JP2567811C - - Google Patents

Info

Publication number
JP2567811C
JP2567811C JP2567811C JP 2567811 C JP2567811 C JP 2567811C JP 2567811 C JP2567811 C JP 2567811C
Authority
JP
Japan
Prior art keywords
wafer
mask
optical system
scanning
alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
Other languages
English (en)
Japanese (ja)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Publication date

Links

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