JP2536859Y2 - プラズマ処理装置の蓋体支持構造 - Google Patents

プラズマ処理装置の蓋体支持構造

Info

Publication number
JP2536859Y2
JP2536859Y2 JP1990095243U JP9524390U JP2536859Y2 JP 2536859 Y2 JP2536859 Y2 JP 2536859Y2 JP 1990095243 U JP1990095243 U JP 1990095243U JP 9524390 U JP9524390 U JP 9524390U JP 2536859 Y2 JP2536859 Y2 JP 2536859Y2
Authority
JP
Japan
Prior art keywords
lid
chamber
plasma processing
arm
resilient member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990095243U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0452734U (cs
Inventor
勇 土方
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to JP1990095243U priority Critical patent/JP2536859Y2/ja
Publication of JPH0452734U publication Critical patent/JPH0452734U/ja
Application granted granted Critical
Publication of JP2536859Y2 publication Critical patent/JP2536859Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP1990095243U 1990-09-11 1990-09-11 プラズマ処理装置の蓋体支持構造 Expired - Lifetime JP2536859Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990095243U JP2536859Y2 (ja) 1990-09-11 1990-09-11 プラズマ処理装置の蓋体支持構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990095243U JP2536859Y2 (ja) 1990-09-11 1990-09-11 プラズマ処理装置の蓋体支持構造

Publications (2)

Publication Number Publication Date
JPH0452734U JPH0452734U (cs) 1992-05-06
JP2536859Y2 true JP2536859Y2 (ja) 1997-05-28

Family

ID=31833825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990095243U Expired - Lifetime JP2536859Y2 (ja) 1990-09-11 1990-09-11 プラズマ処理装置の蓋体支持構造

Country Status (1)

Country Link
JP (1) JP2536859Y2 (cs)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917970B2 (ja) * 1978-07-28 1984-04-24 三菱電機株式会社 熱処理装置
JPS59103345A (ja) * 1982-12-03 1984-06-14 Mitsubishi Electric Corp プラズマ処理装置

Also Published As

Publication number Publication date
JPH0452734U (cs) 1992-05-06

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