JP2546915Y2 - 流体量制御装置 - Google Patents

流体量制御装置

Info

Publication number
JP2546915Y2
JP2546915Y2 JP1990042351U JP4235190U JP2546915Y2 JP 2546915 Y2 JP2546915 Y2 JP 2546915Y2 JP 1990042351 U JP1990042351 U JP 1990042351U JP 4235190 U JP4235190 U JP 4235190U JP 2546915 Y2 JP2546915 Y2 JP 2546915Y2
Authority
JP
Japan
Prior art keywords
fluid
passage
return
acting cylinder
pump device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990042351U
Other languages
English (en)
Japanese (ja)
Other versions
JPH041788U (enrdf_load_stackoverflow
Inventor
謙一 笹崎
Original Assignee
理研精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 理研精機株式会社 filed Critical 理研精機株式会社
Priority to JP1990042351U priority Critical patent/JP2546915Y2/ja
Publication of JPH041788U publication Critical patent/JPH041788U/ja
Application granted granted Critical
Publication of JP2546915Y2 publication Critical patent/JP2546915Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Safety Valves (AREA)
JP1990042351U 1990-04-20 1990-04-20 流体量制御装置 Expired - Lifetime JP2546915Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990042351U JP2546915Y2 (ja) 1990-04-20 1990-04-20 流体量制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990042351U JP2546915Y2 (ja) 1990-04-20 1990-04-20 流体量制御装置

Publications (2)

Publication Number Publication Date
JPH041788U JPH041788U (enrdf_load_stackoverflow) 1992-01-08
JP2546915Y2 true JP2546915Y2 (ja) 1997-09-03

Family

ID=31553823

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990042351U Expired - Lifetime JP2546915Y2 (ja) 1990-04-20 1990-04-20 流体量制御装置

Country Status (1)

Country Link
JP (1) JP2546915Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS562060Y2 (enrdf_load_stackoverflow) * 1976-03-02 1981-01-17
JPS6131232Y2 (enrdf_load_stackoverflow) * 1980-02-06 1986-09-11

Also Published As

Publication number Publication date
JPH041788U (enrdf_load_stackoverflow) 1992-01-08

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