JP2541966B2 - Surface shape measuring device - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a surface shape measuring device, and more particularly to a surface shape measuring device for measuring an aspherical shape such as an aspherical lens at high speed and with high accuracy.

In particular, the present invention is suitable for projecting a non-contact probe such as an optical probe onto a surface to be measured and measuring the shape of the surface to be measured based on the state of projection of light reflected from the surface onto the detection sensor. is there.

[Prior art]

Conventionally, as a surface shape measuring method for an aspherical lens or the like, an object to be measured is moved in an XY coordinate system, the surface of the object to be measured is scanned by a contact probe, and the shape of the object to be measured is determined by the amount of movement of the probe. The method of seeking was generally done.

On the other hand, as a surface shape measuring method using a non-contact type probe, as shown in JP-A-61-17907 and JP-A-61-17908, an in-focus state determination optical system and this optical system are not used. There is a method in which a moving means for focusing is provided on the surface of the object to be measured and the surface shape of the object to be measured is measured from the amount of movement of the moving means.

When the object to be measured is moved and scanned in the XY coordinate system using the above-mentioned contact probe, when the object to be measured is a lens or the like having a large open angle, the inclination angle of the surface of the object to be measured due to the scanning of the probe. The measurement was difficult due to the large size. In addition, there has also been a problem that the length measurement stroke must be increased. Further, there is a problem that when the object to be measured is scanned by the contact probe, the object to be measured is damaged.

The method of using a non-contact type probe such as an optical probe
The object to be measured can be prevented from being damaged by the above-described method using the contact probe, and is extremely useful as this type of measurement method.

However, in the conventional measurement method, the shape of the surface to be measured is measured using only the length measuring means regardless of the type of probe such as contact type or non-contact type, so that the fine unevenness of the surface to be measured is measured. It was impossible to express the shape of the above, and it could not be said to be a high-resolution measuring device.

Further, a measuring device utilizing a non-contact type probe, as described in the above-mentioned JP-A-61-17907 and JP-A-61-17908, is a means for measuring the amount of movement of an in-focus state determination optical system. It is common to obtain and measure the surface shape.

Therefore, the accuracy of length measurement depends on the accuracy of focusing on the surface to be inspected of the optical probe, and if the focusing on fine irregularities cannot follow, the accuracy of measuring the surface shape deteriorates.

[Summary of the Invention] The present invention has been made in view of the problems of the above-described conventional example, and an object to be inspected by irradiating the surface to be inspected with a light beam and detecting reflected light from the surface to be inspected. An optical detecting means for outputting a signal corresponding to a relative position change along the facing direction of the surface due to the deviation of the surface from the reference spherical surface, and the surface to be inspected based on the signal from the optical detecting means. Control means for controlling the relative position of the optical member of the optical detection means with respect to the change amount detection means for detecting the relative position control amount by the control means, and an axis passing through the center of curvature of the surface to be inspected. Drive means for relatively rotating the optical detection means and the surface to be inspected in a direction intersecting with the facing direction about the center, and the result of detection using the change amount detection means at the time of relative rotation by the drive means and the Sum with the result of detection using optical detection means And a measuring means for performing aspherical surface information measurement of the surface to be inspected.

Further features of the invention will be apparent from the examples below.

〔Example〕

FIG. 1 is a schematic configuration diagram showing an embodiment of a measuring device according to the present invention, showing a shape measuring device for a spherical lens and an aspherical lens.

In FIG. 1, a swing bearing 2, an encoder 3, and a swing motor (not shown) are fixed to a surface plate 1. An aerostatic bearing type is provided between the swivel bearing 2 and the swivel shaft 21 fixed to the R alignment guide 6 for matching the center of curvature of the lens with the swivel shaft 21. Further, between the swivel guide 4 fixed to the surface plate 1 and the swivel slide 5 fixed to the R alignment guide 6, a static air pressure guide system is also used.
The turning shaft 21 is connected to a turning motor (not shown) by a steel belt (not shown). As described above, a turning shaft drive mechanism that rotates the R alignment guide 6 around the turning shaft 21 is configured.

The indexing bearing 8 and the indexing motor 9 are fixed to the R alignment slide 7, and the space between the indexing bearing 8 and the indexing shaft 22 is constituted by an aerostatic bearing system. An object to be measured 30 such as an aspherical lens is fixed by a chuck indexing shaft 22 (not shown) so that its optical axis coincides with the indexing shaft 22. As described above, an indexing mechanism of the DUT 30 for rotating the DUT 30 around its optical axis is configured.

An air static pressure guide system is provided between the R alignment guide 6 and the R alignment slide 7. By rotating the R alignment slide 7 with respect to the R alignment guide 6, the center of curvature of the DUT 30 is swung. An R matching mechanism for matching the shaft 21 is constructed. Coarse motion slide with the coarse motion guide 10 fixed to the surface plate 1.
Between 11 and 11, it is configured by a static pressure guide system. The coarse movement motor 12 and the coarse movement slide 11 fixed to the coarse movement guide 10 are
It is connected by a screw 12 'such as a ball screw or a trapezoidal screw which is a rotation / straight conversion mechanism. Coarse slide
The coarse movement grid scale 13 fixed to 11 and the lattice pitch reading device 14 fixed to the coarse movement guide 10 allow the coarse movement slide.
Measure the movement amount of 11.

The space between the fine movement guide 15 fixed to the coarse movement slide 11 and the fine movement slide 16 is constituted by a static air pressure guide system. The fine movement motor 17 constituted by a linear motor is fixed to the coarse movement slide 11, and the slide portion is fixed to the fine movement slide 16 by inserting the fine movement guide 15.

The autofocus microscope 20 is fixed to the fine movement slide 16, and the fine movement grating scale 18 fixed to the autofocus microscope 20 and the lattice pitch reading device 19 fixed to the coarse movement slide 11 make the autofocus microscope 20 Measure the amount of movement. Further, the surface plate 1 is fixed to a vibration isolator (not shown) to remove the influence of external vibration.

FIG. 2 is a schematic configuration diagram showing the internal configuration of the autofocus microscope 20, which is the same as the three-dimensional shape measurement system disclosed by the present applicant in Japanese Patent Application Laid-Open No. 61-17907.

Therefore, detailed description is omitted here, and the function of this optical system will be simply described.

In the autofocus microscope 20 shown in FIG. 2, the in-focus state discriminating optical system 42 detects the in-focus state of the object 30 to be measured with respect to the objective lens 41, and based on the in-focus state, the fine movement motor 17
Is driven to move the autofocus microscope 20, so that the focal point of the objective lens 41 is always locked to the point where the surface of the object 30 and the optical axis of the objective lens 41 intersect, that is, the measured point. It has a simple auto-focusing mechanism. At the same time, the tilt angle measuring optical system 43 measures the tilt angle of the surface of the DUT 30 at the measured point. The tilt angle at this time is measured as a tilt angle in the turning direction indicated by an arrow (θ) around the turning axis 21.

According to the present embodiment, the projection of the optical probe on the surface to be measured of the DUT 30 by the focusing state determination optical system 42 is incident in such a state that the central ray of the optical probe is inclined with respect to the optical axis, that is, The light is obliquely incident on the test surface. This inclination occurs in the plane of the paper of FIG. 2, and the direction of deviation of the reflected beam from the surface to be detected exists in the plane of the paper.

On the other hand, since the DUT 30 is turned around the turning axis 21, the optical probe scans the surface to be measured of the DUT 30 in a direction orthogonal to the paper surface.

The object 30 to be measured, such as a spherical or aspherical lens, has a constant shape along the circumferential direction, and the tilt angle in the direction orthogonal to the turning direction shown in FIG. Is considered to be zero.

Therefore, as shown in FIG. 2, the deviation direction of the reflected beam of the focusing state determination optical system 42 and the turning direction of the DUT 30 are configured to be substantially orthogonal to each other, preferably 90 ± 20 °. As a result, it is possible to eliminate a slight deviation of the reflected beam due to the inclination of the surface to be measured of the object to be measured 30 and interference with the beam for measuring the tilt angle, and the focusing state determination optical system 42 is used to detect the optical axis The height (position) in the direction can be accurately detected. Accordingly, the accuracy of the focus state determination can be significantly improved.

2, 80 is a light source, 100 is a collimator lens, 120 is a knife edge, 140 is a polarization beam splitter, and 160 is a half beam in the focusing state discriminating optical system 42 in FIG. Reference numeral 180 denotes a quarter-wave plate, reference numeral 241 denotes an objective lens, reference numeral 220 denotes a bandpass filter, reference numeral 240 denotes a lens, and reference numeral 244 denotes an optical sensor.

In the tilt angle measuring optical system 43, 280 is a light source, and 300
And 320 are lenses, 340 is a polarizing beam splitter, 360 is a bandpass filter, and 45 is an optical sensor. In this optical system 43, the half mirror 160, the quarter-wave plate 180, and the objective lens 41 are shared with the optical system 42.

FIG. 3 shows a control system block diagram of the measuring apparatus shown in FIGS. The output signal of the sensor 44 of the focus state determination optical system 42 installed inside the autofocus microscope 20 is input to the focus state detector 50 and the focus state signal shown in FIG. 4 and FIG. Light intensity signal and
61-017907). That is, when the measured point on the surface of the object 30 to be measured is at the focal position of the objective lens 41 in FIG. 2, the in-focus state signal is point a in FIG. As the point deviates from the focal position of the objective lens 41, the in-focus state signal changes linearly near point a. At that time, the light amount signal indicating the total amount of light received by the sensor 44 exhibits a change as shown in FIG. Therefore, the fourth
As can be seen from FIG. 5 and FIG. 5, the in-focus state detectable region is determined when the light amount level of the light received by the sensor 44 is a certain value or more.

The focus state signal and the light quantity signal generated by the focus state detector 50 are transmitted to the servo driver 52 and the control computer.
Entered in 60. Further, the output of the servo driver 52 is connected to the fine movement motor 17, and the fine movement slide 16, the autofocus microscope 20, the DUT 30, the focusing state detector 50, the servo driver 52, and the fine movement motor 17 A mechanism loop is formed.

The output signal of the sensor 45 of the tilt angle measuring optical system 43 installed inside the autofocus microscope 20 is input to the tilt angle detector 51, and is processed as the tilt angle of the point to be measured in the turning direction (see Japanese Patent Application Laid-Open (JP-A) no. See JP-A-61-017907). Further, the tilt angle signal processed by the tilt angle detector 51 is input to the control computer 60.

The output signal of the grating pitch reading device 19 is input to the fine movement slide amount detector 53 and processed as a movement amount of the fine movement slide 16. Further, the movement amount of the fine movement sillad 16 is input to the servo driver 52 and the control computer 60. At this time, the positioning servo mechanism loop of the autofocus microscope 20 is formed by the fine movement slide 16, the fine movement grating scale 18, the grating pitch reader 19, the fine movement slide movement detector 53, the servo driver 52, and the fine movement motor 17.

The coarse motor driver 54 is driven by a command from the control computer 60, and the coarse motor 12 connected to the coarse motor driver 54 is rotated to move the coarse slide 11 connected by the screw 12 '. .

Of the grating pitch reader 14 fixed to the coarse motion guide 10;
The output signal obtained by reading the scale of the coarse moving grating scale 13 is input to the coarse moving slide amount detector 55, processed as a moving amount of the coarse moving slide 11, and input to the control computer 60.

In response to a command from the control computer 60, the swing axis motor driver 56 is driven, and a swing motor (not shown) connected to the swing axis motor driver 56 rotates. At this time, the swing shaft connected to the swing motor by a steel belt (not shown)
21 rotates, and the DUT 30 is swung around the swivel axis 21.

A signal from the encoder 3 is input to a turning angle detector 57, processed as a rotation angle of the turning shaft 21, that is, a turning angle θ of the DUT 30 around the turning shaft 21, and input to the control computer 60. .

The index axis motor driver 58 is driven by a command from the control computer 60, and the index axis motor 9 connected to the index axis motor driver 58 rotates. As a result, the DUT 30 rotates a fixed angle about the index axis, and the cross section to be measured is indexed.

The operation panel 59 includes various displays such as an in-focus state display, a light amount display, an inclination angle display, a fine movement slide movement amount display, a coarse movement slide movement amount display, a turning angle display, and an auto focusing servo mechanism (not shown). Switching switch with auto-focus microscope positioning servo mechanism, fine movement slide drive switch, coarse movement slide drive switch, turning axis drive switch,
Each machine is provided with a control switch such as an indexing shaft drive switch and a measurement start / stop switch, and is connected to the control computer 60 to perform a man-machine interface.

The control computer 60 is connected to the data processing computer 61 and outputs the DUT 30 output from the control computer 60.
The measurement data of the in-focus state, the tilt angle, the fine movement slide movement amount, the coarse movement slide movement amount, and the turning angle are input to the data processing computer 61. Further, measurement condition data for the DUT 30 such as the measurement turning range, the number of measurement points, and the turning speed output from the data processing computer 61 are input to the control computer 60.

The above-described respective measurement data input by the data processing computer 61 is processed and converted into shape data of the surface to be measured of the device under test 30, and is output to the disk 62, the plotter 63, the printer 64, and the like.

Next, a method for measuring the shape of the aspherical lens in this embodiment will be described below.

FIG. 6 is an explanatory view showing one embodiment of the method of the present invention.
The measurement mechanism and the control unit are shown in the form of a block diagram.

The measurement mechanism section of FIG. 6 is a top view of FIG. 1 seen from above. As shown in FIG. 6, this measuring apparatus locks the focus position of the objective lens 41 to the measured point of the measured object 30 by the above-mentioned autofocusing servo mechanism, and the center of curvature of the measured object 30 (rotation). Swivel the DUT 30 around the axis 21) and scan the ridgeline of the DUT 30 to find the swivel angle θ and swivel axis.
It is a measuring device by a curved coordinate r-θ method for measuring the cross-sectional shape of the object 30 to be measured by the distance r from 21 to the measured point. Further, the object 30 is rotated around the index axis 22 to perform multi-section measurement, and the surface shape of the object 30 is measured.

First, the fine movement sillad 16 is placed at the operating position of the proximity sensor (not shown) provided between the fine movement guide 15 and the fine movement slide 16, and the output of the fine movement slide movement amount detector 53 is reset to zero. Further, the coarse movement slide 11 is placed at an operation position of a proximity sensor (not shown) provided between the coarse movement guide 10 and the coarse movement slide 11 shown in FIG. 1, and the focus position of the objective lens 41 in this state is determined. The output of the coarse movement detector 55 is preset so that the distance from the pivot 21 becomes equal to the sum of the output of the fine movement detector 53 and the output of the coarse movement detector 55. In other words, it is calibrated so that the sum of the output of the fine movement slide movement amount detector 53 and the output of the coarse movement slide detector 55 becomes 0 when the focus position of the objective lens 41 coincides with the turning axis 21. Become.

Next, the DUT 30 is fixed to the index shaft 22 by a chuck mechanism (not shown) so that the axis of the DUT 30, that is, the optical axis of the lens and the index shaft 22 coincide.

Next, the coarse movement slide 11 and the fine movement slide 11 are adjusted so that the sum of the output of the fine movement slide movement detector 53 and the output of the coarse movement slide movement detector 55 becomes the radius of curvature R (design value) of the DUT 30. Drive slide 16. At this time, the fine movement slide 16 is assumed to be driven by the positioning servo mechanism. next,
The R alignment slide 7 is driven to bring the measured surface of the object 30 to be measured close to the autofocus microscope 20 up to the focus state detectable region of the autofocus microscope 20 shown in FIGS. In this state, switching from the positioning servo mechanism loop to the automatic focusing servo mechanism loop is performed. As a result, the point to be measured is locked at the approximate focal position of the objective lens 41. Here, the R adjusting slide 7 is finely adjusted and driven so that the sum of the output of the fine movement slide amount detector 53 and the output of the coarse movement slide amount detector 55 becomes the radius of curvature R of the DUT 30.

With the method described above, the measurement origin is the center of curvature of the DUT 30 such as a lens, and the origin on the center of curvature is R
By presetting the DUT 30 and the autofocus microscope 20 to form a -θ coordinate system, a conventional XY
Unlike the measurement method based on the coordinate system, the center of curvature of the DUT 30 and the pivot 21 can be easily matched without considering the thickness of the DUT 30 or the like.

In addition, the optical probe of the autofocus microscope 20 rotates and scans the curved surface of the test object 30 to detect the irregularities of the test surface. Therefore, the stroke of the optical probe has an aspherical base curved surface (curvature radius R). , The length measurement stroke can be shortened.

Further, each mechanism of the measuring device has a simple configuration, and the moving amount of the driving mechanism is small, so that the measuring device is small.

Here, the process of switching from the positioning servo mechanism loop of the autofocus microscope 20 to the autofocusing servo mechanism loop will be described in detail. When the point to be measured on the surface to be measured of the object to be measured 30 is at the focal position of the objective lens 41, the reflected beam from the point to be measured is focused on
A spot image is formed at the center of a sensor 44 composed of a CCD or the like (see JP-A-61-017907). Therefore, by observing the video signal of the sensor 44 with an oscilloscope monitor (not shown), the measured point can be moved to the focus state detectable region. That is, in a state where the video signal of the sensor 44 exists near the center of the sensor 44, the in-focus state detectable region is detected. In this state, by switching from the positioning servo mechanism loop to the auto focusing servo mechanism loop by the switching switch, the point to be measured is automatically locked at the focal position of the objective lens 41.

Next, a swing motor (not shown) is driven to rotate the swing shaft to swing the DUT 30. As a result, the ridgeline of the optical probe measured object 30 is scanned by the autofocus microscope 20 and the cross-sectional shape including the lens apex is measured by detecting the reflected beam from the surface to be measured. Further, the indexing shaft 22 is driven to rotate the object under test 30 around the axis, and the measurement is performed in the same manner while changing the scanning ridge line, so that the surface shape of the object to be measured 30 is radially measured.

During the measurement as described above, or in any other case, when the fine movement slide 16 is driven by the auto focusing servo mechanism loop, the in-focus state is determined due to the presence of scratches, dust, etc. at the point to be measured. When the reflected beam from the measured point of the optical system 42 is scattered, the objective lens 41
Is extremely reduced, and the light amount reaching the sensor 44 is reduced. Therefore, the operation of the focus state determination optical system 42 falls into an inoperable state, the autofocusing servomechanism loop is cut, and the fine movement slide 16 cannot be controlled. Therefore, it is predicted that a dangerous situation such as the collision of the autofocus microscope 20 with the measured object 30 will occur. Therefore, during the measurement, even if the point to be measured is free from scratches, dents and the like due to the swivel scanning, the measurement cannot be continued and the measurement is interrupted. In order to cope with these abnormal situations, the following safety measures are taken in the apparatus of this embodiment. In other words, when the fine movement slide 16 is driven by the autofocusing servomechanism loop, when it deviates from the focus state discriminable region shown in FIGS. 4 and 5 due to some influence including scratches and dust. , Automatically switches to the positioning servomechanism loop and locks the autofocus microscope 20 to that position. This prevents the risk of the autofocus microscope 20 colliding with the object 30 to be measured. Considering the case where the measured point passes through scratches, dust, etc. during measurement, as shown in FIG. 7, the focus position of the objective lens 41 is scratched while passing through scratches, dust, etc. by the swivel scanning. It is locked at the position b just before passing through the dust and the like. Here, in the minute scanning range Δθ, it can be said that the displacement Δr of the measured point in the direction of the index axis 22 is minute. Therefore, even if the autofocusing servo mechanism becomes uncontrollable due to minute scratches and dust, and the loop is switched to the positioning servomechanism, the surface to be inspected will rejoin when the scratches, dust, etc. are passed by scanning. The focus position of the objective lens 41 is displaced from c to d by returning to the focus state discriminable region and automatically returning to the autofocusing servo mechanism loop by detecting this, and the measurement is continued. Of. For reference the above flow chart, No. 8
Shown in the figure.

Next, a data processing method of the surface shape in the present embodiment will be described.

In FIG. 6, according to the command from the control computer 60,
The swivel axis 21 is driven at a constant speed of V ¥ 0, and the ridgeline of the DUT 30 is scanned at a constant speed by the optical probe of the autofocus microscope 20. At this time, the measured turning angle θ ₀ is output by the control computer 60 and input to A of the comparator 68. Further, the output of the turning angle detector 57 is input to B of the comparator 68. Here, when the measured turning angle θ ₀ set by the control computer 60 and the present value of the turning angle θ ₀ match, the comparator 68 outputs an A = B signal. Furthermore, A
In accordance with the = B signal, the focus state signal output from the focus state detector 50, the fine movement slide movement amount output from the fine movement slide movement amount detector 53, and the tilt angle output from the tilt angle detector 51 indicate the latch 65. , 66, 67 respectively. The latched data is transmitted to the data processing computer 61 via the control computer 60. By sequentially performing this for a large number of measurement turning angles, one-section data of the DUT 30 is obtained. These data are processed by the data processing computer 61 and processed into one-section shape data.

Next, a method of processing measurement data into shape data will be described. As described above, in the initial state, the sum of the output of the fine slide movement detector 53 and the output of the coarse slide movement detector 55 when the focal position of the objective lens 41 and the rotation axis 21 coincide with each other becomes zero. Calibration has been. The output of the focus state detector 50 is the amount of deviation of the measured point from the focus of the objective lens 41. Therefore, the sum of the output of the focus state detector 50, the output of the fine movement slide movement amount detector 53, and the output of the coarse movement slide movement amount detector 55 is the turning axis 21 in FIG.
It is nothing but the distance r between the (measured object 30 center of curvature) and the measured point. Further, the radius of curvature of the DUT 30 is R (generally, r at the apex of the DUT 30), and the data processing of δ = R−r is performed, whereby the aspherical amount δ is obtained. However, during the measurement, since the coarse movement slide 11 is locked by the air-down method, the actual r is the aspherical surface as the sum of the output of the focusing state detector 50 and the output of the fine movement slide amount detector 53. The calculation of the quantity δ is performed. At the same time, the inclination angle α of the measured point is measured as the output of the inclination angle detector 51. This is the angle α shown in FIG. 6, and the tangent to the measured direction is the tangent to the measured object 30. It is an angle formed with a tangent plane at a point intersecting the optical axis of a spherical objective lens 44 having the same center of curvature.

From the above, the index angle (not shown) as the position information of the measured point (the rotation angle and the turning angle θ of the measured object 30 around the indexing shaft 22 and the aspherical surface amount δ and the inclination angle α as the measured point information are ,
Surface shape data of the DUT 30 is configured. Further, the data processing computer 61 outputs the surface shape of the object 30 to be measured by the output to the plotter 63 and the printer 64 together with the recording to the disk 62, and the man-machine interface is established.

As described above, when converting the measurement data into the surface shape data, the output of the in-focus state detector 50 and the output of the fine movement slide amount detector 53 are both used, so that the light as shown in FIG. Even when the mechanism for focusing the probe on the test surface is large and the autofocus servo cannot follow, the shape data of the test surface can always be obtained accurately.

Further, by obtaining the data of the tilt angle through the tilt angle measuring system as described above, the position and the tilt of the point to be measured on the surface to be measured can be known, and a more detailed surface shape can be expressed.

Now, the scanning mode of the optical probe in the present measuring device will be described. Since this measuring device is provided with a turning means for turning the object to be measured 30 and an indexing means for rotating the object to be measured 30 on its own axis, the scanning modes shown in FIG. 9, FIG. 10, and FIG. The form is possible. Incidentally, FIG. 9 and FIG.
FIG. 11 and FIG. 11 are views of the DUT 30 viewed from its apex side, and the center of the circle in each figure is the apex of the DUT 30.

In order to realize the radial scanning shown in FIG. 9, the indexing shaft 22 is driven as described above so that the direction of the cross section aa 'in FIG. 9 and the turning direction are aligned. Next, the section a-a 'is scanned while acquiring data for each measurement turning angle. Similarly, the indexing shaft 22 is driven so that the direction of the section b'-b coincides with the turning direction, and the section b'-b is scanned while acquiring data for each measured turning angle. Thus, each section aa ', b'-b, cc', d'-d, ee ', f'-f,
The data is acquired by scanning eight sections of gg 'and h'-h. The number of sampling points at this time is 1000 points / cross section.

Next, the annular scanning shown in FIG. 10 will be described with reference to FIG. The mechanical portion of FIG. 12 is also a view of FIG. 1 seen from above as in FIG. By driving the rotating shaft 21, the angle formed between the indexing shaft 22 and the optical axis of the objective lens 41 is adjusted to nθ. Next, the index shaft motor driver 58 is driven by a command from the control computer 60, and the index shaft motor 9 is driven at a constant speed. At this time, a signal from a rotary encoder (not shown) installed on the indexing shaft 22 is input to the indexing angle detector 69, the indexing angle is output as the output of the indexing angle detector 69, and the input of the comparator 68. B
Connected to. Further, the measurement index angle is output by the control computer 60 and is connected to the input A of the comparator 68. At this time, the A = B signal, that is, the output of the focus state detector 50 at the timing when the measured index angle and the current index angle coincide,
Output and tilt angle detector of fine movement slide amount detector 53
The outputs of 51 are each latched and measured as the aspherical amount δ and the inclination angle α at the measurement index angle. The same measurement is performed for indexing angles of 0 ° to 360 ° to complete the measurement of one ring zone. Further, the above-mentioned measured turning angles 0, θ, 2θ ... nθ
By performing the above, the measurement of n ring zones is completed, and the surface shape of the DUT 30 is measured.

Next, the spiral scanning shown in FIG. 11 will be described with reference to FIG. The mechanical part in FIG. 13 is also the same as in FIG.
It is the figure which looked at the figure from the upper part. The measurement starts from the top of the DUT 30. First, according to the command of the control computer 60,
Indexing axis motor driver 58 and swing axis motor driver 56
And the indexing shaft 22 and the pivot axis connected to each driver
And 21 are driven at a constant speed. At this time, a signal from a rotary encoder (not shown) installed on the index shaft 22 is input to the index angle detector 69, the index angle is output as an output of the index angle detector 69, and the input of the comparator 68 B. Further, the measurement index angle is output by the control computer 60 and is connected to the input A of the comparator 68. At this time, the output of the in-focus state detector 50, the output of the fine movement slide amount detector 53, and the output of the tilt angle detector 51 at the timing of A = B signal, that is, at the timing when the measured index angle and the current index angle coincide. Are respectively latched, and the aspherical amount δ and the inclination angle α at the measurement index angle are obtained.
Is measured as By performing the same measurement from the turning angle 0 ° to θ, the surface shape of the DUT 30 is continuously measured in a spiral shape.

As described above, the provision of the turning means and the indexing means makes it possible to measure the shape of the entire test surface with a simple mechanism, and to measure the scanning form of the optical probe as a desired form. . Therefore, the degree of freedom of the measurement form is increased as well as the speed and automation of the measurement, and arbitrary surface shape data can be extracted.

FIG. 14 is a schematic configuration diagram showing a second embodiment of the aspherical lens shape measuring device of the present invention. In this embodiment,
The point where the probe side turns is the first point where the DUT turns.
This is different from the first embodiment shown in the figure. In FIG. 14, the turning slide 5 is fixed to the coarse movement guide 10, and the R alignment guide 6 is fixed to the surface plate 1. The focus position of the objective lens 41 is locked on the surface of the DUT 30 having the center of curvature on the swivel axis 21, and the entire probe side including the autofocus microscope 20 is swung around the swivel axis 21 to measure the DUT. The surface of 30 is scanned and the surface shape of the object 30 to be measured is measured as in the first embodiment.

In the above embodiment, the grating interference method is used as the length measuring means for measuring the amount of movement of each of the fine movement slide 16 and the coarse movement slide 11, but it is also possible to use a laser interference method.

According to the surface shape measuring device for an aspherical lens of the embodiment as described above, it is possible to perform measurement over a wide range in a measurement range such as curvature, open angle, aspherical amount, etc. Aspherical lens shape measurement with spots can be performed at high speed. At the same time, since the inclination angle of the surface of the object to be measured can be measured, accurate information on the aspheric lens shape can be obtained in a short time.

Further, according to the present measuring device, it is not necessary to consider the adhesion of scratches, which is seen in the contact probe method, to various materials such as a glass lens, a plastic lens, and a molding die as the object to be measured. .

〔The invention's effect〕

As described above, the surface shape measuring apparatus according to the present invention measures the aspherical surface information of the surface to be inspected based on the sum of the detection result using the change amount detecting means and the detection result using the optical detecting means. Therefore, fine irregularities on the surface to be inspected can be detected with high precision, and more detailed aspherical surface data can be obtained.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram showing one embodiment of a measuring device according to the present invention. FIG. 2 is a schematic configuration diagram showing the inside of the autofocus microscope shown in FIG. FIG. 3 is a block diagram of a control system of the measuring apparatus shown in FIG. FIG. 4 is an explanatory diagram showing the relationship between the position of the measured point, the focus state signal, and the light amount level received by the sensor. FIG. 5 is an explanatory view showing one embodiment of the measuring method of the present invention. FIG. 6 is an explanatory diagram showing a measurement procedure in the case where dust or a scratch is present on the detection surface. FIG. 7 is a flowchart showing a method of switching between the auto-focusing servo mechanism loop and the positioning servo mechanism loop. 8 to 10 are schematic diagrams showing scanning forms of an optical probe for scanning a surface to be inspected. FIG. 11 is an explanatory view showing a measuring method when scanning is performed in the scanning mode shown in FIG. FIG. 12 is an explanatory diagram showing a measuring method in the case of scanning in the scanning mode shown in FIG. FIG. 13 is a schematic configuration diagram showing another embodiment of the measuring device according to the present invention. 1 ... Surface plate, 2 ... Slewing bearing, 3 ... Encoder, 4 ... Slewing guide, 5 ... Slewing slide, 6 ... R alignment guide, 7 ... R alignment slide, 8 ... Indexing bearing, 9 ... Split Out-axis motor, 10 …… Coarse movement guide 11 …… Coarse movement slide, 12 …… Coarse movement motor 12 ′ …… Screw, 13 …… Fine movement grid scale 14 …… Lattice pitch reader 15 …… Fine movement guide 16 …… Fine movement slide 17 …… Fine movement motor 18 …… Fine movement lattice scale 19 …… Lattice pitch reading device 20 …… Auto focus microscope 30 …… Measured object 41 …… Objective lens 42 …… Focused state determination optical system 43 …… Inclination angle measurement optical system 44,45 …… Sensor

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Makoto Higomura 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Hatsunori Yamamoto 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Satoshi Nose 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Yukichi Niwa 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Mitsutoshi Owada 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (56) Reference JP 62-157507 (JP, A) JP 61-271436 (JP, A) ) JP-A-60-104206 (JP, A) JP-A-58-173423 (JP, A) JP-A-58-173416 (JP, A) JP-A-60-97205 (JP, A) JP-A 61- 17907 (JP, A) JP 61-17908 (JP, A) JP 50-103366 (JP, A) JP 58-47209 (JP, A) JP 7-1166 (JP, B2)

Claims (1)

(57) [Claims] 1. A method of irradiating a light beam to a surface to be inspected and detecting light reflected from the surface to be inspected along a direction opposite to the surface to be inspected due to a deviation of the surface to be inspected from a reference spherical surface. Optical detection means for outputting a signal corresponding to the relative position change,
Control means for controlling the relative position of the optical member of the optical detection means with respect to the surface to be detected based on a signal from the optical detection means, and change amount detection for detecting the relative control amount of the position by the control means. Means, and drive means for relatively rotating the optical detection means and the surface to be tested in a direction intersecting the facing direction about an axis passing through the center of curvature of the surface to be tested,
Measuring means for performing aspherical surface information measurement of the surface to be inspected based on the sum of the detection result using the change amount detecting means and the detection result using the optical detecting means at the time of relative rotation by the driving means. A surface shape measuring apparatus having: