JP2551625C - - Google Patents
Info
- Publication number
- JP2551625C JP2551625C JP2551625C JP 2551625 C JP2551625 C JP 2551625C JP 2551625 C JP2551625 C JP 2551625C
- Authority
- JP
- Japan
- Prior art keywords
- gauge
- gauge resistors
- acceleration
- weights
- beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001133 acceleration Effects 0.000 claims description 27
- 239000004065 semiconductor Substances 0.000 claims description 13
- 230000002093 peripheral Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 description 9
- 230000035945 sensitivity Effects 0.000 description 8
- 239000000758 substrate Substances 0.000 description 8
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 230000000875 corresponding Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006011 modification reaction Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Family
ID=
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