JP2552240B2 - Traveling / feeding device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to running / feeding using a walking type actuator capable of achieving a large stop holding force.
The present invention relates to a device , particularly a traveling / feeding device suitable for precision positioning.

[0002]

2. Description of the Related Art Conventionally, stepping motors and AC and DC servo motors have been used to drive linear guide mechanisms. Since these actuators utilize the force of the magnetic field, they generate electromagnetic fields, generate heat, etc., and require expensive encoders and sophisticated control techniques for advanced positioning.

Further, since a ball screw, a timing belt or the like is required as a drive transmission device, a large amount of space is required and the weight is large. Therefore, it is inefficient to convert rotation into a straight line. Needless to say, a guide-integrated type, that is, a direct drive actuator is required to solve these problems.

[0004]

Current direct drive type actuators include those using a direct drive stepping motor and linear servo motors.
There are problems with electromagnetic field generation, heat generation, and thrust.

On the other hand, there is an ultrasonic motor which is a frictional drive utilizing resonance as a motor which generates a small amount of heat, has a large thrust and has a low noise, but an expensive high frequency wave power source is required to drive the ultrasonic motor. is there. Further, even if a contact preload is applied to the motor, point contact occurs during driving, and the stop holding force becomes small, which makes it unsuitable as a vertical actuator.

Further, there is an inchworm as an actuator using a piezoelectric element.

However, since the inchworm has a holding force limited by the force of the piezoelectric element, the holding force is limited, and in the event of a power failure, the holding force is completely lost. I will end up. In addition, when the device is used by interposing it in a fixed gap, there is a problem that the holding force fluctuates greatly due to variations in the gap.

[0008] Further, pressing → extension → release → pressing,
The movement is awkward due to the series of flows.

The present invention has been made to solve the above-mentioned problems of the prior art. The object of the present invention is to make it possible to obtain a large holding force and to stabilize even if there is some variation in the mounting location. An object of the present invention is to provide a traveling / feeding device that can obtain the required traveling performance and holding power.

[0010]

In order to achieve the above object, in the present invention, the contact surface is separated by a predetermined distance.
And the main body to be placed on the contact surface for a predetermined distance.
It is supported so that it can move relative to the contact surface in parallel while being held at a distance.
Support mechanism and a plurality of contacts that contact the contact surface.
A tentacle, provided between the plurality of contacts and the main body,
Apply the pressing force by pressing the multiple contacts onto the contact surface.
And pressing means for holding the predetermined load, provided between the plurality of at least some of the contacts and the contact surface of said contacts,
Characterized in that it comprises a, an actuator for displacing in a direction parallel to the direction further contact surface pressing and away from the contact surface at least a portion of the contact.

A plurality of actuators having foot portions as the contactors are provided, and the foot portions of some actuators are brought into contact with each other.
Contacting a surface and performing a forward motion while supporting the pressing force of the pressing means, moving the foot part of the other actuator away from the contact surface and moving it forward, and alternating the operations of some of the actuators and other actuators. Driven by
It is characterized by performing .

It has an actuator as a contactor and an inactive body, and these are pressed by the pressing means as a whole with a predetermined force.
The action of pressing the contact surface and moving the foot part of the actuator while supporting it with an inactive body, bringing the foot part into contact with the contact surface , and moving the actuator while holding the contact, It is characterized by being driven by alternately performing an operation of relatively moving an inactive body.

The actuator and the inactive body may have a separate structure or may have an integrated structure.

The pressing force of the pressing means may be mechanical spring force, fluid force, repulsive force of magnetic force, or suction force.

Further, it is characterized in that it has a displacement detecting means for detecting the displacement of the contact .

It is preferable to control the walking position by controlling the actuator based on the displacement information detected by the displacement detecting means.

A force detecting means for detecting the pressing force and the thrust force is provided.

The pressing force and the thrust force are controlled based on the force information detected by the force detecting means.

As the displacement generating means of the actuator, a piezoelectric element or an electrostrictive element, a means for displacing by thermal expansion, a means utilizing a fluid force, a means utilizing a voice coil, a means utilizing a magnetostrictive element and the like can be used. .

The bottom surface of the contactor in contact with the contact surface has an arc shape, and it is effective to make rolling contact with the contact surface .

Further, it is preferable that the contactor is rotatably supported with a position separated from the contact surface by a predetermined distance as a fulcrum.

It is effective that the contactor is supported by a hinge mechanism using a spring. Support mechanism is the contact surface
Is movably supported by rails as rolling elements
Characterized by being composed of a block as a main body
I do.

[0023]

In the present invention, the plurality of contacts are pressed against the contact surface by the pressing means as a whole with a predetermined pressing force.

[0024] Then, at the time of walking, at least a portion of the contact of the contact by the actuator, pushing Te is separated other contacts from the contact surface to the contact surface, the displacement in the horizontal direction with respect to the further contact surface Let me move forward and then this
The contact is separated from the contact surface and another contact is brought into contact with the contact surface . Driving is realized by repeating this movement. Moreover, since the contactor is pressed as a whole by the pressing means, a strong stop holding force can be obtained.

As the plurality of contacts, a plurality of foot portions driven by an actuator may be alternately operated, or a combination of a foot portion driven by the actuator and a brake not driven by the actuator may be used. It may be driven.

[0026]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to illustrated embodiments.

1 (a) to 1 (c) show the traveling / driving of the present invention.
The first basic form of the device is shown in FIGS. 1 (d) to 1 (f).

First, the first basic form will be described.
In this example, the foot portions 1 and 2 as the contactors contacting the contact surface
It has the 1st, 2nd actuators 3 and 4 which have. These first and second actuators 3 and 4 are intermediate bodies 5
The intermediate body 5 is connected to the main body 7 via a spring member 6 as a pressing means. This body 7
Connected by a support mechanism (not shown) such as a linear motion guide device.
The contact surface 8 while maintaining a constant gap 9 with respect to the contact surface 8.
It is supported so as to be relatively movable in parallel with.

The legs 1 and 2 of the first and second actuators 3 and 4 are pressed against the contact surface 8 by a spring member 6 with a predetermined load.

Then, the foot portion 1 of the first actuator 3
Are brought into contact with the contact surface 8 to perform a forward movement while supporting the pressing force of the spring member 6, and the second actuator 4 on the other side is moved.
The foot portion 2 is separated from the contact surface 8 and moved forward. These operations may be performed at the same time, or a time difference may be provided.
Then, the operation is performed by alternating the operations of the first and second actuators 3 and 4.

In this first basic form, three or more legs and actuators may be provided.

Next, the second basic form will be described.
In this example, an actuator 10 and a braking means 11 as an inactive body are attached to an intermediate body 12, and this intermediate body 12 is connected to a main body 14 via a spring member 13 as in the first basic form.

Then, the spring member 1 as the pressing means.
Due to the spring force of 3, the actuator 10 and the braking means 11 are pressed against the contact surface 8 with a predetermined force as a whole. An operation of moving the actuator 10 while supporting the pressing force by the braking means 11 and a step of bringing the foot portion 15 into contact with the contact surface 8 and moving the actuator 10 while holding the contact point, and brakes relative to the foot portion 15. The means 11 is moved to perform the moving operation,
The drive is performed by performing them alternately.

FIG. 2 shows an example of the structure of the foot and actuator of the first basic form.

This actuator is shown in FIG.
As shown in (b), the foot portion 16, a support portion 18 that supports the foot portion 16 through a thin leaf spring portion 17, and the foot portion 1
The first and second displacement generating means 19 and 20 are arranged in a V shape and 6 is interposed between the support portions 18. Thus, the foot portion 16 is rotatably supported with the leaf spring portion 17 at a position separated from the contact surface 8 by a predetermined distance as a fulcrum. Then, by inputting a drive signal having a waveform as shown in FIGS. 2E and 2F to the first and second displacement generating means 19 and 20, the foot 16 is moved from its upright posture to the traveling direction. The foot portion 16 is operated so as to kick out to the opposite side.

The actuator A thus constructed,
2 are arranged in parallel as shown in FIG.
Walking motion is performed by inputting a signal as shown in (h).

2 (a) and 2 (b) is a normally open type structure in which the foot 16 is always separated from the contact surface 8 in a free state, but shown in FIGS. 2 (i) and 2 (j). So that the foot 16
It is also possible to adopt a configuration of a normally closed type in which is always in contact with the contact surface 8.

This traveling / feeding device is used as a support mechanism.
It is preferable to install the linear or curved guide device having a constant gap as shown in FIG. 2 (k).

3A and 3B show the driving of the foot portion 16.

In this embodiment, as shown in FIG. 3 (a), an operation of kicking backward from an upright posture is performed.
It is not preferable to contact the contact surface 8 from the heel portion 16a as shown in FIG. 6B because the heel portion 16a and the contact surface 8 are rapidly worn.

Further, as the shape of the contact surface of the foot portion 16,
It is preferable to have an arc shape as shown in FIG. By doing so, the rolling element 21 shown in FIG.
It becomes possible to make rolling contact in the same manner as, and wear is significantly improved.

FIG. 4 shows another structural example of the actuator.

4 (a) and 4 (b), two displacement generating means 22 and 23 are arranged in parallel.

In FIG. 4 (c), a parallel plate structure is used as the spring portion 17, which can be deformed vertically and horizontally, and displacement generating means 22 and 23 for generating displacement in each direction.
24 is provided.

FIG. 4 (d) uses a leaf spring structure as the structure of the spring portion of FIGS. 4 (a) and 4 (b).

As the displacement generating means, various elements such as a piezoelectric element or an electrostrictive element, a means utilizing thermal expansion, a means utilizing fluid pressure, a means utilizing a voice coil, a magnetostrictive element and the like can be used. .

In addition to the basic spring member shown in FIG. 1, as the pressing means, a means utilizing fluid pressure, a means utilizing repulsive force of magnetic force, a suction force or the like can be used.

FIG. 5A shows a control configuration example.

That is, it comprises a displacement detecting means 25 for detecting the displacement of the foot portion 16 and a controller 26 for controlling the actuators 3, 4 based on the displacement information detected by the displacement detecting means 25.

Further, force detecting means 27 for detecting the pressing force.
It is also possible to adjust the pressing force based on the force information from the force detecting means 27.

FIG. 5B shows an example in which the strain gauge 23 is used as the displacement detecting means in the actuator of the type shown in FIG.

5 (c) and 5 (d) show the displacement generating means 19,
The displacement output is detected for 20 displacements, and the displacement output is fed back to the displacement generating means 19 and 20 to control the displacement.

Of these, FIG. 5C shows the analog output of the strain gauge 28 that is fed back as it is.
In (d), the output is digitally converted and fed back to the CPU.

FIG. 6 (a) is constructed by punching out one plate, and basically has a foot 29 and a C surrounding the foot 2.
It is composed of a character-shaped intermediate body 30 and a C-shaped body 31 surrounding the outer side thereof. And foot 29
The intermediate body 30 is rotatably supported by the spring hinge portion 32, and the intermediate body 30 and the main body 31 are supported by the spring portion 33 of the parallel plate mechanism. The spring portion 33 is configured to press the brake portion 34 extending downward from both ends of the C-shaped intermediate body 30 and the foot portion 29 against the contact surface 8.

FIGS. 6B and 6C schematically show the brake unit 34 and the actuator 35 as inactive bodies, and the simplest arrangement is to arrange them in parallel. In this regard, the configuration shown in FIG. 6A described above allows the brake portion 34 and the actuator 35 to be manufactured on one plane.

Contact surface 8 of brake portion 34 and foot portion 29
It is desirable that the contact surface with has a large friction coefficient. By increasing the friction coefficient, the holding force increases. Therefore, it is effective to coat the contact surface with a substance having a large friction coefficient (for example, carbon metal).

On the other hand, since the corners of the foot 29 are easily worn, it is effective to make them round and to coat them with a substance having a small friction coefficient (such as PTFE).

FIG. 6 (d) shows the displacement generating means 36, 37 in a different direction from that of FIG. 6 (a), and is arranged in a V shape. In this example, the center is the brake portion 34, and the both sides are the foot portions 29, 29.

FIG. 7 shows the actuator 35 and the brake unit 3 with the spring portion of the actuator of FIG. 6A as a separate body.
Only 4 is composed of one flat plate. Spring member 3
Reference numeral 8 is a U-shaped block body that is assembled by sandwiching both side surfaces of the brake portion 34 and the actuator 35, and is composed of left and right holding pieces 39, 39 and a connecting piece 40 connecting these. This sandwiching piece 39, 39
Are provided with spring portions 41, 41 having a parallel plate structure, respectively. Then, the connecting piece 40 comes into contact with the upper end surfaces of the actuator 35 and the brake portion 34, and the holding pieces 39, 39
The lower ends of the brake parts are connected to the lower ends of the brake parts 34, 34.

FIG. 8A is a conceptual diagram of the actuator of FIG. 6A, and the pressing force of the actuator 35 and the braking portion 34 can be freely changed by changing the spring constant k of the spring member 33. In the parallel plate structure of FIG. 6A, the spring constant can be changed by changing the thickness of the spring portion 33. As the spring, various springs such as a coil spring and a disc spring can be applied.

Here, when walking, the spring portion 33 contracts or extends, but the pressing force does not change much in either case. The amount of displacement during walking is, for example, several [μ
Considering about m], from the viewpoint of the natural length of the original spring, the compression amount is normally kept to about 2 to 3 [mm]. Changes only about one thousandth. Therefore, a very stable holding force can be secured.

In the example shown in FIG. 8B, the traveling / feeding devices are arranged in parallel to increase the thrust and the holding force.

9 (a) and 9 (b) are integrated vertically with the spring portion 43 at the center. By doing so, it becomes possible to move inside the tubular body or inside the U-shaped body. The traveling / feeding device applies pressing force by making it shorter than the cylinder diameter.

FIGS. 10 (a) and 10 (b) show a bearing on one side assembled, and a straight road rolling guide mechanism 4 is provided on the opposite side of the brake portion 34 and the actuator 35 of the traveling / feeding device.
4 is provided. Since the traveling / feeding device has the spring portion 33, misalignment can be absorbed, and the rolling element 45
A predetermined preload can be applied to the.

FIG. 11 shows a method of mounting the traveling / feeding device 46.

The traveling / feeding device 46 must apply a preload as a pressing force in order to obtain a holding force. As a method for applying a preload, there is a method as shown in FIGS.

The example shown in FIG. 11A is an adjustment bolt 47.
The guide portion 48 and the traveling / feeding device 46 are joined by the joining bolts 49, and the traveling / feeding device 46 is pressed by the adjusting bolt 47.

FIG. 11B shows a taper gib 50 used in place of the adjusting bolt 47 of FIG. 11A.
11 (c) is an example using the eccentric pin 51.

FIG. 12 shows an example in which the traveling / feeding device 46 is attached to the block 54 side in the straight or curved guide.

FIG. 12A shows an example of walking while holding the side surface of the rail 52.

FIG. 12B shows an example in which two traveling / feeding devices 46 are used and the left and right side surfaces of the rail 52 are pressed to walk.

FIG. 12C shows an example of walking while pressing the mounting surface of the rail 52.

FIG. 12 (d) shows two left and right running / feeding devices.
This is an example of holding the mounting surface 53 of the rail 52 and walking on the table 46.

FIG. 12E shows one or two or more
This is an example in which the traveling / feeding device 46 is used to hold the upper surface of the rail 52 and walk.

FIG. 12 (f) shows the traveling / feeding device 46 in two positions.
This is an example of interposing between the individual blocks 54, 54.

FIG. 13 shows an example in which the traveling / feeding device 46 is embedded in the block 54 of the linear or curved guide device.

FIGS. 7A and 7B show the case where the block 54 is inserted at the center, FIG. 7B shows the case where the block 54 is inserted at the end, and FIG. 7C shows the case where two or more blocks are inserted. Shows.

In FIG. 14, the rail 52 is divided into
In the example in which the traveling / feeding device 46 is arranged, the block height can be kept low.

FIG. 15 shows a block 54 on the outer rail 52.
This is an example in which the traveling / feeding device 46 is assembled to a straight road guide device of a type that sandwiches the.

FIG. 16 shows a ball spline running / feeding device.
This is an example in which the device 46 is attached. The ball splines are 6 rows and 2 rows are equally distributed at an angle of 120 °. Therefore,
Attach the traveling / feeding device 46 to the ball spline nut 120.
By arranging them equally at an angle of °, it is possible to move the three synchronously without any offset.

FIG. 17 is applied to the drive mechanism of the XY table.

One or more traveling / feeding devices 46 are fixed to the table 55 in parallel, and the foot portions 29 are moved by pressing them against another surface. Two tables 55, 56
By combining, it is possible to realize a very thin XY table.

When the X-axis traveling / feeding device 46 is stopped, the Y-axis is also braked. X axis travel / feed
When the device 46 operates, the Y-axis traveling / feeding device 46
The brake is lifted and released to operate in the X-axis direction.

In the illustrated example, two XY axes are used, but four axes may be used.

FIG. 18 shows an example of attachment to a normal table.

The running / feeding device 46 may be fixed to the table 57 and run on the base 58.
Even if the table 57 is driven while being fixed to the base 58, the table 57 can be moved by either of them.

FIG. 18 (a) shows one or more runs.
When the line / feed device 46 is attached to the table 57, FIG.
(B) shows the case where one or more traveling / feeding devices 46 are attached to the center and other than the center, respectively.

FIG. 19 shows another embodiment of the self-propelled table using the traveling / feeding device 46.

The concave base 59 is used, and the foot portions 2 of the traveling / feeding device 46 are attached to the edge portions 60, 60 on both sides of the base 59.
It is possible to move with preload and rigidity by pressing the upper part 8 and the brake part 34 against each other.

FIG. 20 shows a configuration example of feedback control using the linear scale 61.

This is to mount a linear scale 61 in parallel with the rail 52, read the output of the linear scale 52, and feed it back to the displacement generating means 36, 37 to make a minute displacement.

In FIG. 20B, the output of the linear scale 61 is directly input to the CPU and the position is controlled by software.

In FIG. 20 (c), the output of the linear scale 61 is F / V converted and used in the velocity loop, and the output of the linear scale 61 is input to the deviation counter for position servo. Moreover, the velocity loop and the position servo are used at the same time.

FIG. 21 shows an example in which the traveling / feeding device 46 is used as a gripping tool.

Two or more blocks 6 in which the rails 62 are arranged in a V shape and are provided with traveling / feeding devices 46, 46, respectively.
By attaching fingers 64, 64 to 3, 63, the object can be sandwiched between the fingers 64, 64. Running / feeding equipment
Since the mount 46 is a spring, it is possible to give a smooth motion to the fingertip.

FIG. 22 shows a rotary cylinder 63 using the traveling / feeding device 46.

The cylindrical shaft 64 at the center is fixed so as not to rotate, and the rotary cylinder 63 is rotatably assembled through the rotary bearing 65. Inside this rotary cylinder 63, one or more traveling / feeding devices 46 are fixed to the cylindrical shaft 64,
By rotating the inside of the rotary cylinder 63, the rotary cylinder 63 rotates.

FIG. 23 shows the disk 6 by the traveling / feeding device 46.
In this example, 6 is rotated.

A disc 66 with a rotating shaft 67 is provided with a traveling / feeding device.
The disk 6 and the rotary shaft 67 can be rotated by attaching the table 46. Also, make the disk 66 a cylinder and run
It is also possible to attach two or more line / feed devices 46 and rotate them.

FIG. 24 shows an example of a direct drive motor of a self-centering type traveling / feeding device .

FIG. 24 (a) is a 2- drive / feed device direct drive motor, and FIG. 24 (b) is 3- drive / feed.
The device direct drive motor is shown.

Basically, traveling / sending on the cylindrical outer wall portion 68
The rotation device 46 rotates by walking. The compression spring 68 is used to increase the rigidity.

In FIG. 25, the traveling / feeding device 46 has a rotor 70.
It is an example of a self-centering type actuator motor that rotates by walking around. Since the traveling / feeding device 46 has the spring portion 33, it is automatically aligned.

(A) of the figure is a type of 2- traveling / feeding device , the phase required for rotation is 2 phase or 4 phase, and (b) of the same figure is type of 3- running / feeding device motor. The phase required for rotation is 2 or 6 phases.

In FIG. 26, the traveling / feeding device 46 is applied to a stepping motor and a servomotor 72.

Current stepping motors and servomotors can perform positioning only within the range of the capability of the encoder 75. However, by combining the traveling / feeding device 46, it is possible to perform positioning beyond the resolution of the encoder 75. The traveling / feeding device 72 is provided between the stator portion 73 and the rotor portion 74.

FIG. 27 shows an example applied to a nut rotation type ball screw drive.

A rotary bearing 77 is attached around the ball screw nut 76. The outer ring of the rotary bearing 77 is fixed to the table 78 with a jig. The traveling / feeding device 46 is mounted between the rotary bearings 77, 77, and the table 78 is moved by the rotation of the nut 76 while fixing the ball screw shaft 79.

FIG. 28 shows an example in which the ball screw shaft 79 is driven by the traveling / feeding device 46.

Running attached to ball screw nut 76
Make sure that the brake and foot of the line and feed device 46 hit the threads of the screw. In the traveling / feeding device 46, the nut 76 rotates by walking in the direction of the arrow in the figure.

FIG. 28C shows an example in which the traveling / feeding device 46 is embedded in the nut 76.

In FIG. 29, three displacement generating means 80, 81, 82 are provided in any direction of 360 ° from the present position.
Since it moves freely within a displaceable circumference, it can be freely displaced by 360 °.

The displacement generating means 80, 81, 82 are arranged as follows.
The angles are 120 ° when viewed from above and 45 ° when viewed from the side.

The apparatus is constructed such that a small-sized disc spring 84 and a large-sized disc spring 85 are provided in a cylindrical case 83 whose lower side is opened.
The hat-shaped cylinder 86 is inserted through. Brake feet 86 are provided on the end surface of the hat-shaped cylinder 86, and the displacement generating means 80, 81,
82 and foot 29 are incorporated.

FIG. 30 shows an arrangement reverse to that of FIG. 29, in which the displacement generating means 80, 81, 82 are arranged at equal intervals of 120 ° when viewed from above and are arranged at 45 ° from the horizontal direction so that the foot portion 29 can be moved in any direction. Move freely within a displaceable circumference. Therefore, the displacement generating means 80, 81, 82 and the ball 88 rotate in either direction due to friction. When a plate is placed horizontally on this ball 88,
The board will move in either direction.

FIG. 31 shows a sphere 8 using a traveling / feeding device .
This is an example of moving 360 ° by 9.

The four traveling / feeding devices 46 are arranged on the sphere 89 as shown in the figure, and by applying pressure, they can move in any direction of 360 °.

In the traveling / feeding device of FIG. 32, the traveling / feeding device 46 is statically operated when slight movement or holding force is required.
Use the principle of.

On the other hand, when the coarse movement or the holding force is not required, the principle of the ultrasonic motor is dynamically adopted.

When the ultrasonic motor is used, a voltage for lifting the foot portion 34 is applied in advance, and the displacement generating means 36, 37 are used.
Apply high frequency voltage to. At this time, the natural frequency is changed by changing the initial pressing force of the spring 33, and high-speed traveling is also possible.

[0121]

As described above, the traveling / sending of the present invention is performed.
In the device , even if the power is turned off, the device is pressed against the contact surface by the pressing means, so that the device is self-held on the contact surface.

Further, even if there is some dimensional variation in the mounting location, it is possible to almost eliminate the fluctuation of the holding force, and it is possible to obtain stable exercise performance.

Further, although it has a very simple structure, its application range is extremely wide.

[Brief description of drawings]

FIG. 1 is an explanatory diagram of a basic concept of a traveling / feeding device of the present invention.

FIG. 2 is an explanatory diagram of an actuator portion of a foot portion of the traveling / feeding device of the first type of the present invention.

FIG. 3 is a diagram for explaining an operation of a foot portion.

FIG. 4 is a diagram showing another configuration example of an actuator portion.

FIG. 5 is a diagram showing a control configuration of a traveling / feeding device .

FIG. 6 is an explanatory diagram of a modified example of the traveling / feeding device of the second type of the present invention.

FIG. 7 is a diagram showing a modification of FIG. 6.

FIG. 8 is a diagram showing a modification of FIG. 6.

9 is a diagram showing a modification of FIG.

FIG. 10 is a view showing a one-sided rolling guide type traveling / feeding device .

FIG. 11 is a diagram showing a method of mounting the traveling / feeding device .

FIG. 12 is a diagram showing an example of attachment to a rolling guide device.

FIG. 13 is also a diagram showing an example in which FIG. 13 is attached to a rolling guide device.

FIG. 14 is a diagram showing an example of attachment to a rolling guide device.

FIG. 15 is a diagram showing an example of attachment to another type of rolling guide device.

FIG. 16 is a diagram showing an example of attachment to a ball spline.

FIG. 17 is a diagram applied to an XY table.

FIG. 18 is a diagram applied to a table transfer device.

FIG. 19 is a diagram showing another configuration example of an XY table.

FIG. 20 is a diagram showing a control configuration example using a linear scale.

FIG. 21 is a diagram applied to a gripping tool. Ur.

FIG. 22 is a view showing a rotary cylinder.

FIG. 23 is a diagram showing a configuration of a rotating disk.

FIG. 24 is a diagram showing a configuration example of a direct drive motor.

FIG. 25 is a diagram showing a configuration example of another type of direct drive motor.

FIG. 26 is a diagram showing a configuration example for increasing the resolution of a stepping motor or the like.

FIG. 27 is a diagram showing a configuration example of driving a ball screw.

FIG. 28 is a diagram showing another example of the structure of driving a ball screw.

[Fig. 29] Fig. 29 is a view showing traveling / displacement in a 360 ° direction.
It is a figure which shows the structural example of a feeder .

30 is a diagram showing a configuration example in which a sphere can be rotated in a direction of 360 ° by using the actuator of FIG.

FIG. 31 is a diagram showing another method of rotating a sphere using a traveling / feeding device .

FIG. 32 is a diagram for explaining a case where the traveling / feeding device is used as an ultrasonic motor.

[Explanation of symbols]

1, 2 Foot part 3, 4 1st, 2nd actuator 5 Intermediate body 6 Spring member 7 Main body 8 Contact surface 9 Gap 10 Actuator 11 Brake means 12 Intermediate body 13 Spring member 14 Main body 15 Foot part 16 Foot part 17 Leaf spring part 18 Support portion 19, 20 First and second displacement generating portion 25 Displacement detecting means 26 Controller 27 Force detecting means 28 Strain gauge 29 Foot portion 30 Intermediate body 31 Main body 32 Spring hinge portion 33 Spring portion 34 Brake portion 35 Actuator 36, 37 Displacement generating means 38 Spring member 46 Traveling / feeding device

Claims (15)

(57) [Claims] 1. Arranged at a predetermined distance from the contact surface.
And the contact surface with the main body being held at a predetermined distance from the contact surface.
A support mechanism that is supported so as to be relatively movable in parallel with the plurality of contact elements ; a plurality of contact elements that contact the contact surface; and a plurality of contact elements that are provided between the plurality of contact elements and the main body.
Of the contact element against the contact surface and apply the pressing force to the specified load.
A pressing means for maintaining a heavy weight, and contacting at least a part of the contactors of the plurality of contactors.
Provided between Sawamen, characterized in that it comprises a, an actuator for displacing in a direction parallel to the direction further contact surface pressing and away from the contact surface at least part of the contact Traveling / feeding device. 2. A plurality of actuators having a foot portion as a contactor are provided, a foot portion of a part of the actuator is brought into contact with a contact surface , and a forward movement is performed while supporting a pressing force by a pressing means, The actuator is driven by moving the legs of the actuator away from the contact surface and moving forward, and by alternating the operations of some of the actuators and other actuators.
The traveling / feeding device according to claim 1, which is performed . 3. An actuator having a foot as a contactor and an inactive body, the pressing means pressing them against the contact surface as a whole with a predetermined force, and supporting the inactive body to support the foot of the actuator. To move the
Driving is performed by alternately contacting the foot with the contact surface and moving the actuator while holding the contact, and moving the inactive body relatively to the foot to move.
Running and feeding instrumentation according to claim 1, characterized in that
Place. 4. The traveling / feeding device according to claim 3, wherein the actuator and the inactive body are separate components . 5. The traveling / feeding device according to claim 3, wherein the actuator and the inactive body are integrally configured . 6. The traveling / feeding device according to claim 1, wherein the pressing force by the pressing means is one selected from the group consisting of mechanical spring force, fluid pressure, repulsive force of magnetic force, and attractive force.
Equipment. 7. The traveling / feeding device according to claim 1, further comprising displacement detecting means for detecting displacement of the contact.
Place. 8. The traveling / feeding device according to claim 7 , wherein the actuator is controlled based on the displacement information detected by the displacement detecting means. 9. The traveling / feeding device according to claim 1, further comprising force detection means for detecting a pressing force and a thrust force.
Equipment. 10. The traveling / feeding device according to claim 9 , wherein the pressing force and the thrust force are controlled based on the force information detected by the force detecting means . 11. The displacement generating means of the actuator is a piezoelectric element or an electrostrictive element, means for displacing by thermal expansion,
4. The traveling / feeding device according to claim 1, wherein the traveling / feeding device is one selected from the group consisting of means utilizing fluid pressure, voice coil, and means utilizing magnetostrictive element . 12. The traveling / feeding device according to claim 1, wherein the bottom surface of the contactor which is in contact with the contact surface has an arc shape and is in rolling contact with the contact surface . 13. contactor is running and feeding apparatus according to claim 1, 2 or 3 is rotatably supported in the fulcrum position apart a predetermined distance from the contact surface. 14. The traveling / feeding device according to claim 13 , wherein the contactor is supported by a hinge mechanism including a spring . 15. The support mechanism comprises a rail as a contact surface.
As a main body, which is movably supported via rolling elements,
According to claim 1, 2 or 3, wherein
Traveling / feeding device.