JP2569545B2 - Piezoelectric vibration motor - Google Patents

Piezoelectric vibration motor

Info

Publication number
JP2569545B2
JP2569545B2 JP62092440A JP9244087A JP2569545B2 JP 2569545 B2 JP2569545 B2 JP 2569545B2 JP 62092440 A JP62092440 A JP 62092440A JP 9244087 A JP9244087 A JP 9244087A JP 2569545 B2 JP2569545 B2 JP 2569545B2
Authority
JP
Japan
Prior art keywords
piezoelectric
plate
driving
driven
vibrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62092440A
Other languages
Japanese (ja)
Other versions
JPS63262069A (en
Inventor
稲垣  光夫
昭和 小島
文広 糸魚川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Soken Inc
Original Assignee
Nippon Soken Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Soken Inc filed Critical Nippon Soken Inc
Priority to JP62092440A priority Critical patent/JP2569545B2/en
Publication of JPS63262069A publication Critical patent/JPS63262069A/en
Application granted granted Critical
Publication of JP2569545B2 publication Critical patent/JP2569545B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163Motors with ring stator

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Description

【発明の詳細な説明】 [産業上の利用分野」 本発明はカメラのレンズ駆動装置、自動車の電装品等
広い分野で利用可能な圧電振動モータに関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a piezoelectric vibration motor that can be used in a wide range of fields such as a lens driving device for a camera and electric components of an automobile.

[従来の技術] 圧電素子による超音波振動を駆動力源とする圧電振動
モータは、従来の電磁力利用のモータに比し構造が簡単
で応答が速い等の長所を有するため、近年その実用化に
向けて研究開発が進められている(例えば特開昭60−20
0779号)。
[Prior art] A piezoelectric vibration motor that uses ultrasonic vibration generated by a piezoelectric element as a driving force source has advantages such as a simpler structure and faster response than a conventional motor using electromagnetic force. Research and development are under way (see, for example,
No. 0779).

従来の圧電振動モータの構造を第13図で示すと、1は
円環状の駆動板であり、その下面には圧電体2が一体的
に接合されるとともにハウジング5の底面に設けた支持
体4に支持されている。上記駆動板1の上面には従動板
3が配設され、バネ部材6により駆動板1に押圧密着し
ている。上記圧電体2に交流電圧を印加して進行波振動
を生ぜしめると上記駆動体1の上部表面は楕円運動を行
ない、この周方向成分を受けて駆動板1に密着する上記
従動板3が回転運動を行なう。かくして上記従動板3の
中央部に固定した回転出力軸7により回転力をモータ外
部に取り出すことができる。
FIG. 13 shows the structure of a conventional piezoelectric vibration motor. Reference numeral 1 denotes an annular driving plate, on the lower surface of which a piezoelectric body 2 is integrally joined and a support 4 provided on the bottom surface of a housing 5. It is supported by. A driven plate 3 is provided on the upper surface of the driving plate 1, and is pressed and adhered to the driving plate 1 by a spring member 6. When an AC voltage is applied to the piezoelectric body 2 to generate traveling wave vibration, the upper surface of the driving body 1 performs an elliptical motion, and the driven plate 3 which is in close contact with the driving plate 1 receiving this circumferential component rotates. Perform exercise. Thus, the rotation force can be taken out of the motor by the rotation output shaft 7 fixed to the center portion of the driven plate 3.

[発明が解決しようとする問題点] ところで、上記従来の圧電振動モータは、振動源であ
る圧電体2が従動板3の直下に位置するために、従動板
3を駆動板1に密着せしめるための押圧力が圧電体2の
振動を規制する方向に作用し、駆動効率の低下をまねく
という欠点がある。
[Problems to be Solved by the Invention] By the way, in the conventional piezoelectric vibration motor, since the piezoelectric body 2 which is a vibration source is located directly below the driven plate 3, the driven plate 3 is brought into close contact with the driving plate 1. Has a drawback in that the pressing force acts in a direction that regulates the vibration of the piezoelectric body 2 and leads to a reduction in driving efficiency.

本発明は上記実情に鑑みなされたものであり駆動効率
の高い圧電振動モータを提供することを目的とするもの
である。
The present invention has been made in view of the above circumstances, and has as its object to provide a piezoelectric vibration motor having high driving efficiency.

[問題点を解決するための手段] 本発明の圧電振動モータを第1図で説明すると、環状
の駆動板(1)はその内周面ないし外周面を接触面(1
1)となし、該接触面(11)を周方向等間隔で切込んで
これら切込みにより複数の振動片(12)に区画し、各振
動片(12)の先端を上下に突出する質量部(13)となし
ている。上記接触面(13)を除く駆動板(1)の周面に
は上記各振動片(12)の基端に沿う周方向へ交互に極性
の異なる圧電体(2a、2b)を配設してこれら圧電体に交
流を印加する手段を有している。上記各質量部(13)の
突出端面には、回転出力軸(7)に設けた従動板(3a、
3b)がバネ部材(6a、6b)により押圧接触せしめてあ
る。
[Means for Solving the Problems] The piezoelectric vibration motor of the present invention will be described with reference to FIG. 1. An annular driving plate (1) has an inner peripheral surface or an outer peripheral surface which is a contact surface (1).
1), the contact surface (11) is cut at equal intervals in the circumferential direction, the cuts are divided into a plurality of vibrating pieces (12), and a mass portion (the tip) of each vibrating piece (12) projects vertically. 13) On the peripheral surface of the drive plate (1) except for the contact surface (13), piezoelectric bodies (2a, 2b) having different polarities are alternately arranged in the circumferential direction along the base end of each vibrating piece (12). Means for applying an alternating current to these piezoelectric bodies is provided. On the protruding end face of each of the mass portions (13), a driven plate (3a,
3b) is pressed and contacted by the spring members (6a, 6b).

[作用] 上記圧電体に交流電圧を印加して進行波振動を生ぜし
めるとこれと一体に接合された上記駆動板にも同様の進
行波振動が生起する。これに伴なって上記各振動片がね
じり共振し、振動片端部の上記質量部と接する従動板は
ねじれ振動の周方向成分により回転運動する。このよう
にして圧電体の振動は回転運動に変換され、従動板に連
結された回転出力軸を介して回転力がモータ外部に伝達
される。
[Operation] When an AC voltage is applied to the piezoelectric body to generate traveling wave vibration, the same traveling wave vibration also occurs in the driving plate integrally joined thereto. Along with this, each of the vibrating bars undergoes torsional resonance, and the driven plate in contact with the mass portion at the end of the vibrating bar rotates by the circumferential component of the torsional vibration. In this way, the vibration of the piezoelectric body is converted into a rotary motion, and the rotational force is transmitted to the outside of the motor via the rotary output shaft connected to the driven plate.

[発明の効果] 上記構成によれば圧電体が従動板との接触面を除く駆
動板の周面に設けられていることにより、従動板を駆動
板に押圧する力が振動源である圧電体に直接加わらない
から圧電体の振動が規制されず、従ってモータの駆動効
率を向上させることができる。しかも質量部を有する振
動片にて上記接触面を構成したから、振動片をねじり共
振させることで大きな回転力が得られる。また、上記構
成により容易に積層化が可能であり、積層化により大き
な駆動トルクを得ることができる。
[Effects of the Invention] According to the above configuration, since the piezoelectric body is provided on the peripheral surface of the drive plate except for the contact surface with the driven plate, the force pressing the driven plate against the drive plate is a piezoelectric body that is a vibration source. Therefore, the vibration of the piezoelectric body is not regulated, so that the driving efficiency of the motor can be improved. In addition, since the contact surface is formed by the vibrating reed having the mass portion, a large rotational force can be obtained by torsional resonating the vibrating reed. In addition, the above configuration allows easy lamination, and a large driving torque can be obtained by lamination.

[実施例] 以下、図示の実施例により本発明を説明する。EXAMPLES Hereinafter, the present invention will be described with reference to the illustrated examples.

第1図において、モータハウジング5は中空の円筒体
であり、ハウジング中心には回転出力軸7が設けてあ
る。該回転出力軸7は上下のハウジング壁に設けたベア
リング8a、8bにより回転自在に支持され、その一端はハ
ウジング外へ突出して図示しないい被駆動体に連結され
ている。
In FIG. 1, a motor housing 5 is a hollow cylindrical body, and a rotation output shaft 7 is provided at the center of the housing. The rotary output shaft 7 is rotatably supported by bearings 8a and 8b provided on upper and lower housing walls, and one end of the rotary output shaft 7 protrudes out of the housing and is connected to a driven body (not shown).

上記ハウジング5内には回転出力軸7のまわりに環状
の駆動板1が配設され、該駆動板1は内周端部を厚肉と
して上下に突出せしめ、各突出端面を接触面11としてあ
る。そして、これら接触面11にそれぞれ従動板3a、3bが
接触せしめてある。
An annular driving plate 1 is disposed around the rotary output shaft 7 in the housing 5. The driving plate 1 has an inner peripheral end portion that is thick and protrudes vertically, and each protruding end surface is a contact surface 11. . The driven plates 3a and 3b are brought into contact with these contact surfaces 11, respectively.

上記駆動板1と従動板3a、3bの詳細を第2図に示す。
図において駆動板1は内周部を等間隔で切込んで、これ
ら切込みにより複数の振動片12としてある。しかして、
これら振動片12は先端が径方向へ突出する質量部13とな
り(第3図)各質量部13の上下の端面が上記接触面11を
構成している。
FIG. 2 shows the details of the driving plate 1 and the driven plates 3a and 3b.
In the figure, the drive plate 1 is formed by cutting the inner peripheral portion at equal intervals, and the cuts are used as a plurality of vibrating bars 12. Then
These vibrating reeds 12 become mass portions 13 whose tips protrude in the radial direction (FIG. 3). The upper and lower end faces of each mass portion 13 constitute the contact surface 11.

上記駆動板1の外周部上下面には上記各振動片12の基
端に沿って環状の圧電板2a、2bが接合してあり、これら
圧電板2a、2bは周方向へ等間隔で交互にその分極方向が
異ならしめてある。この際、上下の各圧電板2a、2bは分
極位置が90°の位相差を有するようにずらして接合して
ある(第4図)。上記各圧電板2a、2bにはそれぞれ環状
電極21a、21bが接合され、これら環状電極はリード線を
介してそれぞれ90°位相のずれた出力を発する交流電源
10a、10bに接続されている。駆動板1は共通の電極とし
てアースされている。
Annular piezoelectric plates 2a and 2b are joined to the upper and lower surfaces of the outer peripheral portion of the driving plate 1 along the base end of each vibrating piece 12, and these piezoelectric plates 2a and 2b are alternately arranged at equal intervals in the circumferential direction. The polarization directions are different. At this time, the upper and lower piezoelectric plates 2a and 2b are bonded so as to be shifted so that the polarization positions have a phase difference of 90 ° (FIG. 4). Annular electrodes 21a and 21b are joined to the piezoelectric plates 2a and 2b, respectively.These are connected to an AC power source that outputs 90 ° phase-shifted outputs via lead wires.
Connected to 10a, 10b. The driving plate 1 is grounded as a common electrode.

駆動板1に接触する上記各従動板3a、3bは環状をな
し、放射状に支持脚を延出せしめた板バネ6a、6bの脚先
端に周面の複数箇所を固定してある。上記板バネ6a、6b
には中心に長円形の取付穴61a、61bがそれぞれ設けてあ
る。そして、従動板3a、3bで上下より駆動板1を挟持し
た状態で上記取付穴61a、61bを回転出力軸7の長円取付
部に嵌装する。
Each of the driven plates 3a and 3b in contact with the driving plate 1 is formed in an annular shape, and a plurality of circumferential portions are fixed to the tip ends of the plate springs 6a and 6b having support legs extending radially. The above leaf springs 6a, 6b
Are provided with oblong mounting holes 61a and 61b, respectively, at the center. Then, the mounting holes 61a, 61b are fitted into the oblong mounting portion of the rotary output shaft 7 while the driving plate 1 is sandwiched between the driven plates 3a, 3b from above and below.

この時、下方の板バネ6bは上記回転出力軸7の受けフ
ランジ71により支持され、一方、上方の板バネ6aは回転
出力軸7外周のネジ部に螺着したアジャステイングナッ
ト9により押さえられる。かくして、上記アジャスティ
ングナット9を回転移動せしめることにより駆動板1と
従動板3a、3bの接触圧を調整することができる。
At this time, the lower leaf spring 6b is supported by the receiving flange 71 of the rotary output shaft 7, while the upper leaf spring 6a is held down by an adjusting nut 9 screwed into a screw portion on the outer periphery of the rotary output shaft 7. Thus, the contact pressure between the drive plate 1 and the driven plates 3a, 3b can be adjusted by rotating the adjusting nut 9.

なお、駆動板1外周端をハウジング5内周壁に設けた
クッション材51に当接せしめて、その位置決めと回転防
止を図っている。
The outer peripheral end of the drive plate 1 is brought into contact with a cushion member 51 provided on the inner peripheral wall of the housing 5 to position the same and prevent rotation.

上記圧電体2a、2bに90°位相のずれた正弦波電圧を印
加すると、駆動板1の周面には第5図の波線で示す如き
進行波振動が生じる。図の(1)、(2)は進行波振動
の時間的推移を示す。これに伴って駆動板1の内周部に
形成された振動片12は進行波と位相が180°ずれたねじ
れ振動を行なう(第5図矢印)。このねじれ振動の共振
振動数は振動片12の弾性係数と断面形状と質量部13の慣
性モーメントにより決定され、これらを適当に設定する
ことにより上記駆動板1の進行波振動に応じて振動片12
は大きく共振振動する。質量部13の振動変位を第5図の
波線に沿う縦線で示す。
When a sine wave voltage having a phase shift of 90 ° is applied to the piezoelectric bodies 2a and 2b, a traveling wave vibration as shown by a dashed line in FIG. (1) and (2) in the figure show the temporal transition of the traveling wave vibration. Accordingly, the vibrating reed 12 formed on the inner peripheral portion of the driving plate 1 performs torsional vibration having a phase shifted from the traveling wave by 180 ° (arrow in FIG. 5). The resonance frequency of the torsional vibration is determined by the elastic coefficient, the cross-sectional shape, and the moment of inertia of the mass portion 13 of the vibrating reed 12, and by appropriately setting these, the vibrating reed 12
Greatly resonates. The vibration displacement of the mass portion 13 is indicated by a vertical line along the wavy line in FIG.

かくして、上記質量部13の上下端は周期的に上下の従
動板3a、3bに接触し、ねじれ振動の周方向成分により図
の矢印方向へ押圧回転せしめられる。
Thus, the upper and lower ends of the mass portion 13 periodically come into contact with the upper and lower driven plates 3a, 3b, and are pressed and rotated in the direction of the arrow in the drawing by the circumferential component of the torsional vibration.

上記構造によれば、駆動板1と従動板3a、3bを密着せ
しめるための押圧力が駆動源たる圧電体2a、2bに直接印
加されないため圧電体の振動は規制されず、駆動効率の
向上が図れる。また質量部13を設けた振動片12により接
触面11を構成して、これら振動片12をねじり共振せしめ
るようになしたからより大きな回転力を得ることができ
る。
According to the above structure, the pressing force for bringing the driving plate 1 and the driven plates 3a and 3b into close contact with each other is not directly applied to the piezoelectric members 2a and 2b serving as the driving sources, so that the vibration of the piezoelectric members is not restricted and the driving efficiency is improved. I can do it. Further, since the contact surface 11 is constituted by the vibrating reeds 12 provided with the mass portions 13, and these vibrating reeds 12 are torsionally resonated, a larger rotational force can be obtained.

第6図、第7図に本発明の他の実施例を示す。第6図
において回転出力軸7のまわりには複数の駆動板1a、1b
が配設され、該駆動板1a、1bの内周部にはこれらを挟ん
で交互に従動板3a、3b、3cが配されている。従動板3aお
よび3cは板バネ6a、6bに挟持されており、回転出力軸7
外周部に設けたアジャステイングナツト9を調整するこ
とにより駆動板1a、1bと従動板3a、3b、3cの押圧力が調
整できる。第7図はこの実施例の部分的な分解斜視図を
示す。このように駆動板および従動板を多板構成とする
ことにより、さらに大きな回転出力を得ることができ
る。
6 and 7 show another embodiment of the present invention. In FIG. 6, a plurality of driving plates 1a and 1b are provided around the rotation output shaft 7.
And driven plates 3a, 3b, 3c are alternately arranged on the inner peripheral portions of the driving plates 1a, 1b with the driving plates 1a, 1b interposed therebetween. The driven plates 3a and 3c are sandwiched between leaf springs 6a and 6b,
By adjusting the adjusting nut 9 provided on the outer peripheral portion, the pressing force of the driving plates 1a, 1b and the driven plates 3a, 3b, 3c can be adjusted. FIG. 7 shows a partially exploded perspective view of this embodiment. By thus forming the driving plate and the driven plate in a multi-plate configuration, it is possible to obtain a larger rotation output.

なお、本実施例では振動片12は梁の部分が見かけ上存
在せず、質量部13はその中心部まわりにねじれ振動す
る。
In this embodiment, the vibrating reed 12 has no apparent beam portion, and the mass portion 13 vibrates torsionally around its center.

第8図に示す如く、従動板3と駆動板1の上面にのみ
接触せしめた構成としてもよい。図において回転出力軸
7のまわりに配設された駆動板1は、内周端部を厚肉と
して上方に突出せしめ、この突出端面を従動板3との接
触面11とするとともに該接触面11を周方向等間隔で切込
んで先端に質量部13を持つ振動片12としてある。(第9
図)。上記駆動板1は外周部をハウジング5の底面およ
び内周面に設けたクッション材51に支持せしめてある。
As shown in FIG. 8, the configuration may be such that only the upper surfaces of the driven plate 3 and the driving plate 1 are in contact with each other. In the figure, the drive plate 1 disposed around the rotary output shaft 7 has an inner peripheral end portion that is thick and protrudes upward, and this protruding end surface serves as a contact surface 11 with the driven plate 3 and the contact surface 11. Are cut at equal intervals in the circumferential direction to form a resonator element 12 having a mass portion 13 at the tip. (9th
Figure). The drive plate 1 has an outer peripheral portion supported by a cushion member 51 provided on the bottom surface and the inner peripheral surface of the housing 5.

かかる構造によればモータを偏平な形状とすることが
でき、モータの設置スペースが限られている場合に有利
である。
According to such a structure, the motor can be formed into a flat shape, which is advantageous when the installation space for the motor is limited.

上記振動片12は第10図ないし第11図で示す形状として
もよい。すなわち、前者は質量部13を中央でえぐってそ
の質量を調整するもので、かかる形状によれば質量部13
の上下方向への突出量を一定に維持して質量の変更調整
が可能である。また後者は振動片12の両側面に半円溝を
形成したもので、かかる形状によればねじれ振動を容易
に生起せしめることが可能である。
The vibrating piece 12 may have a shape shown in FIGS. 10 to 11. In other words, the former adjusts the mass by circling the mass 13 at the center.
It is possible to change and adjust the mass while keeping the amount of protrusion in the vertical direction constant. In the latter case, semicircular grooves are formed on both side surfaces of the resonator element 12, and according to such a shape, torsional vibration can be easily generated.

上記接触面11を駆動板1の外周部に設けてもよい。第
12図において回転出力軸7のまわりには環状の駆動板1
a、1bが配され、上記駆動板1a、1bは外周端部を厚肉と
して上下に突出せしめて従動板3a、3b、3cとの接触面11
としてあり、該接触面11は周方向等間隔で切込んで多数
の振動子としてある。上記駆動板1a、1bの内周部上下面
には環状の圧電板2a、2bが接合され、駆動板1a、1bの内
周端部は回転出力軸7との間に設けたクッション材51に
当接せしめてある。
The contact surface 11 may be provided on an outer peripheral portion of the driving plate 1. No.
In FIG. 12, an annular driving plate 1 is provided around the rotary output shaft 7.
a, 1b are arranged, and the driving plates 1a, 1b are made thicker at the outer peripheral end and protruded up and down to make contact surfaces 11 with the driven plates 3a, 3b, 3c.
The contact surface 11 is cut at equal intervals in the circumferential direction to form a number of vibrators. Annular piezoelectric plates 2a and 2b are joined to upper and lower surfaces of inner peripheral portions of the driving plates 1a and 1b, and inner peripheral ends of the driving plates 1a and 1b are connected to a cushion member 51 provided between the driving plates 1a and 1b and the rotary output shaft 7. It has been abutted.

上記駆動板1a、1bは外周面の複数箇所に棒状ストッパ
ー14を立設して、各ストッパー先端を対向するハウジン
グ5側壁に設けた係止穴52内に挿入してある。上記係止
穴52は上下方向に延びる長穴状としてあり、かくして駆
動板1は上下振動可能であるとともに回転は阻止され
る。
The drive plates 1a and 1b have bar-shaped stoppers 14 erected at a plurality of locations on the outer peripheral surface, and the tips of the respective stoppers are inserted into locking holes 52 provided in the side wall of the housing 5 facing the same. The locking hole 52 is in the shape of a long hole extending in the vertical direction, so that the driving plate 1 can vertically vibrate and is prevented from rotating.

かかる構造によれば、接触面11の加工が容易であり、
比較的高価な圧電体を小さくできるのでコストの低減が
図れる。
According to such a structure, processing of the contact surface 11 is easy,
Since a relatively expensive piezoelectric body can be made smaller, the cost can be reduced.

【図面の簡単な説明】[Brief description of the drawings]

第1図〜第5図は本発明の一実施例を示し、第1図は圧
電振動モータの全体断面図、第2図は部分分解斜視図、
第3図は要部拡大図、第4図は駆動板斜視図、第5図は
作動説明図であり、第6図、第7図は本発明の第2の実
施例を示し、第6図は全体断面図、第7図は部分分解斜
視図、第8図〜第9図は本発明の第3の実施例を示し、
第8図は全体断面図、第9図は要部拡大図であり、第10
図、第11図はそれぞれ本発明の第4、第5の実施例を示
す要部拡大図、第12図は本発明の第6の実施例を示す全
体断面図、第13図は従来例を示す全体断面図である。 1、1a、1b……駆動板 11……接触面 2、2a、2b……圧電板(圧電体) 3、3a、3b、3c……従動板 6、6a、6b……板バネ 7……回転出力軸 10a、10b……交流電源
1 to 5 show an embodiment of the present invention, FIG. 1 is an overall sectional view of a piezoelectric vibration motor, FIG. 2 is a partially exploded perspective view,
FIG. 3 is an enlarged view of a main part, FIG. 4 is a perspective view of a driving plate, FIG. 5 is an operation explanatory view, and FIGS. 6 and 7 show a second embodiment of the present invention. 7 is an overall sectional view, FIG. 7 is a partially exploded perspective view, and FIGS. 8 to 9 show a third embodiment of the present invention.
8 is an overall sectional view, FIG. 9 is an enlarged view of a main part, and FIG.
FIG. 11 and FIG. 11 are enlarged views of essential parts showing fourth and fifth embodiments of the present invention, FIG. 12 is an overall sectional view showing a sixth embodiment of the present invention, and FIG. It is the whole sectional view shown. 1, 1a, 1b ... driving plate 11 ... contact surface 2, 2a, 2b ... piezoelectric plate (piezoelectric body) 3, 3a, 3b, 3c ... driven plate 6, 6a, 6b ... leaf spring 7 ... Rotary output shaft 10a, 10b …… AC power supply

───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭60−43082(JP,A) 特開 昭61−277384(JP,A) 特開 昭62−196085(JP,A) ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-60-43082 (JP, A) JP-A-61-277384 (JP, A) JP-A-62-196085 (JP, A)

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】駆動板を環状となしてその内周面ないし外
周面を従動板との接触面となし、上記接触面を周方向等
間隔で切込んでこれら切込みにより複数の振動片に区画
するとともに、各振動片の先端を上下に突出する質量部
として、回転出力軸に設けた上記従動板を上記各質量部
の突出端面に弾性的に接触せしめ、かつ上記接触面を除
く駆動板の周面には上記各振動片の基端に沿う周方向へ
交互に極性の異なる圧電体を配設して、これら圧電体に
交流電圧を印加する手段を設けたことを特徴とする圧電
振動モータ。
The drive plate is formed in an annular shape and its inner peripheral surface or outer peripheral surface is formed as a contact surface with a driven plate. The contact surface is cut at equal intervals in the circumferential direction, and the cuts are divided into a plurality of vibrating pieces. And, as a mass part projecting up and down at the tip of each vibrating piece, the driven plate provided on the rotary output shaft is brought into elastic contact with the protruding end face of each mass part, and of the drive plate excluding the contact surface. Piezoelectric vibrating motor characterized in that piezoelectric bodies having different polarities are alternately arranged in the circumferential direction along the base end of each vibrating piece on the peripheral surface, and means for applying an AC voltage to these piezoelectric bodies is provided. .
【請求項2】上記駆動板および従動板を複数段積層化し
た積層構造を有する特許請求の範囲第1項記載の圧電振
動モータ。
2. The piezoelectric vibration motor according to claim 1, wherein said piezoelectric vibration motor has a laminated structure in which said driving plate and said driven plate are laminated in a plurality of stages.
JP62092440A 1987-04-15 1987-04-15 Piezoelectric vibration motor Expired - Lifetime JP2569545B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62092440A JP2569545B2 (en) 1987-04-15 1987-04-15 Piezoelectric vibration motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62092440A JP2569545B2 (en) 1987-04-15 1987-04-15 Piezoelectric vibration motor

Publications (2)

Publication Number Publication Date
JPS63262069A JPS63262069A (en) 1988-10-28
JP2569545B2 true JP2569545B2 (en) 1997-01-08

Family

ID=14054479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62092440A Expired - Lifetime JP2569545B2 (en) 1987-04-15 1987-04-15 Piezoelectric vibration motor

Country Status (1)

Country Link
JP (1) JP2569545B2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5172023A (en) * 1990-11-09 1992-12-15 Kabushiki Kaisha Toyota Chuo Kenkyusho Ultrasonic motor
JP3155034B2 (en) * 1991-09-17 2001-04-09 セイコーインスツルメンツ株式会社 Small moving device using ultrasonic motor
JPH0617392U (en) * 1992-08-03 1994-03-04 アスモ株式会社 Ultrasonic motor
JP3412648B2 (en) * 1994-01-31 2003-06-03 株式会社ニコン Ultrasonic motor
JP2814908B2 (en) * 1994-02-09 1998-10-27 日本電気株式会社 Vibration motor
JP2994358B1 (en) 1998-09-16 1999-12-27 静岡日本電気株式会社 Vibration motor
FR2903825B1 (en) * 2006-07-13 2008-10-10 Sagem Defense Securite ROTARY PIEZOELECTRIC MOTOR
KR20100039158A (en) * 2008-10-07 2010-04-15 삼성전자주식회사 Ultrasonic motor and conveying apparatus having the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6043082A (en) * 1983-08-17 1985-03-07 Sony Corp Elastic wave motor
JPS61277384A (en) * 1985-06-03 1986-12-08 Shinsei Kogyo:Kk Motor for utilizing ultrasonic wave oscillation
JPS62196085A (en) * 1986-02-20 1987-08-29 Matsushita Electric Ind Co Ltd Ultrasonic motor

Also Published As

Publication number Publication date
JPS63262069A (en) 1988-10-28

Similar Documents

Publication Publication Date Title
US6121717A (en) Driving device for at least two rotation elements, which device comprises at least one piezoelectric driving element
JP2569545B2 (en) Piezoelectric vibration motor
JPH08103089A (en) Vibration motor
JPH0534909B2 (en)
JP2994023B2 (en) Ultrasonic motor
JPH0937576A (en) Ultrasonic motor and driving method therefor
JP3113481B2 (en) Piezo motor
JP3805240B2 (en) Ultrasonic motor
JPH0744856B2 (en) Ultrasonic motor
JPH03270679A (en) Ultrasonic oscillator and ultrasonic motor
JPH09182469A (en) Ultrasonic motor, and method of driving ultrasonic motor
JPH0993965A (en) Ultrasonic oscillator and ultrasonic motor using the ultrasonic oscillator
JP2766835B2 (en) Rotary drive
JPH0721114Y2 (en) Ultrasonic motor
JPH07178370A (en) Vibrator and vibrating actuator
JP2512875B2 (en) Ultrasonic motor
JP3213570B2 (en) Ultrasonic motor
JPH0833370A (en) Ultrasonic motor
JPH0251379A (en) Ultrasonic motor
JP2536067B2 (en) Piezoelectric motor
JPH08163879A (en) Ultrasonic oscillator and ultrasonic motor
JPS61262091A (en) Vibration wave motor
JPH06319271A (en) Ultrasonic driving device
JPH06106033B2 (en) Ultrasonic motor
JPH0336972A (en) Ultrasonic motor