JP2562833Y2 - Work holding plate structure of cap seal device - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work holding plate structure of a cap seal device used for sealing a flat package.

[0002]

2. Description of the Related Art Conventionally, there is a cap sealing device used in a manufacturing process of a semiconductor device having a structure shown in FIGS. That is, the cap sealing device 1
In the figure, the work transfer path is formed by the heater block 2. In addition, the work conveyed to the conveyance path of the cap seal device 1 is a flat package 22 having an open top surface in which external leads 21 extend around and a chip (not shown) is mounted therein. A solder material 23 such as gold is previously deposited on the opening edge 22a. On the other hand, peripheral walls 3 and 3 are provided upright on both sides of the heater block 2 forming the transport path, and an inert gas outlet 4 is provided at a boundary between the heater block 2 and the peripheral walls 3 and 3.
Are provided at appropriate intervals. A cover 5 is mounted on the upper part of the peripheral walls 3, 3. The cover 5 closes the upper part of the conveying path, and the outlets 4.
An atmosphere for preventing oxidation is formed by the inert gas blown out from the air.

On the other hand, the cover 5 is provided with a rectangular opening 6 cut from one side to the other side of the transport path. On the other hand, the other end of a vertically movable holding plate 7 having one end connected to a drive mechanism (not shown) of the cap seal device 1 is received. The holding plate 7 is composed of an extension portion 8 that extends from one side of the conveyance path to the side of the conveyance path, and a pressing portion 9 that is provided continuously to the extension end. , Extension part 8 and pressing part 9
Has a step on the upper surface side. The pressing portion 9
Is a rectangular window 1 larger than the flat package 22.
0 is formed.

In such a configuration, when the flat package 22 as a work is conveyed directly below the opening 6 of the cover 5, the holding plate 7 is lowered, and the pressing portion 9 of the holding plate 7 is moved to the flat package 22. The flat package 22 is fixed by pressing the external leads 21 against the heater block 2 while enclosing (FIG. 4 and FIG. 5). At this time, an atmosphere for preventing oxidation is formed in the transport path by the inert gas blown out from the outlets 4 to the transport path, and at the opening edge of the flat package 22, the solder material 23 is heated by a heater. Melted by the heat of the block. In the cap sealing device 1, a cap (not shown) for closing the opening is bonded to the flat package 22 in this state, and the work to be sequentially conveyed is sealed.

[0005]

However, in such a conventional holding plate 7, when the work is fixed, the connecting portion 11 between the extending portion 8 of the holding plate 7 and the pressing portion 9 is not provided with the work. 5, the inert gas blown out from the outlets 4 is blocked from flowing from the extending portion 8 to the work (pressing portion 8) side (FIG. 5). , The atmosphere for preventing oxidation formed in the region surrounded by the pressing portion 8 could not be brought into a favorable state. As a result, the solder material 23 melted at the opening edge 22a of the flat package 22 is easily oxidized, and the cap seal with stable quality cannot be performed.

The present invention has been made in view of such a conventional problem, and provides a work holding plate structure of a cap seal device capable of fixing a work without interrupting the flow of an inert gas. With the goal.

[0007]

According to the present invention, in order to solve the above-mentioned problem, an external lead extends around a transportation path having a plurality of inert gas outlets on both sides in the transportation direction. After fixing the work composed of the flat package that has been taken out by a press plate descending from above the transfer path, the press plate of the cap seal device that seals the work in an atmosphere of an inert gas is provided. An extension portion where one side of the transport path extends from the side, and is connected to an extension end of the extension portion at a step with the extension portion, and the work is fixed when fixing the work. And a pressing portion surrounding the flat package and pressing the external lead against the transport path, wherein the holding plate is provided with a ventilation hole penetrating from a lower surface of the extending portion to an end surface of the extending end portion. ing.

[0008]

In the above structure, when the holding plate fixes the work, the inert gas blown out from the outlet by the wall extending in the conveying direction formed by the continuous portion of the extending portion and the pressing portion of the holding plate. Is blocked from flowing in the direction of the work. At this time, since the ventilation hole penetrates from the lower surface of the extension of the holding plate to the end face of the extension end of the extension, the connection The inert gas blocked by the section flows to the work side through the vent hole.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to the drawings. That is, as shown in FIGS. 1 to 3, in the cap sealing device 1, the work transport path is formed by the heater block 2 (the same parts as in the conventional example are denoted by the same reference numerals and description thereof is omitted). .). On the other hand, the opening 6 of the cover 5 receives the other end of a vertically movable holding plate 7 having one end connected to a drive mechanism (not shown) of the cap seal device 1 on the side of the transport path.

The holding plate 7 comprises an extending portion 8 extending from one side of the conveying path to one side of the conveying path, and a pressing portion 9 connected to the extending end. Have been. The extending portion 8 and the pressing portion 9 have a step on the upper surface side, and the pressing portion 9 forms a rectangular window 10 larger than the flat package 22. On the other hand, the extension portion 8 is provided with a ventilation hole 12 which is bent inside and penetrates from the lower surface 8a of the extension portion 8 to the end surface 8b of the extension end of the extension portion 8. . Further, one opening 12a of the ventilation hole 12 opening on the lower surface 8a has a larger opening area than the other opening 12b, is close to one side of the transport path (heat block 2), and has an outlet 4.・ It is facing.

In this configuration, as described in the conventional example, when the flat package 22 as a work is conveyed directly below the opening 6 of the cover 5, the holding plate 7 is moved downward, and the holding plate 7 is moved downward. The pressing portion 9 presses the external leads 21 against the heater block 2 while surrounding the flat package 22, thereby fixing the flat package 22 (the state of FIGS. 1 and 2). At this time, since the above-described ventilation hole 12 is provided in the extension portion 8 of the holding plate 7, the inert gas blown out from the blowout port 4 at one side of the transport path is: It flows to the pressing portion 9 side, that is, the flat package 22 side through the ventilation hole 12 (indicated by an arrow A in FIGS. 1 and 2).

Therefore, the work can be fixed without blocking the flow of the inert gas, and the atmosphere for preventing oxidation by the inert gas formed in the area surrounded by the pressing portion 8 can be maintained in a good condition. It can be. as a result,
Oxidation of the solder material 23 melted at the opening edge 22a of the flat package 22 can be prevented, and a cap seal of stable quality can be performed.

In addition, the inert gas blown out from the outlet 4 located below the holding plate 7 once fills the vent hole 12 and then flows out from the other opening 12b of the vent hole 12, so that the pressing portion 8 Does not disturb the atmosphere in the area surrounded by. Therefore, the entrainment of air from above the holding plate 7 due to the disturbance of the atmosphere can be prevented beforehand, and the oxidation of the melted solder material 23 can be more reliably prevented.

[0014]

[Effect of the Invention] As described above, in the present invention,
An extension part whose one side extends from the side of the work transfer path, and is connected to the extension end of the extension part with a step and fixed to the work. In the structure having a pressing portion surrounding the flat package and pressing the external lead against the transport path, a ventilation hole penetrating from the lower surface of the extending portion to the end surface of the extending end portion is provided. When fixed, the inert gas blown off at one side of the conveyance path flows to the pressing portion side through the ventilation hole.

Therefore, the work can be fixed without interrupting the flow of the inert gas, and the atmosphere for preventing oxidation in the area surrounded by the pressing portion can be maintained in a favorable state. As a result, by preventing the molten solder material from being oxidized at the opening edge of the flat package, it is possible to perform cap sealing with stable quality.

In addition, since the inert gas flowing to the pressing portion through the ventilation hole once fills the ventilation hole and then flows to the pressing portion, the atmosphere is not disturbed.
Therefore, the entrainment of air due to the disturbance of the atmosphere can be prevented, and the oxidation of the molten solder material can be more reliably prevented.

[Brief description of the drawings]

FIG. 1 is an enlarged view of a portion B of FIG. 3 showing an embodiment of the present invention.

FIG. 2 is a schematic plan view of a main part of the cap sealing device according to the embodiment.

FIG. 3 is a schematic cross-sectional view taken along line AA of FIG. 2 showing the same embodiment.

FIG. 4 is a schematic plan view of a cap sealing device showing a conventional example.

FIG. 5 is a schematic cross-sectional view taken along the line CC of FIG. 4 showing a conventional example.

[Explanation of symbols]

 2 Heater block (conveyance path) 4 Outlet 7 Holding plate 8 Extension 8a Lower surface 8b End face 9 Presser 12 Vent hole 21 External lead 22 Flat package (work)

Claims (1)

(57) [Scope of request for utility model registration] 1. A presser which moves on a transport path having a plurality of inert gas outlets on both sides in the transport direction and which is a flat package having external leads extending therefrom, descends from above the transport path. After being fixed by a plate, the pressing plate of the cap sealing device for sealing the work in an atmosphere of an inert gas has an extension in which one side of the transport path extends from the side of the transport path. And a pressing portion which is connected to the extension end of the extension portion at a step with the extension portion, surrounds the flat package when fixing the work, and presses the external lead against the transport path. A ventilation hole penetrating from a lower surface of the extension portion to an end face of the extension end portion in the holding plate, the work holding plate structure of the cap seal device.