIG. 4 is a cross-sectional structural view of a conventional optical fiber connector, FIG. 5 is a view showing a forming process of the conventional optical fiber connector, and FIG. 6 is a conceptual view of connection with an optical waveguide as a conventional optical fiber connector. Is shown.

第4図で、2個のシリコン基板1a,1bのV溝を合わせ
るように対向させたときに形成される角孔に、コア3と
クラッド4で構成した光ファイバ2を挿入した状態でエ
ポキシ系接着剤5で固着一体化し、更に光ファイバの直
角断面方向で切断して端面(図示矢印a面)を平面研磨
して形成しているものであって、上記研磨面には光ファ
イバ2の端面が露出した状態になっている。
In FIG. 4, an epoxy-based optical fiber 2 composed of a core 3 and a clad 4 is inserted into a square hole formed when the two silicon substrates 1a and 1b face each other so that the V grooves are aligned. The optical fiber 2 is fixed and integrated with an adhesive 5 and further cut in a direction perpendicular to the cross section of the optical fiber to form an end surface (the surface indicated by the arrow a) by plane polishing. Is exposed.

第5図で(A)は、複数個の微細な平行V溝を備えた
Si単結晶よりなるシリコン基板1aを示している。
In FIG. 5, (A) is provided with a plurality of fine parallel V-grooves.
1 shows a silicon substrate 1a made of a Si single crystal.

ここで上記シリコン基板1aの複数個のV溝に光ファイ
バ2をそれぞれ整列載置し隙間を埋めるかたちでエポキ
シ系接着剤5を塗布する。この状態が(B)である。
Here, the epoxy fibers 5 are applied in such a manner that the optical fibers 2 are aligned and mounted in the plurality of V-grooves of the silicon substrate 1a and fill the gaps. This state is (B).

ここで上記1aと同じシリコン基板1bを対向させるかた
ちでV溝を合わせて光ファイバ2を挟着固定した図が
(C)である。尚、この時点では複数個の光ファイバの
先端端面は特に整列されている必要はない。
Here, (C) is a diagram in which the V-groove is aligned and the optical fiber 2 is sandwiched and fixed in such a manner that the same silicon substrate 1b as that of the above 1a is opposed. At this point, the end faces of the plurality of optical fibers do not need to be particularly aligned.

更に、予め設定した位置で、光ファイバ2即ちシリコ
ン基板1a及び1bのV溝の直角断面(図示矢指b〜b′
面)方向に切断し切断面を平面研磨して、(D)に示す
光ファイバ接続子を完成している。
Further, at a preset position, a right-angle cross section of the V-groove of the optical fiber 2, that is, the silicon substrates 1a and 1b (arrows b to b 'shown in the figure).
(D) direction and the cut surface is polished flat to complete the optical fiber connector shown in (D).

この場合の研磨面は、複数個の光ファイバ2の断面及
びシリコン基板1a及び1bのSi結晶面が同一平面をなして
露出している。
In this case, the polished surface is exposed such that the cross sections of the plurality of optical fibers 2 and the Si crystal planes of the silicon substrates 1a and 1b are on the same plane.

第6図は、従来の光ファイバ接続子を、光導波路11を
備えたガイド10に接合させ、光ファイバ2のコア3と上
記光導波路11の位置を合致させた後に、接続面周囲をUV
硬化性エポキシ系接着剤12で固着一体化した状態を示し
た図である。
FIG. 6 shows that a conventional optical fiber connector is bonded to a guide 10 having an optical waveguide 11 so that the core 3 of the optical fiber 2 and the optical waveguide 11 are aligned with each other.
FIG. 2 is a view showing a state where the adhesive is fixed and integrated with a curable epoxy adhesive 12.

ここで光ファイバ接続子との接続面となる光導波路11
を備えたガイド10の端面は、通常光導波路の直角断面方
向で平面研磨して光導波路11を露出させている。
Here, the optical waveguide 11 serving as a connection surface with the optical fiber connector is provided.
The end face of the guide 10 provided with a surface is usually polished in a direction perpendicular to the optical waveguide to expose the optical waveguide 11.

従って光ファイバ接続子をガイド10と接合させ且つ光
導波路11と光ファイバ2のコア3の位置を合致させるこ
とにより、光通信伝送路の接続が完成する。
Therefore, the connection of the optical communication transmission line is completed by joining the optical fiber connector to the guide 10 and matching the position of the optical waveguide 11 with the core 3 of the optical fiber 2.

〔発明が解決しようとする問題点〕[Problems to be solved by the invention]

光ファイバ接続子との接続部分となる光導波路接続面
は通常ガイドと共に平面研磨した状態にあり、研磨面に
露出している光導波路径は光ファイバ・コア径と同程度
である。
The optical waveguide connecting surface to be connected to the optical fiber connector is usually polished with a guide in a plane, and the diameter of the optical waveguide exposed on the polished surface is substantially the same as the diameter of the optical fiber core.

また光導波路に接続する光ファイバコアの接続面は、
光ファイバ接続子としてSi結晶面と共に平面研磨されて
おり、研磨面に露出しているコア径は前述の如く10μm
程度である。
The connection surface of the optical fiber core connected to the optical waveguide is
The optical fiber connector is planar polished together with the Si crystal surface, and the core diameter exposed on the polished surface is 10 μm as described above.
It is about.

一方光ファイバ接続子としての接続面の大きさは、例
えば光ファイバ4個の場合で5×2〜3mm程度が考えら
れている。
On the other hand, the size of the connection surface as an optical fiber connector is considered to be, for example, about 5 × 2 to 3 mm for four optical fibers.

従ってμm単位の光ファイバと光導波路を接続する場
合に、光ファイバ接続子研磨面または光導波路研磨面に
傾きがあるか若しくは傾いて接合される場合には、上記
研磨面の周辺部即ち光信号の伝送に直接関与しないシリ
コン基板の周辺部で片当たりするため、光ファイバのコ
アと光導波路間に微小の隙間が生じて接続損失が増加す
ることになる。例えば1度の傾きでも導波路と光ファイ
バコアは数10μm離れることになってこの隙間で接続損
失が発生する。
Therefore, when connecting an optical fiber in units of μm and an optical waveguide, if the optical fiber connector polished surface or the optical waveguide polished surface is inclined or bonded with an inclination, the peripheral portion of the polished surface, that is, an optical signal In this case, there is a small gap between the core of the optical fiber and the optical waveguide, which increases the connection loss. For example, even if the inclination is one degree, the waveguide and the optical fiber core are separated by several tens of μm, and a connection loss occurs in this gap.

更に位置ズレについては、上記のコア径と光導波路径
の場合では、0.5μm以下に光導波路と光ファイバの芯
ズレを抑えないと接続損失が急激に増加する。
Further, regarding the positional deviation, in the case of the core diameter and the optical waveguide diameter described above, if the core deviation between the optical waveguide and the optical fiber is not suppressed to 0.5 μm or less, the connection loss sharply increases.

従って従来、光ファイバ接続子と光導波路を接続する
場合は、光ファイバ接続子の研磨面と光導波路の研磨面
を接合させ且つ位置合わせを行うのに、微動ダイアル等
の機械的手段を用いて工数を掛けて調整しながら両者を
接着固定し、通信系としての伝送路を構成している。
Therefore, conventionally, when connecting the optical fiber connector and the optical waveguide, in order to join and polish the polished surface of the optical fiber connector and the polished surface of the optical waveguide, using a mechanical means such as a fine movement dial. The two are bonded and fixed while being adjusted by man-hours to form a transmission line as a communication system.

然し、この接続作業が価格低廉化を阻害する大きな要
因となっていると共に、完全に伝送損失を無くすことが
できず問題となっている。
However, this connection work is a major factor that hinders cost reduction, and there is a problem that transmission loss cannot be completely eliminated.

〔問題点を解決するための手段〕[Means for solving the problem]

上記問題点は、複数の光ファイバをホルダに固定し、
前記ホルダを該複数の光ファイバとともに切断し、前記
切断した複数の光ファイバの端面が前記ホルダより突出
するように上記ホルダの端部を選択的にエッチング除去
することにより接合面を形成し、該複数の光ファイバ
と、該複数の光ファイバに対応して光導波路基板上に形
成された複数の光導波路とを位置合わせして、該位置合
わせされた光導波路の端面が露出する光導波路基板の端
面と該ホルダの接合面とを接合固定することを特徴とす
る光ファイバと光導波路の接続方法により解決される。
同様に、上記問題点は、複数の光ファイバと、前記複数
の光ファイバを保持するホルダと、前記複数の光ファイ
バに対応する複数の光導波路が形成された光導波路基板
とを有し、前記ホルダは、前記複数の光ファイバの端面
が同一平面上に配置され、且つ、該ホルダの端面より突
出するように保持してなり、さらに、該ホルダの端面と
該光導波路基板の端面とを接合固定したことを特徴とす
る光ファイバと光導波路の接続構造によって解決され
る。
The above problem is that a plurality of optical fibers are fixed to the holder,
Cutting the holder together with the plurality of optical fibers, forming a joint surface by selectively etching and removing the end of the holder so that end surfaces of the cut plurality of optical fibers protrude from the holder, A plurality of optical fibers and a plurality of optical waveguides formed on the optical waveguide substrate corresponding to the plurality of optical fibers are aligned, and an end surface of the aligned optical waveguide is exposed. The problem is solved by a method for connecting an optical fiber and an optical waveguide, wherein an end face and a bonding surface of the holder are bonded and fixed.
Similarly, the above problems include a plurality of optical fibers, a holder for holding the plurality of optical fibers, and an optical waveguide substrate on which a plurality of optical waveguides corresponding to the plurality of optical fibers are formed, The holder is held so that end faces of the plurality of optical fibers are arranged on the same plane and protrudes from the end face of the holder, and further joins the end face of the holder and the end face of the optical waveguide substrate. The problem is solved by the connection structure between the optical fiber and the optical waveguide, which is characterized by being fixed.

〔作 用〕(Operation)

本発明では、従来の光ファイバ接続子研磨面と光導波
路接続面の研磨面相互の接続に代えて、突出した光ファ
イバの研磨された先端接続面のみを光導波路の研磨面に
接合して接続するものである。
In the present invention, instead of the conventional connection between the polished surface of the optical fiber connector and the polished surface of the optical waveguide connection surface, only the polished tip connection surface of the protruding optical fiber is joined to the polished surface of the optical waveguide and connected. Is what you do.

このことは、研磨面相互の接触面積が大幅に減少する
と共に、研磨面の傾きによって生ずるシリコン基板等フ
ァイバ固定部の片当たり現象がなくなるため、光導波路
と光ファイバコアに隙間を生ずることがなく、また隙間
が生じた場合あるいは導波路と光ファイバコアに位置ズ
レが認められた場合でも、光ファイバのみが突出してい
るために光ファイバサイド方向からの顕微鏡等による肉
視観察が可能となり調整及び修正が極めて容易である。
This significantly reduces the contact area between the polished surfaces and eliminates the one-sided phenomenon of the fiber fixing portion such as the silicon substrate caused by the inclination of the polished surface, so that there is no gap between the optical waveguide and the optical fiber core. In addition, even when a gap occurs or when a misalignment is observed between the waveguide and the optical fiber core, since only the optical fiber protrudes, macroscopic observation with a microscope or the like from the side of the optical fiber becomes possible. Modification is extremely easy.

更に光ファイバのホルダをエッチングしてファイバを
突出させる手法を用いるために、エッチング時間の調整
等によりファイバの微小な突出量を再現性良く制御する
ことが可能となり、特に光導波路と固定した後の温度特
性を安定化させることができる。
Furthermore, since the method of projecting the fiber by etching the holder of the optical fiber is used, it is possible to control the amount of minute projection of the fiber with good reproducibility by adjusting the etching time, etc., particularly after fixing the optical fiber to the optical waveguide. Temperature characteristics can be stabilized.

従って、光導波路に光ファイバ接続子を接続するに際
して、伝送損失の発生しないまた特性的にも安定した接
続が工数を掛けずに実施できる。
Therefore, when the optical fiber connector is connected to the optical waveguide, a connection that does not cause transmission loss and is stable in characteristics can be performed without increasing the number of steps.

〔実施例〕〔Example〕

以下添付図により順を追って説明する。 The description will be made in order with reference to the accompanying drawings.

第1図は本発明になる光ファイバ接続子外観図であ
り、第2図は、本発明になる光ファイバ接続子の断面構
造図と斜視図を、また第3図は、本発明になる光ファイ
バ接続子と光導波路との接続概念図を表したものであ
る。
FIG. 1 is an external view of an optical fiber connector according to the present invention, FIG. 2 is a sectional structural view and a perspective view of the optical fiber connector according to the present invention, and FIG. FIG. 2 is a conceptual diagram illustrating a connection between a fiber connector and an optical waveguide.

第1図で、本発明になる光ファイバ接続子が完成した
状態では、光ファイバ2はホルダ13を貫通した状態で固
定されている。この場合光ファイバ2の先端端面(図示
矢指c面)は鏡面状の切断面であり、一方光導波路11の
端面は研磨面が露出しているため両者を位置合わせして
接合することにより、接続損失の少ない接続ができる。
In FIG. 1, when the optical fiber connector according to the present invention is completed, the optical fiber 2 is fixed while penetrating the holder 13. In this case, the end surface of the optical fiber 2 (the arrow c surface in the figure) is a mirror-shaped cut surface, while the end surface of the optical waveguide 11 has a polished surface exposed so that the two are aligned and joined to each other. Connection with low loss can be made.

以下本発明の具体的実施例について説明する。 Hereinafter, specific examples of the present invention will be described.

第2図(A)で、第4図記載の従来の光ファイバ接続
子の研磨面(図示矢指a面)を、予め設定した条件でピ
ロカテコール等のSi結晶のみをエッチングするエッチン
グ液に浸漬し、10〜数100μmの厚さにSi結晶面のみを
エッチング除去する。
In FIG. 2A, the polished surface (arrow a surface shown) of the conventional optical fiber connector shown in FIG. 4 is immersed in an etching solution for etching only Si crystals such as pyrocatechol under preset conditions. Then, only the Si crystal plane is removed by etching to a thickness of 10 to several hundreds μm.

従ってこの工程を追加することによって本発明になる
光ファイバ2のみが突出した光フアイバ接続子を形成す
ることができる。
Therefore, by adding this step, an optical fiber connector in which only the optical fiber 2 according to the present invention protrudes can be formed.

尚、エッチング除去する厚さは、光ファイバ2を光導
波路11と接続一体化する際に使用するUV硬化性エポキシ
系接着剤12の熱膨張係数と、それより小さい光ファイバ
2の熱膨張係数の差によって発生する高温使用時の接続
固定部分における剥離現象を防止するため、10〜数100
μmの範囲に規定している。
The thickness to be removed by etching is determined by the coefficient of thermal expansion of the UV-curable epoxy adhesive 12 used for connecting and integrating the optical fiber 2 with the optical waveguide 11 and the smaller coefficient of thermal expansion of the optical fiber 2. In order to prevent the peeling phenomenon at the connection fixing part during high temperature use caused by the difference, 10 to several hundreds
It is specified in the range of μm.

また上記のピロカテコール等のSi結晶面のみをエッチ
ングするエッチング液では、シリコン基板1a,1bの表面
を安定させるためのSiO2膜やエポキシ系接着剤5は除去
されないが、SiO2膜はその厚さが極めて薄いためにSi結
晶面をエッチング除去する際に脱落し、またエポキシ系
接着剤5はその量が少ないことと光導波路との接続固定
時に使用する接着剤が同系のエポキシ樹脂であるため残
留によって特に支障を来さない。
Further, the above-mentioned etchant for etching only the Si crystal plane such as pyrocatechol does not remove the SiO 2 film or the epoxy-based adhesive 5 for stabilizing the surfaces of the silicon substrates 1a and 1b, but the SiO 2 film has a large thickness. Is very thin, so that it drops off when the Si crystal surface is removed by etching, and the amount of the epoxy-based adhesive 5 is small and the adhesive used for connection and fixation with the optical waveguide is the same type of epoxy resin. There is no particular hindrance due to the residue.

第2図(B)は、光ファイバが4個の場合の斜視図で
あり、光導波路との接続面となる複数個の光ファイバ2
先端端面(図示矢指d面)は、Si結晶面がエッチング除
去される前の平面研磨されたままの状態を維持している
ため、同一平面上に位置した研磨面を保持している。
FIG. 2 (B) is a perspective view in the case where there are four optical fibers, and a plurality of optical fibers 2 serving as connection surfaces with an optical waveguide.
The tip end surface (arrow d surface in the figure) maintains a polished surface located on the same plane because the surface is maintained as polished before the Si crystal surface is removed by etching.

第3図は、本発明になる光ファイバ接続子を光導波路
11を備えたガイド10と密着接合し、光ファイバ2が突出
したことによって生じた空間部で、UV硬化性エポキシ系
接着剤12を用いて両者を固着一体化した状態を示してい
る。
FIG. 3 shows an optical fiber connector according to the present invention;
This figure shows a state in which the optical fiber 2 is tightly bonded to the guide 10 provided with the optical fiber 2, and the two are fixed and integrated using a UV-curable epoxy-based adhesive 12 in a space created by projecting the optical fiber 2.

図で、接合する部分が光信号を伝送する光導波路11と
光ファイバ2に限定されており、また光ファイバが突出
している分だけ空間があるのでUV硬化性エポキシ系接着
剤12で両者を固着するまえには、接続面は光ファイバの
サイド方向から顕微鏡等による肉視観察が可能である。
In the figure, the joining portion is limited to the optical waveguide 11 for transmitting an optical signal and the optical fiber 2, and since there is a space as much as the optical fiber protrudes, the two are fixed with a UV-curable epoxy adhesive 12. Before that, the connection surface can be visually observed with a microscope or the like from the side direction of the optical fiber.

〔発明の効果〕〔The invention's effect〕

上述の如く本発明により、光通信装置における伝送路
の接続において、伝送特性を落とすことなく、容易に且
つ確実に光導波路と接続できる光ファイバ接続子を提供
することができる。
As described above, according to the present invention, it is possible to provide an optical fiber connector that can easily and reliably connect to an optical waveguide without deteriorating transmission characteristics in connection of a transmission line in an optical communication device.

尚、本発明の説明では、精度の良いアレイ化が可能で
且つ光ファイバとの選択エッチングができるシリコン基
板にもとずいているが、シリコン基板と同等精度のアレ
イ化と光ファイバとの選択エッチングが行える物質であ
れば、シリコンに限らず他の物質でもアレイ化後の切
断,選択エッチングによって同等の硬化を得ることがで
きる。
In the description of the present invention, a silicon substrate capable of forming an array with high accuracy and capable of selective etching with an optical fiber is based on the silicon substrate. As long as the material can perform the above, the same hardening can be obtained by cutting and selective etching after arraying not only silicon but also other materials.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明になる光ファイバ接続子外観図、 第2図は、本発明になる光ファイバ接続子例の断面構造
図と斜視図、 第3図は、本発明になる光ファイバ接続子例と光導波路
との接続概念図、 第4図は、従来の光ファイバ接続子の断面構造図、 第5図は、従来の光ファイバ接続子の形成工程図、 第6図は、従来の光ファイバ接続子と光導波路との接続
概念図、 である。図において、 1aはシリコン基板、1bはシリコン基板、 2は光ファイバ、3はコア、 4はクラッド、5はエポキシ系接着剤、 10はガイド、11は光導波路、 12はUV硬化性エポキシ系接着剤、 をそれぞれ表す。
FIG. 1 is an external view of an optical fiber connector according to the present invention, FIG. 2 is a sectional structural view and a perspective view of an example of an optical fiber connector according to the present invention, and FIG. 3 is an optical fiber connector according to the present invention. FIG. 4 is a cross-sectional structural view of a conventional optical fiber connector, FIG. 5 is a process diagram of forming a conventional optical fiber connector, and FIG. 6 is a conventional optical fiber connector. FIG. 3 is a conceptual diagram of a connection between a fiber connector and an optical waveguide. In the figure, 1a is a silicon substrate, 1b is a silicon substrate, 2 is an optical fiber, 3 is a core, 4 is a clad, 5 is an epoxy adhesive, 10 is a guide, 11 is an optical waveguide, and 12 is a UV curable epoxy adhesive , Respectively.

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】複数の光ファイバをホルダに固定し、前記
ホルダを該複数の光ファイバとともに切断し、 前記切断した複数の光ファイバの端面が、前記ホルダよ
り突出するように上記ホルダの端部を選択的にエッチン
グ除去することにより接合面を形成し、 該複数の光ファイバと、該複数の光ファイバに対応して
光導波路基板上に形成された複数の光導波路とを位置合
わせして、 該位置合わせされた光導波路の端面が露出する光導波路
基板の端面と該ホルダの接合面とを接合固定することを
特徴とする光ファイバと光導波路の接続方法。
1. A plurality of optical fibers are fixed to a holder, and the holder is cut together with the plurality of optical fibers. An end portion of the holder so that end faces of the cut plurality of optical fibers protrude from the holder. Forming a bonding surface by selectively etching away, aligning the plurality of optical fibers and the plurality of optical waveguides formed on the optical waveguide substrate corresponding to the plurality of optical fibers, A method for connecting an optical fiber and an optical waveguide, wherein an end surface of the optical waveguide substrate where the aligned end surface of the optical waveguide is exposed and a bonding surface of the holder are bonded and fixed.
【請求項2】複数の光ファイバと、 前記複数の光ファイバを保持するホルダと、 前記複数の光ファイバに対応する複数の光導波路が形成
された光導波路基板とを有し、 前記ホルダは、前記複数の光ファイバの端面が同一平面
上に配置され、且つ、該ホルダの端面より突出するよう
に保持してなり、さらに、 該ホルダの端面と該光導波路基板の端面とを接合固定し
たことを特徴とする光ファイバと光導波路の接続構造。
2. An optical fiber comprising: a plurality of optical fibers; a holder for holding the plurality of optical fibers; and an optical waveguide substrate on which a plurality of optical waveguides corresponding to the plurality of optical fibers are formed. The end faces of the plurality of optical fibers are arranged on the same plane and are held so as to protrude from the end face of the holder, and the end face of the holder and the end face of the optical waveguide substrate are joined and fixed. A connection structure between an optical fiber and an optical waveguide.
JP62180542A 1987-03-20 1987-07-20 Optical fiber connector Expired - Lifetime JP2570307B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP62180542A JP2570307B2 (en) 1987-07-20 1987-07-20 Optical fiber connector
CA000561753A CA1309240C (en) 1987-03-20 1988-03-17 Method of connecting optical fibers
US07/170,320 US4948219A (en) 1987-03-20 1988-03-18 Method of connecting optical fibers and connection aids and fiber holders employed therewith, and optical waveguide modules employing same
DE8888302387T DE3877597T2 (en) 1987-03-20 1988-03-18 CONNECTION OF OPTICAL FIBERS.
EP88302387A EP0283301B1 (en) 1987-03-20 1988-03-18 Connecting optical fibers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62180542A JP2570307B2 (en) 1987-07-20 1987-07-20 Optical fiber connector

Publications (2)

Publication Number Publication Date
JPS6423209A JPS6423209A (en) 1989-01-25
JP2570307B2 true JP2570307B2 (en) 1997-01-08

Family

ID=16085094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62180542A Expired - Lifetime JP2570307B2 (en) 1987-03-20 1987-07-20 Optical fiber connector

Country Status (1)

Country Link
JP (1) JP2570307B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002196179A (en) 2000-10-17 2002-07-10 Ngk Insulators Ltd Fiber array, its manufacturing method, and optical device using the fiber array
JP5089075B2 (en) * 2006-04-20 2012-12-05 東京特殊電線株式会社 Wavelength conversion module

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61102604A (en) * 1984-10-25 1986-05-21 Nec Corp Optical connector
JPS61132910A (en) * 1984-12-01 1986-06-20 Nec Corp Optical connector
JPS61132911A (en) * 1984-12-03 1986-06-20 Nec Corp Optical connector plug
JPS61256310A (en) * 1985-05-10 1986-11-13 Matsushita Electric Ind Co Ltd Optical circuit device

Also Published As

Publication number Publication date
JPS6423209A (en) 1989-01-25

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