JP2550103B2 - Diamond composite grain - Google Patents
Diamond composite grainInfo
- Publication number
- JP2550103B2 JP2550103B2 JP62262727A JP26272787A JP2550103B2 JP 2550103 B2 JP2550103 B2 JP 2550103B2 JP 62262727 A JP62262727 A JP 62262727A JP 26272787 A JP26272787 A JP 26272787A JP 2550103 B2 JP2550103 B2 JP 2550103B2
- Authority
- JP
- Japan
- Prior art keywords
- diamond
- particles
- heat
- resistant
- granular material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明はダイヤモンド複合粒及びその製造法に関す
る。この複合粒は各種の結合材で成形し、砥石や切削工
具として、またラッピング研磨、ブラスト研磨等に有用
である。The present invention relates to a diamond composite grain and a method for producing the same. The composite particles are molded with various binders and are useful as a grindstone or a cutting tool, and also for lapping polishing, blast polishing and the like.
研削、研磨用ダイヤモンド砥粒は従来天然ダイヤモン
ド又は超高圧法によりつくられた自形粒かそれを粉砕し
たものが主として用いられているが、これらは粒の表面
の凹凸はその数が限られ、また粉砕粒では表面に鋭いエ
ッジを有する。Conventionally, diamond abrasive grains for grinding and polishing are mainly used as natural diamond or self-shaped grains produced by an ultrahigh pressure method or those crushed, but the number of irregularities on the surface of these grains is limited, Further, the ground particles have sharp edges on the surface.
超高圧法によるダイヤモンド粒は結晶自形によるエッ
ジを有するため重研削用に限定されている。また天然ダ
イヤモンドの粉砕品又は超高圧法によるダイヤモンド結
晶の粉砕品は鋭いエッジが出ていることにより、表面研
磨には適さず、また重研削でも大きな欠け落が起り、研
削性能低下が早い欠点がある。The diamond grains produced by the ultra-high pressure method are limited to heavy-duty grinding because they have edges formed by crystal self-morphology. In addition, crushed products of natural diamond or crushed products of diamond crystals by the ultra-high pressure method are not suitable for surface polishing because they have sharp edges, and large chipping occurs even in heavy grinding, resulting in a rapid deterioration of grinding performance. is there.
ダイヤモンドのレジン結合砥石は一般にダイヤモンド
粒とレジンとの接着力を高めるなどの理由により、ダイ
ヤモンドの表面をNi等によりかなり厚くメッキしたもの
が使用されている。このメッキの部分は研削には寄与し
ないので、メッキしないですめば研削性能の向上が期待
できる。Generally, a diamond resin-bonded grindstone is used in which the surface of diamond is considerably thickly plated with Ni or the like for the purpose of increasing the adhesive force between the diamond grains and the resin. Since this plated portion does not contribute to grinding, it is expected to improve grinding performance if it is not plated.
本発明者は先に特殊な表面形状を有するダイヤモンド
砥粒を出願した（特願昭62−98657、同62−98658）。こ
れらは微細なダイヤモンド、SiC等の周囲にダイヤモン
ドを析出させたもので、微細なダイヤモンド、SiC等は
核あるいはシードとして用いられていた。また比較的小
さいSiCの表面をダイヤモンドで被覆した砥粒について
も出願した（特願昭62−65808）。しかし、これらは大
きな粒状物にすることはむづかしい。The present inventor previously applied for diamond abrasive grains having a special surface shape (Japanese Patent Application Nos. 62-98657 and 62-98658). These are obtained by depositing diamond around fine diamond, SiC, etc., and fine diamond, SiC, etc. were used as nuclei or seeds. We also filed an application for abrasive grains in which the surface of relatively small SiC is coated with diamond (Japanese Patent Application No. 62-65808). However, it is difficult to make them into large particles.
本発明の目的は、研磨、研削等に有用な、これまでよ
り大きなダイヤモンド複合粒を提供することにある。It is an object of the present invention to provide larger diamond composite grains that are useful for polishing, grinding and the like.
本発明者は上記目的を達成するため鋭意研究した結
果、比較的大きな耐熱性粒状物を用い、その表面に気相
法によるダイヤモンド粒子を析出させることが可能であ
ることを見出し本発明に到達した。As a result of intensive research to achieve the above object, the present inventor has found that it is possible to deposit diamond particles by a vapor phase method on the surface of a relatively large heat-resistant granular material and reach the present invention. .
即ち本発明は耐熱性粒状物の表面に気相法によるダイ
ヤモンド粒子が析出し、表面に凹凸形状を有するダイヤ
モンド複合粒及び耐熱性粒状物を気相法によるダイヤモ
ンド生成ガス帯域で流動させ、該耐熱性粒状物の表面に
ダイヤモンド粒子を析出させることにより、表面に凹凸
形状を有するダイヤモンド複合粒の製造法である。That is, the present invention is that the diamond particles by the vapor phase method are deposited on the surface of the heat-resistant granules, and the diamond composite particles having the irregular shape on the surface and the heat-resistant granules are made to flow in the diamond-forming gas zone by the vapor phase method. This is a method for producing diamond composite particles having irregularities on the surface by precipitating diamond particles on the surface of the functional granular material.
本発明で用いられる耐熱性粒状物としてはダイヤモン
ド、Ｗ、Mo、Ta、WC、SiC、TiC、ZrO2、Cr2O3、TaN、Zr
N、Si3N4等の耐熱性の金属、セラミックスが適する。こ
れらの大きさは10μｍ以上が適当であり、さらに好まし
くは30μｍ以上である。The heat-resistant particles used in the present invention include diamond, W, Mo, Ta, WC, SiC, TiC, ZrO 2 , Cr 2 O 3 , TaN, Zr.
Heat resistant metals and ceramics such as N and Si 3 N 4 are suitable. The size of these is suitably 10 μm or more, more preferably 30 μm or more.
粒状物の大きさの上限は特に制限ないが、均一にダイ
ヤモンド粒子を付着させるなどの理由より300μｍ位が
適当である。この粒状物の粒度の調整は粉砕等及び分級
により行なわれる。The upper limit of the size of the granular material is not particularly limited, but about 300 μm is suitable for reasons such as uniformly adhering the diamond particles. The particle size of this granular material is adjusted by crushing and classification.
耐熱性粒状物の表面に析出したダイヤモンドは多くは
微粒子であり、その大きさは大部分が0.1〜100μｍ程度
である。そして微粒子の形状はダイヤモンド結晶の自形
が多少出現した所々に稜線のある角張った球状体である
（添付写真参照）。Most of the diamond deposited on the surface of the heat-resistant granules are fine particles, and the size of most of them is about 0.1 to 100 μm. The shape of the fine particles is an angular sphere with ridges where the diamond crystals appear to some extent (see the attached photo).
耐熱性粒状物の表面のダイヤモンド粒子は図１に表面
構造を走査型電子顕微鏡（SEM）で示すように各粒子が
独立して存在する場合、及び図示していないが、各粒子
の間隔が詰まり殆んど接触するような状態のもの、さら
には各粒子が多層に重なる場合も本発明に含まれる。多
層に重なった場合も多数の粒子が集まったものであり、
膜状のダイヤモンドではない。粒状が集まったものなの
で、複合粒の表面の構造は凹凸をなしている。このよう
に膜状でなく、ダイヤモンド粒子として析出させるには
耐熱性粒状物の大きさは10μｍ以上、特に望ましくは30
μｍ以上である。Diamond particles on the surface of the heat-resistant granules are present when each particle exists independently as shown in the scanning electron microscope (SEM) surface structure in FIG. 1, and although not shown, the intervals between the particles are clogged. The present invention includes the case where the particles are almost in contact with each other, and the case where the particles are laminated in multiple layers. Even in the case of overlapping in multiple layers, it is a collection of many particles,
It is not a film diamond. Since the particles are aggregated, the surface structure of the composite particles is uneven. As described above, in order to deposit diamond particles not in the form of a film, the size of the heat-resistant granules is 10 μm or more, particularly preferably 30 μm.
It is at least μm.
耐熱性粒状物の表面のダイヤモンド粒子は気相法ダイ
ヤモンド合成法により析出させることにより、該粒状物
にかなり強く結合している。The diamond particles on the surface of the heat-resistant granules are considerably strongly bonded to the granules by depositing them by the vapor phase diamond synthesis method.
耐熱性粒状物の表面にダイヤモンド粒子を析出させる
には公知の気相法ダイヤモンド合成法を応用して行なう
ことができる。即ち、原料ガスとしてはメタン、エタ
ン、プロパン、ベンゼン、トルエン、シクロヘキサン等
の炭化水素、メタノール、エタノール、プロパノール、
ターシャリーブタノール、アセトン等の含酸素有機化合
物、さらにはこれらにH2O、O2、CO2、CO等の酸素含有物
質を添加したものを用いることもできる。これらのガス
は単独あるいは水素、アルゴン等のキャリアガスと混合
して用いられる。ガスの圧力は、10-2Torr程度さら加熱
手段によっては加圧状態まで可能である。The deposition of diamond particles on the surface of the heat resistant granular material can be carried out by applying a known vapor phase diamond synthesis method. That is, as the raw material gas, hydrocarbons such as methane, ethane, propane, benzene, toluene, cyclohexane, methanol, ethanol, propanol,
It is also possible to use oxygen-containing organic compounds such as tertiary butanol and acetone, and further compounds obtained by adding oxygen-containing substances such as H 2 O, O 2 , CO 2 and CO to these. These gases may be used alone or mixed with a carrier gas such as hydrogen or argon. The gas pressure can be up to about 10 -2 Torr depending on the heating means.
ガスをダイヤモンド生成温度に加熱したり、分解する
には熱フィラメント、マイクロ波、高周波、直流アーク
放電、電子線、紫外線、赤外線など公知の方法を用いる
ことができる。A known method such as hot filament, microwave, high frequency, direct current arc discharge, electron beam, ultraviolet ray or infrared ray can be used to heat or decompose the gas to the diamond formation temperature.
これらの方法で耐熱性粒状物の全面にダイヤモンド粒
子を析出させるには基板の上に粒状物を置き連続的ある
いは間欠的に粒状物を転がすなどの方法をとればよい。
また粒状物を容器に入れ、容器をダイヤモンド析出帯域
中で上下に振動させて、粒状物を容器内で浮遊させなが
ら、粒状物にダイヤモンド粒子を析出させることができ
る。粉砕等によりつくられた粒状物は多くの活性点を有
しており、これがダイヤモンド生成の核のような働きを
し、この点を起点にダイヤモンド粒子が析出すると思わ
れる。ダイヤモンド粒子の析出量は析出時間により調整
することができるが、望ましい態様としては30〜300μ
ｍの粒状物を用い、この粒状物100重量部に対し、ダイ
ヤモンド粒子10〜180重量部析出させたものである。In order to deposit diamond particles on the entire surface of the heat-resistant granular material by these methods, a method of placing the granular material on the substrate and rolling the granular material continuously or intermittently may be used.
It is also possible to deposit the particles in the container and vibrate the container up and down in the diamond precipitation zone to suspend the particles in the container while depositing the diamond particles on the particles. Granules produced by pulverization and the like have many active points, which act like nuclei for diamond formation, and diamond particles are thought to precipitate from this point. The deposition amount of diamond particles can be adjusted by the deposition time, but in a preferred embodiment, it is 30 to 300 μm.
10 to 180 parts by weight of diamond particles are deposited on 100 parts by weight of the particles.
耐熱性粒状物としてα−SiC粒（大きさ約120μｍ）を
用い、これを加熱ヒーターを内蔵したモリブデン製の皿
の上に20mm口に均一に約50mgを分布させた。これを熱フ
ィラメント法反応装置（約２）にセットした。モリブ
デン製の皿の上にタングステンフィラメント0.3mmφの
コイル状フィラメント（長さ15mm）を皿から5mmの距離
に設定した。As heat-resistant granules, α-SiC grains (size: about 120 μm) were used, and about 50 mg were evenly distributed to 20 mm mouths on a molybdenum dish containing a heater. This was set in the hot filament method reactor (about 2). A coiled filament (length 15 mm) of tungsten filament 0.3 mmφ was set on a molybdenum dish at a distance of 5 mm from the dish.
原料ガスはアセトン−水素系で1.5容量％アセトンの
濃度でトータル流量120cc/minで流し、反応圧力500Tor
r、フィラメント温度2200℃、温度（皿の支持台表面温
度）850℃とし、SiC粒を各30分毎に撹拌し、合成実験を
繰り返した。トータル合成時間は5hr行った。その結
果、120μSiC粒に角張ったダイヤモンド粒子（約15μ
径）が点散しているのが光学顕微鏡及びSEMで確認され
た。SEM写真を図１に示す（倍率は（ａ）が1000、
（ｂ）は5000）。反応後の重量は約72.3mgであった。The raw material gas is an acetone-hydrogen system with a concentration of 1.5% by volume of acetone and a total flow rate of 120 cc / min.
r, filament temperature 2200 ℃, temperature (plate support surface temperature) 850 ℃, SiC particles were stirred every 30 minutes, the synthesis experiment was repeated. The total synthesis time was 5 hours. As a result, the diamond particles (about 15μ
It was confirmed by an optical microscope and SEM that the diameter was scattered. A SEM photograph is shown in Fig. 1 (magnification (a) is 1000,
(B) is 5000). The weight after the reaction was about 72.3 mg.
本発明によるダイヤモンド複合粒はダイヤモンド粒子
が耐熱性粒状物の表面に析出し、凹凸形状をなしている
ため、研削砥石の結合材との結合力が著しく高い。また
粒状物はかなり大きなものが使用でき、その周囲にダイ
ヤモンド粒子が固着しているので、大粒のダイヤモンド
を使用したのと同様の効果がある。In the diamond composite particles according to the present invention, the diamond particles are deposited on the surface of the heat-resistant granular material and have an uneven shape, so that the bonding force of the grinding wheel with the binder is extremely high. In addition, since very large particles can be used and diamond particles are fixed around them, the same effect as using large diamond particles can be obtained.
図１は本発明のダイヤモンド複合粒の走査型電子顕微鏡
による結晶の構造を示す（倍率は（ａ）が1000、（ｂ）
は5000）。FIG. 1 shows a crystal structure of a diamond composite grain of the present invention observed by a scanning electron microscope (magnification is 1000 for (a), (b))
Is 5000).
フロントページの続き (56)参考文献 特開 昭59−137311（ＪＰ，Ａ) 特開 昭60−231494（ＪＰ，Ａ)Continuation of front page (56) References JP-A-59-137311 (JP, A) JP-A-60-231494 (JP, A)
Claims (3)
よるダイヤモンド粒子が膜状でなく独立にかつ、前記耐
熱性粒状物100重量部に対してダイヤモンド粒子10〜180
重量部析出し、表面に凹凸形状を有するダイヤモンド複
合粒。1. Diamond particles formed by a hot filament method on the surface of a heat-resistant granular material are not in the form of a film and are independent, and 10 to 180 diamond particles per 100 parts by weight of the heat-resistant granular material.
Part by weight of diamond composite particles having a surface with irregularities deposited.
の範囲第１項記載のダイヤモンド複合粒。2. The diamond composite particles according to claim 1, wherein the heat resistant particles have a size of 30 μm or more.
許請求の範囲第１項又は第２項記載のダイヤモンド複合
粒。3. The diamond composite particles according to claim 1 or 2, wherein the diamond particles are 0.1 to 100 μm.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62262727A JP2550103B2 (en) | 1987-10-20 | 1987-10-20 | Diamond composite grain |
| PCT/JP1988/001069 WO1993013015A1 (en) | 1987-10-20 | 1988-10-20 | Composite diamond grains and process for their production |
| US07/372,367 US5071708A (en) | 1987-10-20 | 1988-10-20 | Composite diamond grain |
| US07/698,923 US5268201A (en) | 1987-10-20 | 1991-05-13 | Composite diamond grain and method for production thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62262727A JP2550103B2 (en) | 1987-10-20 | 1987-10-20 | Diamond composite grain |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01108105A JPH01108105A (en) | 1989-04-25 |
| JP2550103B2 true JP2550103B2 (en) | 1996-11-06 |
Family
ID=17379753
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62262727A Expired - Lifetime JP2550103B2 (en) | 1987-10-20 | 1987-10-20 | Diamond composite grain |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2550103B2 (en) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59137311A (en) * | 1983-01-21 | 1984-08-07 | Natl Inst For Res In Inorg Mater | Method for synthesizing polycrystalline diamond |
| JPS60231494A (en) * | 1984-04-27 | 1985-11-18 | Showa Denko Kk | Manufacture of diamond superfines |
| JPH0725033B2 (en) * | 1987-05-15 | 1995-03-22 | 三菱マテリアル株式会社 | Hard composite powder abrasive |
-
1987
- 1987-10-20 JP JP62262727A patent/JP2550103B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01108105A (en) | 1989-04-25 |
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