JP2561015Y2 - Polycrystalline silicon storage container - Google Patents

Polycrystalline silicon storage container

Info

Publication number
JP2561015Y2
JP2561015Y2 JP1992041796U JP4179692U JP2561015Y2 JP 2561015 Y2 JP2561015 Y2 JP 2561015Y2 JP 1992041796 U JP1992041796 U JP 1992041796U JP 4179692 U JP4179692 U JP 4179692U JP 2561015 Y2 JP2561015 Y2 JP 2561015Y2
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
outer bag
basket
inner basket
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1992041796U
Other languages
Japanese (ja)
Other versions
JPH0594187U (en
Inventor
秀男 伊藤
満敏 生川
Original Assignee
高純度シリコン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 高純度シリコン株式会社 filed Critical 高純度シリコン株式会社
Priority to JP1992041796U priority Critical patent/JP2561015Y2/en
Publication of JPH0594187U publication Critical patent/JPH0594187U/en
Application granted granted Critical
Publication of JP2561015Y2 publication Critical patent/JP2561015Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【考案の詳細な説明】[Detailed description of the invention]

【0001】[0001]

【産業上の利用分野】本考案は、製品として出荷される
多結晶シリコンを収容する容器であって、洗浄工程から
袋詰め工程に至る一連の作業能率を高め、かつ内部に収
容した多結晶シリコンによって袋が破損するなどの問題
がなく、取扱いが便利であり、搬送や保存の信頼性の高
い収容容器に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a container for accommodating polycrystalline silicon to be shipped as a product. The present invention relates to a storage container that is free from problems such as breakage of bags, is convenient to handle, and has high transport and storage reliability.

【0002】[0002]

【従来の技術】多結晶シリコンの製造においては、通
常、1〜2程度の棒状に成長させた多結晶シリコンを
200mm程度の長さのチャンクと称する塊に切断し、
このチャンクを更に小さなランプと呼ばれる塊に破砕
し、エッチング洗浄して表面の酸化被膜などを除去した
後、これを製品として出荷する。この場合、半導体用材
料として用いられる多結晶シリコンは極めて高純度の品
質を有することが必要とされる。そこで、製品として出
荷する多結晶シリコンは外部から汚染されないように、
ポリエチレン製などの高分子材料の袋に詰めて出荷され
ている。
2. Description of the Related Art In the production of polycrystalline silicon, usually, polycrystalline silicon grown in a rod shape of about 1 to 2 m is cut into chunks called chunks having a length of about 200 mm.
The chunk is further crushed into a small mass called a lamp, and is subjected to etching cleaning to remove an oxide film on the surface, and then shipped as a product. In this case, polycrystalline silicon used as a semiconductor material needs to have extremely high purity. Therefore, the polycrystalline silicon shipped as a product is not contaminated from the outside,
Shipped in bags of high polymer material such as polyethylene.

【0003】従来は洗浄したランプ状の多結晶シリコン
を直接に袋詰めして出荷しているが、この多結晶シリコ
ンの外表面には鋭利な破砕端が突出していることが多
く、この突起が直接に収容袋に触れて袋が破損し、外部
から汚染物質が侵入し、また袋の微細な破損屑が付着し
て製品を汚染する問題がある。また、従来の製造工程で
は、ランプ状の多結晶シリコンを洗浄した後に手作業で
袋詰めしているために再汚染されたり、また人手を多く
必要とし、作業能率も低い。
Conventionally, washed lamp-shaped polycrystalline silicon is directly packed in a bag and shipped. In many cases, a sharp crushed end protrudes from the outer surface of the polycrystalline silicon. There is a problem in that the bag is broken by directly touching the storage bag, contaminants enter from the outside, and fine breakage of the bag adheres to contaminate the product. Further, in the conventional manufacturing process, since the lamp-shaped polycrystalline silicon is manually bagged after being cleaned, it is recontaminated, requires a lot of manpower, and the work efficiency is low.

【0004】[0004]

【考案の解決課題】本考案は従来の袋詰め作業における
上記問題を解消するものであって、鋭利な破砕端を有す
る多結晶シリコンを収容しても破損し難く、かつ洗浄工
程から袋詰め工程に至る一連の作業工程での再汚染を防
ぎ、かつ作業能率を高める収容容器を提供することを目
的とする。
SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems in the conventional bagging operation, and is hardly damaged even when polycrystalline silicon having a sharp crushed end is accommodated. It is an object of the present invention to provide a storage container that prevents re-contamination in a series of operation steps leading to and improves the operation efficiency.

【0005】[0005]

【課題の解決手段】本考案によれば以下の構成からなる
多結晶シリコンの収容容器が提供される。 (1)塊状の多結晶シリコンを収容する内カゴと、該内
カゴを収容する外袋とを有し、該内カゴは上記多結晶シ
リコンの破砕端の突起の平均外径よりも小さい孔径の多
数の通液孔を有する洗浄カゴを兼用し、一方、上記外袋
は洗浄工程を経た塊状の多結晶シリコンを内カゴに収納
した状態で封止されることを特徴とする多結晶シリコン
の収容容器。本考案の上記収容容器は以下の態様を含
む。 (2)上記多結晶シリコンの破砕端の突起の平均外径よ
りも小さい孔径からなる網状部材によって内カゴが形成
されている上記(1)の収容容器。 (3)内カゴと外袋との間に空間を形成するリブが内カ
ゴの外表面に形成されている上記(1)または(2)に
記載の収容容器。 (4)内カゴに収容した状態で多結晶シリコンを洗浄す
るように該内カゴは開口部を上側にして吊下げ自在に形
成され、かつ該内カゴは洗浄した多結晶シリコンを収容
した状態で外袋に収容され、該外袋の上端が熱溶着さ
れ、または外袋の開口部が蓋材により密閉される上記
(1),(2)または(3)に記載の収容容器。
According to the present invention, there is provided a polycrystalline silicon container having the following structure. (1) An inner basket for accommodating massive polycrystalline silicon, and an outer bag for accommodating the inner cage, wherein the inner cage has a hole diameter smaller than the average outer diameter of the projection of the crushed end of the polycrystalline silicon. A washing basket having a large number of liquid passage holes is also used, while the outer bag is sealed in a state in which a lump of polycrystalline silicon that has undergone a washing step is housed in an inner basket. container. The container of the present invention includes the following aspects. (2) The container according to (1), wherein the inner cage is formed by a mesh member having a hole diameter smaller than the average outer diameter of the projection at the crushed end of the polycrystalline silicon. (3) The container according to (1) or (2), wherein a rib forming a space between the inner basket and the outer bag is formed on an outer surface of the inner basket. (4) The inner cage is formed so as to be able to be hung with the opening part upward so as to wash the polycrystalline silicon while being housed in the inner cage, and the inner cage is housed with the washed polycrystalline silicon. The storage container according to the above (1), (2) or (3), which is housed in an outer bag, the upper end of the outer bag is heat-sealed, or the opening of the outer bag is closed by a lid material.

【0006】一般に、出荷用の収容容器は収容物を外部
から遮断して保護するために用いられるものであり、一
方、洗浄工程で用いる洗浄カゴは内部の多結晶シリコン
が洗浄液に接触し易いように保持するために用いられる
ものであって、両者はその使用目的が異なる。またその
構造も前者は外部に対して閉鎖型であるが後者は開放型
であり共通性がないため従来は出荷用の収容容器と洗浄
カゴを兼用することは全く行なわれていない。本考案は
出荷用の収容容器を外袋と内カゴによって形成すること
により、内カゴを洗浄カゴとして兼用できるようにし
た。
[0006] Generally, a shipping container is used to shield and protect the contents from the outside. On the other hand, the cleaning basket used in the cleaning step is such that the polycrystalline silicon inside can easily come into contact with the cleaning liquid. , Which are used for different purposes. In addition, the former is of a closed type with respect to the outside, but the latter is of an open type and has no commonality. Therefore, conventionally, a container for shipping and a washing basket are not used at all. In the present invention, the shipping container is formed by the outer bag and the inner basket, so that the inner basket can be used also as the washing basket.

【0007】上記内カゴの形状は、上部が開放した箱状
のものでもよく、また筒状のものでもよい。なお取扱い
易さの点から、開口部を上側にして静置できる形状が好
ましい。外形寸法は収容する多結晶シリコン塊の量およ
び大きさによって適宜定められる。また該内カゴはその
形状および大きさに応じて十分な強度を有し、かつ洗浄
液に対して耐蝕性を持つ材質が選択される。なお金属材
料は多結晶シリコンの汚染源となるので好ましくない。
The shape of the inner basket may be a box shape with an open top, or a cylindrical shape. In addition, from the viewpoint of ease of handling, a shape that can be stood still with the opening facing upward is preferable. The external dimensions are appropriately determined according to the amount and size of the polycrystalline silicon lump to be accommodated. Further, a material having sufficient strength according to the shape and size of the inner cage and having corrosion resistance to the cleaning liquid is selected. Note that a metal material is not preferable because it becomes a contamination source of polycrystalline silicon.

【0008】上記内カゴの一例として、5Kgのシリコン
ランプを収容する、ポリプロピレン製の内寸、170mm
×170mm×200mmの角型内カゴが提示される。ポリ
プロピレンは洗浄液(弗酸と硝酸の混酸)に対して耐蝕
性を有し、洗浄後の乾燥工程での高温に耐え、かつシリ
コンへの汚染が少ない材質であり、上記内カゴの材質と
して好ましい。また容積効率の点から一般に角型の荷姿
が採用され、その大きさも作業性の点から5Kg程度の収
容容積が適当である。
[0008] As an example of the inner basket, a polypropylene inner size of 170 mm accommodating a silicon lamp of 5 kg.
A square-shaped basket of × 170 mm × 200 mm is presented. Polypropylene is a material that has corrosion resistance to a cleaning liquid (mixed acid of hydrofluoric acid and nitric acid), withstands high temperatures in a drying step after cleaning, and that is less contaminated with silicon. In general, a rectangular package is used from the viewpoint of volumetric efficiency, and a suitable storage capacity of about 5 kg is appropriate from the viewpoint of workability.

【0009】 上記内カゴは洗浄カゴとしても用いられ
るので、洗浄液に浸漬した際に洗浄液の出入りが良好
で、かつ液切れの良いことが求められる。このためには
側壁および底面に孔径の大きな通液孔を多数設ければよ
いが、既に述べたように、収容した多結晶シリコンの表
面には鋭利な破砕端が突出している場合が多いので、通
液孔が大きいと、破砕端が外部に突出して外袋を破損す
る懸念があるので、破砕端が外部に突出して外袋を破損
しない程度の口径、一般的には破砕端の突起の平均外径
よりも小さい孔径の通液孔が設けられる。通常、破砕端
の端面角度は45°〜60°であるので、3Kg容量の
内カゴの場合、3mm〜4mm径の丸孔、または短辺3
mm〜4mmの長方形ないし正方形の通液孔であれば良
い。なお通液孔を大きくする場合には、内カゴの外表面
にリブ等を突設して内カゴと外袋との間に空間を形成す
るとよい。なお、該通液孔に適する孔径を有する網状部
材によって上記内カゴを形成しもよく、または板状部
材に上記通液孔を適宜の個数穿設して内カゴを形成して
も良い。洗浄液の出入りを良くするためには、内カゴの
底面に設けた通液孔の面積を底面全体の面積比で15%
程度にすると良い。通液孔の面積が大き過ぎると、多結
晶シリコンの小さい破片が洗浄工程で流出し、また底面
の強度が不足するので好ましくない。
Since the above-mentioned inner basket is also used as a washing basket, it is required that the washing liquid enter and exit well when immersed in the washing liquid, and that the liquid drains well. For this purpose, a large number of liquid passage holes having a large hole diameter may be provided on the side wall and the bottom surface. However, as described above, a sharp crushed end is often projected on the surface of the contained polycrystalline silicon. If the liquid passage hole is large, there is a concern that the crushed end protrudes to the outside and damages the outer bag.Therefore, the diameter of the crushed end protrudes to the outside and does not damage the outer bag. A liquid passage hole having a smaller hole diameter than the outer diameter is provided. Normally, the end face angle of the crushed end is 45 ° to 60 °, so in the case of an inner basket having a capacity of 3 kg, a round hole having a diameter of 3 mm to 4 mm or a short side 3
Any rectangular or square liquid passage hole having a size of 4 mm to 4 mm may be used. When the liquid passage hole is enlarged, a rib or the like may be protruded from the outer surface of the inner cage to form a space between the inner cage and the outer bag. Depending mesh member with a pore size suitable for vent inlet hole may be formed inner basket and appropriate number bored the liquid passing hole well or plate member be formed above the cage. In order to improve the flow of the cleaning liquid, the area of the liquid passage hole provided in the bottom surface of the inner cage should be 15% in terms of the area ratio of the entire bottom surface.
It should be about. If the area of the liquid passage hole is too large, small pieces of polycrystalline silicon flow out in the washing step, and the strength of the bottom surface is insufficient, which is not preferable.

【0010】上記内カゴは、好適な実施態様として、そ
の開口部を上側にして吊下げ自在に形成される。例え
ば、内カゴの両側面にフックを設け、またはフックを係
合する突起部が設けられる。また、吊り下げ自在に形成
された外カゴの中に内カゴを入れる構造とし、この状態
で洗浄工程に付した後に外カゴから内カゴを取り出して
内カゴのままシリコンランプを外袋に収容しても良い。
洗浄工程および洗浄後の外袋への装入に至る一連の作業
を内カゴを吊下げた状態で行なうことにより、連続して
効率よく行なうことができる。また自動化にも適する。
[0010] As a preferred embodiment, the inner basket is formed so that it can be hung with its opening upward. For example, hooks are provided on both sides of the inner cage, or projections for engaging the hooks are provided. In addition, the inner basket is put into the outer basket that can be freely suspended, and after being subjected to the cleaning process in this state, the inner basket is taken out of the outer basket, and the silicon lamp is housed in the outer bag as the inner basket. May be.
By performing a series of operations from the washing step to the loading into the outer bag after washing in a state where the inner basket is suspended, continuous and efficient operations can be performed. Also suitable for automation.

【0011】上記外袋は、多結晶シリコンを収容した内
カゴを内部に装入した状態で封止される。封止方法は制
限されない。例えば、外袋の上端を熱溶着して密閉して
もよく、または開口部を蓋材によって覆い、その周縁全
体を熱溶着し、または接着剤を用いて密閉しても良い。
該外袋の材質は、シリコンへの汚染の影響が少なく、熱
溶着が容易なポリエチレンが一般に用いられる。
The outer bag is sealed with an inner basket containing polycrystalline silicon inserted therein. The sealing method is not limited. For example, the upper end of the outer bag may be hermetically sealed by heat welding, or the opening may be covered with a lid member, and the entire periphery thereof may be heat-sealed or hermetically sealed with an adhesive.
As the material of the outer bag, polyethylene which is less likely to be contaminated by silicon and which is easily heat-welded is generally used.

【0012】[0012]

【実施例】本考案に係る収容容器の具体例を図1〜図3
に示す。図1において、ポリプロピレン製の内カゴ10
はやや長方形の底面を持つ角型の形状を有する。該内カ
ゴ10の両側面には口径3mm〜4mmの通液孔11が縦横
各々8列ずつ設けられており、底面には口径3〜4mmの
通液孔が36個設けられている。この内カゴ10はポリ
エチレン製の外袋12に装入されており、該外袋12の
上端開口13はその中央を寄合わせた状態に閉じられて
いる。
1 to 3 show a specific example of a container according to the present invention.
Shown in In FIG. 1, an inner basket 10 made of polypropylene is used.
It has a rectangular shape with a slightly rectangular base. On both sides of the inner basket 10, eight rows of liquid passage holes 11 each having a diameter of 3 mm to 4 mm are provided vertically and horizontally, and 36 liquid passage holes each having a diameter of 3 to 4 mm are provided on the bottom surface. The inner basket 10 is placed in an outer bag 12 made of polyethylene, and the upper opening 13 of the outer bag 12 is closed with its center aligned.

【0013】図2の収容容器は、図1と同様の内カゴ1
0をポリエチレン製の外袋12に装入し、その上端開口
をポリエチレン製の蓋材14によって覆い、該蓋材14
の周縁15を外袋12の開口縁部に熱溶着して封止した
ものである。なお、内カゴ10には図1の場合と同様に
通液孔11が穿設されている。
The container shown in FIG. 2 has an inner basket 1 similar to that shown in FIG.
0 is placed in an outer bag 12 made of polyethylene, and its upper end opening is covered with a lid 14 made of polyethylene.
Is thermally sealed to the opening edge of the outer bag 12 and sealed. The inner basket 10 is provided with a liquid passage hole 11 as in the case of FIG.

【0014】図3の収容容器は、円筒形のポリプロピレ
ン製の内カゴ16と同形の外袋17によって形成されて
おり、該内カゴ16の周面には図1の内カゴ10のもの
と同様の通液孔11が縦6列、横21列穿設されてい
る。また底面には口径4mmの丸形の通液孔が25個設け
られている。外袋17の上端開口は円形の蓋材18によ
って覆われており、該蓋材18の周縁は外袋17に接着
されている。
The container shown in FIG. 3 is formed by an outer bag 17 having the same shape as a cylindrical polypropylene inner cage 16, and a peripheral surface of the inner cage 16 is similar to that of the inner cage 10 shown in FIG. Are formed in six rows and 21 rows. The bottom surface is provided with 25 round holes having a diameter of 4 mm. The upper end opening of the outer bag 17 is covered with a circular lid 18, and the periphery of the lid 18 is adhered to the outer bag 17.

【0015】[0015]

【考案の効果】本考案の収容容器は、外袋と内カゴによ
って形成されており、この内カゴが洗浄カゴを兼用して
いるので、破砕した多結晶シリコンを内カゴに収容した
状態で洗浄し、そのまま乾燥して外袋に詰めることがで
きるので、洗浄後の再汚染の問題がなく、しかも洗浄か
ら出荷用の袋詰め作業に至る一連の作業を連続して行な
うことができるので作業能率が大幅に向上する。また、
破砕した多結晶シリコンは内カゴに収容されて袋詰めさ
れているので、その鋭利な破砕端が直接に外袋に接触し
てこれを破損するなどの虞がなく信頼性が高い。
[Effect of the Invention] The storage container of the present invention is formed of an outer bag and an inner basket, and since the inner basket also serves as a cleaning basket, the crushed polycrystalline silicon is housed in the inner basket for cleaning. Since it can be dried and packed in an outer bag as it is, there is no problem of recontamination after washing, and a series of operations from washing to packing for shipping can be performed continuously, so work efficiency is improved. Is greatly improved. Also,
Since the crushed polycrystalline silicon is housed in an inner basket and packed in a bag, there is no danger that the sharp crushed end directly contacts the outer bag and breaks it, so that the reliability is high.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本考案に係る収容容器の斜視図FIG. 1 is a perspective view of a container according to the present invention.

【図2】 本考案に係る収容容器の斜視図FIG. 2 is a perspective view of the container according to the present invention.

【図3】 本考案に係る収容容器の斜視図FIG. 3 is a perspective view of the container according to the present invention.

【符号の説明】[Explanation of symbols]

10、16−内カゴ 11−通液孔 12、17−外袋 14、18−蓋材 13−上端開口 15−周縁 10, 16-Inner basket 11-Liquid hole 12, 17-Outer bag 14, 18-Lid material 13-Top opening 15-Peripheral edge

Claims (4)

(57)【実用新案登録請求の範囲】(57) [Scope of request for utility model registration] 【請求項1】 塊状の多結晶シリコンを収容する内カゴ
と、該内カゴを収容する外袋とを有し、該内カゴは上記
多結晶シリコンの破砕端の突起の平均外径よりも小さい
孔径の多数の通液孔を有する洗浄カゴを兼用し、一方、
上記外袋は洗浄工程を経た塊状の多結晶シリコンを内カ
ゴに収納した状態で封止されることを特徴とする多結晶
シリコンの収容容器。
1. An inner basket for accommodating massive polycrystalline silicon, and an outer bag for accommodating the inner cage, wherein the inner cage is smaller than an average outer diameter of a projection at a crushed end of the polycrystalline silicon. A washing basket having a large number of liquid holes with a hole diameter is also used,
A container for storing polycrystalline silicon, wherein the outer bag is sealed in a state where bulk polycrystalline silicon having undergone a washing step is stored in an inner basket.
【請求項2】 上記多結晶シリコンの破砕端の突起の平
均外径よりも小さい孔径からなる網状部材によって内カ
ゴが形成されている請求項1の収容容器。
2. The container according to claim 1, wherein the inner cage is formed by a mesh member having a hole diameter smaller than the average outer diameter of the projection at the crushed end of the polycrystalline silicon.
【請求項3】 内カゴと外袋との間に空間を形成するリ
ブが内カゴの外表面に形成されている請求項1または2
に記載の収容容器。
3. A rib forming a space between the inner basket and the outer bag is formed on the outer surface of the inner basket.
The storage container according to 1.
【請求項4】 内カゴに収容した状態で多結晶シリコン
を洗浄するように該内カゴは開口部を上側にして吊下げ
自在に形成され、かつ該内カゴは洗浄した多結晶シリコ
ンを収容した状態で外袋に収容され、該外袋の上端が熱
溶着され、または外袋の開口部が蓋材により密閉される
請求項1,2または3に記載の収容容器。
4. The inner basket is formed so as to be able to be suspended with its opening side upward so as to wash the polycrystalline silicon while being housed in the inner cage, and the inner cage contains the washed polycrystalline silicon. The container according to claim 1, wherein the container is housed in an outer bag in a state, an upper end of the outer bag is heat-sealed, or an opening of the outer bag is closed by a lid material.
JP1992041796U 1992-05-26 1992-05-26 Polycrystalline silicon storage container Expired - Lifetime JP2561015Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1992041796U JP2561015Y2 (en) 1992-05-26 1992-05-26 Polycrystalline silicon storage container

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1992041796U JP2561015Y2 (en) 1992-05-26 1992-05-26 Polycrystalline silicon storage container

Publications (2)

Publication Number Publication Date
JPH0594187U JPH0594187U (en) 1993-12-21
JP2561015Y2 true JP2561015Y2 (en) 1998-01-28

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Family Applications (1)

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Country Status (1)

Country Link
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