JP2007274288A - Cooling container for imaging element - Google Patents

Cooling container for imaging element Download PDF

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JP2007274288A
JP2007274288A JP2006096684A JP2006096684A JP2007274288A JP 2007274288 A JP2007274288 A JP 2007274288A JP 2006096684 A JP2006096684 A JP 2006096684A JP 2006096684 A JP2006096684 A JP 2006096684A JP 2007274288 A JP2007274288 A JP 2007274288A
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container
image sensor
imaging element
space
cooling
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JP4374349B2 (en
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Yoshifumi Shimodaira
美文 下平
Nobuo Nakamura
信夫 中村
Tomonori Mizuno
友範 水野
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NOBUO DENSHI KK
Shizuoka University NUC
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NOBUO DENSHI KK
Shizuoka University NUC
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a cooling container for an imaging element which can easily cool imaging element (image sensor), prevent dew condensation of a transparent plate on the subject side or in the container, and cope with wide-ranging applications. <P>SOLUTION: This cooling container for an imaging element comprises a metallic external container 8, having a window opening and a bottom opening smaller than the window opening on its bottom surface; a container bottom 12 in which a group of conductive terminals 11 and a thermally conductive support member thermally, coupled to an imaging element 14 on its one end and to a heat-absorbing portion of a cooler on the other end are supported hermetically, so that one ends of the conductive terminals 11 appear in the inside and the other ends appear in the outside of the container, and one ends of the thermally conductive supporting member (metal rod 13) appear in the inside of the container and the other ends appear in the outside of the container, and which is hermetically coupled to the bottom opening of the external container 8; an inside container 10 surrounding a space 15 at the center of the external container 8, to form a thermally insulated space 9 between the external container 8 and an internal peripheral wall; and double glass window assemblies (5, 3, 7) in close contact with the window opening that are replaceable. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、撮像素子(イメージセンサ)を透明窓を有する容器内に収容し、冷却した状態で動作させることができる撮像素子冷却容器に関する。   The present invention relates to an imaging element cooling container in which an imaging element (image sensor) is accommodated in a container having a transparent window and can be operated in a cooled state.

高感度のCCD撮像において、素子の冷却は必要不可欠であり、CCD撮像素子の冷却が行われる。しかし、低温にすることにより大気中の水分が結露し、受光面が曇り撮像ができなくなる。これらの問題を解決するために、撮像素子の周囲に乾燥した気体を流したり真空容器内に納めるという方法が一般的にとられている(特許文献1〜3)。気体を流す方法では、結露を発生させない為に露点温度が冷却温度以下の乾燥空気を製造する装置が大掛かりになったり、ガスを購入する必要がありランニングコストが高くなる。   In high-sensitivity CCD imaging, element cooling is indispensable, and the CCD imaging element is cooled. However, when the temperature is lowered, moisture in the atmosphere is condensed, and the light receiving surface is cloudy, and imaging cannot be performed. In order to solve these problems, a method of flowing a dry gas around the image sensor or storing it in a vacuum container is generally employed (Patent Documents 1 to 3). In the method of flowing gas, in order not to cause dew condensation, an apparatus for producing dry air having a dew point temperature equal to or lower than the cooling temperature becomes large, and it is necessary to purchase gas, resulting in an increase in running cost.

一方、CCDを真空容器に納める方法では、ランニングコストは掛からないがガラスと金属という異なる素材を接合するため、構造や製作精度が悪い場合、使用時の冷却と使用後の常温という温度変化の影響などでひずみが発生しやすく、徐々に真空度が低下して、断熱効果も低下してしまう。そうした場合、結露を発生させてしまうため、再度真空引きを行う必要がある。また、内部の素子が破壊された場合は容器ごと使用できなくなる。
特開平7−7668号公報 特開平8−205007号公報 特開2002−40554号公報
On the other hand, the method of storing the CCD in the vacuum vessel does not incur a running cost, but because different materials such as glass and metal are joined, if the structure and manufacturing accuracy are poor, the effect of temperature changes such as cooling during use and normal temperature after use. Etc., distortion is likely to occur, the degree of vacuum gradually decreases, and the heat insulation effect also decreases. In such a case, it is necessary to evacuate again to cause condensation. Further, when the internal element is destroyed, the entire container cannot be used.
Japanese Patent Laid-Open No. 7-7668 JP-A-8-205007 JP 2002-40554 A

本発明は、安価で保守が容易な撮像素子冷却容器であること、各種の撮像素子の異なる要請にも対応できること、保守に必要なコストを極力抑えることができることを解決課題とするものである。
本発明の目的は、新規な構成の組み合わせを導入することにより、撮像素子等のイメージセンサの冷却が容易であり、被写体側または容器内の透明板の結露を防止することができ、多岐に渡る応用に対応することができる撮像素子冷却容器を提供することにある。
An object of the present invention is to provide an imaging device cooling container that is inexpensive and easy to maintain, that it can respond to different demands of various imaging devices, and that the cost required for maintenance can be minimized.
An object of the present invention is to introduce a combination of new configurations, so that an image sensor such as an image sensor can be easily cooled, and condensation on a transparent plate in a subject side or a container can be prevented. An object of the present invention is to provide an imaging element cooling container that can be applied to applications.

前記目的を達成するために、本発明による請求項1記載の撮像素子冷却容器は、
窓開口と底面に底開口を有する金属性の外側容器と、
導電端子群および一端で撮像素子と他端で冷却装置の吸熱部に熱結合する熱伝導性支持部材を、前記導電端子群の一端側を容器内に他端が容器外に、前記熱伝導性支持部材の一端を容器内に他端が容器外に現れるように気密に支持し、前記外側容器の底開口に気密に結合する容器底部と、
前記外側容器の中央の空間を囲い、前記外側容器の内周壁間に断熱空間を形成する内側容器と、
前記窓開口に交換可能に密着させられるガラス窓組立と、から構成されている。
In order to achieve the object, an imaging element cooling container according to claim 1 according to the present invention is provided.
A metallic outer container having a window opening and a bottom opening on the bottom;
The conductive terminal group and a thermally conductive support member thermally coupled to the image sensor at one end and the heat absorbing portion of the cooling device at the other end, the one end side of the conductive terminal group inside the container and the other end outside the container, the thermal conductivity A container bottom that supports one end of the support member in an airtight manner so that the other end appears outside the container and is airtightly coupled to the bottom opening of the outer container;
An inner container that surrounds a central space of the outer container and forms a heat insulating space between inner peripheral walls of the outer container;
A glass window assembly that is exchangeably attached to the window opening.

本発明による請求項2記載の撮像素子冷却容器は、請求項1記載の撮像素子冷却容器であって、
前記撮像素子をCCDまたはCMOSイメージセンサとすることができ、
前記冷却装置の吸熱部を、ペルチェ素子の吸熱部とすることができ、
前記容器の中央の空間を囲う内側容器と、前記外側容器の内周壁間の断熱空間は、真空空間とすることができ、
前記ガラス窓組立の窓部は窓側の断熱空間を形成する2重ガラス窓組立とすることができる。
The imaging device cooling container according to claim 2 according to the present invention is the imaging device cooling container according to claim 1,
The imaging device can be a CCD or CMOS image sensor,
The heat absorption part of the cooling device can be a heat absorption part of a Peltier element,
The heat insulating space between the inner container surrounding the central space of the container and the inner peripheral wall of the outer container can be a vacuum space,
The window portion of the glass window assembly may be a double glass window assembly that forms a heat insulating space on the window side.

本発明による撮像素子冷却容器は、以上のように構成されているから以下のような特有の効果が得られる。
ア.本発明による容器は、撮像素子を真空断熱部に収容しないので、従来の真空封止に起因する問題の発生の余地はない。容器内の結露の問題は解決され、二重窓ガラス構造にすれば表面の結露も防止できる。
イ.撮像素子を取り付けた後、空間を封じる際に、ガラスと断熱容器を接合するのに熱を使わなくて良いので、素子の損傷を防止できる。
ウ.容器内の空間と外部の圧力差が少ないので、封じ切った後は外部より水分等の好ましくない成分の侵入を少なくすることができる。
エ.容器をコネクタのソケットに対応させ、底部を撮像素子の種類別に用意するとすれば、容器を個別に設計しなくて、多品種の撮像素子に対応できる。
オ.撮像素子に不具合が発生しても、交換可能である。
Since the imaging device cooling container according to the present invention is configured as described above, the following specific effects can be obtained.
A. Since the container according to the present invention does not house the image sensor in the vacuum heat insulating portion, there is no room for problems due to conventional vacuum sealing. The problem of dew condensation in the container is solved, and if a double glazing structure is used, dew condensation on the surface can be prevented.
I. When the space is sealed after the image sensor is attached, it is not necessary to use heat to join the glass and the heat insulating container, so that the element can be prevented from being damaged.
C. Since the pressure difference between the space inside the container and the outside is small, it is possible to reduce entry of undesirable components such as moisture from the outside after sealing.
D. If the container is made to correspond to the socket of the connector and the bottom is prepared for each type of image sensor, it is possible to handle a wide variety of image sensors without designing the container individually.
E. Even if a defect occurs in the image sensor, it can be replaced.

以下図面を参照して本発明による装置の実施の形態を説明する。
図1は、本発明による撮像素子冷却容器の実施例を示す中央断面図である。本発明による撮像素子冷却容器は内部に円筒状または略矩形状の撮像素子とその接続空間を形成するものである。
外側容器8はアルミを加工したものであり、図中に開口する窓開口と底面に前記開口より小さい底開口が設けられている。窓開口は後述する窓組立を受け、気密に保つためのOリング4を受ける環状の溝が加工されている。底開口は後述する容器底部12を受け入れる開口である。
Embodiments of an apparatus according to the present invention will be described below with reference to the drawings.
FIG. 1 is a central sectional view showing an embodiment of an image sensor cooling container according to the present invention. The imaging element cooling container according to the present invention forms a cylindrical or substantially rectangular imaging element and its connection space.
The outer container 8 is obtained by processing aluminum, and has a window opening that opens in the drawing and a bottom opening smaller than the opening at the bottom. The window opening is subjected to a window assembly which will be described later, and an annular groove for receiving an O-ring 4 for keeping airtightness is machined. The bottom opening is an opening that receives a container bottom 12 described later.

導電端子群11と熱伝導率の高い銅等の金属棒13よりなる熱伝導性支持部材は、発泡スチレン等の断熱性および絶縁性に優れた材料よりなる容器底部12により気密に保持されている。容器底部12は、前記熱伝導性支持部材(金属棒13)を一端で撮像素子14の裏面と熱的に結合可能に、他端で外部の冷却装置の吸熱部16に熱結合するように、また、導電端子群11の一端側を容器内に、他端が容器外に現れるように支持して外側容器8の底の開口を密封する。
内側容器10はアルミ製のつば付筒状体であって、外側容器8の中央の空間15を囲い、内側容器10と外側容器8の内周壁間に断熱空間9を形成する。この断熱空間は真空とすることができる。
光学ガラス板5,7およびガラス製2重ガラス封止部3の間に、乾燥した気体(空気または窒素ガス)または真空の空間6が封入されて形成されている2重ガラス窓組立(5,3,7)は、外側容器8の上側開口に落とし込まれて、アルミ製のガラス押さえ板2を複数のボルト1で、気密かつ取り外し可能に固定される。
The heat conductive support member made of the conductive terminal group 11 and the metal rod 13 such as copper having high heat conductivity is airtightly held by the container bottom 12 made of a material having excellent heat insulation and insulation properties such as foamed styrene. . The container bottom 12 is configured such that the thermally conductive support member (metal rod 13) can be thermally coupled to the back surface of the image sensor 14 at one end and thermally coupled to the heat absorbing unit 16 of the external cooling device at the other end. Further, one end side of the conductive terminal group 11 is supported in the container and the other end appears outside the container, and the bottom opening of the outer container 8 is sealed.
The inner container 10 is an aluminum flanged tubular body, and surrounds the central space 15 of the outer container 8, and forms a heat insulating space 9 between the inner container 10 and the inner peripheral wall of the outer container 8. This insulating space can be evacuated.
A double glass window assembly (5, 5) formed by enclosing a dry gas (air or nitrogen gas) or vacuum space 6 between the optical glass plates 5 and 7 and the glass double glass sealing part 3. 3, 7) is dropped into the upper opening of the outer container 8, and the glass holding plate 2 made of aluminum is hermetically and detachably fixed with a plurality of bolts 1.

次に前述の容器の組立の例を簡単に説明する。
A.外側容器8内にアルミ板製の内側容器10を図示のように落とし込み、取り付けて、上部を溶接またはロウ付けにより接合する。
B.外側容器8と内側容器10の下側接合部にロウを乗せ、真空炉に入れ加熱し断熱空間9を真空に封じ切る。
C.導電端子群11と熱伝導率の良い銅やアルミ等の金属棒13を容器底部12に樹脂等で固定し、容器底部12を外側容器の底部の開口に密封固定する。
D.CCDまたはCMOSセンサ等の撮像素子14を前記金属棒13に固定する。
その際、撮像素子14と金属棒13の間に熱伝導を良好にする為に金属のペースト等を塗布、又は金属箔等を挟み込む。
E.導電端子群11の必要な端子と、撮像素子14の必要な端子を電気的に接続する。
Next, an example of assembling the container will be briefly described.
A. The inner container 10 made of an aluminum plate is dropped into the outer container 8 as shown in the figure, attached, and the upper part is joined by welding or brazing.
B. A wax is put on the lower joint portion of the outer container 8 and the inner container 10 and placed in a vacuum furnace to heat and heat-insulating space 9 is sealed in a vacuum.
C. The conductive terminal group 11 and a metal rod 13 such as copper or aluminum having good thermal conductivity are fixed to the container bottom 12 with resin or the like, and the container bottom 12 is hermetically fixed to the opening at the bottom of the outer container.
D. An image sensor 14 such as a CCD or CMOS sensor is fixed to the metal rod 13.
At that time, a metal paste or the like is applied between the image sensor 14 and the metal rod 13 or a metal foil or the like is sandwiched in order to improve heat conduction.
E. Necessary terminals of the conductive terminal group 11 and necessary terminals of the image sensor 14 are electrically connected.

F.光学ガラス板5(外側ガラス)および光学ガラス板7(内側ガラス)間のガラス製2重ガラス封止部3に囲まれた光透過部分の内部空間6に、空気または窒素等の乾燥した気体を充填するか、場合によっては真空として断熱効果を高めて結露を防止する。
金属棒13の外部からの冷却温度と、乾燥空気または窒素等の気体が封入されている容器内部空間15内の気体の熱伝導による関係から、図1のような2枚のガラス5,7である必要は必ずしもなく、1枚のガラスでも良い場合がある。
G.乾燥した空気等の気体の雰囲気中で、Eまでの撮像素子の組み込まれた容器と、Fのガラスの間をゴムまたは樹脂製Oリング4で密閉する。
金属製ガラス押さえ2と金属製ガラス押さえボルト1を使用し、乾燥空気または窒素等の気体が封入されている容器内部空間15を封じる。
F. A dry gas such as air or nitrogen is introduced into the inner space 6 of the light transmitting portion surrounded by the glass double glass sealing portion 3 between the optical glass plate 5 (outer glass) and the optical glass plate 7 (inner glass). Filling or, in some cases, a vacuum to enhance the heat insulation effect and prevent condensation.
From the relationship between the cooling temperature from the outside of the metal rod 13 and the heat conduction of the gas in the container internal space 15 in which a gas such as dry air or nitrogen is sealed, the two glasses 5 and 7 as shown in FIG. It is not always necessary to have a single glass.
G. In a gas atmosphere such as dry air, a container in which an image sensor up to E is incorporated and the glass of F are sealed with a rubber or resin O-ring 4.
A metal glass retainer 2 and a metal glass retainer bolt 1 are used to seal the container internal space 15 in which a gas such as dry air or nitrogen is enclosed.

前記撮像素子冷却容器は、容器の金属棒13の外部部分にペルチェ素子等の冷却装置吸熱部16を取り付け、撮像素子14を必要な温度まで冷却し、外部の光学系(図示を省略)を介して被写体を撮像素子に投影して撮像が可能となる。   The image pickup device cooling container is provided with a cooling device heat absorption part 16 such as a Peltier element attached to an external portion of the metal rod 13 of the container, cools the image pickup element 14 to a required temperature, and passes through an external optical system (not shown). Thus, the subject can be projected onto the image sensor to capture an image.

以上詳しく説明した実施例について本発明の範囲内で種々の変形を施すことができる。図2は、外側容器、容器底部、熱伝導部材の接続態様の変形例を示す部分断面図である。外側容器、容器底部の結合を強固にするために、大量に生産する場合には、外側容器8の内周と熱伝導部材13の外周にそれぞれ凹凸溝を設けておき、その間に樹脂を流し込んで容器底部12を一体に成形することができる。
また、さらに他の変形例として、外側容器8の内周と容器底部12間をねじ結合可能にし、容器底部12と熱伝導部材13間もねじ結合可能にすることもできる。この場合は、ねじ結合だけでもある程度の気密性を保つことができるが、気密性を高めるために、接着剤を塗布してもよい。この構成によれば、容器底部12等の交換が容易になる。
Various modifications can be made to the embodiment described in detail within the scope of the present invention. FIG. 2 is a partial cross-sectional view showing a modification of the connection mode of the outer container, the container bottom, and the heat conducting member. In order to strengthen the connection between the outer container and the container bottom, in the case of mass production, uneven grooves are provided on the inner periphery of the outer container 8 and the outer periphery of the heat conducting member 13, respectively, and a resin is poured between them. The container bottom 12 can be formed integrally.
As still another modification, the inner periphery of the outer container 8 and the container bottom 12 can be screwed together, and the container bottom 12 and the heat conducting member 13 can be screwed together. In this case, a certain degree of hermeticity can be maintained only by screw connection, but an adhesive may be applied to improve hermeticity. According to this structure, replacement | exchange of the container bottom part 12 grade | etc., Becomes easy.

本発明による撮像素子冷却容器は、撮像素子(イメージセンサ等)の冷却が容易であり、被写体側または容器内の透明板の結露を防止することができ、多岐に渡る応用に対応することができるから、各種撮像素子の評価の分野とか、劣悪な環境におけるイメージデータの獲得や、計測の分野に利用できる。   The imaging device cooling container according to the present invention can easily cool the imaging device (image sensor or the like), can prevent condensation on the object side or in the transparent plate in the container, and can correspond to various applications. Therefore, it can be used in the field of evaluation of various image sensors, the acquisition of image data in a poor environment, and the field of measurement.

本発明による撮像素子冷却容器の実施例の中央断面図である。It is a center sectional view of the example of the image sensor cooling container by the present invention. 外側容器、容器底部、熱伝導部材の接続態様の変形例を示す部分断面図である。It is a fragmentary sectional view which shows the modification of the connection aspect of an outer side container, a container bottom part, and a heat conductive member.

符号の説明Explanation of symbols

1 ボルト
2 ガラス押さえ板
3 ガラス製2重ガラス封止部
4 ゴムまたは樹脂製Oリング
5,7 光学ガラス板
6 乾燥した気体または真空空間
8 外側容器
9 断熱空間
10 内側容器
11 導電端子
12 容器底部
13 熱伝導部材(金属棒)
14 撮像素子
15 容器内部空間
16 冷却装置吸熱部
DESCRIPTION OF SYMBOLS 1 Bolt 2 Glass holding plate 3 Glass double glass sealing part 4 Rubber or resin O-ring 5,7 Optical glass board 6 Dry gas or vacuum space 8 Outer container 9 Thermal insulation space 10 Inner container 11 Conductive terminal 12 Container bottom 13 Heat conduction member (metal bar)
14 Image sensor 15 Container internal space 16 Cooling device heat absorption part

Claims (2)

窓開口と底面に底開口を有する金属性の外側容器と、
導電端子群および一端で撮像素子と他端で冷却装置の吸熱部に熱結合する熱伝導性支持部材を、前記導電端子群の一端側を容器内に他端が容器外に、前記熱伝導性支持部材の一端を容器内に他端が容器外に現れるように気密に支持し、前記外側容器の底開口に気密に結合する容器底部と、
前記外側容器の中央の空間を囲い、前記外側容器の内周壁間に断熱空間を形成する内側容器と、
前記窓開口に交換可能に密着させられるガラス窓組立と、から構成した撮像素子冷却容器。
A metallic outer container having a window opening and a bottom opening on the bottom;
The conductive terminal group and a thermally conductive support member thermally coupled to the image sensor at one end and the heat absorbing portion of the cooling device at the other end, the one end side of the conductive terminal group inside the container and the other end outside the container, the thermal conductivity A container bottom that supports one end of the support member in an airtight manner so that the other end appears outside the container and is airtightly coupled to the bottom opening of the outer container;
An inner container that surrounds a central space of the outer container and forms a heat insulating space between inner peripheral walls of the outer container;
An image sensor cooling container comprising: a glass window assembly that is exchangeably attached to the window opening.
前記撮像素子はCCDまたはCMOSイメージセンサであり、
前記冷却装置の吸熱部は、ペルチェ素子の吸熱部であり、
前記容器の中央の空間を囲う内側容器と、前記外側容器の内周壁間の断熱空間は、真空空間であり、
前記ガラス窓組立の窓部は窓側の断熱空間を形成する2重ガラス窓組立である請求項1記載の撮像素子冷却容器。
The image sensor is a CCD or CMOS image sensor,
The heat absorption part of the cooling device is a heat absorption part of a Peltier element,
The heat insulating space between the inner container surrounding the central space of the container and the inner peripheral wall of the outer container is a vacuum space,
The imaging device cooling container according to claim 1, wherein the window portion of the glass window assembly is a double glass window assembly that forms a heat insulating space on the window side.
JP2006096684A 2006-03-31 2006-03-31 Image sensor cooling container Expired - Fee Related JP4374349B2 (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114354404A (en) * 2022-01-07 2022-04-15 中国航发贵阳发动机设计研究所 Sensor cooling device
JP7118467B1 (en) 2020-09-18 2022-08-16 株式会社岩谷技研 Shooting method for photographing the subject
US11794906B2 (en) 2021-03-19 2023-10-24 Iwaya Giken Inc. Container for flight craft
EP4395348A1 (en) 2022-12-27 2024-07-03 Canon Kabushiki Kaisha Imaging apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7118467B1 (en) 2020-09-18 2022-08-16 株式会社岩谷技研 Shooting method for photographing the subject
JP2022122803A (en) * 2020-09-18 2022-08-23 株式会社岩谷技研 Imaging method for imaging subject
US11794906B2 (en) 2021-03-19 2023-10-24 Iwaya Giken Inc. Container for flight craft
US11858642B2 (en) 2021-03-19 2024-01-02 Iwaya Giken Inc. Container for flight craft
CN114354404A (en) * 2022-01-07 2022-04-15 中国航发贵阳发动机设计研究所 Sensor cooling device
EP4395348A1 (en) 2022-12-27 2024-07-03 Canon Kabushiki Kaisha Imaging apparatus

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