JP2544014Y2 - Constant temperature bath - Google Patents

Description

[Detailed description of the invention] "Industrial application field" This invention relates to a thermostatic chamber that can be used, for example, in an IC test apparatus.

[Prior Art] FIG. 3 shows a form of an IC transfer path of an IC test apparatus.

In the drawing, reference numeral 1 denotes an IC storage magazine that stores ICs. This IC
The storage magazines 1 are provided at two locations on the upper and lower sides of the test apparatus.

The upper IC storage magazine 1 stores the IC under test 2A and sequentially sends out the ICs under test 2A to the connection unit 3.

The connection unit 3 performs an operation of electrically connecting the IC 2A under test to the test head 4, and performs an operation test of the IC 2A under test.

The tested IC2B after the test is sorted into a good product and a defective product and stored in the IC storage magazine 1 on the receiving side.

A thermostat 5 is provided on the connection unit 3 and on the upstream side thereof. The thermostat 5 has a structure in which the temperature can be freely set in the range of −30 ° C. to + 125 ° C., and a high-temperature test and a low-temperature test can be performed.

Each time the type of the IC under test 2A changes,
Since the socket ST must be replaced in accordance with the lead-out format of the terminal of the IC under test 2A, the socket ST is removably attached to the thermostatic bath 5.

FIG. 4 shows a structure for attaching the connection unit 3 to the thermostat 5. An opening 5B is formed in the outer wall 5A of the constant temperature bath 5, and the opening 5B is formed.
The connection unit 3 is fitted into the opening and the opening 5B is sealed.

An elastic packing 6 is provided around the window 5B to seal the opening 5B.
The flange 5A formed on the connection unit 3 is pressed against the elastic packing 6 to seal the window 5A.

In order to press the flange portion 3A against the elastic packing 6, a fastening means constituted by a cylinder 7 and a wedge 7B attached to the tip of a rod 7A of the cylinder 7 is provided.

The fastening means engages the wedge 7B with the upper surface of the flange portion 3A by driving the cylinder 7, and presses the flange portion 3A against the elastic packing 6.

[Problem to be Solved by the Invention] Conventionally, the flange portion 3A of the connection unit 3 is pressed against the elastic packing 6, and the structure is sealed by this pressure contact. Therefore, a large pressing force is required to enhance the sealing performance. It is necessary to use a large-capacity cylinder for 7.

Further, since the inside and outside of the thermostatic bath 5 are bounded by the elastic packing 6, there is a drawback that the outside of the elastic packing 6 is cooled and dewed through the elastic packing 6 particularly during a low temperature test.

If condensation forms on the outside of the elastic packing 6, when the condensation resolves, water drops fall, causing a disadvantage that the water drops fall on an electric circuit or the like provided below.

An object of the present invention is to propose a constant temperature bath which can enhance the sealing performance without increasing the tightening force on the connection unit and does not cause dew condensation outside the packing.

"Means for solving the problem" In this invention, a window is formed on the outer wall of the thermostat,
A connection unit for electrically connecting between the inside of the thermostat and the outside is detachably mounted on the window, and the window is sealed by the attachment of the connection unit. The peripheral surface has a cylindrical surface parallel to the attachment / detachment direction of the connection unit, and a brim-like protrusion along the peripheral surface is formed at an inner end of the inner peripheral surface of the window. First and second elastic packings are respectively attached to the surface on the window side and a portion of the inner peripheral surface outside the protruding piece. The front surface of the connection unit is pressed against the first elastic packing, and the second elastic packing is pressed. The side surface of the connection unit is pressed against the packing so as to double seal the periphery of the connection unit.

Further, the window is formed by opening an opening formed in an outer wall of the thermostatic chamber, an inner portion of a peripheral wall attached to an inner surface of the outer wall along an inner end of the opening, and an inner side of the inner wall of the outer wall. A ring-shaped groove formed in the inner peripheral surface along the circumferential direction, the second elastic packing is mounted in the groove, and the window side of the protruded piece is formed. A ring-shaped groove is formed on the surface along the circumferential direction, and the first elastic packing is mounted in the groove.

According to the configuration of the present invention, since the first elastic packing mounted on the protruding piece and the second elastic packing mounted on the opening end face are sealed, the sealed portion is partitioned by the first and second elastic packings.

The gap formed between the two elastic packings has heat insulating properties, and no cool air is transmitted to the outer elastic packing. As a result, dew formation on the outer elastic packing is prevented.

Moreover, according to the structure of the present invention, the pressing force applied to the connection unit 3 acts only on the first elastic packing and does not act on the second elastic packing. Therefore, the pressure contact force applied to one elastic packing may be sufficient, and the tightening force of the tightening means may be the same as the conventional one or may be smaller than the conventional one even though it has a double sealing structure.

FIG. 1 shows an embodiment of the present invention. In FIG.
5A shows the outside of the thermostat 5. A window 5E is formed in the outer wall 5A, and a structure in which the connection unit 3 is fitted to the window 5E and a fastening means for pressing the connection unit 3 toward the outer wall 5A of the thermostatic bath 5 are shown in FIG. The fourth point is
It is the same as the case of the figure.

The structure that characterizes this invention is the inner peripheral surface that constitutes the window 5E.
A protruding piece 5D is provided on the inner end 5b of 5C, a first elastic packing 6A is attached to this protruding piece 5D, and a second elastic packing 6B is provided on an inner peripheral surface 5C having a surface orthogonal to the surface of the protruding piece 5D. Is provided.

Also, as shown in FIG.
5D may be provided, and the second elastic packing 6B may be mounted on the groove 13 formed on the inner peripheral surface 5C, and the first elastic packing 6A may be mounted on the groove 14 formed on the inner surface of the protruding piece 5D.

Thus, the first elastic packing 6A and the second elastic packing 6A
By providing 6B, as shown in FIG. 2, the connection unit 3 comes into contact with the first elastic packing 6A and the second elastic packing 6B with the front face 3B and the side face 3C, and a double sealed structure is obtained. .

According to this double sealing structure, the gap G formed by being sandwiched between the first elastic packing 6A and the second elastic packing 6B exhibits a heat insulating effect, and the outer elastic packing, that is, the second elastic packing 6B is cooled. Is not transmitted.

Therefore, even if the second elastic packing 6B comes into contact with the outside air, dew condensation does not occur at that portion.

In this embodiment, as shown in FIG. 2, communication holes 8A, 8B and 8C are formed in the protruding piece 5D and the connection unit 3, and the communication holes 8A and 8C are formed.
A case is shown in which dry air is supplied to the internal empty space of the connection unit 3 through B and 8C.

In such a configuration, since the dry air leaks to the gap G and is given, the air remaining in the gap G does not condense. At the time of the high temperature test, a cooling effect is obtained by the flow of the dry air.

"Effects of the Invention" As described above, according to the invention, the reliability of sealing can be enhanced by the double sealing structure. Moreover, because of the double sealing structure, no cool air is transmitted to the outer second elastic packing 6B. Therefore, it is possible to provide an IC test apparatus in which dew condensation does not occur, an obstacle due to water droplets generated by dew condensation can be avoided, and handling becomes easy.

Further, in this invention, while using two elastic packings 6A and 6B, the pressing force for pressing the connection unit 3 against the elastic packing acts only on the first elastic packing 6A. Therefore the first
Since a double sealing structure can be obtained by applying a pressing force only to the elastic packing 6A, a highly airtight sealing structure can be obtained with a small tightening force.

[Brief description of the drawings]

FIG. 1 is a sectional view showing an embodiment of the present invention, FIG. 2 is an enlarged sectional view for explaining the structure of a main part of the present invention, and FIG.
FIG. 1 is a side view for explaining an outline of an IC test apparatus, and FIG. 4 is a cross-sectional view for explaining a conventional technique. 3: Connection unit, 3B: front, 3C: side, 5: constant temperature bath, 5A: outer wall, 5B: opening, 5C: inner peripheral surface, 5D: protrusion, 6A: first elastic packing, 6B: second elastic packing .

Claims (2)

(57) [Scope of request for utility model registration] A. A window is formed on an outer wall of a thermostat, and a connection unit for electrically connecting the inside of the thermostat to the outside is detachably mounted on the window, and the connection unit is mounted. B. The inner peripheral surface of the window has a cylindrical surface parallel to the attaching / detaching direction of the connection unit, and the inner peripheral portion of the inner peripheral surface of the window A first and second elastic packings are respectively attached to a surface of the projection on the window side and a portion of the inner peripheral surface outside the projection, along a peripheral surface thereof. A thermostatic bath configured so that the front surface of the connection unit is pressed against the first elastic packing and the side surface of the connection unit is pressed against the second elastic packing, so that the periphery of the connection unit is double sealed. . 2. The window has an opening formed in the outer wall of the thermostatic chamber, an inside of a peripheral wall attached to an inner surface of the outer wall along an inner end of the opening, and an inner side of the inner end of the peripheral wall. A ring-shaped groove is formed in the inner peripheral surface along the circumferential direction, and the second elastic packing is mounted in the groove; 2. The constant temperature bath according to claim 1, wherein a ring-shaped groove is formed in the surface of the piece on the window side along the circumferential direction, and the first elastic packing is mounted in the groove.