JP2543842B2 - Spinner head - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a spinner head used for spinner-coating a coating liquid on a disk substrate in an optical recording disk, a magnetic disk, etc., and a recording layer for an optical recording disk using this spinner head. Regarding the coating method.

[0002]

2. Description of the Related Art For example, as a spinner head used for spinner coating for forming various coatings on various disk substrates, such as coating of a recording layer of an optical recording disk, conventionally, it is shown in FIG. There is a formula spinner head.

In this system, the disc substrate 8 is mounted on the disc substrate mounting portion 3 having a size substantially the same as that of the disc substrate 8,
Next, the disk substrate 8 is sucked and fixed to the disk substrate mounting portion 3 by the suction path 7 and rotated in the direction of arrow a.

However, in this method, if a part of the disk substrate 8 is warped and the entire surface is not flat, the adsorption and fixation to the disk substrate mounting portion 3 may be incomplete and the adsorption and fixation may not be possible.

Further, heat generated from a motor bearing portion (not shown) is passed through the disk substrate mounting portion 3 to the disk substrate 8
And the rate of evaporation of the solvent of the coating liquid and the drying speed fluctuate, and the coating film thickness is not stable. Further, heat easily escapes in a portion in contact with the head itself, and heat does not easily escape in a portion in contact with the space formed by the suction portion, and a temperature difference can be formed on the substrate. As a result, the recording layer is unevenly dried, and the recording layer is unevenly thickened.

Further, since the spinner head becomes large, it is necessary to use a motor having a large output, and there is a drawback that a large amount of power consumption is required.

In order to solve such a drawback, there is a center screw type spinner head shown in FIG.

In this type of spinner head, the disk substrate 8 is mounted on the disk substrate mounting portion 3, and the chuck 4 is fixed to the disk substrate mounting portion 3 by the screw portion 45, whereby the disk substrate 8 is fixed. It rotates in the direction of arrow a.

However, in this method, dust may be generated by the sliding of the screw portion 45, which may adversely affect the recording layer.
Further, there is a drawback that the attachment / detachment operation is not simple and time-consuming.

[0010]

The object of the present invention is to make it possible to form a stable coating film with a small size and low energy consumption.
An object of the present invention is to provide a spinner head for spinner coating, which is easy to operate, and a method for coating a recording layer for an optical recording disk using this spinner head.

[0011]

These objects are achieved by the present invention described in (1) to (4) below. (1) A disc substrate mounting portion, which is connected to a motor and mounts the disc substrate, is formed by spinner coating the coating liquid on an annular disc substrate having a circular opening in the center to form a ring-shaped coating thin film. This board mounting part has an annular and smooth disk substrate mounting surface for sucking and mounting the disk substrate by suction, and moreover, it is fitted to the central opening of the disk substrate at the central part of the disk substrate mounting part. A spinner head having a convex portion for positioning a disk substrate, wherein the outer diameter of the disk substrate mounting surface is smaller than the inner diameter of the coating thin film effective area. (2) The spinner head according to (1) above, wherein the coated thin film is a recording layer for an optical recording disk. (3) The spinner head according to (1) or (2) above, wherein the suction is performed by a plurality of suction ports having a small area formed on the disk substrate mounting surface. (4) The coating liquid is spinner coated on an annular disc substrate having a circular opening in the center to form a ring-shaped coating thin film, which is connected to a motor and sucks and mounts the disc substrate. A method for applying a recording layer for an optical recording disk using a circular spinner head, wherein a positioning protrusion provided in the central portion of the upper surface of the spinner head is fitted into an opening at the center of the disk substrate. In a state where the center of rotation of the head and the center of rotation of the disc substrate are aligned, the disc substrate is mounted and adsorbed on the disc substrate mounting surface of the disc substrate mounting portion, and the spinner head is rotated in this state, The disc substrate is rotated, and the coating solution is supplied from the position beyond the outer periphery of the disc substrate mounting surface on the disc substrate surface to the outer peripheral side. Until you click the outer edge of the board, a method of coating an optical recording disk for recording layer and forming a ring-shaped coating film as a coating film effective region is located.

[0012]

[Specific Configuration] The specific configuration of the present invention will be described below with reference to FIGS.
It will be described in detail according to the embodiment shown in FIG.

1 and 2 are for explaining the present invention. FIG. 1 is a vertical sectional view of a spinner head, and FIG. 2 is a vertical sectional view when a disk substrate is set on the spinner head.

In FIG. 1, a spinner head 1 has a base portion 2 and a disk substrate mounting portion 3. The disk substrate mounting portion 3 has a smooth and circular disk substrate mounting surface 35 for mounting and sucking the disk substrate 8.

Further, the disk substrate mounting portion 3 has a plurality of small area suction ports 5. It is preferable that the suction port is a hole having an opening shape which is open to the disk substrate mounting surface 35 in the disk substrate mounting portion 3, and at that time,
The radius of the opening is about 1-10 mm. A suction path 7 is formed on the disk substrate mounting surface in the base portion 2 and the disk substrate mounting portion 3 so as to communicate with the suction port 5.

The suction port 5 is preferably provided with an elastic member that comes into contact with the disk substrate 8. This allows
The adsorption and fixation of the disk substrate 8 can be made more reliable and favorable.

As such an elastic member, for example, a suction cup 6 may be provided in the suction port 5 so as to communicate with the suction passage 7 as shown in the figure. Alternatively, an O-ring (not shown) may be provided at a portion of the suction port 5 that contacts the disk substrate 8.

The suction passage 7 communicates with a suction pump (not shown), and the disk substrate 8 is mounted on the mounting surface 35 of the disk substrate mounting portion 3 via an elastic member provided in the suction port 5 or the hole 5. Adsorb and fix.

In this case, a known sealing mechanism is arranged at the outlet 75 of the suction passage 7 and a sealing mechanism (not shown) is used,
It is communicated with an external suction pump (not shown).

At the center of the disk substrate mounting surface 35, as shown in the drawing, an inner peripheral portion rotary shaft fitting inlet position aligning convex portion 38 of the substrate 8 is provided.

The base 2 is connected to a motor (not shown) by a known means such as screwing, groove alignment and the like.

The disk substrate mounting surface 35 of the above-mentioned spinner head is disk-shaped, and its diameter may be smaller than the diameter of the effective area of the coating film 9 (for example, the recording surface in an optical disk), usually 20. Approximately 100 mm. Moreover, by doing so, the influence of the heat generation of the motor is eliminated.

Holes 5 provided on the disk substrate mounting surface 35
Is preferably provided in the circumferential direction of the disk substrate mounting surface 35 at a constant interval of about 2 to 6 pieces.

In this manner, preferably, a plurality of small-area suction ports 5 are provided in the circumferential direction, preferably in the circumferential direction, and the suction of the substrate is thereby performed, whereby the holes are continuously provided in a ring shape. In comparison, the adsorption area is reduced, the influence of the warp of the substrate is reduced, and the adsorption and retention is remarkably stabilized.

Further, in the figure, the disc substrate mounting surface 35 of the disc substrate mounting portion 3 has a disc shape, and the base portion 2 connected to the disc substrate mounting surface 35 has a cylindrical shape having a smaller diameter than that, but the diameter of the base portion 2 is the same. Alternatively, the diameter may be larger than that.

FIG. 2 shows the disk substrate 8 set on the spinner head 1. The disk substrate 8 is sucked and fixed to the disk substrate mounting surface 35 by the suction force in the arrow (b) direction by an external suction pump (not shown), and rotates in the arrow a direction.

In the spinner head 1 of the present invention, the disk substrate 8 is adsorbed and fixed at the central portion thereof via the suction port 5 or the elastic member, so that even if the disk substrate is slightly warped or wavy, it can be surely and satisfactorily. The disc substrate can be held. In this case, as compared with the conventional example shown in FIG. 4 in which the entire surface of the disk substrate 8 is mounted, the warp of the disk substrate is much more stable at the outer peripheral portion, so that the holding of the substrate is much more stable.

Further, the heat of the motor is hardly transferred to the effective area of the coating film on the disk substrate.

Therefore, the coating solution can be stably applied to the predetermined thickness by dropping the coating solution on the disk substrate by the spinner head of the present invention according to a conventional method.

The rotation speed is about 200 to 6000 rpm.

As the disk substrate 8, a resin plate, a glass plate, a metal plate or the like can be used depending on the application. In the case of an optical recording disk, acrylic resin, polycarbonate resin, nylon, etc. are preferably used for this disk substrate.

The coating material includes a recording layer for optical recording discs, a recording layer for magnetic discs, a protective layer for various discs, various resists and the like.

In the case of an optical recording disk, the recording layer is
Although it may be various, it is preferably composed of a dye alone or a dye composition.

The dye to be used may be appropriately selected from those that effectively absorb the wavelengths of the writing light and the reading light. In this case, as these light sources, it is preferable to use a semiconductor laser from the viewpoint that the device can be miniaturized. Are preferred.

When the dye composition is used as the recording layer, a self-oxidizing resin such as nitrocellulose or a thermoplastic resin such as polystyrene or nylon can be contained. Further, in order to prevent oxidative deterioration of the dye, a quencher may be contained. Further, other additives may be contained.

In such a case, a mixture of an indolenine type cyanine dye and a bisphenyldithiol type quencher is particularly preferable. It is also preferable to use these as an ionic bond between the cation of the dye and the anion of the quencher, or a mixture of this and the dye.

[0037]

The spinner head of the present invention exhibits the following effects in spinner coating of a coating liquid on a disk substrate.

(1) Since the disk substrate 8 is adsorbed and fixed at its central portion, the disk substrate can be reliably and satisfactorily held even if the disk substrate is slightly warped or wavy, and stable coating can be performed.

(2) Moreover, since the central portion sucks and adsorbs through the suction port having a small area, the influence of warping of the disk substrate is further reduced, and the substrate holding becomes extremely stable.

(3) If an elastic member is provided at the suction port, the substrate can be held more stably.

(4) Since only the central part of the disk substrate is in contact with the spinner head, the heat of the motor part hardly propagates through the spinner head and reaches the coating area of the disk substrate. Therefore, the drying speed of the coating film is stable and the film thickness does not change.

(5) Since the disk substrate is attached and detached by suction, the operation is easy, and dust is not generated due to the sliding of the spinner head component, and the coating film is not adversely affected.

(6) The spinner head can be miniaturized, the power of the motor is small, the power consumption is small, and the apparatus is compact.

[0044]

EXAMPLES The present invention will be described in more detail below by showing specific examples of the present invention.

When a disk substrate mounting surface diameter of 70 mm of the present invention is used to coat an 8-inch acrylic resin disk with an indolenine cyanine dye in toluene / dichloroethane as a solvent to a film thickness of 0.06 μm, coating unevenness occurs. There was no. On the other hand, when the same coating as described above was performed using a conventional spinner head having a disk substrate mounting surface diameter of 8 inches, coating unevenness due to heat occurred at the periphery of the adsorption portion.

As described above, the spinner head of the present invention enables stable film formation in spinner coating on a disk substrate.

[Brief description of drawings]

FIG. 1 is a vertical cross-sectional view showing one embodiment of a spinner head of the present invention.

FIG. 2 is a vertical cross-sectional view showing a state where a disk substrate is set on the spinner head shown in FIG.

FIG. 3 is a vertical sectional view showing a conventional spinner head.

FIG. 4 is a vertical cross-sectional view showing a conventional spinner head.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Spinner head 2 Base part 3 Disk substrate mounting part 35 Disk substrate mounting surface 38 Inner peripheral part of disk substrate Rotational shaft fitting inlet positioning convex part 5 Hole part 6 Sucker 7 Suction path 8 Disk substrate 9 Coating film 4 Chuck 45 Screw part a rotation direction b suction direction

Claims (4)

(57) [Claims] 1. A disk substrate mount, which is connected to a motor and mounts the disk substrate to spin-coat the coating liquid on an annular disk substrate having a circular opening in the center to form a ring-shaped coating thin film. The substrate mounting portion has an annular smooth disk substrate mounting surface for sucking and mounting the disk substrate by suction, and is fitted in the central opening of the disk substrate at the central portion of the disk substrate mounting portion. A spinner head having a convex portion for positioning the disk substrate together, wherein the outer diameter of the disk substrate mounting surface is smaller than the inner diameter of the coating thin film effective area. 2. The spinner head according to claim 1, wherein the coated thin film is a recording layer for an optical recording disk. 3. The spinner head according to claim 1, wherein the suction is performed by a plurality of suction ports having a small area formed on the disk substrate mounting surface. 4. A spinner coat of a coating solution on an annular disc substrate having a circular opening in the center to form a ring-shaped coating thin film, which is connected to a motor and sucks the disc substrate by suction. A method for applying a recording layer for an optical recording disk using a circular spinner head to be mounted, wherein a positioning convex portion provided in a central portion of an upper surface of the spinner head is fitted into an opening at a central portion of a disk substrate. In a state where the center of rotation of the spinner head and the center of rotation of the disc substrate are aligned, the disc substrate is mounted and adsorbed on the disc substrate mounting surface of the disc substrate mounting portion, and the spinner head is rotated in this state. , Rotate the disc substrate, and apply the coating liquid supply device from the position where the outer periphery of the disc substrate mounting surface on the disc substrate surface is moved to the outer peripheral side. A coating method for a recording layer for an optical recording disk, characterized in that a ring-shaped coating film is formed so that a coating film effective region is positioned up to the outer peripheral edge of the disk substrate.