JP2551582B2 - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JP2551582B2 JP2551582B2 JP62112567A JP11256787A JP2551582B2 JP 2551582 B2 JP2551582 B2 JP 2551582B2 JP 62112567 A JP62112567 A JP 62112567A JP 11256787 A JP11256787 A JP 11256787A JP 2551582 B2 JP2551582 B2 JP 2551582B2
- Authority
- JP
- Japan
- Prior art keywords
- head
- thin film
- heads
- magnetic head
- film magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/1871—Shaping or contouring of the transducing or guiding surface
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、高密度記録VTR用のダブルアジマス磁気ヘ
ツド等に好適な薄膜磁気ヘツドに係り、特に、磁気テー
プ等の記録媒体との当接が安定な薄膜磁気ヘツドに関す
るものである。The present invention relates to a thin film magnetic head suitable for a double azimuth magnetic head for a high density recording VTR, and more particularly, to a contact with a recording medium such as a magnetic tape. Relates to a stable thin film magnetic head.
従来、高密度記録VTRの回転ヘツドとしては特開昭61
−150113号公報に記載のような、ダブルアジマスヘツド
が知られている。これは、回転ドラムに180゜離れて互
いにアジマス角の異なるヘツドA,Bを設けてノーマル再
生を行うと共に、ヘツドBの近傍にヘツドAと同一アジ
マス角の補助のヘツドB′を設け、スチル再生やスロー
再生時にはヘツドAとB′を用いることにより、S/Nの
向上を図つたものであつて、上記ヘツドBとB′は、フ
エライト又は磁性合金体のブロツクをギヤツプボンデイ
ングしていわゆるバルク式で作られ、手巻きによりコイ
ルが巻回され、テープの相対方向に沿つて空隙を挟んで
向き合うように支持プレート上に貼着されている。此の
種のダブルアジマス磁気ヘツドは、ブロツク状の磁気コ
ア体よりなり磁性コア体積が大きいバルク形で、コイル
の巻回半径が大きくならざるを得ないことから、2個の
ヘツド間の磁束洩れが増大し、クロストークが大きいと
いう問題があつた。Conventionally, as a rotary head of a high-density recording VTR, JP-A-61
A double azimuth head is known as described in Japanese Patent Publication No. 150113. This is to perform normal reproduction by providing heads A and B having different azimuth angles 180 ° apart from each other on the rotary drum, and also providing auxiliary head B'having the same azimuth angle as head A near head B for still reproduction. In order to improve the S / N by using the heads A and B'for slow reproduction, the heads B and B'are so-called gear-bonded blocks of ferrite or magnetic alloy. It is made in a bulk type, and a coil is wound by manual winding, and is attached on a support plate so as to face each other with a gap along the relative direction of the tape. This type of double azimuth magnetic head is a bulk type with a large magnetic core volume consisting of a block-shaped magnetic core body, and the winding radius of the coil is inevitably large, so the magnetic flux leakage between the two heads is large. However, there was a problem that the crosstalk was large.
一方、VTRなどに用いる磁気ヘツドとして、特開昭57
−176524号公報及び特開昭60−138714号公報には、薄膜
磁気ヘツドが示されており、これらの公報に記載のもの
は、記録媒体との当接の安定化を図るために、基板上に
形成した薄膜磁気ヘツド素子上に、ガラスボンド技術を
用いて保護板(ガラス層)を一体的に接着した構成とな
つている。またコイルも薄膜技術で比較的薄く小形に作
られている。On the other hand, as a magnetic head used for a VTR, etc.
-176524 and Japanese Patent Application Laid-Open No. 60-138714 disclose thin film magnetic heads, and those disclosed in these publications are mounted on a substrate in order to stabilize contact with a recording medium. A protective plate (glass layer) is integrally bonded onto the thin-film magnetic head element formed in step 1 by using the glass bonding technique. The coil is also made relatively thin and small by thin film technology.
上記特開昭57−176524号又は特開昭60−138714号公報
記載の薄膜磁気ヘツドでは、磁性コア及び導体コイルが
薄膜技術で薄く小さく作られるものであるが、これを上
記特開昭61−150113号公報記載のようなVTR用のダブル
アジマス磁気ヘツドに適用して、つき合せた2個の磁気
ヘツド間のクロストークを除去しようというものは知ら
れていない。In the thin film magnetic head described in JP-A-57-176524 or JP-A-60-138714, the magnetic core and the conductor coil are made thin and small by the thin film technique. It is not known to apply it to a double azimuth magnetic head for a VTR as described in Japanese Patent No. 150113 to remove crosstalk between two magnetic heads that are butted together.
そこで、本発明者等は、さきに、ダブルアジマスの2
個のつき合せ磁気ヘツドを薄膜技術で作り両ヘツド間の
クロストークを除去するものを提案したが、その場合に
記録媒体との間の安定した当接や磁気ヘツドの寿命の問
題については、特に考慮がなされなかつた。勿論、上記
各公報記載のヘツドにおいても、単に摩耗寿命の問題だ
けでなく安定した当接の問題を含めた考慮は、何れもな
されていない。また、保護板をガラスボンド手法で設け
るものは、ヘツド摩設を軽減する上で若干有利であると
はいえ、上記の安定した当接の点で不利であり、また、
製造プロセスが煩雑になる他、ガラス融点まで温度を上
げる必要から、用いられる磁性体材料,導電材料,絶縁
材料も耐熱性の高いものを要する等の制限が加わる問題
がある。Therefore, the inventors of the present invention have previously described the double azimuth 2
We proposed a method of making individual butted magnetic heads by thin film technology to eliminate crosstalk between both heads.In that case, the problems of stable contact with the recording medium and life of the magnetic head are It was never considered. Of course, in the heads described in the above publications, no consideration is given to not only the problem of wear life but also the problem of stable contact. Further, although providing the protective plate by the glass bond method is slightly advantageous in reducing head wear, it is disadvantageous in the point of stable contact described above.
In addition to the complicated manufacturing process, there is a problem that the magnetic material, conductive material, and insulating material used must have high heat resistance because the temperature must be raised to the glass melting point.
従つて、本発明は、上記従来技術の問題点を解消し、
2個のヘツドをつき合せる薄膜磁気ヘツドにおいて、両
ヘツドの記録媒体との安定な当接を確保し、摩耗寿命を
改善し、併せて製造工程の簡素化された薄膜ヘツドを提
供することにある。Therefore, the present invention solves the above-mentioned problems of the prior art,
In a thin film magnetic head in which two heads are brought into contact with each other, stable contact between both heads and a recording medium is ensured, wear life is improved, and at the same time, a thin film head whose manufacturing process is simplified is provided. .
上記目的を達成するため、本発明の薄膜磁性ヘツド
は、記録媒体の相対走行方向に所定の空隙を隔てて取付
台に取付けられた第1および第2のヘツドを有し、特徴
として、第1及び第2のヘツドの記録媒体摺動面の幅が
上記相対走行方向に沿つて記録媒体の入り側及び出側か
ら中央部に至るに従い徐々に狭くなるように構成され
る。上記第1及び第2のヘツドの少くとも一方は実質的
な記録再生のできる薄膜磁気ヘツドを構成するが、他方
の磁気ヘツドは、記録再生の行われない材質からできて
いるいわばダミーヘツドとしてもよい。上記ダブルアジ
マス磁気ヘツドの場合には、勿論、第1,第2ヘツド共に
実質的に記録再生の可能な磁気ヘツドである。磁気記録
再生ヘツドの作動磁気ギヤツプは、いずれも中央寄りす
なわち両ヘツドの向い合う面に近い所にある。第1及び
第2ヘツドを合せた摺動面の正面形状(後記第2図)は
記録媒体の入り側と出側で低く中央で高い弧状をなす。
なお、両ヘツド間の上記所定の空隙には記録媒体を支え
るような部材は存在せず凹所となつている。上記の出入
側で広く中央で狭い、いわば糸巻き状の摺動面を形成す
るには、薄膜技術で磁気ヘツドを作製した後、両側面に
中央がくびれた弧状のテーパをつけるように研摩すれば
よい。In order to achieve the above object, the thin film magnetic head of the present invention has first and second heads mounted on a mounting base with a predetermined gap in the relative running direction of the recording medium. The width of the recording medium sliding surface of the second head is gradually narrowed along the relative running direction from the entrance side and the exit side of the recording medium to the central portion. At least one of the first and second heads constitutes a thin film magnetic head capable of substantially recording and reproducing, but the other magnetic head may be a so-called dummy head made of a material which does not record or reproduce. . In the case of the double azimuth magnetic head, of course, both the first and second heads are magnetic heads on which recording and reproduction are substantially possible. The operating magnetic gears of the magnetic recording / reproducing head are located near the center, that is, near the facing surfaces of both heads. The front surface shape (FIG. 2 described later) of the sliding surface where the first and second heads are combined has an arc shape that is low at the entrance side and exit side of the recording medium and high at the center.
It should be noted that there is no member for supporting the recording medium in the above-mentioned predetermined gap between both heads, and it is a recess. In order to form a so-called thread-wound sliding surface that is wide at the entrance side and narrow at the center, a magnetic head is made by thin-film technology, and then polished so that both sides have arcuate tapering in the center. Good.
好適な実施例では、摺動面の横断形状(後記第3図)
に曲率をもたせることができる。In the preferred embodiment, the cross-sectional shape of the sliding surface (Fig. 3 below).
Can have a curvature.
第1及び第2のヘツドの摺動面の幅を入出側で広く中
央へ行く程狭くすることにより、記録媒体との当接が良
好になると共に、摩耗に対する寿命も長くすることがで
きる。即ち、磁気ヘツドが使い始めのときに、記録媒体
が所定の強さの力で磁気ヘツドを押圧すると、比較的幅
広の記録媒体出入側よりも、比較的幅狭で作動磁気ギヤ
ツプのある中央付近の法が記録媒体による摺動面への作
用圧力は大きくなるから、一定の幅(その寸法は幅広部
と幅狭部の中間の値〜幅広部の値)のものに比べて、作
動磁気空隙のある中央付近での当接関係は極めて良好な
ものとなる。By narrowing the widths of the sliding surfaces of the first and second heads on the inlet and outlet sides and narrowing them toward the center, the contact with the recording medium becomes good and the life against wear can be extended. That is, when the recording head presses the magnetic head with a force of a predetermined strength when the magnetic head starts to be used, the area near the center where the operating magnetic gear is relatively narrower than the relatively wide recording medium entrance / exit side. Since the pressure applied to the sliding surface by the recording medium is large, the operating magnetic gap is larger than that of a constant width (the dimension is a value between the wide portion and the narrow portion). The contact relationship in the vicinity of the center where there is is extremely good.
また、使用しているうちに、上記のような作用圧力の
関係から、磁気ヘツドの出側及び入り側近傍よりも中央
近傍の摩耗量が大きいので、摩耗は中央から始まつてだ
んだん出側と入り側に向つて進行して行く。これと共
に、実効的な記録媒体との当接面の面積は中央から始ま
つてだんだん出側と入り側に向つて広がつて行く。この
場合、テープとコンタクトしながら削られて行くので、
特性が劣化することは殆んどない。なお、上記のよう
に、両側面にテーパが付されている場合には、この広が
りは更に幅方向にも助長される。このようにして、ヘツ
ド摺接面積(摺動面積)が実効的に大きくなるので、記
録媒体との当接が安定に行われるのを確保しつつ、同時
に、摺接面積が広がるにつれてその摩耗量は徐々に減少
して行くので、結果としてヘツド摩耗速度が低下し、摩
耗寿命が増大する。Also, during use, the wear amount near the center is larger than near the outlet side and the inlet side of the magnetic head due to the above-mentioned working pressure relationship, so the wear starts from the center and gradually increases toward the outlet side. Proceed toward the entrance side. Along with this, the area of the effective contact surface with the recording medium starts from the center and gradually expands toward the exit side and the entrance side. In this case, it will be scraped while contacting the tape,
The characteristics are hardly deteriorated. When the both side surfaces are tapered as described above, this spread is further promoted in the width direction. In this way, since the head sliding contact area (sliding area) is effectively increased, it is possible to ensure stable contact with the recording medium, and at the same time, as the sliding contact area increases, the amount of wear increases. Gradually decreases, resulting in a lower head wear rate and increased wear life.
なお、両ヘツドをダブルアジマス薄膜磁気ヘツドとし
た場合に、磁気コア及びコイルの小型化薄型化が達成さ
れ、両ヘツド間の磁束洩れが低減されるのは、上記提案
した磁気ヘツドと同様である。また、薄膜形成面を互い
に向い合せてこの間に空隙をもたせヘツド取付台に一体
に取付けた構成であるから、従来技術のように薄膜磁気
ヘツド素子も保護板でガラスボンデイングする必要もな
く、製造工程が簡素化される。When both heads are made of double azimuth thin film magnetic heads, the magnetic core and the coil can be made smaller and thinner, and the magnetic flux leakage between both heads can be reduced, as in the magnetic head proposed above. . Further, since the thin film forming surfaces are faced to each other and a gap is provided between them so as to be integrally attached to the head mount, it is not necessary to glass bond the thin film magnetic head element with the protective plate as in the prior art, and the manufacturing process Is simplified.
以下、本発明の実施例を図面を用いて説明する。 Embodiments of the present invention will be described below with reference to the drawings.
第1図,第2図,第3図および第4図は、それぞれ本
発明の実施例である薄膜磁気ヘツドのヘツド摺動面方向
より見た平面図,側面図,第2図のA−A′断面図およ
びB−B′断面(薄膜形成面)である。1aはアジマス角
度+θでトラツク幅Tw1,1bはアジマス角度−θでトラツ
ク幅Tw2の薄膜磁気ヘツドで、ヘツドベース3上に両ヘ
ツドギヤツプ間隔がLgとなる様に貼り付けられたダブル
アジマス磁気ヘツドを構成する。丸く囲んだ斜線部分5
a,5bは薄膜磁気ヘツド素子、6a,6bは薄膜磁気ヘツド素
子を保護するための保護膜、11a,11bは非磁性基板、2a,
2bは記録媒体(テープ)と当接するヘツド摺動面、4a,4
bは上記ヘツド摺動面2a,2bを得るために必要なテーパ角
αで加工されたヘツドテーパ面、7はテープの走行方向
である。8は上部コア、9は薄膜コイル、10はコイル引
出し部、14a,14bは作動磁気空隙である。1, 2, 3, and 4 are a plan view, a side view, and A--A of FIG. 2, respectively, as seen from the head sliding surface direction of the thin film magnetic head according to the embodiment of the present invention. It is a'sectional view and a BB 'section (thin film forming surface). 1a is a thin film magnetic head having an azimuth angle + θ and a track width Tw 1 and 1b having an azimuth angle −θ and a track width Tw 2. Configure. Circled shaded area 5
a, 5b are thin film magnetic head elements, 6a, 6b are protective films for protecting the thin film magnetic head elements, 11a, 11b are non-magnetic substrates, 2a,
2b is a head sliding surface that contacts the recording medium (tape), 4a, 4
Reference numeral b is a head taper surface processed with a taper angle α required to obtain the head slide surfaces 2a and 2b, and 7 is a tape running direction. Reference numeral 8 is an upper core, 9 is a thin film coil, 10 is a coil drawing portion, and 14a and 14b are operating magnetic air gaps.
本実施例は以下の様にして製造される。第4図の薄薄
形成面の断面図が、第5図である。まず、薄膜磁気ヘツ
ド1aの製造方法は、ガラス,セラミツク,フエライト等
のテープとの当接が良好な非磁性基板(本実施例では、
MnO−NiO系のセラミツクを用いた。)11上に、下部コア
12としてCo−Nb−Zr等の非晶質合金12をスパツタリング
等の手法により約20μm形成することより始まる。次
に、SiO2,Al2O3等よりなる絶縁層13をスパツタリング等
で形成した後、Cuよりなる薄膜コイル9を形成し、更に
絶縁層13を形成して、薄膜コイル9と磁気コア8,12間の
電気絶縁を確保する。次に、ギヤツプ長を規制するギヤ
ツプ材14として、SiO2,Al2O3等を0.3μm形成し、更に
上部コア8として下部コア12と同一材料を所定の形状に
形成する。この時、第4図に示す様に、電極引き出し部
10として上記上部コア8と同一材料である非晶質合金を
用いると、上部コア8のパターニング工程で同時に形成
が可能となるので製造工程が簡素化される。次に、保護
膜6として、テープとの当接が良好な材料としてMgO−S
TO2系セラミツク層をスパツタリングあるいは蒸着等の
手法で約10〜60μm形成する。保護膜6の膜厚として
は、10μm以下だと、テープの走行による摩耗による急
激に保護膜6が削れること、また欠け等の発生によりテ
ープとの安定した当接が得られなくなる。一方、60μm
以上の膜厚の保護膜6を形成すると、保護膜6の内部応
力により基板11が反ること、また保護膜の形成時間が増
大し製造プロセスが煩雑になる等の問題が生じ、上部10
〜60μmの膜厚範囲が適切である。This example is manufactured as follows. FIG. 5 is a sectional view of the thinned surface of FIG. First, the method of manufacturing the thin film magnetic head 1a is performed by using a non-magnetic substrate (in this embodiment, a good contact with a tape such as glass, ceramic, or ferrite).
An MnO-NiO ceramic was used. ) 11 on the bottom core
It starts with forming an amorphous alloy 12 such as Co—Nb—Zr as 12 by about 20 μm by a method such as sputtering. Then, after forming a S i O 2, Al 2 O 3 or the like insulating layer 13 made of at Supatsutaringu etc., to form a thin film coil 9 made of Cu, and further forming an insulating layer 13, the thin film coil 9 and the magnetic Ensure electrical insulation between cores 8 and 12. Next, as Giyatsupu member 14 for regulating the Giyatsupu length, S i O 2, Al 2 O 3 or the like to 0.3μm formed, further form the same material as the lower core 12 in a predetermined shape as the upper core 8. At this time, as shown in FIG.
If an amorphous alloy made of the same material as the upper core 8 is used as the upper core 10, the upper core 8 can be simultaneously formed in the patterning process, so that the manufacturing process is simplified. Next, as the protective film 6, MgO-S is used as a material having good contact with the tape.
The TO 2 -based ceramic layer is formed to a thickness of about 10 to 60 μm by a method such as sputtering or vapor deposition. When the film thickness of the protective film 6 is 10 μm or less, the protective film 6 is abruptly abraded due to abrasion due to running of the tape, and a stable contact with the tape cannot be obtained due to chipping or the like. On the other hand, 60 μm
When the protective film 6 having the above-mentioned thickness is formed, problems occur such that the substrate 11 warps due to the internal stress of the protective film 6 and the time for forming the protective film increases to complicate the manufacturing process.
A film thickness range of up to 60 μm is suitable.
上記により得られた薄膜磁気ヘツド基板は、各ヘツド
毎に切断された後、機械加工により、まず第4図に示す
様に薄薄コイル9を切らない様にヘツドテーパ面4aを角
度αで形成する。角度αとしては、30〜60度が選ばれ
る。角度αが大きい方が、薄膜コイル9の配設面積が大
きくなり、薄膜コイル9の電気抵抗が小さくでき、ヘツ
ドのインピーダンスノイズが低減できるという効果があ
る。しかし、角度αが60度を越えて大きくなり過ぎる
と、ヘツドの摩耗に従い急激にヘツド摺動面幅Wが大き
くなり、安定なテープ当接がとれなくなるという問題が
発生する。次に、薄膜磁気ヘツド1a,1bをヘツドベース
3に所定の位置(ギヤツプ間隔Lgが本実施例では0.3〜
0.75mm)となる様に貼り付ける。更に、円筒研削あるい
はテープによる円筒研摩等の機械加工により、ヘツド摺
動面2a,2bをテープ走行7の方向へ半径R1,テープ走行の
幅方向に半径R2となる様に整形すると本発明の第1の実
施例である薄膜磁気ヘツドが得られる。本実施例ではR1
が8〜13mm、R2が2〜4mmが最もテープとの当接が安定
していた。The thin-film magnetic head substrate obtained as described above is cut into individual heads and then machined to form the head taper surface 4a at an angle α so as not to cut the thin and thin coil 9 as shown in FIG. . The angle α is selected to be 30 to 60 degrees. The larger the angle α is, the larger the area for disposing the thin-film coil 9 is, the smaller the electric resistance of the thin-film coil 9 is, and the more the impedance noise of the head can be reduced. However, if the angle α exceeds 60 degrees and becomes too large, the head sliding surface width W suddenly increases as the head wears, and stable tape contact cannot be achieved. Next, the thin film magnetic heads 1a and 1b are placed on the head base 3 at predetermined positions (gap spacing Lg is 0.3 to 0.3 in this embodiment).
0.75mm) so that it is attached. Further, the head sliding surfaces 2a, 2b are shaped by machining such as cylindrical grinding or cylindrical polishing with tape to have a radius R 1 in the direction of the tape running 7 and a radius R 2 in the width direction of the tape running. The thin film magnetic head of the first embodiment is obtained. In this embodiment, R 1
8 to 13 mm and R 2 of 2 to 4 mm showed the most stable contact with the tape.
この様に構成した薄薄磁気ヘツドでは、ダブルアジマ
スヘツドを薄膜で構成した薄膜磁気ヘツドとしたことに
より、両ヘツド間のクロストークが低減され、従来のバ
ルク型ヘツドに比較して約10dB以上は改善する。また、
ヘツド摺動面形状2a,2bでは、ヘツド摺動面幅Wがテー
プの入り側および出側より空隙に至るに従い徐々に狭く
なる様に構成されているために、従来の薄膜磁気ヘツド
の様に保護板を用いる必要がなくガラスボンド等の製造
工程が省略できるとともに、テープとの当接の安定化お
よびヘツド磨耗寿命の増大が図られる。第10図および第
11図に、本発明の実施例である薄膜磁気ヘツドのテープ
との当接の初期状態におけるレベル劣化量とヘツド摺動
幅Wの関係および従来ヘツド(ヘツド摺動幅Wが一定値
で、本発明のヘツドの摺動面の中央部での幅Wと等しく
したもの)と本実施例の摩耗特性を示した。ヘツド摺動
幅Wが250μmを超えるあたりから、レベル劣化が始ま
りテープとの安定な当接が得られなくなる。一方、摺動
幅Wが小さくなるとテープとの安定な当接が可能となる
がヘツド摩耗寿命が短くなることから、本実施例では摺
動幅Wとしては、100〜200μmを選んだ。上記ヘツド形
状の本実施例の薄膜磁気ヘツドと従来例のヘツド摩耗特
性を比較すると、第11図に示す様に、テープ走行時間の
経過に伴い従来例と比較しヘツド摩耗量が少なくなり、
テープとの良好な当接を確保しつつヘツド摩耗寿命が増
大することがわかる。In the thin magnetic head constructed in this way, the double azimuth head is a thin film magnetic head composed of a thin film, so that crosstalk between both heads is reduced, and it is about 10 dB or more compared with the conventional bulk type head. Improve. Also,
With the head sliding surface shapes 2a and 2b, the head sliding surface width W is configured to become gradually narrower from the entrance side and the exit side of the tape as it reaches the gap, so that it is similar to the conventional thin film magnetic head. Since it is not necessary to use a protective plate, a manufacturing process such as glass bonding can be omitted, and contact with the tape can be stabilized and head wear life can be increased. Figure 10 and
FIG. 11 shows the relationship between the level deterioration amount and the head sliding width W in the initial state of contact with the tape of the thin film magnetic head of the embodiment of the present invention, and the conventional head (the head sliding width W is a constant value, The width of the head of the present invention equal to the width W at the center of the sliding surface) and the wear characteristics of this embodiment are shown. When the head sliding width W exceeds 250 μm, the level deterioration starts and stable contact with the tape cannot be obtained. On the other hand, when the sliding width W becomes smaller, stable contact with the tape becomes possible, but the head wear life becomes shorter. Therefore, in this embodiment, the sliding width W was selected to be 100 to 200 μm. Comparing the head wear characteristics of the head-shaped thin-film magnetic head of the present example and the conventional example, as shown in FIG. 11, the head wear amount decreases with the passage of the tape as compared with the conventional example,
It can be seen that the head wear life is increased while ensuring good contact with the tape.
第7図は、本発明の第2の実施例である薄膜磁気ヘツ
ドのヘツド摺動面である。薄膜磁気ヘツド1aは先の第1
の実施例と同じ構成であるが、1cは、薄膜磁気ヘツド1b
と同一形状をした非磁性基板であり、磁気ヘツドとして
の機能を持つておらず、いわばダミーヘツドと称すべき
ものである。この様に構成することにより、ダブルアジ
マス磁気ヘツド以外の通常のシングル磁気ヘツドとして
も、第1の実施例と同様の、テープとの良好な当接、ヘ
ツド摩耗寿命の増大、保護板のガラスボンデイング工程
の省略等の効果が得られる。また、第6図は、第5図に
示した薄膜磁気ヘツドの保護膜6をラツプ等の手法によ
り平坦化した場合の断面図を示したものだが、保護膜6
を平坦化した場合と平坦化しない場合では、第1図の薄
膜磁気ヘツド素子5a,5b近傍の保護膜6a,6bの摺動面から
みた形状が異なる(図では省略)が、上記した摩耗につ
いての本発明の効果は変わらない。また、第8図には、
上記ヘツドテーパ面4aの底部に平坦部を持たせた形状に
した他の実施例、第9図には、テーパ面4aを半径R3の曲
率を持たせた形状とした他の実施例の側断面図を示した
が、この様に構成した場合でも、第1および第2の実施
例で示したヘツド摺動面形状2a,2bが実現でき、本発明
の効果に変わりがないことは明らかである。FIG. 7 is a head sliding surface of the thin film magnetic head according to the second embodiment of the present invention. The thin film magnetic head 1a is the first
1c has the same structure as that of the first embodiment, except that the thin-film magnetic head 1b
It is a non-magnetic substrate having the same shape as, and does not function as a magnetic head, and should be called a dummy head, so to speak. With this structure, even if a normal single magnetic head other than the double azimuth magnetic head is used, good contact with the tape, increased head wear life, and glass bonding of the protective plate can be achieved as in the first embodiment. Effects such as omission of steps can be obtained. Further, FIG. 6 shows a cross-sectional view when the protective film 6 of the thin film magnetic head shown in FIG. 5 is flattened by a technique such as a lap method.
Although the shapes of the protective films 6a and 6b near the thin film magnetic head elements 5a and 5b in FIG. The effect of the present invention does not change. In addition, in FIG.
Another embodiment in which the shape which gave a flat portion at the bottom of the Hetsudotepa surface 4a, the FIG. 9, a side cross section of another embodiment in which a tapered surface 4a and shape which gave a curvature radius R 3 Although the figures are shown, it is apparent that the head sliding surface shapes 2a and 2b shown in the first and second embodiments can be realized and the effect of the present invention is not changed even with such a configuration. .
一方、第12図には、他の実施例として薄膜磁気ヘツド
のヘツド摺動面を示す。なお同図では、一対のヘツドの
うち、一方を省略して示してある。図示のように、保護
膜6aのヘツド摺動面2aの先端部15に丸みを設けることに
より、テープ走行方向(図では右から左へ走行するもの
とする)の出側に位置する磁気ヘツド1aの先端部15がテ
ープとより安定した当接をし、先端部が鋭角であるとき
に発生し易いテープの損傷を未然に防止することができ
る。第12図には、テープの出側に位置する薄膜磁気ヘツ
ド1aについてのみ示したが、テープの入り側に位置する
薄膜磁気ヘツド1bおよびダミーヘツドの非磁性基板1cに
おいても同様に適用すれば同様の効果が得られるのはい
うまでもない。On the other hand, FIG. 12 shows a head sliding surface of a thin film magnetic head as another embodiment. In the figure, one of the pair of heads is omitted. As shown in the figure, the magnetic head 1a located on the output side in the tape running direction (it is assumed to run from right to left in the figure) is provided by rounding the tip portion 15 of the head sliding surface 2a of the protective film 6a. It is possible to prevent the damage of the tape, which is likely to occur when the tip has an acute angle, because the tip 15 of the tape comes into more stable contact with the tape. Although FIG. 12 shows only the thin film magnetic head 1a located on the tape exit side, the same applies to the thin film magnetic head 1b located on the tape entry side and the non-magnetic substrate 1c of the dummy head. It goes without saying that the effect can be obtained.
以上詳述したように、本発明の薄膜磁気ヘツドは、少
くとも1つは実質的な記録再生機能をもつ2個のヘツド
を、薄膜形成面が互いに向い合せになるようにして両ヘ
ツド間に所定の空隙を持たせてヘツド取付台(ヘツドベ
ース)に一体に取付け、両ヘツドを合せた摺動面の形状
が、記録媒体の入り側および出側より中央部の上記空隙
に至るに従い徐々にヘツド摺動面幅が狭くなるように構
成したので、クロストークの減少のみならず、記録媒体
との安定した当接及び磁気ヘッドの摩耗寿命の増大をも
たらすことができる。ヘッドが記録媒体に接触走行する
場合、ヘッドの進行方向の前と後はその中央部分に比べ
て記録媒体との触媒圧力が大きく、その結果摩耗も中心
部分に比べて早くなる。従って、ヘッドの中央部分に位
置する2つの磁気ギャップ部分に安定なテープ当接を与
えるには記録媒体との摺動面全体に均一な圧力を与え、
且つ不必要な接触部分を取り去ることが必要である。更
に、ヘッド走行の前側に強い接触圧力が集中すると従来
考えられていたのであるが、記録媒体とヘッドとの摺動
速度や記録媒体の特性等の条件によっては、後側にも前
側と同様に強い接触圧力が加わるのである。このため、
ヘッドの摺動面全体に均一圧力を与えるため、ヘッドの
中央部の前と後との両側に狭くなる摺動面を形成してい
るのである。As described above in detail, in the thin film magnetic head of the present invention, two heads having at least one substantial recording / reproducing function are provided between the heads so that the thin film forming surfaces face each other. The head is mounted integrally on a head mount (head base) with a predetermined gap, and the shape of the sliding surface that combines both heads gradually increases from the entry side and exit side of the recording medium to the above-mentioned gap in the center. Since the sliding surface width is narrowed, not only the crosstalk can be reduced, but also stable contact with the recording medium and the wear life of the magnetic head can be increased. When the head travels in contact with the recording medium, the catalytic pressure with the recording medium is larger before and after the head in the traveling direction of the head than in the central portion of the head, and as a result, wear is faster than in the central portion. Therefore, in order to give stable tape contact to the two magnetic gap portions located in the central portion of the head, uniform pressure is applied to the entire sliding surface with the recording medium,
And it is necessary to remove unnecessary contact parts. Further, it was conventionally thought that a strong contact pressure was concentrated on the front side of the head running. However, depending on the conditions such as the sliding speed between the recording medium and the head and the characteristics of the recording medium, the rear side may be the same as the front side. A strong contact pressure is applied. For this reason,
Since a uniform pressure is applied to the entire sliding surface of the head, narrowing sliding surfaces are formed on the front and rear sides of the central portion of the head.
また、上記ギャップ間隔は凹所空間となっているの
で、ガラスボンディング等が不要で、製造工程の簡素化
を図ることもできる等、優れた効果を奏するものであ
る。Further, since the gap interval is a recess space, glass bonding or the like is not required, and the manufacturing process can be simplified, which is an excellent effect.
第1図は本発明の第1の実施例である薄膜磁気ヘツドの
平面図、第2図は同薄膜磁気ヘツドの正面図、第3図は
第2図のA−A′線断面図、第4図は第2図のB−B′
線断面図、第5図と第6図は薄膜磁気ヘツド素子の断面
図、第7図は本発明の第2の実施例の平面図、第8図と
第9図は本発明の第3と第4の実施例の第2図A−A′
線に相当する断面図、第10図と第11図は本発明の第1の
実施例の特性の説明図、第12図は本発明の第5の実施例
のヘツド摺動面の平面図である。 1a,1b……薄膜磁気ヘツド、2a,2b……ヘツド摺動面、3
……ヘツドベース(ヘツド取付台)、5a,5b……薄膜磁
気ヘツド素子、6a,6b……保護膜、8,12……薄膜磁気コ
ア(上部コアと下部コア、第2の磁性体と第1の磁性
体)、9……薄薄コイル、11,1c……非磁性基板、13…
…絶縁層、14,14a,14b……作動磁気ギヤツプ。1 is a plan view of a thin film magnetic head according to a first embodiment of the present invention, FIG. 2 is a front view of the same thin film magnetic head, and FIG. 3 is a sectional view taken along the line AA 'in FIG. FIG. 4 shows BB ′ of FIG.
5 and 6 are sectional views of the thin film magnetic head element, FIG. 7 is a plan view of the second embodiment of the present invention, and FIGS. 8 and 9 are the third embodiment of the present invention. FIG. 2 of the fourth embodiment AA ′ in FIG.
10 and 11 are explanatory views of characteristics of the first embodiment of the present invention, and FIG. 12 is a plan view of the head sliding surface of the fifth embodiment of the present invention. is there. 1a, 1b ... Thin-film magnetic head, 2a, 2b ... Head sliding surface, 3
...... Head base (head mount), 5a, 5b …… Thin film magnetic head element, 6a, 6b …… Protective film, 8, 12 …… Thin film magnetic core (upper core and lower core, second magnetic body and first Magnetic material), 9 ... thin coil, 11,1c ... non-magnetic substrate, 13 ...
… Insulating layers, 14,14a, 14b …… Operating magnetic gears.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 小西 捷雄 横浜市戸塚区吉田町292番地 株式会社 日立製作所家電研究所内 (72)発明者 内村 明史 勝田市大字稲田1410番地 株式会社日立 製作所東海工場内 (56)参考文献 特開 昭62−47813(JP,A) 特開 昭57−189325(JP,A) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Yoshio Konishi, 292 Yoshida-cho, Totsuka-ku, Yokohama City, Home Appliances Research Laboratory, Hitachi, Ltd. (72) Inventor, Akifumi Uchimura 1410, Inada, Katsuta-shi, Hitachi Ltd. 56) References JP 62-47813 (JP, A) JP 57-189325 (JP, A)
Claims (4)
録媒体の相対走行方向に沿って対称となるよう互いに薄
膜形成面を向い合せて両ヘッド間に所定のギャップ間隔
をもたせてヘッド取付台に一体に取付られ、第1及び第
2のヘッドの少なくとも一方は基板上に第1の磁性体と
絶縁体と薄膜コイル層と第2の磁性体と保護膜の積層さ
れた層を含む実質的な薄膜磁気記録再生ヘッドを構成し
ている薄膜磁気ヘッドであって、 両ヘッド間に所定の上記ギャップ間隔は、上記保護膜
と、記録媒体との摺接部材の存在しない凹所空間とから
構成され、 上記第1及び第2のヘッドの記録媒体摺動面の幅が、上
記相対走行方向に沿って、記録媒体の入り側から中央部
の凹所空間に及び記録媒体の出側から中央部の凹所空間
に至るに従い徐々に狭くなるように構成された 薄膜磁気ヘッド。1. A head in which first and second heads having the same contour shape face each other so that their thin film forming surfaces face each other so as to be symmetrical along a relative running direction of a recording medium, and a predetermined gap is provided between both heads. At least one of the first and second heads is integrally attached to the mounting base, and includes at least one of a first magnetic body, an insulator, a thin film coil layer, a second magnetic body, and a protective film laminated on the substrate. A thin film magnetic head which constitutes a substantial thin film magnetic recording / reproducing head, wherein the predetermined gap distance between the two heads is the protective film and a recess space where a sliding contact member with a recording medium does not exist. The widths of the recording medium sliding surfaces of the first and second heads are along the relative running direction from the entrance side of the recording medium to the central recess space and from the exit side of the recording medium. It gradually narrows as it reaches the recessed space in the center Uni configured thin-film magnetic head.
方のヘッドと同一構造の実質的な薄膜磁気記録再生ヘッ
ドを構成してなる特許請求の範囲第1項記載の薄膜磁気
ヘッド。2. A thin film magnetic head according to claim 1, wherein the other of said first and second heads constitutes a substantial thin film magnetic recording / reproducing head having the same structure as said one head.
に磁気ヘッドを構成しない基板材からなる特許請求の範
囲第1項記載の薄膜磁気ヘッド。3. A thin-film magnetic head according to claim 1, wherein the other of said first and second heads is made of a substrate material that does not substantially constitute a magnetic head.
成する第1及び第2のヘッドの磁気ギャップ面が上記相
対走行方向に対して所要のアジマス角度を有している特
許請求の範囲第2項記載の薄膜磁気ヘッド。4. The magnetic gap surfaces of the first and second heads constituting the substantially thin film magnetic recording / reproducing head have a required azimuth angle with respect to the relative traveling direction. 2. The thin film magnetic head according to item 2.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62112567A JP2551582B2 (en) | 1987-05-11 | 1987-05-11 | Thin film magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62112567A JP2551582B2 (en) | 1987-05-11 | 1987-05-11 | Thin film magnetic head |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63279411A JPS63279411A (en) | 1988-11-16 |
JP2551582B2 true JP2551582B2 (en) | 1996-11-06 |
Family
ID=14589930
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62112567A Expired - Fee Related JP2551582B2 (en) | 1987-05-11 | 1987-05-11 | Thin film magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2551582B2 (en) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57189325A (en) * | 1981-05-18 | 1982-11-20 | Toshiba Corp | Composite magnetic head |
JPS6247813A (en) * | 1985-08-28 | 1987-03-02 | Hitachi Ltd | Double azimuth thin film magnetic head |
-
1987
- 1987-05-11 JP JP62112567A patent/JP2551582B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPS63279411A (en) | 1988-11-16 |
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