JP2537382Y2 - 分離形スケール装置 - Google Patents

分離形スケール装置

Info

Publication number
JP2537382Y2
JP2537382Y2 JP1988069749U JP6974988U JP2537382Y2 JP 2537382 Y2 JP2537382 Y2 JP 2537382Y2 JP 1988069749 U JP1988069749 U JP 1988069749U JP 6974988 U JP6974988 U JP 6974988U JP 2537382 Y2 JP2537382 Y2 JP 2537382Y2
Authority
JP
Japan
Prior art keywords
scale
detection head
head
positioning
members
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988069749U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01173605U (enrdf_load_stackoverflow
Inventor
貢 中山
康彦 小野寺
Original Assignee
ソニー・プレシジョン・テクノロジー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ソニー・プレシジョン・テクノロジー株式会社 filed Critical ソニー・プレシジョン・テクノロジー株式会社
Priority to JP1988069749U priority Critical patent/JP2537382Y2/ja
Publication of JPH01173605U publication Critical patent/JPH01173605U/ja
Application granted granted Critical
Publication of JP2537382Y2 publication Critical patent/JP2537382Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP1988069749U 1988-05-26 1988-05-26 分離形スケール装置 Expired - Lifetime JP2537382Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988069749U JP2537382Y2 (ja) 1988-05-26 1988-05-26 分離形スケール装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988069749U JP2537382Y2 (ja) 1988-05-26 1988-05-26 分離形スケール装置

Publications (2)

Publication Number Publication Date
JPH01173605U JPH01173605U (enrdf_load_stackoverflow) 1989-12-08
JP2537382Y2 true JP2537382Y2 (ja) 1997-05-28

Family

ID=31295023

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988069749U Expired - Lifetime JP2537382Y2 (ja) 1988-05-26 1988-05-26 分離形スケール装置

Country Status (1)

Country Link
JP (1) JP2537382Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53143656U (enrdf_load_stackoverflow) * 1977-04-19 1978-11-13
JPS6341392U (enrdf_load_stackoverflow) * 1986-08-27 1988-03-18

Also Published As

Publication number Publication date
JPH01173605U (enrdf_load_stackoverflow) 1989-12-08

Similar Documents

Publication Publication Date Title
US3833303A (en) Measuring apparatus using the moire fringe concept of measurement
JPH047814B2 (enrdf_load_stackoverflow)
JP2515848B2 (ja) 位置測定装置用の組み付け方法及びその方法を実施するための装置
US5219379A (en) Angular alignment assembly
US4215480A (en) Distance measuring gauge
WO2023155657A1 (zh) 一种绝对式六自由度光栅编码器
JP2537382Y2 (ja) 分離形スケール装置
US5726350A (en) Contour measuring apparatus with a stylus
JP4910126B2 (ja) ３軸角度センサ
Chetwynd et al. X-ray interferometer calibration of microdisplacement transducers
JP2017133892A (ja) 回転角度検出装置および回転角度検出方法
JP2002107142A (ja) 歯車測定機
CA1051193A (en) Probe for a coordinate measuring machine
RU2197713C2 (ru) Датчик линейных перемещений
US7684059B2 (en) Device for determining the position of an object movable along at least one displacement direction
USRE29281E (en) Measuring apparatus using the moire fringe concept of measurement
US3910703A (en) Measuring apparatus using the moire fringe concept of measurement
US3561120A (en) Distance measurement with friction wheel devices
JPH0687007B2 (ja) 測角装置
CN217331177U (zh) 用于二维反馈定位框架垂直度校准装置
USRE29282E (en) Measuring apparatus using the moire fringe concept of measurement
JPH11170471A (ja) 印刷用媒体製造装置
JPH0267910A (ja) ねじリード測定装置
JPH0230723Y2 (enrdf_load_stackoverflow)
Schenz et al. Direct machining of a non-axisymmetric phase corrector