CN107045251A - A kind of space camera active refrigeration vacuum sealing focal plane subassembly - Google Patents

A kind of space camera active refrigeration vacuum sealing focal plane subassembly Download PDF

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Publication number
CN107045251A
CN107045251A CN201710343241.XA CN201710343241A CN107045251A CN 107045251 A CN107045251 A CN 107045251A CN 201710343241 A CN201710343241 A CN 201710343241A CN 107045251 A CN107045251 A CN 107045251A
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CN
China
Prior art keywords
focal plane
vacuum
casing
cold screen
active refrigeration
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CN201710343241.XA
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CN107045251B (en
Inventor
凤良杰
杨文刚
王晨杰
淡丽军
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B17/00Details of cameras or camera bodies; Accessories therefor
    • G03B17/55Details of cameras or camera bodies; Accessories therefor with provision for heating or cooling, e.g. in aircraft

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  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Studio Devices (AREA)

Abstract

The present invention proposes a kind of active refrigeration, vacuum-packed space camera active refrigeration vacuum sealing focal plane subassembly, can effectively solve the problems, such as moisture contamination during traditional camera focal plane detector refrigeration by detector refrigeration to less than 60 DEG C.The component is repaiied including focal plane case cuts pad, trim ring, vacuum glazing, vacuum focal plane casing, vacuum sealing connector, cooling assembly, focal plane bottom seat, focal plane bottom plate, heat pipe, relaying casing, thermistor and TEC;Vacuum glazing compresses incidence hole by trim ring sealing, and the front end of trim ring, which is provided with focal plane case, repaiies and cut pad;Cooling assembly includes cold screen window, cold screen, active refrigeration CCD components and cold screen substrate;Cold screen window is arranged in cold screen breach;The back side of cold screen substrate is provided with multiple TECs and thermistor;Cooling assembly, focal plane bottom seat, focal plane bottom plate, heat pipe are arranged in the cavity of vacuum focal plane casing and relaying casing composition, and the back side of focal plane bottom plate is provided with heat pipe.

Description

A kind of space camera active refrigeration vacuum sealing focal plane subassembly
Technical field
The present invention relates to camera sealing device field, and in particular to a kind of space camera active refrigeration vacuum sealing focal plane group Part.
Background technology
The space astronomy camera integration time for observing dark weak signal target is long, and the requirement suppressed to noise of detector is very high, typically Detector dark current is reduced by the way of refrigeration detector, camera signal to noise ratio is improved.Thermoelectric cooling (Thermo-Electric Cooling, TEC) technology is a kind of refrigerating method using peltier effect, it does not need any working medium, no-movable part, knot Structure is simple, is extremely suitable for the refrigeration application of camera space focal plane, but spacecraft cooling focal plane is in ground progress testing experiment, Refrigeration focal plane temperature is generally below ambient dew point, and condensation vapor has a strong impact on testing experiment effect to low temperature detector surface, very Space probe may extremely be damaged.
To eliminate the solidifying white phenomenon of condensation, camera space on the ground testing experiment when focal plane case is typically stored in nitrogen cabinet In, make to be filled with nitrogen in focal plane, and moisture content is absorbed using drier.But this mode is for needing to carry out testing experiment for a long time Astronomical camera, steam can slowly enter casing, influence test effect, and the powder of drier can pollute focal plane, be unfavorable for AEROSPACE APPLICATION.
Traditional camera space focal plane case typically uses the aluminum alloy materials of good heat conductivity.But it is very low for cryogenic temperature Astronomical camera focal plane for, the thermal conductive resin of aluminium alloy can make the temperature of seal glass window be reduced to dew-point temperature with Under, make condensation vapor to glass window, be unfavorable for testing experiment, while the thermal coefficient of expansion of aluminium alloy and TEC is not Matching, can make TEC produce larger thermal stress, reduce focal plane security.
The content of the invention
To solve the technical problem of existing low temperature focal plane condensation vapor, the invention provides a kind of active refrigeration, vacuum are close The space camera active refrigeration vacuum sealing focal plane subassembly of envelope, detector refrigeration can be arrived less than -60 DEG C, effectively solve tradition Moisture contamination problem when camera focal plane detector freezes.
Technical solution provided by the present invention is:
A kind of space camera active refrigeration vacuum sealing focal plane subassembly, including focal plane case are repaiied and cut pad 1, trim ring 2, vacuum glass Glass window 3, vacuum focal plane casing 4, vacuum sealing connector 7, cooling assembly, focal plane bottom seat 10, focal plane bottom plate 11, heat pipe 12nd, relaying casing 13, thermistor and TEC 14;The front end of vacuum focal plane casing 4 is provided with outside incidence hole, incidence hole Edge be provided with boss, vacuum glazing 3 compresses incidence hole by the sealing of trim ring 2, and the front end of trim ring 2, which is provided with focal plane case, repaiies and cut Pad 1;The side of vacuum focal plane casing 4 is provided with insert hole;The side of vacuum focal plane casing 4 is provided with vacuum suction interface 15 and very Porosimter interface 16;Cooling assembly is arranged in the cavity of focal plane bottom seat 10;Cooling assembly include cold screen window 5, cold screen 6, Active refrigeration CCD components 8 and cold screen substrate 9;The front end of cold screen 6 is provided with breach, and cold screen window 5 is arranged in breach;Cold screen bottom Plate 9 is provided with window, and active refrigeration CCD components 8 are arranged between cold screen 6 and cold screen substrate 9, the back side of active refrigeration CCD components 8 peace The window of the TEC 14 and thermistor of dress through cold screen substrate 9 is stretched out outside cold screen substrate 9, the back side of cold screen substrate 9 Provided with multiple TECs 14 and thermistor, active refrigeration CCD components 8, thermistor and TEC 14 are by true The insert hole of the empty side of focal plane casing 4 is connected with vacuum sealing connector 7;Cooling assembly, focal plane bottom seat 10, focal plane bottom plate 11st, heat pipe 12 is arranged in the cavity that vacuum focal plane casing 4 and relaying casing 13 are constituted;Focal plane bottom plate 11 is arranged on focal plane The rear of bottom seat 10, the back side of focal plane bottom plate 11 is provided with heat pipe 12, using focal plane bottom seat 10 and focal plane bottom plate 11 Seal the rear end of vacuum focal plane casing 4;Contact surface, vacuum focal plane casing 4 and the focal plane of vacuum focal plane casing 4 and vacuum glazing 3 Sealing ring is equipped with the contact surface of the contact surface of bottom seat 10, focal plane bottom seat 10 and focal plane bottom plate 11.
Further, the material of vacuum focal plane casing 4 is titanium alloy.The relatively low coefficient of heat conduction of titanium alloy can be effectively improved Vacuum glass window temperature, prevents condensation vapor to glass window.
Further, the section of vacuum sealing connector 7 is track type circular section, and the section of vacuum sealing connector 7 is provided with rubber Rubber cushion 17.Ensure the vacuum leakproofness with extraneous electrical connections.
Further, the surrounding of vacuum focal plane casing 4 is evenly arranged with eight lugs, and the surrounding of relaying casing 13 is provided with Eight screwing through hole, the vacuum focal plane casing 4 is fixedly connected with relaying casing 13 respectively by screw.
Further, focal plane bottom plate 11 is using the modulated molybdenum-copper bottom plate of thermal coefficient of expansion.Selection and thermoelectricity system The molybdenum-copper material of cooler (TEC) material thermal expansion coefficient matching solves TEC under big temperature difference condition as focal plane bottom plate Thermal stress issues, meet the requirement of camera space focusing plane case high rigidity, high intensity and high reliability.
Further, the back side of cold screen substrate 9 is provided with four TECs 14 and four thermistors;Active refrigeration The back mounted TEC 14 of CCD components 8 and thermistor quantity are two.
Further, it is provided with heat insulating mattress between vacuum focal plane casing 4 and relaying casing 13.
Further, the substrate of active refrigeration CCD components 8 is the gold-plated processing of other surfaces outside aluminium nitride ceramics, photosurface, Reduce radiation heat transfer.
Further, the surfaces externally and internally of cold screen 6 and cold screen substrate 9 carries out gold-plated processing, and focal plane bottom plate 11 is towards master The gold-plated processing in side of dynamic refrigeration CCD components 8, reduces radiation heat transfer.
Further, coated with thermally conductive silicone grease between the contact surface of heat pipe 12 and focal plane bottom plate 11, to reduce thermal contact resistance.
Advantages of the present invention is:
1. can effectively it be solved when traditional camera focal plane detector freezes by detector active refrigeration to less than -60 DEG C Moisture contamination problem.
2nd, the molybdenum-copper material matched with TEC (TEC) material thermal expansion coefficient is selected as focal plane bottom plate, The thermal stress issues of TEC under big temperature difference condition are solved, camera space focusing plane case high rigidity, high intensity and highly reliable is met The requirement of property.
The structure such as detachable vacuum seal when 3. focal plane subassembly has active refrigeration, vacuum sealing, small light, transmitting Feature.
4th, the present invention is sealed using rubber seal to cavity where camera focal plane CCD/CMOS, solves steam The problem of being polluted into focal plane cavity focusing plane.
5th, focal plane case side wall of the present invention has vacuum suction interface and vacuometer interface, and gas inside focal plane case can be shown in real time Pressure.
6th, the CCD component externals inside focal plane case of the present invention are covered with cold screen, and cold screen is freezed using 4 small-sized TEC, is Internal focal plane creates low temperature environment, and influence of the exterior space heat radiation to CCD temperature is reduced to greatest extent.
7th, connector is contacted using track type circular section rubber blanket with focal plane case side wall in the present invention, it is ensured that be electrically connected with the external world The vacuum leakproofness of socket part point.
8th, the sub-buckle structure design in the present invention between part, had both met the overall closure of focal plane case, Jiao is prevented again The problems such as there is electromagnetic leakage in face case.
9th, the bottom plate of focal plane case uses the material heat of TEC in molybdenum-copper material, with CCD components in the present invention The coefficient of expansion is consistent, it is ensured that security of the TEC in a wide range of temperature changing process.
Brief description of the drawings
Fig. 1 is camera vacuum focal plane case overall structure sectional view;
Fig. 2 is the explosive view of camera vacuum focal plane case;
Fig. 3 is vacuum focal plane case shell mechanism schematic diagram;
Fig. 4 is CCD components and gold-plated cold screen structural representation;
Fig. 5 is the structural representation of vacuum sealing connector.
Wherein reference is:1- focal plane casees, which are repaiied, cuts pad, 2- trim rings, 3- vacuum glazings, 4- vacuum focal plane casings, 5- Cold screen window, the cold screens of 6-, 7- vacuum sealing connectors, 8- active refrigeration CCD components, the cold screen substrates of 9-, 10- focal planes bottom seat, 11- focal plane bottom plates, 12- heat pipes, 13- relaying casings, 14- TECs (TEC), 15- vacuum suction interfaces, 16- vacuum Degree meter interface, 17- rubber blankets.
Embodiment
Present disclosure is described in further detail below in conjunction with the drawings and specific embodiments:
As shown in Figure 1, Figure 2, Figure 3 shows, space camera active refrigeration vacuum sealing focal plane subassembly is repaiied including focal plane case and cuts pad 1st, trim ring 2, vacuum glazing 3, vacuum focal plane casing 4, vacuum sealing connector 7, cooling assembly, focal plane bottom seat 10, focal plane Bottom plate 11, heat pipe 12, relaying casing 13, thermistor and TEC 14;The front end of vacuum focal plane casing 4 is provided with into light Edge outside hole, incidence hole is provided with boss, and vacuum glazing 3 is sealed on the casing being pressed on outside incidence hole by trim ring 2, pressure The front end of circle 2, which is provided with focal plane case and repaiied, cuts pad 1;The side of vacuum focal plane casing 4 is provided with insert hole;Vacuum focal plane casing 4 Side is provided with vacuum suction interface 15 and vacuometer interface 16;Cooling assembly is arranged in the cavity of focal plane bottom seat 10;System Cold component includes cold screen window 5, cold screen 6, active refrigeration CCD components 8 and cold screen substrate 9;The front end of cold screen 6 is provided with breach, cold Shield window 5 to be arranged in breach, active refrigeration CCD components 8 are arranged between cold screen 6 and cold screen substrate 9;Cold screen substrate 9 is provided with Window, the back mounted TEC 14 of active refrigeration CCD components 8 and thermistor stretch out cold through the cold window of screen substrate 9 Outside screen substrate 9, the back side of cold screen substrate 9 is provided with multiple TECs 14 and thermistor, active refrigeration CCD components 8, temperature-sensitive Resistance and TEC 14 are connected by the insert hole of the side of vacuum focal plane casing 4 with two vacuum sealing connectors 7.
Cooling assembly, focal plane bottom seat 10, focal plane bottom plate 11, heat pipe 12 are arranged at vacuum focal plane casing 4 and relaying In the cavity that casing 13 is constituted;Focal plane bottom plate 11 is arranged on the rear of focal plane bottom seat 10, and the back side of focal plane bottom plate 11 is set Heat pipe 12 is equipped with, the rear end of vacuum focal plane casing 4 is sealed using focal plane bottom seat 10 and focal plane bottom plate 11.Vacuum focal plane casing 4 Contact surface, focal plane bottom seat 10 and the focal plane of contact surface, vacuum focal plane casing 4 and focal plane bottom seat 10 with vacuum glazing 3 Sealing ring is equipped with the contact surface of bottom plate 11.
The front end of vacuum focal plane casing 4 is connected with camera rear optical system flange, is designed using flange, prevents veiling glare from entering burnt Face, the front end incidence hole of vacuum focal plane casing 4 is sealed using vacuum glazing 3, using focal plane bottom seat 10 and molybdenum-copper focal plane Active refrigeration CCD components 8, back are installed on the rear end of the sealing vacuum focal plane of bottom plate 11 casing 4, molybdenum-copper focal plane bottom plate 11 Using heat pipe 12 is installed, the heat of CCD components is transferred out, vacuum focal plane casing 4 with relaying casing 13 using screw and every Heat pad is connected, and relaying casing 13 is connected with rear end focal plane electronic packages.CCD components are freezed by two two grades of TEC, CCD components Outer cover low temperature cold screen 6.
Focal plane case, which is repaiied, cuts pad 1 positioned between the front end of vacuum focal plane casing 4 and rear optical system, and focal plane case, which is repaiied, cuts pad 1 Made using heat-barrier material, the focusing plane case of perpendicularity and focal plane case can be with to(for) optical axis be entered for the distance of rear optical system Row is repaiied and cut, and the heat transfer of front panel can be completely cut off again to vacuum focal plane case.
The thickness of vacuum glazing 3 is calculated analytically, and the thickness of vacuum glazing 3 is 8 ㎜, a diameter of 40 ㎜, can Ensure optics focal plane correct position, face shape at atmosheric pressure is can guarantee that again, vacuum glazing 3 is arranged on true using trim ring 2 The empty front end of focal plane casing 4.Sealing effectiveness is obtained using rubber blanket.
The substrate of active refrigeration CCD components 8 is aluminium nitride ceramics, in addition to photosurface, the gold-plated processing of CCD components other surfaces. 2 thermistors are pasted in CCD module boards upper surface close to read-out area, for CCD temperature to be monitored and controlled.CCD flexible cables It is connected with vacuum sealing connector 7, CCD substrates back is using two TEC active refrigerations, it is ensured that the temperature in CCD runnings.
As shown in figure 4, gold-plated cold screen 6 and gold-plated cold screen substrate 9, are made using the higher aluminium alloy of thermal conductivity, in order to subtract Small radiation heat transfer, its surfaces externally and internally carries out gold-plated processing, and cold screen substrate 9 is designed using symmetrical plug-in type, the left half of and right side half While from the right and left insertion active refrigeration CCD components 8, avoiding TEC.Cold screen substrate 9 is connected by screw with cold screen 6, using 4 TEC refrigeration is built for CCD respectively pastes a thermistor at low-temp radiating environment, cold 4 TEC positions of the surface of screen 6 correspondence.Cold screen Window 5 is corresponding with CCD photosurfaces, is cuboid window.
Molybdenum-copper bottom plate 11 is gold-plated towards CCD sides, and inner surface is 6 TEC hot junction mounting surface, passes through GD-414C TEC is pasted on TEC substrate inner surfaces by black silicon rubber, and is connected by 12 screws with focal plane bottom seat 10, with rubber blanket Realize vacuum sealing.The outer surface of focal plane bottom plate 11 be the evaporation ends mounting surface of heat pipe 12, two heat pipes by 12 mounting holes with The back side of focal plane bottom plate 11 is connected, coated with thermally conductive silicone grease between contact surface, to reduce thermal contact resistance.
Vacuum focal plane casing 4 is integrally formed processing and fabricating by titanium alloy, is pacified between rear optical system using Titanium Alloy Screw Dress is fixed, and is connected by 12 screws.Two sides of focal plane casing are provided with 2 hermetically sealed connectors, are utilized respectively flexible cable CCD and TEC is connected, two other side is respectively vacuum suction interface 15 and vacuometer interface 16.
As shown in figure 5, the Surface Machining annular groove of vacuum sealing connector 7, embedded track type circular section rubber blanket 17, with Vacuum focal plane casing 4 is installed to obtain vacuum sealing effect.

Claims (10)

1. a kind of space camera active refrigeration vacuum sealing focal plane subassembly, it is characterised in that:Repaiied including focal plane case cut pad (1), Trim ring (2), vacuum glazing (3), vacuum focal plane casing (4), vacuum sealing connector (7), cooling assembly, focal plane bottom seat (10), focal plane bottom plate (11), heat pipe (12), relaying casing (13), thermistor and TEC (14);
The edge that the front end of vacuum focal plane casing (4) is provided with outside incidence hole, incidence hole is provided with boss, and vacuum glazing (3) leads to Trim ring (2) sealing incidence hole is crossed, the front end of trim ring (2), which is provided with focal plane case, repaiies and cut pad (1);The side of vacuum focal plane casing (4) Face is provided with insert hole;The side of vacuum focal plane casing (4) is provided with vacuum suction interface (15) and vacuometer interface (16);
Cooling assembly is arranged in the cavity of focal plane bottom seat (10);Cooling assembly includes cold screen window (5), cold screen (6), active Freeze CCD components (8) and cold screen substrate (9);The front end of cold screen (6) is provided with breach, and cold screen window (5) is arranged in breach;It is cold Screen substrate (9) is provided with window, and active refrigeration CCD components (8) are arranged between cold screen (6) and cold screen substrate (9), active refrigeration The window of CCD components (8) back mounted TEC (14) and thermistor through cold screen substrate (9) stretches out cold screen substrate (9) outside, the back side of cold screen substrate (9) is provided with multiple TECs (14) and thermistor, active refrigeration CCD components (8), heat Quick resistance and TEC (14) are connected by the insert hole of vacuum focal plane casing (4) side with vacuum sealing connector (7);
Cooling assembly, focal plane bottom seat (10), focal plane bottom plate (11), heat pipe (12) be arranged at vacuum focal plane casing (4) and In the cavity for relaying casing (13) composition;Focal plane bottom plate (11) is arranged on the rear of focal plane bottom seat (10), focal plane bottom plate (11) the back side is provided with heat pipe (12), and vacuum focal plane casing is sealed using focal plane bottom seat (10) and focal plane bottom plate (11) (4) rear end;
The contact surface of vacuum focal plane casing (4) and vacuum glazing (3), vacuum focal plane casing (4) and focal plane bottom seat (10) Sealing ring is equipped with the contact surface of contact surface, focal plane bottom seat (10) and focal plane bottom plate (11).
2. space camera active refrigeration vacuum sealing focal plane subassembly according to claim 1, it is characterised in that:Vacuum focal plane Casing (4) material is titanium alloy.
3. space camera active refrigeration vacuum sealing focal plane subassembly according to claim 2, it is characterised in that:Vacuum sealing Connector (7) section is track type circular section, and vacuum sealing connector (7) section is provided with rubber blanket (17).
4. the space camera active refrigeration vacuum sealing focal plane subassembly according to claim 1 or 2 or 3, it is characterised in that:Very The surrounding of empty focal plane casing (4) is evenly arranged with eight lugs, and the surrounding of relaying casing (13) is provided with eight screwing through hole, institute Vacuum focal plane casing (4) is stated to be fixedly connected with relaying casing (13) by screw.
5. space camera active refrigeration vacuum sealing focal plane subassembly according to claim 4, it is characterised in that:Focal plane bottom Plate (11) is using the modulated molybdenum-copper bottom plate of thermal coefficient of expansion.
6. space camera active refrigeration vacuum sealing focal plane subassembly according to claim 5, it is characterised in that:Cold screen substrate (9) the back side is provided with four TECs (14) and four thermistors;Active refrigeration CCD components (8) back mounted heat Electric refrigerator (14) and thermistor quantity are two.
7. space camera active refrigeration vacuum sealing focal plane subassembly according to claim 6, it is characterised in that:Vacuum focal plane Heat insulating mattress is provided between casing (4) and relaying casing (13).
8. space camera active refrigeration vacuum sealing focal plane subassembly according to claim 7, it is characterised in that:Active refrigeration CCD components (8) substrate is the gold-plated processing of other surfaces outside aluminium nitride ceramics, photosurface.
9. space camera active refrigeration vacuum sealing focal plane subassembly according to claim 8, it is characterised in that:Cold screen (6) Gold-plated processing is carried out with the surfaces externally and internally of cold screen substrate (9), and focal plane bottom plate (11) is towards active refrigeration CCD components (8) The gold-plated processing in side.
10. space camera active refrigeration vacuum sealing focal plane subassembly according to claim 9, it is characterised in that:Heat pipe (12) the coated with thermally conductive silicone grease between the contact surface of focal plane bottom plate (11).
CN201710343241.XA 2017-05-16 2017-05-16 Space camera active refrigeration vacuum seal focal plane assembly Expired - Fee Related CN107045251B (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110752198A (en) * 2019-10-28 2020-02-04 中国电子科技集团公司第四十四研究所 Back-illuminated avalanche gain type EMCCD refrigeration packaging structure and method

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US5634150A (en) * 1992-09-08 1997-05-27 Nikon Corporation Compact camera with improved display device and mounting board layout
US5745815A (en) * 1995-06-28 1998-04-28 Fuji Photo Optical Co., Ltd. Camera cover
CN101059641A (en) * 2006-04-18 2007-10-24 佳能株式会社 Optical device and method for removing foreign substances from the optical device
CN101813951A (en) * 2009-12-07 2010-08-25 中国科学院西安光学精密机械研究所 Temperature controlled focal plane detector mechanism
CN102681568A (en) * 2012-05-30 2012-09-19 中国科学院西安光学精密机械研究所 Precise thermal control mechanism of focal plane detector
CN104902155A (en) * 2015-05-28 2015-09-09 中国科学院西安光学精密机械研究所 Closed focal plane box of space camera
CN206757274U (en) * 2017-05-16 2017-12-15 中国科学院西安光学精密机械研究所 A kind of space camera active refrigeration vacuum sealing focal plane subassembly

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5634150A (en) * 1992-09-08 1997-05-27 Nikon Corporation Compact camera with improved display device and mounting board layout
US5745815A (en) * 1995-06-28 1998-04-28 Fuji Photo Optical Co., Ltd. Camera cover
CN101059641A (en) * 2006-04-18 2007-10-24 佳能株式会社 Optical device and method for removing foreign substances from the optical device
CN101813951A (en) * 2009-12-07 2010-08-25 中国科学院西安光学精密机械研究所 Temperature controlled focal plane detector mechanism
CN102681568A (en) * 2012-05-30 2012-09-19 中国科学院西安光学精密机械研究所 Precise thermal control mechanism of focal plane detector
CN104902155A (en) * 2015-05-28 2015-09-09 中国科学院西安光学精密机械研究所 Closed focal plane box of space camera
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110752198A (en) * 2019-10-28 2020-02-04 中国电子科技集团公司第四十四研究所 Back-illuminated avalanche gain type EMCCD refrigeration packaging structure and method

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