JP2551745B2 - 摩耗，変形，表面疲労，腐蝕に耐え得る高い硬度を有するクロム層 - Google Patents
摩耗，変形，表面疲労，腐蝕に耐え得る高い硬度を有するクロム層Info
- Publication number
- JP2551745B2 JP2551745B2 JP57154467A JP15446782A JP2551745B2 JP 2551745 B2 JP2551745 B2 JP 2551745B2 JP 57154467 A JP57154467 A JP 57154467A JP 15446782 A JP15446782 A JP 15446782A JP 2551745 B2 JP2551745 B2 JP 2551745B2
- Authority
- JP
- Japan
- Prior art keywords
- chromium
- layer
- carbon
- high hardness
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 title claims description 108
- 239000011651 chromium Substances 0.000 title claims description 105
- 229910052804 chromium Inorganic materials 0.000 title claims description 101
- 230000007797 corrosion Effects 0.000 title description 9
- 238000005260 corrosion Methods 0.000 title description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 62
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 62
- 229910052799 carbon Inorganic materials 0.000 claims description 60
- 229910052757 nitrogen Inorganic materials 0.000 claims description 31
- 238000004544 sputter deposition Methods 0.000 claims description 20
- 239000012298 atmosphere Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 13
- 239000006104 solid solution Substances 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 6
- 150000001875 compounds Chemical class 0.000 claims description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 3
- 239000004215 Carbon black (E152) Substances 0.000 claims 1
- 229930195733 hydrocarbon Natural products 0.000 claims 1
- 150000002430 hydrocarbons Chemical class 0.000 claims 1
- 239000010410 layer Substances 0.000 description 73
- 238000000034 method Methods 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000009713 electroplating Methods 0.000 description 6
- 229910000831 Steel Inorganic materials 0.000 description 5
- 238000005452 bending Methods 0.000 description 5
- 239000012071 phase Substances 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- GVEHJMMRQRRJPM-UHFFFAOYSA-N chromium(2+);methanidylidynechromium Chemical compound [Cr+2].[Cr]#[C-].[Cr]#[C-] GVEHJMMRQRRJPM-UHFFFAOYSA-N 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 230000036961 partial effect Effects 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- 229910003470 tongbaite Inorganic materials 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000012300 argon atmosphere Substances 0.000 description 2
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 150000001722 carbon compounds Chemical class 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 230000000670 limiting effect Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 244000025254 Cannabis sativa Species 0.000 description 1
- 235000012766 Cannabis sativa ssp. sativa var. sativa Nutrition 0.000 description 1
- 235000012765 Cannabis sativa ssp. sativa var. spontanea Nutrition 0.000 description 1
- 241000920340 Pion Species 0.000 description 1
- LUTSRLYCMSCGCS-BWOMAWGNSA-N [(3s,8r,9s,10r,13s)-10,13-dimethyl-17-oxo-1,2,3,4,7,8,9,11,12,16-decahydrocyclopenta[a]phenanthren-3-yl] acetate Chemical compound C([C@@H]12)C[C@]3(C)C(=O)CC=C3[C@@H]1CC=C1[C@]2(C)CC[C@H](OC(=O)C)C1 LUTSRLYCMSCGCS-BWOMAWGNSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 235000009120 camo Nutrition 0.000 description 1
- 235000005607 chanvre indien Nutrition 0.000 description 1
- 150000001844 chromium Chemical class 0.000 description 1
- JOPOVCBBYLSVDA-UHFFFAOYSA-N chromium(6+) Chemical compound [Cr+6] JOPOVCBBYLSVDA-UHFFFAOYSA-N 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007850 degeneration Effects 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011487 hemp Substances 0.000 description 1
- 150000004677 hydrates Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8117040A FR2512070A1 (fr) | 1981-09-03 | 1981-09-03 | Couche de chrome de haute durete, capable de resister a la fois a l'usure, a la deformation, a la fatigue des surfaces et a la corrosion |
| FR8117040 | 1981-09-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58144473A JPS58144473A (ja) | 1983-08-27 |
| JP2551745B2 true JP2551745B2 (ja) | 1996-11-06 |
Family
ID=9261980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57154467A Expired - Lifetime JP2551745B2 (ja) | 1981-09-03 | 1982-09-03 | 摩耗，変形，表面疲労，腐蝕に耐え得る高い硬度を有するクロム層 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US4486285A (OSRAM) |
| EP (1) | EP0074322B1 (OSRAM) |
| JP (1) | JP2551745B2 (OSRAM) |
| BR (1) | BR8205242A (OSRAM) |
| CA (1) | CA1179969A (OSRAM) |
| DE (1) | DE3280327D1 (OSRAM) |
| FR (1) | FR2512070A1 (OSRAM) |
| IN (1) | IN160803B (OSRAM) |
| ZA (1) | ZA826468B (OSRAM) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH659758GA3 (OSRAM) * | 1983-02-17 | 1987-02-27 | ||
| JPS60208813A (ja) * | 1984-04-02 | 1985-10-21 | Mitsubishi Electric Corp | 光電変換装置とその製造方法 |
| US4761346A (en) * | 1984-11-19 | 1988-08-02 | Avco Corporation | Erosion-resistant coating system |
| US4741975A (en) * | 1984-11-19 | 1988-05-03 | Avco Corporation | Erosion-resistant coating system |
| GB8521406D0 (en) * | 1985-08-28 | 1985-10-02 | Atomic Energy Authority Uk | Coatings |
| FR2591613B1 (fr) * | 1985-12-16 | 1988-04-01 | Stephanois Rech Mec | Couches minces de metal condense sur un substrat et contenant carbone ou azote en solution d'insertion. |
| CH669347A5 (OSRAM) * | 1986-05-28 | 1989-03-15 | Vni Instrument Inst | |
| FR2653452B1 (fr) * | 1989-10-20 | 1992-01-24 | Stephanois Rech Mec | Revetement de substrat, pour conferer a celui-ci de bonnes proprietes tribologiques, en alliage chrome-azote, et procede d'obtention. |
| JP3221892B2 (ja) * | 1991-09-20 | 2001-10-22 | 帝国ピストンリング株式会社 | ピストンリング及びその製造法 |
| US5449547A (en) * | 1993-03-15 | 1995-09-12 | Teikoku Piston Ring Co., Ltd. | Hard coating material, sliding member coated with hard coating material and method for manufacturing sliding member |
| JP3350157B2 (ja) * | 1993-06-07 | 2002-11-25 | 帝国ピストンリング株式会社 | 摺動部材およびその製造方法 |
| JP3696406B2 (ja) * | 1998-06-18 | 2005-09-21 | 日本ピストンリング株式会社 | 摺動部材 |
| US6212997B1 (en) | 1999-02-01 | 2001-04-10 | Nordson Corporation | Reciprocating fluid pumps with chromium nitride coated components in contact with non-metallic packing and gasket materials for increased seal life |
| US7431777B1 (en) * | 2003-05-20 | 2008-10-07 | Exxonmobil Research And Engineering Company | Composition gradient cermets and reactive heat treatment process for preparing same |
| CN101035925B (zh) * | 2004-09-08 | 2010-09-08 | 比克-维奥利克斯公司 | 在剃须刀片刀口和剃须刀片上沉积涂层的方法 |
| US7263325B2 (en) * | 2004-10-04 | 2007-08-28 | Lexmark International, Inc. | Auger for use in an image forming device |
| US8092922B2 (en) * | 2008-06-30 | 2012-01-10 | GM Global Technology Operations LLC | Layered coating and method for forming the same |
| JP5914334B2 (ja) * | 2012-03-16 | 2016-05-11 | Ｔｐｒ株式会社 | 高靭性被膜及び摺動部材 |
| JP7728082B2 (ja) | 2020-12-23 | 2025-08-22 | Ｔｐｒ株式会社 | ＣｒＮ被膜、及び摺動部材 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3428541A (en) * | 1966-06-03 | 1969-02-18 | Victory Eng Corp | Arc deposition of platinum-carbon electrically resistive films |
| US3481854A (en) * | 1967-01-20 | 1969-12-02 | Us Air Force | Preparation of thin cermet films by radio frequency sputtering |
| US3635811A (en) * | 1967-11-06 | 1972-01-18 | Warner Lambert Co | Method of applying a coating |
| US3912461A (en) * | 1970-11-02 | 1975-10-14 | Texas Instruments Inc | Low temperature metal carbonitride coatings |
| US3912612A (en) * | 1972-07-14 | 1975-10-14 | Westinghouse Electric Corp | Method for making thin film superconductors |
| US4231816A (en) * | 1977-12-30 | 1980-11-04 | International Business Machines Corporation | Amorphous metallic and nitrogen containing alloy films |
| JPS6041702B2 (ja) * | 1979-05-04 | 1985-09-18 | 株式会社東芝 | 金属皮膜 |
-
1981
- 1981-09-03 FR FR8117040A patent/FR2512070A1/fr active Granted
-
1982
- 1982-08-26 EP EP82420124A patent/EP0074322B1/fr not_active Expired - Lifetime
- 1982-08-26 DE DE8282420124T patent/DE3280327D1/de not_active Expired - Lifetime
- 1982-09-02 US US06/414,100 patent/US4486285A/en not_active Expired - Lifetime
- 1982-09-02 CA CA000410683A patent/CA1179969A/fr not_active Expired
- 1982-09-03 JP JP57154467A patent/JP2551745B2/ja not_active Expired - Lifetime
- 1982-09-03 BR BR8205242A patent/BR8205242A/pt not_active IP Right Cessation
- 1982-09-03 ZA ZA826468A patent/ZA826468B/xx unknown
-
1983
- 1983-01-04 IN IN16/CAL/83A patent/IN160803B/en unknown
Non-Patent Citations (1)
| Title |
|---|
| 麻蒔立男「薄膜形成の基礎」（昭和５２−１−３０）日刊工業新聞社Ｐ．１２８．１３２ |
Also Published As
| Publication number | Publication date |
|---|---|
| DE3280327D1 (de) | 1991-06-06 |
| FR2512070B1 (OSRAM) | 1983-12-09 |
| JPS58144473A (ja) | 1983-08-27 |
| ZA826468B (en) | 1983-07-27 |
| IN160803B (OSRAM) | 1987-08-08 |
| CA1179969A (fr) | 1984-12-27 |
| EP0074322B1 (fr) | 1991-05-02 |
| EP0074322A3 (en) | 1984-10-17 |
| EP0074322A2 (fr) | 1983-03-16 |
| BR8205242A (pt) | 1983-08-16 |
| FR2512070A1 (fr) | 1983-03-04 |
| US4486285A (en) | 1984-12-04 |
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