JP2560366Y2 - High-speed axial-flow type carbon dioxide laser oscillator - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-speed axial flow type carbon dioxide laser oscillator having improved electrodes.

[0002]

2. Description of the Related Art In a high-speed axial-flow type carbon dioxide laser oscillator, in order to obtain a high output, a resonator configuration in which a plurality of discharge tubes are connected in series is generally employed. FIG. 1 is a schematic configuration diagram of a conventional split discharge type high-speed axial flow type carbon dioxide laser oscillator employing the above configuration. In the figure, a resonator 1 has, for example, four first to fourth discharge tubes 2, 3, 4, and 5 connected in series, and each discharge tube has a first to fourth cathode 2 respectively.
a, 3a, 4a, 5a and first to fourth anodes 2b, 3
b, 4b, and 5b are provided, and the counter electrodes of the cathode and the anode provided in the longitudinal direction of the discharge tube are alternately provided with different polarities. First to fourth high-voltage DC power supplies 62, 63, 64, 65 are connected between the first to fourth cathodes 2a to 5a and the first to fourth anodes 2b to 5b, respectively. When applied, a glow discharge 7 is generated. A reflecting mirror 8 and an output mirror 9 are disposed at the ends of the first and fourth discharge tubes 2 and 5, and the output mirror 9 extracts the laser beam 10 to the outside. Blower 12 provided in gas passage 11
Is driven, the gas medium filled in the discharge tube circulates in the direction of the arrow, and the heat of the gas whose temperature has increased due to the discharge and the heat of the gas whose temperature has increased due to the compression heat of the blower 12 are respectively transferred by the heat exchangers 13 and 14. Removed.

[0003]

Problems to be Solved by the Invention Since each anode is grounded from a safety point of view, when the adjacent cathodes are arranged close to each other, for example, the first discharge tube 2 is connected to the second discharge tube.
When the gas pressure is slightly lower than that of the discharge tube 3 and the discharge is easily started, the discharge is started in the discharge tube 2 first, and the discharge current I1 is reduced as shown by the solid line in FIG. 6
2 → anode 2b → discharge tube 2 → cathode 2a → first power supply 62, and glow discharge 7 is generated in discharge tube 2. At this time,
Although the voltage applied from the second power supply 63 is applied between the anode 3b and the cathode 3a, no discharge occurs in the discharge tube 3, and the discharge current I2 from the power supply 63 is reduced as shown by the dotted line in FIG. 63 → ground → anode 2b → discharge tube 2 → cathode 3a
→ The current flows to the power source 63, and a new discharge 71 is generated in the discharge tube 2. In the discharge in the discharge tube 2, the current density is increased by the applied voltage of the power supplies 62 and 63, and the discharge is changed from glow discharge to arc discharge. Therefore, a regular laser discharge cannot be obtained. Output drops. Therefore, in the conventional split discharge type laser oscillator, it is necessary to provide an appropriate insulating distance between adjacent cathodes in order to prevent the above-mentioned irregular laser discharge. This causes a reduction in the discharge utilization rate in the vessel, that is, the ratio of the discharge utilization space to the entire resonator space. For example, if this ratio is 5
It may be 0% or less.
There is a disadvantage that the laser oscillator becomes longer.

[0004]

Means for Solving the Problems To solve the above problems, in the present invention, a discharge tube provided with a cathode and an anode counter electrode in the longitudinal direction is formed by alternately changing the polarity of the counter electrode. The target is a high-speed axial flow type carbon dioxide laser oscillator of the split discharge type arranged in the longitudinal direction of a plurality of discharge tubes.
High pressure between the common cathode and the paired anode.
Connect the power supply and adjoin adjacent one of the anodes
Electrically connect the anodes and any one of the above anodes
It is characterized in that only one is grounded .

[0005]

FIG. 3 is a schematic diagram showing a main part of a resonator body according to an embodiment of the present invention. In the figure, the first common cathode 2
Reference numeral 3a designates a structure in which a proper insulating distance provided between the conventional first and second cathodes 2a and 3a shown in FIG.
Numeral 5a eliminates the conventional insulation distance between the third and fourth cathodes 4a and 5a, and makes the cathodes common. Accordingly, an insulating tube provided between the first discharge tube 2 and the second discharge tube 3 and between the third discharge tube 4 and the fourth discharge tube 5 becomes unnecessary. First
And high-voltage DC power supplies 62 and 63 are connected between the second anodes 2b and 3b and the first common cathode 23a, respectively, between the third and fourth anodes 4a and 5a and the second common cathode 45a. The power sources 64 and 65 are connected, and the second and third anodes 3b,
4b is externally connected, and one of the anodes, for example, the first anode 2b is grounded. At the time of discharge, since a circuit is not formed by grounding each anode as in the prior art, a regular laser discharge (glow discharge) 7 is generated between each cathode and anode, and The potential difference due to 62, 63 is canceled, and the second (third) anode 3b (, 4b)
Becomes zero, and similarly, the potential of the fourth anode 5b also becomes zero. The discharge is a DC discharge using a DC power supply, but may be an AC discharge.

[0006]

[Effect of the Invention] As described above, according to the present invention, one end
By grounding , there is no need to provide an insulation distance between the cathodes while ensuring safety , and a round circuit is formed.
Therefore , the discharge utilization rate in the resonator can be improved. Therefore, when the same output as that of the related art is obtained, the size of the laser oscillator can be further reduced. When a high output is obtained, the length of the oscillator can be prevented.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram of a conventional split discharge type high-speed axial flow type carbon dioxide laser oscillator.

FIG. 2 is an explanatory diagram in the case of performing an irregular laser discharge in a conventional oscillator.

FIG. 3 is a schematic configuration diagram of a main part of a resonator main body showing an embodiment of the present invention.

[Explanation of symbols]

2-5 the first to fourth discharge tube 2a~5a first to fourth cathode 2B-5b first to fourth anode 23a first co Tsukage electrode 45a second co Tsukage pole

Claims (1)

(57) [Scope of request for utility model registration] 1. A split discharge type high-speed axial flow in which a plurality of discharge tubes provided with a counter electrode of a cathode and an anode in the longitudinal direction are arranged in the longitudinal direction of the discharge tube by alternately changing the polarities of the counter electrodes. In the carbon dioxide laser oscillator, the cathodes of the adjacent counter electrodes are made common to each other, and the same potential is applied between the cathodes.
And between the common cathode and the paired anode,
Connect a high-voltage power supply, and adjacent to the plurality of anodes
The anodes to be electrically connected, and any one of the above anodes
High-speed axial flow CO2 laser oscillator with only one grounded .