JP2555614B2 - Surface treatment equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of use] The present invention relates to an improvement in a surface treatment apparatus for samples such as plastic, glass, metal, and ceramics.

[Conventional technology and its problems]

Generally, the surface of a sample such as plastic, glass, metal, or ceramic has oils and fats, organic solvents, foreign substances caused by contact between objects, dust floating in the atmosphere, and fine powder due to cutting and polishing.

Therefore, an ultraviolet ray or ozone generator is used to decompose and remove oils and fats, organic solvents, foreign matters, dusts, fine powders and the like adhering to the surface of the sample.

As a conventional processing apparatus using ultraviolet rays, as shown in FIG. 4 of the related art, for example, a plurality of reflectors 2 are arranged at an interval of about 5 cm inside a box-shaped apparatus main body 1, and each of the reflectors 2 is arranged. An ultraviolet ray generating lamp, for example, a low-pressure mercury lamp 3 is mounted inside, and a sample 4 whose surface is to be processed is placed on the lower surface of the ultraviolet ray generating lamp 3, for example, on the upper surface of a conveyor 5, and ozone generated by the ultraviolet ray generating lamp 3 is placed. And UV
At 185 nm and 254 nm, oil and fat on the surface of the sample, organic solvent, foreign matter,
Dust, fine powder, etc. are decomposed or removed.

In order to enhance the processing ability with ozone and ultraviolet rays by the same device, it is desirable that the distance between the ultraviolet ray generating lamp 3 and the sample 4 is as small as possible. However, if the distance between the ultraviolet ray generating lamp 3 and the surface of the sample 4 is small, a difference in illuminance occurs near the center and both ends of the sample surface, and the treatment effect becomes uneven. If it is not designed, the treatment effect will be insufficient. Further, in order to obtain a uniform treatment effect on the sample surface, there is a drawback that the distance between the ultraviolet ray generating lamp and the sample must be increased and an ultraviolet ray generating lamp having a large wattage must be used.

[Purpose of occurrence]

The present invention has been made in view of the above points, and an object of the present invention is to provide a surface treatment apparatus capable of reducing the distance between a light source and a sample and further increasing the treatment effect by ultraviolet rays and ozone.

[Means for solving problems]

The present invention will be described below with reference to FIGS. In the figure, 11 is a box-shaped device body, 12 is a reflector supported on the inner upper surface of the device body 11 at intervals of, for example, about 5 cm, 1
Reference numeral 3 denotes an ultraviolet ray generating lamp that is mounted inside each reflector 12 and is, for example, a 25 watt low-pressure mercury lamp,
Reference numeral 14 denotes a plate body having a good ultraviolet transmittance, which covers the opening surface corresponding to the ultraviolet ray generation lamp 13, and is constituted by using, for example, a synthetic quartz glass plate. Ultraviolet rays of synthetic quartz glass plate
The transmittance at 185 nm is about 75%, and the transmittance at 254 nm is 90%.
It is a degree. Reference numeral 15 denotes a vacuum exhaust port provided in a part of the apparatus main body 11, which also serves as a nitrogen gas or inert gas supply port. The inside of the apparatus main body 11 is evacuated or filled with nitrogen gas or an inert gas to form an atmosphere having a good ultraviolet ray transmittance. 16 is a nitrogen gas or inert gas exhaust port. Reference numeral 17 is an ozone supply port formed at one end of the lower part of the device body 11, 18 is an ozone exhaust port provided on the opposite side of the device body 11 from the ozone supply port, and 19 is located on the lower surface of the flat plate 14 of the device body 11. It is a conveyor, and an ozone treatment space 20 is provided between the flat plate 14 and the conveyor 19. Reference numeral 21 denotes a sample placed on the upper surface of the conveyor 19, which is, for example, plastic, glass, metal, ceramic or the like.

Next, the ultraviolet rays 18 on the sample surface in the above-mentioned surface treatment apparatus
The relationship between the illuminance of 5 nm and 254 nm and the irradiation distance will be described with reference to FIG. As shown in the figure, when the ozone concentration is 200 PPM and the irradiation distance to the sample surface is 0, and the ultraviolet illuminance on the sample surface is set to a relative value of 1.0, the ultraviolet ray 254 nm is about 2 cm when the irradiation distance to the sample surface is 2.5 cm. Becomes 0.5, and 0.1 at 5.0 cm
8 In addition, the irradiation distance of ultraviolet rays of 185 nm to the sample surface is
It becomes about 0.5 at 4.0 cm and 0.33 at 6 cm. As described above, the ultraviolet illuminance on the sample surface greatly affects the irradiation distance, and in order to increase the processing effect, it is necessary to make the distance between the sample surface and the ultraviolet ray generating lamp 13 as small as possible.

Next, the effect of the treatment in the above-mentioned surface treatment device
Description will be made in comparison with the conventional surface treatment apparatus shown in the figure. The ozone concentration in the device body 11 of the above device is 200P.
PM, one 25-watt low-pressure mercury lamp 13 as a light source was installed and treated, and when the cleaning degree was measured by the contact angle, the contact angle in this device was 40 to 20 in about 1.5 minutes. According to the device shown, the contact angle at 3 minutes is from 40
It just drops to 20. Further, after about 4 minutes, the contact angle is reduced from 40 to 0 according to the present apparatus, but in the conventional apparatus, the contact angle is only reduced from 40 to 15.

[Operation of the invention]

By the surface treatment device described above, while turning on the ultraviolet ray generation lamp, either one of nitrogen gas or inert gas is supplied into the main body of the apparatus, or the inside of the main body of the apparatus is evacuated to have a good ultraviolet transmittance atmosphere, When ozone is further supplied from the ozone supply port and, for example, the sample on the conveyor is processed, the ultraviolet rays 185 nm and 254 nm generated by the ultraviolet ray generation lamp efficiently pass through the plate 14 and the sample 21 is subjected to the ultraviolet ray treatment and the ozone treatment. Treated with ozone in space.

〔The invention's effect〕

As described above, according to the present invention, an ultraviolet ray generating lamp is mounted inside the apparatus body, and a plate having a high ultraviolet ray transmittance is provided on the corresponding surface of the ultraviolet ray generating lamp, and the inside of the apparatus body has a high ultraviolet ray transmittance. Since it is constructed in the atmosphere and the ozone treatment space is provided on the lower surface of the plate, the transmittance of the ultraviolet rays 185 nm and 254 nm generated by the ultraviolet ray lamp inside the device is good. By the ozone of the, oil and fat, organic solvent, foreign matter, dust, etc. on the surface of the sample such as plastic, glass, metal, ceramics,
It is possible to effectively decompose and remove fine powder and the like.

Also, since the ozone treatment space is provided on the lower surface of the flat plate,
In the same ozone treatment space, ozone is oxidatively decomposed by the ultraviolet rays that have passed through the flat plate, and the surface of the sample can be effectively sterilized and unnecessary oxidative decomposition of ozone can be prevented.

In addition, since there is a plate on the lower surface of the device main body, the directivity of the ultraviolet light generation lamp is less than that of the conventional device, and even if multiple ultraviolet light generation lamps are mounted inside the device main body, the sample can be placed on the lower surface of the plate. There is an advantage that uniform processing can be performed.

[Brief description of drawings]

FIG. 1 is a cross-sectional view of the surface treatment apparatus according to the present invention, FIG. 2 is a view showing the relationship between the irradiation distance of the apparatus in FIG. 1 and the ultraviolet illuminance on the sample surface, and FIG. 3 is the present invention and the conventional apparatus. FIG. 4 is a comparative view showing the relationship between the treatment time and the contact angle in FIG. 4, and FIG. 4 is a sectional view of a conventional surface treatment apparatus. 1 to 3, 11 ... Device main body, 12 ... Reflector, 13 ... UV generating lamp, 14 ... Plate, 20 ... Ozone treatment space, 21 ... Sample

Claims (3)

(57) [Claims] 1. A box-shaped apparatus main body is provided with an ultraviolet ray generating lamp, and a plate having a good ultraviolet ray transmittance is provided on a corresponding surface of the ultraviolet ray lamp. A surface treatment apparatus characterized in that it has a good atmosphere and is provided with an ozone treatment space on the lower surface of the plate. 2. The surface treatment apparatus according to claim 1, wherein nitrogen gas or an inert gas is supplied to the inside of the apparatus main body to improve the ultraviolet transmittance inside the apparatus main body. 3. The surface treatment apparatus according to claim 1, wherein the inside of the apparatus main body is evacuated to improve the ultraviolet transmittance inside the apparatus main body.